DK0913001T3 - Flerlagsfilmkondensatorstrukturer og fremgangsmåde - Google Patents

Flerlagsfilmkondensatorstrukturer og fremgangsmåde

Info

Publication number
DK0913001T3
DK0913001T3 DK97928073T DK97928073T DK0913001T3 DK 0913001 T3 DK0913001 T3 DK 0913001T3 DK 97928073 T DK97928073 T DK 97928073T DK 97928073 T DK97928073 T DK 97928073T DK 0913001 T3 DK0913001 T3 DK 0913001T3
Authority
DK
Denmark
Prior art keywords
multilayer film
film capacitor
capacitor structures
structures
multilayer
Prior art date
Application number
DK97928073T
Other languages
Danish (da)
English (en)
Inventor
Michael Man-Kuen Watt
Original Assignee
Gennum Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Gennum Corp filed Critical Gennum Corp
Application granted granted Critical
Publication of DK0913001T3 publication Critical patent/DK0913001T3/da

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
    • H01L28/40—Capacitors
    • H01L28/60—Electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G4/00—Fixed capacitors; Processes of their manufacture
    • H01G4/002—Details
    • H01G4/228—Terminals
    • H01G4/232—Terminals electrically connecting two or more layers of a stacked or rolled capacitor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G4/00—Fixed capacitors; Processes of their manufacture
    • H01G4/30—Stacked capacitors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G4/00—Fixed capacitors; Processes of their manufacture
    • H01G4/30—Stacked capacitors
    • H01G4/306—Stacked capacitors made by thin film techniques
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
    • H01L27/08—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind
    • H01L27/0805—Capacitors only

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
  • Semiconductor Memories (AREA)
DK97928073T 1996-06-27 1997-06-26 Flerlagsfilmkondensatorstrukturer og fremgangsmåde DK0913001T3 (da)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/671,057 US5745335A (en) 1996-06-27 1996-06-27 Multi-layer film capacitor structures and method

Publications (1)

Publication Number Publication Date
DK0913001T3 true DK0913001T3 (da) 2004-06-28

Family

ID=24692974

Family Applications (1)

Application Number Title Priority Date Filing Date
DK97928073T DK0913001T3 (da) 1996-06-27 1997-06-26 Flerlagsfilmkondensatorstrukturer og fremgangsmåde

Country Status (7)

Country Link
US (1) US5745335A (de)
EP (2) EP1408537A3 (de)
JP (3) JP2000514243A (de)
AU (1) AU3250097A (de)
DE (1) DE69727809T2 (de)
DK (1) DK0913001T3 (de)
WO (1) WO1998000871A1 (de)

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Also Published As

Publication number Publication date
JP5225879B2 (ja) 2013-07-03
EP0913001A1 (de) 1999-05-06
EP1408537A3 (de) 2004-07-07
EP0913001B1 (de) 2004-02-25
EP1408537A2 (de) 2004-04-14
JP5695628B2 (ja) 2015-04-08
US5745335A (en) 1998-04-28
DE69727809D1 (de) 2004-04-01
DE69727809T2 (de) 2005-01-13
JP2013055344A (ja) 2013-03-21
WO1998000871A1 (en) 1998-01-08
JP2000514243A (ja) 2000-10-24
JP2009152621A (ja) 2009-07-09
AU3250097A (en) 1998-01-21

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