DE69929155T2 - Verfahren zur herstellung einer organischen elektrolumineszenzanzeige - Google Patents
Verfahren zur herstellung einer organischen elektrolumineszenzanzeige Download PDFInfo
- Publication number
- DE69929155T2 DE69929155T2 DE69929155T DE69929155T DE69929155T2 DE 69929155 T2 DE69929155 T2 DE 69929155T2 DE 69929155 T DE69929155 T DE 69929155T DE 69929155 T DE69929155 T DE 69929155T DE 69929155 T2 DE69929155 T2 DE 69929155T2
- Authority
- DE
- Germany
- Prior art keywords
- layer
- light
- forming
- cathode
- movie
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 58
- 238000005401 electroluminescence Methods 0.000 title description 68
- 238000000034 method Methods 0.000 claims abstract description 47
- 230000008569 process Effects 0.000 claims abstract description 17
- 239000011159 matrix material Substances 0.000 claims abstract description 16
- 239000010410 layer Substances 0.000 claims description 129
- 239000000758 substrate Substances 0.000 claims description 59
- 239000012790 adhesive layer Substances 0.000 claims description 23
- 238000002347 injection Methods 0.000 claims description 17
- 239000007924 injection Substances 0.000 claims description 17
- 238000006243 chemical reaction Methods 0.000 claims description 16
- 238000003892 spreading Methods 0.000 claims description 15
- 230000007246 mechanism Effects 0.000 claims description 12
- 238000007789 sealing Methods 0.000 claims description 12
- 230000007480 spreading Effects 0.000 claims description 12
- 230000001678 irradiating effect Effects 0.000 claims description 10
- 238000007641 inkjet printing Methods 0.000 claims description 4
- 238000000926 separation method Methods 0.000 claims description 4
- 239000000126 substance Substances 0.000 claims description 4
- 238000012546 transfer Methods 0.000 abstract description 8
- 238000000059 patterning Methods 0.000 abstract description 3
- 239000000463 material Substances 0.000 description 20
- 239000011521 glass Substances 0.000 description 14
- 230000001681 protective effect Effects 0.000 description 7
- HEDRZPFGACZZDS-UHFFFAOYSA-N Chloroform Chemical compound ClC(Cl)Cl HEDRZPFGACZZDS-UHFFFAOYSA-N 0.000 description 6
- 239000000243 solution Substances 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 5
- 229920005989 resin Polymers 0.000 description 5
- 239000011347 resin Substances 0.000 description 5
- 239000000565 sealant Substances 0.000 description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 4
- 229920000553 poly(phenylenevinylene) Polymers 0.000 description 4
- 239000002904 solvent Substances 0.000 description 4
- 229920001187 thermosetting polymer Polymers 0.000 description 4
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 3
- 229920000109 alkoxy-substituted poly(p-phenylene vinylene) Polymers 0.000 description 3
- 238000001035 drying Methods 0.000 description 3
- 239000001989 lithium alloy Substances 0.000 description 3
- 230000033001 locomotion Effects 0.000 description 3
- TVIVIEFSHFOWTE-UHFFFAOYSA-K tri(quinolin-8-yloxy)alumane Chemical compound [Al+3].C1=CN=C2C([O-])=CC=CC2=C1.C1=CN=C2C([O-])=CC=CC2=C1.C1=CN=C2C([O-])=CC=CC2=C1 TVIVIEFSHFOWTE-UHFFFAOYSA-K 0.000 description 3
- 239000008096 xylene Substances 0.000 description 3
- 229910000838 Al alloy Inorganic materials 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 2
- 229910000733 Li alloy Inorganic materials 0.000 description 2
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 2
- SMWDFEZZVXVKRB-UHFFFAOYSA-N Quinoline Chemical class N1=CC=CC2=CC=CC=C21 SMWDFEZZVXVKRB-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 229910052744 lithium Inorganic materials 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- -1 polyethylene terephthalate Polymers 0.000 description 2
- 229910001148 Al-Li alloy Inorganic materials 0.000 description 1
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 238000003848 UV Light-Curing Methods 0.000 description 1
- JFBZPFYRPYOZCQ-UHFFFAOYSA-N [Li].[Al] Chemical compound [Li].[Al] JFBZPFYRPYOZCQ-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 239000011575 calcium Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 239000011777 magnesium Substances 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- NIHNNTQXNPWCJQ-UHFFFAOYSA-N o-biphenylenemethane Natural products C1=CC=C2CC3=CC=CC=C3C2=C1 NIHNNTQXNPWCJQ-UHFFFAOYSA-N 0.000 description 1
- 239000012044 organic layer Substances 0.000 description 1
- 125000002524 organometallic group Chemical group 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- JZRYQZJSTWVBBD-UHFFFAOYSA-N pentaporphyrin i Chemical class N1C(C=C2NC(=CC3=NC(=C4)C=C3)C=C2)=CC=C1C=C1C=CC4=N1 JZRYQZJSTWVBBD-UHFFFAOYSA-N 0.000 description 1
- 229920003227 poly(N-vinyl carbazole) Polymers 0.000 description 1
- 229920000767 polyaniline Polymers 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920006289 polycarbonate film Polymers 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920006393 polyether sulfone Polymers 0.000 description 1
- 229920000139 polyethylene terephthalate Polymers 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229920000123 polythiophene Polymers 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 150000001651 triphenylamine derivatives Chemical class 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B33/00—Electroluminescent light sources
- H05B33/10—Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/17—Passive-matrix OLED displays
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/80—Constructional details
- H10K59/805—Electrodes
- H10K59/8052—Cathodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/80—Constructional details
- H10K59/805—Electrodes
- H10K59/8052—Cathodes
- H10K59/80521—Cathodes characterised by their shape
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/18—Deposition of organic active material using non-liquid printing techniques, e.g. thermal transfer printing from a donor sheet
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/30—Devices specially adapted for multicolour light emission
- H10K59/35—Devices specially adapted for multicolour light emission comprising red-green-blue [RGB] subpixels
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/12—Deposition of organic active material using liquid deposition, e.g. spin coating
- H10K71/13—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing
- H10K71/135—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing using ink-jet printing
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/40—Thermal treatment, e.g. annealing in the presence of a solvent vapour
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/50—Forming devices by joining two substrates together, e.g. lamination techniques
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/60—Forming conductive regions or layers, e.g. electrodes
- H10K71/611—Forming conductive regions or layers, e.g. electrodes using printing deposition, e.g. ink jet printing
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/10—Organic polymers or oligomers
- H10K85/111—Organic polymers or oligomers comprising aromatic, heteroaromatic, or aryl chains, e.g. polyaniline, polyphenylene or polyphenylene vinylene
- H10K85/114—Poly-phenylenevinylene; Derivatives thereof
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/10—Organic polymers or oligomers
- H10K85/111—Organic polymers or oligomers comprising aromatic, heteroaromatic, or aryl chains, e.g. polyaniline, polyphenylene or polyphenylene vinylene
- H10K85/115—Polyfluorene; Derivatives thereof
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/30—Coordination compounds
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/30—Coordination compounds
- H10K85/321—Metal complexes comprising a group IIIA element, e.g. Tris (8-hydroxyquinoline) gallium [Gaq3]
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/30—Coordination compounds
- H10K85/321—Metal complexes comprising a group IIIA element, e.g. Tris (8-hydroxyquinoline) gallium [Gaq3]
- H10K85/324—Metal complexes comprising a group IIIA element, e.g. Tris (8-hydroxyquinoline) gallium [Gaq3] comprising aluminium, e.g. Alq3
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/60—Organic compounds having low molecular weight
- H10K85/631—Amine compounds having at least two aryl rest on at least one amine-nitrogen atom, e.g. triphenylamine
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Electroluminescent Light Sources (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5721498 | 1998-03-09 | ||
| JP05721498A JP4547723B2 (ja) | 1998-03-09 | 1998-03-09 | 有機ｅｌ表示装置の製造方法 |
| PCT/JP1999/001132 WO1999046961A1 (en) | 1998-03-09 | 1999-03-09 | Method of manufacturing organic el display |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE69929155D1 DE69929155D1 (de) | 2006-02-02 |
| DE69929155T2 true DE69929155T2 (de) | 2006-08-24 |
Family
ID=13049286
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE69929155T Expired - Lifetime DE69929155T2 (de) | 1998-03-09 | 1999-03-09 | Verfahren zur herstellung einer organischen elektrolumineszenzanzeige |
| DE69938800T Expired - Lifetime DE69938800D1 (de) | 1998-03-09 | 1999-03-09 | Verfahren zur Herstellung einer organischen Elektrolumineszenzanzeige |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE69938800T Expired - Lifetime DE69938800D1 (de) | 1998-03-09 | 1999-03-09 | Verfahren zur Herstellung einer organischen Elektrolumineszenzanzeige |
Country Status (5)
| Country | Link |
|---|---|
| EP (2) | EP1624485B1 (https=) |
| JP (1) | JP4547723B2 (https=) |
| AT (1) | ATE314802T1 (https=) |
| DE (2) | DE69929155T2 (https=) |
| WO (1) | WO1999046961A1 (https=) |
Families Citing this family (40)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6165543A (en) * | 1998-06-17 | 2000-12-26 | Nec Corporation | Method of making organic EL device and organic EL transfer base plate |
| US6114088A (en) | 1999-01-15 | 2000-09-05 | 3M Innovative Properties Company | Thermal transfer element for forming multilayer devices |
| WO2000041893A1 (en) | 1999-01-15 | 2000-07-20 | 3M Innovative Properties Company | Thermal transfer element and process for forming organic electroluminescent devices |
| JP4009923B2 (ja) | 1999-09-30 | 2007-11-21 | セイコーエプソン株式会社 | Ｅｌパネル |
| US6228555B1 (en) | 1999-12-28 | 2001-05-08 | 3M Innovative Properties Company | Thermal mass transfer donor element |
| US6284425B1 (en) | 1999-12-28 | 2001-09-04 | 3M Innovative Properties | Thermal transfer donor element having a heat management underlayer |
| US6436222B1 (en) * | 2000-05-12 | 2002-08-20 | Eastman Kodak Company | Forming preformed images in organic electroluminescent devices |
| JP2002083691A (ja) | 2000-09-06 | 2002-03-22 | Sharp Corp | アクティブマトリックス駆動型有機ｌｅｄ表示装置及びその製造方法 |
| US6855384B1 (en) | 2000-09-15 | 2005-02-15 | 3M Innovative Properties Company | Selective thermal transfer of light emitting polymer blends |
| US6358664B1 (en) | 2000-09-15 | 2002-03-19 | 3M Innovative Properties Company | Electronically active primer layers for thermal patterning of materials for electronic devices |
| JP2002108250A (ja) | 2000-09-29 | 2002-04-10 | Sharp Corp | アクティブマトリックス駆動型自発光表示装置及びその製造方法 |
| JP2002190386A (ja) * | 2000-12-20 | 2002-07-05 | Daicel Chem Ind Ltd | 有機エレクトロルミネッセンス素子用材料およびその製造方法 |
| EP1347670A4 (en) | 2000-12-20 | 2009-01-14 | Daicel Chem | MATERIAL FOR ORGANIC ELECTROLUMINESCENCE DEVICE AND METHOD FOR MANUFACTURING SAME |
| JP2002222694A (ja) | 2001-01-25 | 2002-08-09 | Sharp Corp | レーザー加工装置及びそれを用いた有機エレクトロルミネッセンス表示パネル |
| JP2002240437A (ja) | 2001-02-19 | 2002-08-28 | Sharp Corp | 薄膜形成用ドナーシートの製造方法、薄膜形成用ドナーシート及び有機エレクトロルミネッセンス素子 |
| US6767807B2 (en) | 2001-03-02 | 2004-07-27 | Fuji Photo Film Co., Ltd. | Method for producing organic thin film device and transfer material used therein |
| JP2002343565A (ja) | 2001-05-18 | 2002-11-29 | Sharp Corp | 有機ｌｅｄ表示パネルの製造方法、その方法により製造された有機ｌｅｄ表示パネル、並びに、その方法に用いられるベースフィルム及び基板 |
| JP2002343564A (ja) | 2001-05-18 | 2002-11-29 | Sharp Corp | 転写用フィルムおよびそれを用いた有機エレクトロルミネッセンス素子の製造方法 |
| US6699597B2 (en) | 2001-08-16 | 2004-03-02 | 3M Innovative Properties Company | Method and materials for patterning of an amorphous, non-polymeric, organic matrix with electrically active material disposed therein |
| SG135973A1 (en) * | 2001-08-16 | 2007-10-29 | 3M Innovative Properties Co | Method and materials for patterning of a polymerizable, amorphous matrix with electrically active material disposed therein |
| US6953735B2 (en) | 2001-12-28 | 2005-10-11 | Semiconductor Energy Laboratory Co., Ltd. | Method for fabricating a semiconductor device by transferring a layer to a support with curvature |
| TWI258317B (en) | 2002-01-25 | 2006-07-11 | Semiconductor Energy Lab | A display device and method for manufacturing thereof |
| US7241512B2 (en) | 2002-04-19 | 2007-07-10 | 3M Innovative Properties Company | Electroluminescent materials and methods of manufacture and use |
| GB0306409D0 (en) | 2003-03-20 | 2003-04-23 | Cambridge Display Tech Ltd | Electroluminescent device |
| JP2005032917A (ja) * | 2003-07-10 | 2005-02-03 | Dainippon Printing Co Ltd | 有機薄膜太陽電池の製造方法および転写シート |
| US7897303B2 (en) | 2004-03-20 | 2011-03-01 | Hewlett-Packard Development Company, L.P. | Applying color elements and busbars to a display substrate |
| GB2412223B (en) * | 2004-03-20 | 2008-10-22 | Hewlett Packard Development Co | Method of applying light filters and busbars to a display substrate |
| JP4548153B2 (ja) * | 2005-03-07 | 2010-09-22 | セイコーエプソン株式会社 | 有機ｅｌ表示装置の製造方法 |
| DE102006013834A1 (de) * | 2006-03-23 | 2007-09-27 | Tesa Ag | Elektrolumineszierende Haftklebemassen |
| US7670450B2 (en) | 2006-07-31 | 2010-03-02 | 3M Innovative Properties Company | Patterning and treatment methods for organic light emitting diode devices |
| JP4450006B2 (ja) | 2007-04-02 | 2010-04-14 | ソニー株式会社 | 転写用基板および有機電界発光素子の製造方法 |
| JP2009048811A (ja) | 2007-08-16 | 2009-03-05 | Sony Corp | 転写用基板および有機電界発光素子の製造方法 |
| US8080811B2 (en) | 2007-12-28 | 2011-12-20 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing evaporation donor substrate and light-emitting device |
| JP4502224B2 (ja) * | 2008-01-15 | 2010-07-14 | 大日本印刷株式会社 | パターン転写層を設けた有機ｅｌ転写体、有機ｅｌ被転写体および有機ｅｌ素子の製造方法 |
| WO2009107548A1 (en) | 2008-02-29 | 2009-09-03 | Semiconductor Energy Laboratory Co., Ltd. | Deposition method and manufacturing method of light-emitting device |
| US8182863B2 (en) | 2008-03-17 | 2012-05-22 | Semiconductor Energy Laboratory Co., Ltd. | Deposition method and manufacturing method of light-emitting device |
| KR101629637B1 (ko) | 2008-05-29 | 2016-06-13 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 성막방법 및 발광장치의 제조방법 |
| CN104952702B (zh) * | 2015-05-15 | 2017-11-28 | 张家港康得新光电材料有限公司 | 半导体器件及其制作方法 |
| CN108878668A (zh) * | 2018-07-04 | 2018-11-23 | 京东方科技集团股份有限公司 | 背板及其制作方法、显示装置以及照明装置 |
| CN114055970A (zh) * | 2020-08-03 | 2022-02-18 | 湖南鼎一致远科技发展有限公司 | 可热转印的器件层结构和色带结构及其制备方法 |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61163591A (ja) * | 1985-01-11 | 1986-07-24 | 関西日本電気株式会社 | 有機型ｅｌ素子の製造方法 |
| JPS642297A (en) * | 1987-06-24 | 1989-01-06 | Nec Kansai Ltd | Manufacture of electroluminescent element |
| JPH06283265A (ja) * | 1993-03-25 | 1994-10-07 | Nec Kansai Ltd | 電界発光灯及びその製造方法及びその製造装置 |
| JPH0757871A (ja) * | 1993-08-19 | 1995-03-03 | Hitachi Ltd | 電場発光表示装置 |
| JP3585524B2 (ja) * | 1994-04-20 | 2004-11-04 | 大日本印刷株式会社 | 有機薄膜ｅｌ素子の製造方法 |
| JPH07302685A (ja) * | 1994-05-10 | 1995-11-14 | Nec Kansai Ltd | 電界発光灯の製造方法 |
| US5563019A (en) * | 1994-06-30 | 1996-10-08 | E. I. Du Pont De Nemours And Company | Donor element for laser-induced thermal transfer |
| US5686383A (en) * | 1995-08-22 | 1997-11-11 | Eastman Kodak Company | Method of making a color filter array by colorant transfer and lamination |
| US5688551A (en) * | 1995-11-13 | 1997-11-18 | Eastman Kodak Company | Method of forming an organic electroluminescent display panel |
| US5766819A (en) * | 1995-11-29 | 1998-06-16 | E. I. Dupont De Nemours And Company | Donor elements, assemblages, and associated processes with flexible ejection layer(s) for laser-induced thermal transfer |
| US5695907A (en) * | 1996-03-14 | 1997-12-09 | Minnesota Mining And Manufacturing Company | Laser addressable thermal transfer imaging element and method |
| JP3036436B2 (ja) * | 1996-06-19 | 2000-04-24 | セイコーエプソン株式会社 | アクティブマトリックス型有機ｅｌ表示体の製造方法 |
| US5998085A (en) * | 1996-07-23 | 1999-12-07 | 3M Innovative Properties | Process for preparing high resolution emissive arrays and corresponding articles |
| KR100195175B1 (ko) * | 1996-12-23 | 1999-06-15 | 손욱 | 유기전자발광소자 유기박막용 도너필름, 이를 이용한 유기전자발광소자의 제조방법 및 그 방법에 따라 제조된 유기전자발광소자 |
| JP3466876B2 (ja) * | 1997-06-16 | 2003-11-17 | キヤノン株式会社 | エレクトロ・ルミネセンス素子の製造法 |
-
1998
- 1998-03-09 JP JP05721498A patent/JP4547723B2/ja not_active Expired - Lifetime
-
1999
- 1999-03-09 EP EP05077308A patent/EP1624485B1/en not_active Expired - Lifetime
- 1999-03-09 DE DE69929155T patent/DE69929155T2/de not_active Expired - Lifetime
- 1999-03-09 EP EP99939247A patent/EP1003354B1/en not_active Expired - Lifetime
- 1999-03-09 WO PCT/JP1999/001132 patent/WO1999046961A1/ja not_active Ceased
- 1999-03-09 DE DE69938800T patent/DE69938800D1/de not_active Expired - Lifetime
- 1999-03-09 AT AT99939247T patent/ATE314802T1/de not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| DE69929155D1 (de) | 2006-02-02 |
| EP1003354A4 (en) | 2004-05-19 |
| DE69938800D1 (de) | 2008-07-03 |
| WO1999046961A1 (en) | 1999-09-16 |
| JPH11260549A (ja) | 1999-09-24 |
| JP4547723B2 (ja) | 2010-09-22 |
| ATE314802T1 (de) | 2006-01-15 |
| EP1003354A1 (en) | 2000-05-24 |
| EP1624485A2 (en) | 2006-02-08 |
| EP1003354B1 (en) | 2005-12-28 |
| EP1624485A3 (en) | 2006-11-29 |
| EP1624485B1 (en) | 2008-05-21 |
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