KR101629637B1 - 성막방법 및 발광장치의 제조방법 - Google Patents

성막방법 및 발광장치의 제조방법 Download PDF

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Publication number
KR101629637B1
KR101629637B1 KR1020090045754A KR20090045754A KR101629637B1 KR 101629637 B1 KR101629637 B1 KR 101629637B1 KR 1020090045754 A KR1020090045754 A KR 1020090045754A KR 20090045754 A KR20090045754 A KR 20090045754A KR 101629637 B1 KR101629637 B1 KR 101629637B1
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South Korea
Prior art keywords
layer
substrate
light
organic compound
layers
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KR1020090045754A
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KR20090124948A (ko
Inventor
순페이 야마자키
코이치로 타나카
히사오 이케다
사토시 세오
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가부시키가이샤 한도오따이 에네루기 켄큐쇼
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Priority to JPJP-P-2008-141521 priority Critical
Priority to JP2008141521 priority
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Publication of KR20090124948A publication Critical patent/KR20090124948A/ko
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