JP4547723B2 - 有機el表示装置の製造方法 - Google Patents

有機el表示装置の製造方法 Download PDF

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Publication number
JP4547723B2
JP4547723B2 JP05721498A JP5721498A JP4547723B2 JP 4547723 B2 JP4547723 B2 JP 4547723B2 JP 05721498 A JP05721498 A JP 05721498A JP 5721498 A JP5721498 A JP 5721498A JP 4547723 B2 JP4547723 B2 JP 4547723B2
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JP
Japan
Prior art keywords
organic
film
layer
display device
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP05721498A
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English (en)
Japanese (ja)
Other versions
JPH11260549A5 (https=
JPH11260549A (ja
Inventor
英和 小林
達也 下田
浩史 木口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to JP05721498A priority Critical patent/JP4547723B2/ja
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to DE69938800T priority patent/DE69938800D1/de
Priority to EP05077308A priority patent/EP1624485B1/en
Priority to EP99939247A priority patent/EP1003354B1/en
Priority to PCT/JP1999/001132 priority patent/WO1999046961A1/ja
Priority to DE69929155T priority patent/DE69929155T2/de
Priority to AT99939247T priority patent/ATE314802T1/de
Publication of JPH11260549A publication Critical patent/JPH11260549A/ja
Publication of JPH11260549A5 publication Critical patent/JPH11260549A5/ja
Application granted granted Critical
Publication of JP4547723B2 publication Critical patent/JP4547723B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00Electroluminescent light sources
    • H05B33/10Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10OLED displays
    • H10K59/17Passive-matrix OLED displays
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/80Constructional details
    • H10K59/805Electrodes
    • H10K59/8052Cathodes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/80Constructional details
    • H10K59/805Electrodes
    • H10K59/8052Cathodes
    • H10K59/80521Cathodes characterised by their shape
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10Deposition of organic active material
    • H10K71/18Deposition of organic active material using non-liquid printing techniques, e.g. thermal transfer printing from a donor sheet
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/30Devices specially adapted for multicolour light emission
    • H10K59/35Devices specially adapted for multicolour light emission comprising red-green-blue [RGB] subpixels
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10Deposition of organic active material
    • H10K71/12Deposition of organic active material using liquid deposition, e.g. spin coating
    • H10K71/13Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing
    • H10K71/135Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing using ink-jet printing
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/40Thermal treatment, e.g. annealing in the presence of a solvent vapour
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/50Forming devices by joining two substrates together, e.g. lamination techniques
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/60Forming conductive regions or layers, e.g. electrodes
    • H10K71/611Forming conductive regions or layers, e.g. electrodes using printing deposition, e.g. ink jet printing
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/10Organic polymers or oligomers
    • H10K85/111Organic polymers or oligomers comprising aromatic, heteroaromatic, or aryl chains, e.g. polyaniline, polyphenylene or polyphenylene vinylene
    • H10K85/114Poly-phenylenevinylene; Derivatives thereof
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/10Organic polymers or oligomers
    • H10K85/111Organic polymers or oligomers comprising aromatic, heteroaromatic, or aryl chains, e.g. polyaniline, polyphenylene or polyphenylene vinylene
    • H10K85/115Polyfluorene; Derivatives thereof
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/30Coordination compounds
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/30Coordination compounds
    • H10K85/321Metal complexes comprising a group IIIA element, e.g. Tris (8-hydroxyquinoline) gallium [Gaq3]
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/30Coordination compounds
    • H10K85/321Metal complexes comprising a group IIIA element, e.g. Tris (8-hydroxyquinoline) gallium [Gaq3]
    • H10K85/324Metal complexes comprising a group IIIA element, e.g. Tris (8-hydroxyquinoline) gallium [Gaq3] comprising aluminium, e.g. Alq3
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/60Organic compounds having low molecular weight
    • H10K85/631Amine compounds having at least two aryl rest on at least one amine-nitrogen atom, e.g. triphenylamine

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Electroluminescent Light Sources (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
JP05721498A 1998-03-09 1998-03-09 有機el表示装置の製造方法 Expired - Lifetime JP4547723B2 (ja)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP05721498A JP4547723B2 (ja) 1998-03-09 1998-03-09 有機el表示装置の製造方法
EP05077308A EP1624485B1 (en) 1998-03-09 1999-03-09 Method for manufacturing organic el display device
EP99939247A EP1003354B1 (en) 1998-03-09 1999-03-09 Method of manufacturing organic el display
PCT/JP1999/001132 WO1999046961A1 (en) 1998-03-09 1999-03-09 Method of manufacturing organic el display
DE69938800T DE69938800D1 (de) 1998-03-09 1999-03-09 Verfahren zur Herstellung einer organischen Elektrolumineszenzanzeige
DE69929155T DE69929155T2 (de) 1998-03-09 1999-03-09 Verfahren zur herstellung einer organischen elektrolumineszenzanzeige
AT99939247T ATE314802T1 (de) 1998-03-09 1999-03-09 Verfahren zur herstellung einer organischen elektrolumineszenzanzeige

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP05721498A JP4547723B2 (ja) 1998-03-09 1998-03-09 有機el表示装置の製造方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2005061927A Division JP4548153B2 (ja) 2005-03-07 2005-03-07 有機el表示装置の製造方法

Publications (3)

Publication Number Publication Date
JPH11260549A JPH11260549A (ja) 1999-09-24
JPH11260549A5 JPH11260549A5 (https=) 2005-09-02
JP4547723B2 true JP4547723B2 (ja) 2010-09-22

Family

ID=13049286

Family Applications (1)

Application Number Title Priority Date Filing Date
JP05721498A Expired - Lifetime JP4547723B2 (ja) 1998-03-09 1998-03-09 有機el表示装置の製造方法

Country Status (5)

Country Link
EP (2) EP1624485B1 (https=)
JP (1) JP4547723B2 (https=)
AT (1) ATE314802T1 (https=)
DE (2) DE69929155T2 (https=)
WO (1) WO1999046961A1 (https=)

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JP4009923B2 (ja) 1999-09-30 2007-11-21 セイコーエプソン株式会社 Elパネル
US6228555B1 (en) 1999-12-28 2001-05-08 3M Innovative Properties Company Thermal mass transfer donor element
US6284425B1 (en) 1999-12-28 2001-09-04 3M Innovative Properties Thermal transfer donor element having a heat management underlayer
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JP2002083691A (ja) 2000-09-06 2002-03-22 Sharp Corp アクティブマトリックス駆動型有機led表示装置及びその製造方法
US6855384B1 (en) 2000-09-15 2005-02-15 3M Innovative Properties Company Selective thermal transfer of light emitting polymer blends
US6358664B1 (en) 2000-09-15 2002-03-19 3M Innovative Properties Company Electronically active primer layers for thermal patterning of materials for electronic devices
JP2002108250A (ja) 2000-09-29 2002-04-10 Sharp Corp アクティブマトリックス駆動型自発光表示装置及びその製造方法
JP2002190386A (ja) * 2000-12-20 2002-07-05 Daicel Chem Ind Ltd 有機エレクトロルミネッセンス素子用材料およびその製造方法
EP1347670A4 (en) 2000-12-20 2009-01-14 Daicel Chem MATERIAL FOR ORGANIC ELECTROLUMINESCENCE DEVICE AND METHOD FOR MANUFACTURING SAME
JP2002222694A (ja) 2001-01-25 2002-08-09 Sharp Corp レーザー加工装置及びそれを用いた有機エレクトロルミネッセンス表示パネル
JP2002240437A (ja) 2001-02-19 2002-08-28 Sharp Corp 薄膜形成用ドナーシートの製造方法、薄膜形成用ドナーシート及び有機エレクトロルミネッセンス素子
US6767807B2 (en) 2001-03-02 2004-07-27 Fuji Photo Film Co., Ltd. Method for producing organic thin film device and transfer material used therein
JP2002343565A (ja) 2001-05-18 2002-11-29 Sharp Corp 有機led表示パネルの製造方法、その方法により製造された有機led表示パネル、並びに、その方法に用いられるベースフィルム及び基板
JP2002343564A (ja) 2001-05-18 2002-11-29 Sharp Corp 転写用フィルムおよびそれを用いた有機エレクトロルミネッセンス素子の製造方法
US6699597B2 (en) 2001-08-16 2004-03-02 3M Innovative Properties Company Method and materials for patterning of an amorphous, non-polymeric, organic matrix with electrically active material disposed therein
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US7897303B2 (en) 2004-03-20 2011-03-01 Hewlett-Packard Development Company, L.P. Applying color elements and busbars to a display substrate
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DE102006013834A1 (de) * 2006-03-23 2007-09-27 Tesa Ag Elektrolumineszierende Haftklebemassen
US7670450B2 (en) 2006-07-31 2010-03-02 3M Innovative Properties Company Patterning and treatment methods for organic light emitting diode devices
JP4450006B2 (ja) 2007-04-02 2010-04-14 ソニー株式会社 転写用基板および有機電界発光素子の製造方法
JP2009048811A (ja) 2007-08-16 2009-03-05 Sony Corp 転写用基板および有機電界発光素子の製造方法
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JP4502224B2 (ja) * 2008-01-15 2010-07-14 大日本印刷株式会社 パターン転写層を設けた有機el転写体、有機el被転写体および有機el素子の製造方法
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KR101629637B1 (ko) 2008-05-29 2016-06-13 가부시키가이샤 한도오따이 에네루기 켄큐쇼 성막방법 및 발광장치의 제조방법
CN104952702B (zh) * 2015-05-15 2017-11-28 张家港康得新光电材料有限公司 半导体器件及其制作方法
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CN114055970A (zh) * 2020-08-03 2022-02-18 湖南鼎一致远科技发展有限公司 可热转印的器件层结构和色带结构及其制备方法

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Also Published As

Publication number Publication date
DE69929155D1 (de) 2006-02-02
DE69929155T2 (de) 2006-08-24
EP1003354A4 (en) 2004-05-19
DE69938800D1 (de) 2008-07-03
WO1999046961A1 (en) 1999-09-16
JPH11260549A (ja) 1999-09-24
ATE314802T1 (de) 2006-01-15
EP1003354A1 (en) 2000-05-24
EP1624485A2 (en) 2006-02-08
EP1003354B1 (en) 2005-12-28
EP1624485A3 (en) 2006-11-29
EP1624485B1 (en) 2008-05-21

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