DE69837674T2 - Doppeldamaszen-metallisierung - Google Patents

Doppeldamaszen-metallisierung Download PDF

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Publication number
DE69837674T2
DE69837674T2 DE69837674T DE69837674T DE69837674T2 DE 69837674 T2 DE69837674 T2 DE 69837674T2 DE 69837674 T DE69837674 T DE 69837674T DE 69837674 T DE69837674 T DE 69837674T DE 69837674 T2 DE69837674 T2 DE 69837674T2
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DE
Germany
Prior art keywords
layer
copper
cvd
metal
conductive metal
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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DE69837674T
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German (de)
English (en)
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DE69837674D1 (de
Inventor
Liang-Yuh San Jose CHEN
Rong San Jose TAO
Ted Palo Alto GUO
Roderick Craig Pleasanton MOSELY
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Applied Materials Inc
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Applied Materials Inc
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Publication of DE69837674T2 publication Critical patent/DE69837674T2/de
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Expired - Fee Related legal-status Critical Current

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    • H10W20/033—
    • H10W20/045—
    • H10W20/0523—
    • H10W20/056—
    • H10W20/076—
    • H10W20/084—

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  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
DE69837674T 1997-08-19 1998-08-17 Doppeldamaszen-metallisierung Expired - Fee Related DE69837674T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US08/914,521 US5989623A (en) 1997-08-19 1997-08-19 Dual damascene metallization
US914521 1997-08-19
PCT/US1998/017010 WO1999009593A1 (en) 1997-08-19 1998-08-17 Dual damascene metallization

Publications (2)

Publication Number Publication Date
DE69837674D1 DE69837674D1 (de) 2007-06-06
DE69837674T2 true DE69837674T2 (de) 2008-01-10

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Family Applications (1)

Application Number Title Priority Date Filing Date
DE69837674T Expired - Fee Related DE69837674T2 (de) 1997-08-19 1998-08-17 Doppeldamaszen-metallisierung

Country Status (6)

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US (2) US5989623A (enExample)
EP (1) EP1021827B1 (enExample)
JP (1) JP4615707B2 (enExample)
KR (1) KR100506139B1 (enExample)
DE (1) DE69837674T2 (enExample)
WO (1) WO1999009593A1 (enExample)

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US5989623A (en) 1999-11-23
KR20010023055A (ko) 2001-03-26
JP4615707B2 (ja) 2011-01-19
WO1999009593A1 (en) 1999-02-25
US6207222B1 (en) 2001-03-27
EP1021827A1 (en) 2000-07-26
EP1021827B1 (en) 2007-04-25
JP2001516146A (ja) 2001-09-25
KR100506139B1 (ko) 2005-08-05

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