DE69232381T2 - Halbleiteranordnung und Verfahren zu ihrer Herstellung - Google Patents
Halbleiteranordnung und Verfahren zu ihrer HerstellungInfo
- Publication number
- DE69232381T2 DE69232381T2 DE69232381T DE69232381T DE69232381T2 DE 69232381 T2 DE69232381 T2 DE 69232381T2 DE 69232381 T DE69232381 T DE 69232381T DE 69232381 T DE69232381 T DE 69232381T DE 69232381 T2 DE69232381 T2 DE 69232381T2
- Authority
- DE
- Germany
- Prior art keywords
- manufacture
- semiconductor device
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66742—Thin film unipolar transistors
- H01L29/6675—Amorphous silicon or polysilicon transistors
- H01L29/66765—Lateral single gate single channel transistors with inverted structure, i.e. the channel layer is formed after the gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/78606—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device
- H01L29/78636—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device with supplementary region or layer for improving the flatness of the device
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/78651—Silicon transistors
- H01L29/7866—Non-monocrystalline silicon transistors
- H01L29/78672—Polycrystalline or microcrystalline silicon transistor
- H01L29/78678—Polycrystalline or microcrystalline silicon transistor with inverted-type structure, e.g. with bottom gate
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B10/00—Static random access memory [SRAM] devices
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Thin Film Transistor (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3199434A JP2901163B2 (ja) | 1991-08-08 | 1991-08-08 | 半導体装置及びその製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69232381D1 DE69232381D1 (de) | 2002-03-14 |
DE69232381T2 true DE69232381T2 (de) | 2002-11-14 |
Family
ID=16407758
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69232381T Expired - Fee Related DE69232381T2 (de) | 1991-08-08 | 1992-08-07 | Halbleiteranordnung und Verfahren zu ihrer Herstellung |
DE69220432T Expired - Fee Related DE69220432T2 (de) | 1991-08-08 | 1992-08-07 | Halbleiteranordnung und Verfahren zu ihrer Herstellung |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69220432T Expired - Fee Related DE69220432T2 (de) | 1991-08-08 | 1992-08-07 | Halbleiteranordnung und Verfahren zu ihrer Herstellung |
Country Status (5)
Country | Link |
---|---|
US (1) | US5550390A (de) |
EP (2) | EP0528290B1 (de) |
JP (1) | JP2901163B2 (de) |
KR (1) | KR960012916B1 (de) |
DE (2) | DE69232381T2 (de) |
Family Cites Families (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2503864C3 (de) * | 1975-01-30 | 1981-09-24 | Siemens AG, 1000 Berlin und 8000 München | Halbleiterbauelement |
JPS55132072A (en) * | 1979-03-31 | 1980-10-14 | Toshiba Corp | Mos semiconductor device |
JPS5688354A (en) * | 1979-12-20 | 1981-07-17 | Toshiba Corp | Semiconductor integrated circuit device |
JPS57132365A (en) * | 1981-02-10 | 1982-08-16 | Toshiba Corp | Nonvolatile semiconductor memory storage |
JPS58124261A (ja) * | 1982-01-21 | 1983-07-23 | Toshiba Corp | 半導体装置 |
JPS58218169A (ja) * | 1982-06-14 | 1983-12-19 | Seiko Epson Corp | 半導体集積回路装置 |
JPS59108360A (ja) * | 1982-12-14 | 1984-06-22 | Mitsubishi Electric Corp | 半導体装置 |
JPH0616560B2 (ja) * | 1982-12-17 | 1994-03-02 | セイコー電子工業株式会社 | 薄膜トランジスタの製造方法 |
DE3533032A1 (de) * | 1985-09-17 | 1987-03-19 | Standard Elektrik Lorenz Ag | Duennschicht-feldeffekt-transistor und ein verfahren zu seiner herstellung |
JP2892683B2 (ja) * | 1989-05-29 | 1999-05-17 | 株式会社日立製作所 | 半導体記憶装置およびその製造方法 |
JPS62190761A (ja) * | 1986-02-18 | 1987-08-20 | Nissan Motor Co Ltd | 半導体装置 |
JPS63104373A (ja) * | 1986-10-20 | 1988-05-09 | Mitsubishi Electric Corp | 半導体記憶装置 |
JPH01229229A (ja) * | 1988-03-09 | 1989-09-12 | Seikosha Co Ltd | 非晶質シリコン薄膜トランジスタおよびその製造方法 |
JPH01268064A (ja) * | 1988-04-20 | 1989-10-25 | Hitachi Ltd | 多結晶シリコン薄膜の形成方法 |
JPH01276672A (ja) * | 1988-04-27 | 1989-11-07 | Seikosha Co Ltd | 逆スタガー型非晶質シリコン薄膜トランジスタ |
JPH022175A (ja) * | 1988-06-14 | 1990-01-08 | Matsushita Electric Ind Co Ltd | 薄膜トランジスタ及びその製造方法 |
JPH0348463A (ja) * | 1989-03-01 | 1991-03-01 | Mitsubishi Electric Corp | 薄膜トランジスタ |
JPH0341774A (ja) * | 1989-07-10 | 1991-02-22 | Sharp Corp | 薄膜トランジスタ |
JPH03293773A (ja) * | 1990-04-12 | 1991-12-25 | Casio Comput Co Ltd | 薄膜トランジスタメモリ |
JPH04505833A (ja) * | 1990-10-05 | 1992-10-08 | ゼネラル・エレクトリック・カンパニイ | 基準構造の地形の伝搬地形による装置の自己アライメント |
JPH04162668A (ja) * | 1990-10-26 | 1992-06-08 | Hitachi Ltd | 半導体装置およびその製造方法 |
-
1991
- 1991-08-08 JP JP3199434A patent/JP2901163B2/ja not_active Expired - Fee Related
-
1992
- 1992-08-05 KR KR1019920014072A patent/KR960012916B1/ko not_active IP Right Cessation
- 1992-08-07 EP EP92113472A patent/EP0528290B1/de not_active Expired - Lifetime
- 1992-08-07 DE DE69232381T patent/DE69232381T2/de not_active Expired - Fee Related
- 1992-08-07 DE DE69220432T patent/DE69220432T2/de not_active Expired - Fee Related
- 1992-08-07 EP EP96119724A patent/EP0771035B1/de not_active Expired - Lifetime
-
1995
- 1995-05-30 US US08/453,726 patent/US5550390A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0528290A1 (de) | 1993-02-24 |
JP2901163B2 (ja) | 1999-06-07 |
DE69220432T2 (de) | 1998-01-22 |
KR960012916B1 (ko) | 1996-09-25 |
EP0771035A1 (de) | 1997-05-02 |
EP0528290B1 (de) | 1997-06-18 |
KR930005258A (ko) | 1993-03-23 |
EP0771035B1 (de) | 2002-01-23 |
JPH0547793A (ja) | 1993-02-26 |
DE69232381D1 (de) | 2002-03-14 |
DE69220432D1 (de) | 1997-07-24 |
US5550390A (en) | 1996-08-27 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |