DE60232385D1 - Einkristallines, mit Sauerstoff dotiertes N-Galliumnitrid-Substrat und Verfahren zu dessen Herstellung - Google Patents

Einkristallines, mit Sauerstoff dotiertes N-Galliumnitrid-Substrat und Verfahren zu dessen Herstellung

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Publication number
DE60232385D1
DE60232385D1 DE60232385T DE60232385T DE60232385D1 DE 60232385 D1 DE60232385 D1 DE 60232385D1 DE 60232385 T DE60232385 T DE 60232385T DE 60232385 T DE60232385 T DE 60232385T DE 60232385 D1 DE60232385 D1 DE 60232385D1
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Germany
Prior art keywords
doped
making
same
gallium nitride
single crystalline
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Expired - Lifetime
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DE60232385T
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English (en)
Inventor
Kensaku Motoki
Masaki Ueno
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Sumitomo Electric Industries Ltd
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Sumitomo Electric Industries Ltd
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    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials
    • C30B23/02—Epitaxial-layer growth
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02—Epitaxial-layer growth
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10—Inorganic compounds or compositions
    • C30B29/40—AIIIBV compounds wherein A is B, Al, Ga, In or Tl and B is N, P, As, Sb or Bi
    • C30B29/403—AIII-nitrides
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10—Inorganic compounds or compositions
    • C30B29/40—AIIIBV compounds wherein A is B, Al, Ga, In or Tl and B is N, P, As, Sb or Bi
    • C30B29/403—AIII-nitrides
    • C30B29/406—Gallium nitride
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/60—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape characterised by shape
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B33/00—After-treatment of single crystals or homogeneous polycrystalline material with defined structure
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02367—Substrates
    • H01L21/0237—Materials
    • H01L21/02387—Group 13/15 materials
    • H01L21/02389—Nitrides
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02367—Substrates
    • H01L21/0237—Materials
    • H01L21/02387—Group 13/15 materials
    • H01L21/02395—Arsenides
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02367—Substrates
    • H01L21/02433—Crystal orientation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02518—Deposited layers
    • H01L21/02521—Materials
    • H01L21/02538—Group 13/15 materials
    • H01L21/0254—Nitrides
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02518—Deposited layers
    • H01L21/0257—Doping during depositing
    • H01L21/02573—Conductivity type
    • H01L21/02576—N-type
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02518—Deposited layers
    • H01L21/02609—Crystal orientation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02612—Formation types
    • H01L21/02617—Deposition types
    • H01L21/0262—Reduction or decomposition of gaseous compounds, e.g. CVD
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
    • H01L29/20—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only AIIIBV compounds
    • H01L29/207—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only AIIIBV compounds further characterised by the doping material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
    • H01L29/20—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only AIIIBV compounds
    • H01L29/2003—Nitride compounds

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
DE60232385T 2001-04-12 2002-03-26 Einkristallines, mit Sauerstoff dotiertes N-Galliumnitrid-Substrat und Verfahren zu dessen Herstellung Expired - Lifetime DE60232385D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001113872 2001-04-12

Publications (1)

Publication Number Publication Date
DE60232385D1 true DE60232385D1 (de) 2009-06-25

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Family Applications (2)

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DE60226292T Expired - Lifetime DE60226292T2 (de) 2001-04-12 2002-03-26 Sauerstoffdotierungs-Verfahren für ein einkristallines Galliumnitrid-Substrat
DE60232385T Expired - Lifetime DE60232385D1 (de) 2001-04-12 2002-03-26 Einkristallines, mit Sauerstoff dotiertes N-Galliumnitrid-Substrat und Verfahren zu dessen Herstellung

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DE60226292T Expired - Lifetime DE60226292T2 (de) 2001-04-12 2002-03-26 Sauerstoffdotierungs-Verfahren für ein einkristallines Galliumnitrid-Substrat

Country Status (8)

Country Link
US (5) US6773504B2 (de)
EP (3) EP2060663A1 (de)
JP (1) JP5141985B2 (de)
KR (1) KR100484482B1 (de)
CN (2) CN1269999C (de)
DE (2) DE60226292T2 (de)
HK (1) HK1097009A1 (de)
TW (1) TW593800B (de)

Families Citing this family (126)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8633093B2 (en) * 2001-04-12 2014-01-21 Sumitomo Electric Industries Ltd. Oxygen doping method to gallium nitride single crystal substrate
US6773504B2 (en) * 2001-04-12 2004-08-10 Sumitomo Electric Industries, Ltd. Oxygen doping method to gallium nitride single crystal substrate and oxygen-doped N-type gallium nitride freestanding single crystal substrate
US7097707B2 (en) * 2001-12-31 2006-08-29 Cree, Inc. GaN boule grown from liquid melt using GaN seed wafers
KR101363377B1 (ko) * 2002-04-15 2014-02-14 더 리전츠 오브 더 유니버시티 오브 캘리포니아 무극성 질화 갈륨 박막의 전위 감소
US8809867B2 (en) 2002-04-15 2014-08-19 The Regents Of The University Of California Dislocation reduction in non-polar III-nitride thin films
JP3973523B2 (ja) * 2002-09-20 2007-09-12 三洋電機株式会社 窒化物系半導体レーザ素子
US7479448B2 (en) * 2002-12-03 2009-01-20 Nec Corporation Method of manufacturing a light emitting device with a doped active layer
AU2003256522A1 (en) * 2002-12-16 2004-07-29 The Regents Of University Of California Growth of planar, non-polar a-plane gallium nitride by hydride vapor phase epitaxy
US7427555B2 (en) 2002-12-16 2008-09-23 The Regents Of The University Of California Growth of planar, non-polar gallium nitride by hydride vapor phase epitaxy
US7098487B2 (en) 2002-12-27 2006-08-29 General Electric Company Gallium nitride crystal and method of making same
WO2004061923A1 (en) * 2002-12-27 2004-07-22 General Electric Company Gallium nitride crystal, homoepitaxial gallium-nitride-based devices and method for producing same
US9279193B2 (en) 2002-12-27 2016-03-08 Momentive Performance Materials Inc. Method of making a gallium nitride crystalline composition having a low dislocation density
US7786503B2 (en) 2002-12-27 2010-08-31 Momentive Performance Materials Inc. Gallium nitride crystals and wafers and method of making
US8357945B2 (en) 2002-12-27 2013-01-22 Momentive Performance Materials Inc. Gallium nitride crystal and method of making same
US7859008B2 (en) 2002-12-27 2010-12-28 Momentive Performance Materials Inc. Crystalline composition, wafer, device, and associated method
US7638815B2 (en) 2002-12-27 2009-12-29 Momentive Performance Materials Inc. Crystalline composition, wafer, and semi-conductor structure
EP1650841B1 (de) * 2003-07-10 2014-12-31 Nichia Corporation Nitrid-halbleiter-laserelement
JP2005101475A (ja) * 2003-08-28 2005-04-14 Hitachi Cable Ltd Ｉｉｉ−ｖ族窒化物系半導体基板及びその製造方法
US7323256B2 (en) * 2003-11-13 2008-01-29 Cree, Inc. Large area, uniformly low dislocation density GaN substrate and process for making the same
TW200528589A (en) * 2004-02-17 2005-09-01 Nikko Materials Co Ltd Vapor-phase deposition method
US20070296335A1 (en) * 2004-03-12 2007-12-27 Tokuaki Nihashi Process for Producing Layered Member and Layered Member
JP3888374B2 (ja) * 2004-03-17 2007-02-28 住友電気工業株式会社 ＧａＮ単結晶基板の製造方法
WO2005111279A2 (en) * 2004-04-02 2005-11-24 Cornell Research Foundation, Inc. Gan bulk growth by ga vapor transport
JP4384019B2 (ja) * 2004-12-08 2009-12-16 住友電気工業株式会社 ヘッドランプ
JP2006179511A (ja) * 2004-12-20 2006-07-06 Sumitomo Electric Ind Ltd 発光装置
JP4995722B2 (ja) * 2004-12-22 2012-08-08 パナソニック株式会社 半導体発光装置、照明モジュール、および照明装置
US7707603B2 (en) * 2005-01-28 2010-04-27 Microsoft Corporation Digital media transfer based on user behavior
JP4849296B2 (ja) * 2005-04-11 2012-01-11 日立電線株式会社 ＧａＮ基板
TWI455181B (zh) 2005-06-01 2014-10-01 Univ California 半極性（Ｇａ，Ａｌ，Ｉｎ，Ｂ）Ｎ薄膜、異質結構及裝置之生長及製造技術
JPWO2007023722A1 (ja) * 2005-08-25 2009-02-26 住友電気工業株式会社 ＧａｘＩｎ１−ｘＮ（０≦ｘ≦１）結晶の製造方法、ＧａｘＩｎ１−ｘＮ（０≦ｘ≦１）結晶基板、ＧａＮ結晶の製造方法、ＧａＮ結晶基板および製品
JP4939014B2 (ja) * 2005-08-30 2012-05-23 国立大学法人徳島大学 Ｉｉｉ族窒化物半導体発光素子およびｉｉｉ族窒化物半導体発光素子の製造方法
KR100707166B1 (ko) * 2005-10-12 2007-04-13 삼성코닝 주식회사 ＧａＮ 기판의 제조방법
US7777217B2 (en) * 2005-12-12 2010-08-17 Kyma Technologies, Inc. Inclusion-free uniform semi-insulating group III nitride substrate and methods for making same
KR100695118B1 (ko) * 2005-12-27 2007-03-14 삼성코닝 주식회사 다중-프리스탠딩 ＧａＮ 웨이퍼의 제조방법
US7928447B2 (en) * 2006-07-17 2011-04-19 Sumitomo Electric Industries, Ltd. GaN crystal substrate, fabricating method of GaN crystal substrate, and light-emitting device
KR20090048572A (ko) * 2006-08-09 2009-05-14 도꾸리쯔교세이호진 상교기쥬쯔 소고겡뀨죠 탄화규소 반도체 장치 및 그 제조 방법
US20100104495A1 (en) * 2006-10-16 2010-04-29 Mitsubishi Chemical Corporation Method for producing nitride semiconductor, crystal growth rate increasing agent, single crystal nitride, wafer and device
JP4714192B2 (ja) * 2007-07-27 2011-06-29 住友電気工業株式会社 窒化ガリウム結晶の成長方法、窒化ガリウム結晶基板、エピウエハの製造方法およびエピウエハ
US8293623B2 (en) * 2007-09-12 2012-10-23 Showa Denko K.K. Epitaxial SiC single crystal substrate and method of manufacture of epitaxial SiC single crystal substrate
JP4952534B2 (ja) * 2007-11-20 2012-06-13 三菱電機株式会社 窒化物半導体発光素子の製造方法
JP2009190936A (ja) * 2008-02-14 2009-08-27 Sumitomo Electric Ind Ltd Ｉｉｉ族窒化物結晶の製造方法
JP2009286652A (ja) * 2008-05-28 2009-12-10 Sumitomo Electric Ind Ltd Ｉｉｉ族窒化物結晶、ｉｉｉ族窒化物結晶基板および半導体デバイスの製造方法
US8097081B2 (en) 2008-06-05 2012-01-17 Soraa, Inc. High pressure apparatus and method for nitride crystal growth
US9157167B1 (en) 2008-06-05 2015-10-13 Soraa, Inc. High pressure apparatus and method for nitride crystal growth
US8871024B2 (en) 2008-06-05 2014-10-28 Soraa, Inc. High pressure apparatus and method for nitride crystal growth
US8303710B2 (en) 2008-06-18 2012-11-06 Soraa, Inc. High pressure apparatus and method for nitride crystal growth
US9404197B2 (en) 2008-07-07 2016-08-02 Soraa, Inc. Large area, low-defect gallium-containing nitride crystals, method of making, and method of use
US20100003492A1 (en) * 2008-07-07 2010-01-07 Soraa, Inc. High quality large area bulk non-polar or semipolar gallium based substrates and methods
WO2011044554A1 (en) 2009-10-09 2011-04-14 Soraa, Inc. Method for synthesis of high quality large area bulk gallium based crystals
EP2319086A4 (de) 2008-08-04 2014-08-27 Soraa Inc Weisslichtvorrichtungen mit nicht-polarem oder semipolarem galliumhaltigem material und leuchtstoffen
US8284810B1 (en) 2008-08-04 2012-10-09 Soraa, Inc. Solid state laser device using a selected crystal orientation in non-polar or semi-polar GaN containing materials and methods
US8979999B2 (en) 2008-08-07 2015-03-17 Soraa, Inc. Process for large-scale ammonothermal manufacturing of gallium nitride boules
US10036099B2 (en) 2008-08-07 2018-07-31 Slt Technologies, Inc. Process for large-scale ammonothermal manufacturing of gallium nitride boules
US8430958B2 (en) 2008-08-07 2013-04-30 Soraa, Inc. Apparatus and method for seed crystal utilization in large-scale manufacturing of gallium nitride
US8323405B2 (en) 2008-08-07 2012-12-04 Soraa, Inc. Process and apparatus for growing a crystalline gallium-containing nitride using an azide mineralizer
US20100031873A1 (en) * 2008-08-07 2010-02-11 Soraa, Inc. Basket process and apparatus for crystalline gallium-containing nitride
US8021481B2 (en) 2008-08-07 2011-09-20 Soraa, Inc. Process and apparatus for large-scale manufacturing of bulk monocrystalline gallium-containing nitride
US7976630B2 (en) 2008-09-11 2011-07-12 Soraa, Inc. Large-area seed for ammonothermal growth of bulk gallium nitride and method of manufacture
US8354679B1 (en) 2008-10-02 2013-01-15 Soraa, Inc. Microcavity light emitting diode method of manufacture
US8455894B1 (en) 2008-10-17 2013-06-04 Soraa, Inc. Photonic-crystal light emitting diode and method of manufacture
US20100147210A1 (en) * 2008-12-12 2010-06-17 Soraa, Inc. high pressure apparatus and method for nitride crystal growth
US8878230B2 (en) 2010-03-11 2014-11-04 Soraa, Inc. Semi-insulating group III metal nitride and method of manufacture
US8987156B2 (en) 2008-12-12 2015-03-24 Soraa, Inc. Polycrystalline group III metal nitride with getter and method of making
US8461071B2 (en) 2008-12-12 2013-06-11 Soraa, Inc. Polycrystalline group III metal nitride with getter and method of making
USRE47114E1 (en) 2008-12-12 2018-11-06 Slt Technologies, Inc. Polycrystalline group III metal nitride with getter and method of making
US9589792B2 (en) 2012-11-26 2017-03-07 Soraa, Inc. High quality group-III metal nitride crystals, methods of making, and methods of use
US9543392B1 (en) 2008-12-12 2017-01-10 Soraa, Inc. Transparent group III metal nitride and method of manufacture
JP4375497B1 (ja) 2009-03-11 2009-12-02 住友電気工業株式会社 Ｉｉｉ族窒化物半導体素子、エピタキシャル基板、及びｉｉｉ族窒化物半導体素子を作製する方法
JP5420281B2 (ja) * 2009-03-11 2014-02-19 日立金属株式会社 Ｉｉｉ族窒化物半導体単結晶の製造方法、及びｉｉｉ族窒化物半導体単結晶基板の製造方法
US8299473B1 (en) 2009-04-07 2012-10-30 Soraa, Inc. Polarized white light devices using non-polar or semipolar gallium containing materials and transparent phosphors
JP5326787B2 (ja) 2009-05-11 2013-10-30 住友電気工業株式会社 Ｉｉｉ族窒化物半導体レーザダイオード、及びｉｉｉ族窒化物半導体レーザダイオードを作製する方法
US8306081B1 (en) 2009-05-27 2012-11-06 Soraa, Inc. High indium containing InGaN substrates for long wavelength optical devices
US9250044B1 (en) 2009-05-29 2016-02-02 Soraa Laser Diode, Inc. Gallium and nitrogen containing laser diode dazzling devices and methods of use
US8509275B1 (en) 2009-05-29 2013-08-13 Soraa, Inc. Gallium nitride based laser dazzling device and method
US9800017B1 (en) 2009-05-29 2017-10-24 Soraa Laser Diode, Inc. Laser device and method for a vehicle
JP5446622B2 (ja) * 2009-06-29 2014-03-19 住友電気工業株式会社 Ｉｉｉ族窒化物結晶およびその製造方法
US8435347B2 (en) 2009-09-29 2013-05-07 Soraa, Inc. High pressure apparatus with stackable rings
JP5381581B2 (ja) * 2009-09-30 2014-01-08 住友電気工業株式会社 窒化ガリウム基板
JP5631889B2 (ja) * 2009-11-10 2014-11-26 株式会社トクヤマ 積層体の製造方法
JP5282978B2 (ja) * 2009-12-18 2013-09-04 日立電線株式会社 Ｉｉｉ族窒化物半導体基板
KR101107966B1 (ko) * 2010-06-08 2012-01-30 박민정 시각효과를 높인 발광부를 구비한 광고장치
US9564320B2 (en) 2010-06-18 2017-02-07 Soraa, Inc. Large area nitride crystal and method for making it
US8729559B2 (en) 2010-10-13 2014-05-20 Soraa, Inc. Method of making bulk InGaN substrates and devices thereon
US8786053B2 (en) 2011-01-24 2014-07-22 Soraa, Inc. Gallium-nitride-on-handle substrate materials and devices and method of manufacture
TWI467635B (zh) * 2011-02-17 2015-01-01 Soitec Silicon On Insulator 凹孔缺陷縮減之三五族半導體構造及形成此等構造之方法
US8492185B1 (en) 2011-07-14 2013-07-23 Soraa, Inc. Large area nonpolar or semipolar gallium and nitrogen containing substrate and resulting devices
JP5953683B2 (ja) * 2011-09-14 2016-07-20 株式会社リコー １３族窒化物結晶、及び１３族窒化物結晶基板
JP5808208B2 (ja) * 2011-09-15 2015-11-10 株式会社サイオクス 窒化物半導体基板の製造方法
KR101976229B1 (ko) 2011-10-21 2019-05-07 미쯔비시 케미컬 주식회사 주기표 제 13 족 금속 질화물 반도체 결정의 제조 방법, 및 그 제조 방법에 의해 제조되는 주기표 제 13 족 금속 질화물 반도체 결정
US9694158B2 (en) 2011-10-21 2017-07-04 Ahmad Mohamad Slim Torque for incrementally advancing a catheter during right heart catheterization
US10029955B1 (en) 2011-10-24 2018-07-24 Slt Technologies, Inc. Capsule for high pressure, high temperature processing of materials and methods of use
JP2014062023A (ja) * 2011-10-28 2014-04-10 Mitsubishi Chemicals Corp 窒化物結晶の製造方法
EP3312310B1 (de) 2011-10-28 2021-12-15 Mitsubishi Chemical Corporation Galliumnitridkristall
US8482104B2 (en) 2012-01-09 2013-07-09 Soraa, Inc. Method for growth of indium-containing nitride films
US10145026B2 (en) 2012-06-04 2018-12-04 Slt Technologies, Inc. Process for large-scale ammonothermal manufacturing of semipolar gallium nitride boules
US9275912B1 (en) 2012-08-30 2016-03-01 Soraa, Inc. Method for quantification of extended defects in gallium-containing nitride crystals
US9299555B1 (en) 2012-09-28 2016-03-29 Soraa, Inc. Ultrapure mineralizers and methods for nitride crystal growth
US9650723B1 (en) 2013-04-11 2017-05-16 Soraa, Inc. Large area seed crystal for ammonothermal crystal growth and method of making
TW201511327A (zh) 2013-09-06 2015-03-16 Ind Tech Res Inst 發光二極體
US10769820B2 (en) 2013-10-30 2020-09-08 Mayo Foundation For Medical Education And Research System and method for model-based reconstruction of quantitative images
JP6279619B2 (ja) * 2014-01-28 2018-02-14 住友化学株式会社 半導体基板の製造方法
US10202710B2 (en) 2014-03-03 2019-02-12 Osaka University Process for producing group III nitride crystal and apparatus for producing group III nitride crystal
JP6308049B2 (ja) * 2014-06-26 2018-04-11 株式会社デンソー 半導体装置の製造方法
CN105986314B (zh) * 2015-02-05 2018-06-08 东莞市中镓半导体科技有限公司 一种用于气相外延生长半导体单晶材料的反应器
WO2016136552A1 (ja) 2015-02-23 2016-09-01 三菱化学株式会社 Ｃ面ＧａＮ基板
CN105436478A (zh) * 2015-12-30 2016-03-30 上海大学 控制变截面处杂晶形成的方法
WO2018165481A1 (en) 2017-03-08 2018-09-13 Halo Neuro, Inc. System for electrical stimulation
US10174438B2 (en) 2017-03-30 2019-01-08 Slt Technologies, Inc. Apparatus for high pressure reaction
KR101858615B1 (ko) * 2017-09-28 2018-06-28 정영걸 구강 세정기에 부착되는 세정 브러쉬
JP6785455B2 (ja) * 2018-05-11 2020-11-18 パナソニックＩｐマネジメント株式会社 発光ダイオード素子、及び発光ダイオード素子の製造方法
KR102120153B1 (ko) * 2018-05-18 2020-06-08 정영걸 세정액 공급부재에 연결되는 수동식 세정 브러쉬
JP7117732B2 (ja) * 2018-07-11 2022-08-15 国立大学法人大阪大学 Ｉｉｉ族窒化物基板およびｉｉｉ族窒化物結晶の製造方法
CN109346407A (zh) * 2018-09-21 2019-02-15 张海涛 氮化镓hemt的制造方法
CN109346397A (zh) * 2018-09-21 2019-02-15 张海涛 n型氮化镓基板的制造方法
US11239637B2 (en) 2018-12-21 2022-02-01 Kyocera Sld Laser, Inc. Fiber delivered laser induced white light system
US11421843B2 (en) 2018-12-21 2022-08-23 Kyocera Sld Laser, Inc. Fiber-delivered laser-induced dynamic light system
US11466384B2 (en) 2019-01-08 2022-10-11 Slt Technologies, Inc. Method of forming a high quality group-III metal nitride boule or wafer using a patterned substrate
US11884202B2 (en) 2019-01-18 2024-01-30 Kyocera Sld Laser, Inc. Laser-based fiber-coupled white light system
US12000552B2 (en) 2019-01-18 2024-06-04 Kyocera Sld Laser, Inc. Laser-based fiber-coupled white light system for a vehicle
CN111128688B (zh) * 2019-12-31 2022-09-27 东莞市中镓半导体科技有限公司 n型氮化镓自支撑衬底的制作方法
US11721549B2 (en) 2020-02-11 2023-08-08 Slt Technologies, Inc. Large area group III nitride crystals and substrates, methods of making, and methods of use
CN115104174A (zh) 2020-02-11 2022-09-23 Slt科技公司 改进的iii族氮化物衬底、制备方法和使用方法
US12091771B2 (en) 2020-02-11 2024-09-17 Slt Technologies, Inc. Large area group III nitride crystals and substrates, methods of making, and methods of use
JP7483669B2 (ja) 2020-11-02 2024-05-15 エスエルティー テクノロジーズ インコーポレイテッド 窒化物結晶成長のための超高純度鉱化剤及び改良された方法
CN113013020B (zh) * 2021-02-23 2023-06-27 中国人民大学 一种基于厚度刻蚀的大面积超薄二维氮化物的生长方法
CN114293251B (zh) * 2021-12-20 2023-03-24 南京大学 制备高质量多孔GaN模板晶体的方法

Family Cites Families (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09172223A (ja) * 1995-12-19 1997-06-30 Sony Corp 半導体装置と半導体装置の製造方法
JP2830814B2 (ja) * 1996-01-19 1998-12-02 日本電気株式会社 窒化ガリウム系化合物半導体の結晶成長方法、及び半導体レーザの製造方法
US6072197A (en) * 1996-02-23 2000-06-06 Fujitsu Limited Semiconductor light emitting device with an active layer made of semiconductor having uniaxial anisotropy
JP3644191B2 (ja) * 1996-06-25 2005-04-27 住友電気工業株式会社 半導体素子
WO1998019375A1 (fr) * 1996-10-30 1998-05-07 Hitachi, Ltd. Machine de traitement optique de l'information et dispositif a semi-conducteur emetteur de lumiere afferent
JP3658892B2 (ja) * 1996-11-25 2005-06-08 日亜化学工業株式会社 ｐ型窒化物半導体の成長方法及び窒化物半導体素子
JP3566476B2 (ja) * 1996-12-18 2004-09-15 三菱電線工業株式会社 半導体発光素子の製造方法
EP0874405A3 (de) * 1997-03-25 2004-09-15 Mitsubishi Cable Industries, Ltd. Element auf Basis von GaN mit niedriger Versetzungsdichte, seine Verwendung und Herstellungsverfahren
JP3119200B2 (ja) * 1997-06-09 2000-12-18 日本電気株式会社 窒化物系化合物半導体の結晶成長方法および窒化ガリウム系発光素子
JPH11144151A (ja) 1997-11-14 1999-05-28 Hitachi Ltd Ｐｏｓシステム
JP3408413B2 (ja) * 1998-03-06 2003-05-19 松下電器産業株式会社 半導体の製造方法及び半導体装置
US6086673A (en) * 1998-04-02 2000-07-11 Massachusetts Institute Of Technology Process for producing high-quality III-V nitride substrates
JP3788104B2 (ja) 1998-05-28 2006-06-21 住友電気工業株式会社 窒化ガリウム単結晶基板及びその製造方法
JPH11340576A (ja) * 1998-05-28 1999-12-10 Sumitomo Electric Ind Ltd 窒化ガリウム系半導体デバイス
TW428331B (en) * 1998-05-28 2001-04-01 Sumitomo Electric Industries Gallium nitride single crystal substrate and method of producing the same
JP3788037B2 (ja) 1998-06-18 2006-06-21 住友電気工業株式会社 ＧａＮ単結晶基板
WO1999066565A1 (en) * 1998-06-18 1999-12-23 University Of Florida Method and apparatus for producing group-iii nitrides
JP3788041B2 (ja) 1998-06-30 2006-06-21 住友電気工業株式会社 ＧａＮ単結晶基板の製造方法
TW413956B (en) * 1998-07-28 2000-12-01 Sumitomo Electric Industries Fluorescent substrate LED
US6335546B1 (en) * 1998-07-31 2002-01-01 Sharp Kabushiki Kaisha Nitride semiconductor structure, method for producing a nitride semiconductor structure, and light emitting device
JP4032538B2 (ja) * 1998-11-26 2008-01-16 ソニー株式会社 半導体薄膜および半導体素子の製造方法
JP3796060B2 (ja) * 1998-12-15 2006-07-12 三洋電機株式会社 半導体レーザ素子およびその製造方法
JP2000244068A (ja) * 1998-12-22 2000-09-08 Pioneer Electronic Corp 窒化物半導体レーザ及びその製造方法
JP2000299496A (ja) * 1999-04-14 2000-10-24 Sharp Corp 窒化ガリウム系化合物半導体層の製造方法およびそれにより製造された半導体装置
JP4145437B2 (ja) * 1999-09-28 2008-09-03 住友電気工業株式会社 単結晶ＧａＮの結晶成長方法及び単結晶ＧａＮ基板の製造方法と単結晶ＧａＮ基板
JP3968968B2 (ja) 2000-07-10 2007-08-29 住友電気工業株式会社 単結晶ＧａＮ基板の製造方法
JP2002026464A (ja) * 2000-07-13 2002-01-25 Sanyo Electric Co Ltd 窒化物系半導体素子
US6773504B2 (en) * 2001-04-12 2004-08-10 Sumitomo Electric Industries, Ltd. Oxygen doping method to gallium nitride single crystal substrate and oxygen-doped N-type gallium nitride freestanding single crystal substrate
US6613143B1 (en) * 2001-07-06 2003-09-02 Technologies And Devices International, Inc. Method for fabricating bulk GaN single crystals

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