JP4714192B2 - 窒化ガリウム結晶の成長方法、窒化ガリウム結晶基板、エピウエハの製造方法およびエピウエハ - Google Patents
窒化ガリウム結晶の成長方法、窒化ガリウム結晶基板、エピウエハの製造方法およびエピウエハ Download PDFInfo
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- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 title claims description 167
- 229910002601 GaN Inorganic materials 0.000 title claims description 166
- 239000013078 crystal Substances 0.000 title claims description 155
- 239000000758 substrate Substances 0.000 title claims description 135
- 238000004519 manufacturing process Methods 0.000 title claims description 23
- 238000002109 crystal growth method Methods 0.000 title description 16
- 239000007789 gas Substances 0.000 claims description 109
- 239000012159 carrier gas Substances 0.000 claims description 91
- 238000000034 method Methods 0.000 claims description 58
- 239000010703 silicon Substances 0.000 claims description 38
- 229910052710 silicon Inorganic materials 0.000 claims description 38
- 239000002019 doping agent Substances 0.000 claims description 19
- 238000012545 processing Methods 0.000 claims description 18
- 239000002994 raw material Substances 0.000 claims description 18
- 150000004678 hydrides Chemical class 0.000 claims 1
- 238000001947 vapour-phase growth Methods 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 37
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 27
- 238000002248 hydride vapour-phase epitaxy Methods 0.000 description 27
- 229910052814 silicon oxide Inorganic materials 0.000 description 25
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 18
- 239000001301 oxygen Substances 0.000 description 18
- 229910052760 oxygen Inorganic materials 0.000 description 18
- 239000004065 semiconductor Substances 0.000 description 15
- 230000000052 comparative effect Effects 0.000 description 11
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 10
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 9
- 238000010586 diagram Methods 0.000 description 9
- IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 description 9
- 229910000041 hydrogen chloride Inorganic materials 0.000 description 9
- 229910052751 metal Inorganic materials 0.000 description 8
- 239000002184 metal Substances 0.000 description 8
- 150000004767 nitrides Chemical class 0.000 description 7
- 239000012495 reaction gas Substances 0.000 description 7
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 6
- 229910052733 gallium Inorganic materials 0.000 description 6
- 238000005498 polishing Methods 0.000 description 6
- 239000012535 impurity Substances 0.000 description 5
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 3
- 229910002091 carbon monoxide Inorganic materials 0.000 description 3
- XOYLJNJLGBYDTH-UHFFFAOYSA-M chlorogallium Chemical compound [Ga]Cl XOYLJNJLGBYDTH-UHFFFAOYSA-M 0.000 description 3
- 238000005520 cutting process Methods 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- KOPOQZFJUQMUML-UHFFFAOYSA-N chlorosilane Chemical compound Cl[SiH3] KOPOQZFJUQMUML-UHFFFAOYSA-N 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 229910003460 diamond Inorganic materials 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- PZPGRFITIJYNEJ-UHFFFAOYSA-N disilane Chemical compound [SiH3][SiH3] PZPGRFITIJYNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- UPWPDUACHOATKO-UHFFFAOYSA-K gallium trichloride Chemical compound Cl[Ga](Cl)Cl UPWPDUACHOATKO-UHFFFAOYSA-K 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 238000001451 molecular beam epitaxy Methods 0.000 description 2
- 239000002120 nanofilm Substances 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 229910052594 sapphire Inorganic materials 0.000 description 2
- 239000010980 sapphire Substances 0.000 description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
- 229910010271 silicon carbide Inorganic materials 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 239000005046 Chlorosilane Substances 0.000 description 1
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 229910021098 KOH—NaOH Inorganic materials 0.000 description 1
- 229910003902 SiCl 4 Inorganic materials 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- 239000006061 abrasive grain Substances 0.000 description 1
- 239000003463 adsorbent Substances 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- SLLGVCUQYRMELA-UHFFFAOYSA-N chlorosilicon Chemical compound Cl[Si] SLLGVCUQYRMELA-UHFFFAOYSA-N 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- MROCJMGDEKINLD-UHFFFAOYSA-N dichlorosilane Chemical compound Cl[SiH2]Cl MROCJMGDEKINLD-UHFFFAOYSA-N 0.000 description 1
- BUMGIEFFCMBQDG-UHFFFAOYSA-N dichlorosilicon Chemical compound Cl[Si]Cl BUMGIEFFCMBQDG-UHFFFAOYSA-N 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 230000005764 inhibitory process Effects 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- BYTCDABWEGFPLT-UHFFFAOYSA-L potassium;sodium;dihydroxide Chemical compound [OH-].[OH-].[Na+].[K+] BYTCDABWEGFPLT-UHFFFAOYSA-L 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000007670 refining Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 150000004756 silanes Chemical class 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- FDNAPBUWERUEDA-UHFFFAOYSA-N silicon tetrachloride Chemical compound Cl[Si](Cl)(Cl)Cl FDNAPBUWERUEDA-UHFFFAOYSA-N 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- 230000008719 thickening Effects 0.000 description 1
- 230000032258 transport Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/40—AIIIBV compounds wherein A is B, Al, Ga, In or Tl and B is N, P, As, Sb or Bi
- C30B29/403—AIII-nitrides
- C30B29/406—Gallium nitride
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
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- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Semiconductor Lasers (AREA)
- Led Devices (AREA)
Description
本発明の一実施の形態における窒化ガリウム結晶の成長方法を説明する。本実施の形態における窒化ガリウム結晶の成長方法は、キャリアガスと、窒化ガリウムの原料と、ドーパントとしてのシリコンを含むガスとを用いて、ハイドライド気相成長(HVPE)法により下地基板上に窒化ガリウム結晶を成長させる。
図4は、実施の形態2におけるエピウエハの製造方法を示すフローチャートである。図5は、実施の形態2における基板を示す模式図である。図6は、実施の形態2におけるエピウエハを示す模式図である。図4〜図6を参照して、本実施の形態におけるエピウエハの製造方法を説明する。
本実施例では、露点が−60℃以下のキャリアガスを用いて窒化ガリウム結晶を成長させることの効果について調べた。具体的には、実施例1〜15および比較例1〜3の各々のエピウエハを製造し、そのクラック発生率および動作電圧の上昇値を測定した。
実施例1〜15は、本発明の実施の形態2におけるエピウエハの製造方法にしたがってエピウエハを製造した。詳細には、まず、表1に記載の種類のキャリアガスをそれぞれ準備した(ステップS1)。次に、準備したキャリアガスの露点を表1に記載の露点になるように精製した(ステップS2)。表1の露点になるように、準備したキャリアガスを分子膜に透過させた。
比較例1〜3のエピウエハは、基本的には実施例1〜15のエピウエハの製造方法と同様の構成を備えているが、キャリアガスの露点が実施例1〜15よりも高い点において異なる。
参考例1〜3のエピウエハは、基本的には実施例1〜15のエピウエハの製造方法と同様の構成を備えているが、ドーパントとしてシリコンを用いずに酸素を用いた点およびキャリアガスの露点が高い点において異なる。
図8は、本実施例におけるキャリアガスの露点とクラック発生率との関係を示す図である。図8および表2に示すように、露点が−60℃以下の実施例1〜15は、薄膜化のための加工をした(ステップS7)後のクラック発生率を、比較例1〜3よりも低い15%以下にできた。特に、キャリアガスの露点を−80℃以下にすることによって、窒化ガリウム結晶のクラック発生率を6%以下に、薄膜化のための加工をした後のクラック発生率を9%以下に低減できた。
Claims (5)
- キャリアガスと、窒化ガリウムの原料と、ドーパントとしてのシリコンを含むガスとを用いて、ハイドライド気相成長法により下地基板上に窒化ガリウム結晶を成長させる窒化ガリウム結晶の成長方法において、
前記窒化ガリウム結晶の成長時における前記キャリアガスの露点が−60℃以下であることを特徴とする、窒化ガリウム結晶の成長方法。 - 前記窒化ガリウム結晶の成長時におけるキャリアガスの分圧が0.56atm以上0.92atm以下である、請求項1に記載の窒化ガリウム結晶の成長方法。
- 請求項1または2に記載の窒化ガリウム結晶の成長方法により得られ、
前記下地基板と、
前記下地基板上に形成された前記窒化ガリウム結晶とを備えた、窒化ガリウム結晶基板。 - 請求項1または2に記載の窒化ガリウム結晶の成長方法により、前記下地基板上に前記窒化ガリウム結晶を成長させる工程と、
少なくとも前記下地基板を除去して、前記窒化ガリウム結晶からなる基板を形成する工程と、
前記基板上にエピタキシャル成長層を形成する工程と、
前記基板において前記エピタキシャル成長層が形成された面と反対側の面を、薄膜化のために加工する工程とを備えた、エピウエハの製造方法。 - 請求項4に記載のエピウエハの製造方法により製造され、
前記基板と、
前記基板上に形成された前記エピタキシャル成長層とを備えた、エピウエハ。
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JP2007196318A JP4714192B2 (ja) | 2007-07-27 | 2007-07-27 | 窒化ガリウム結晶の成長方法、窒化ガリウム結晶基板、エピウエハの製造方法およびエピウエハ |
TW097125945A TW200908098A (en) | 2007-07-27 | 2008-07-09 | Gallium nitride crystal growth method, gallium nitride crystal substrate, epi-wafer manufacturing method, and epi-wafer |
EP08012967A EP2025779A2 (en) | 2007-07-27 | 2008-07-17 | Gallium nitride crystal growth method, gallium nitride crystal substrate, epi-wafer manufacturing method, and epi-wafer |
KR1020080070111A KR20090012091A (ko) | 2007-07-27 | 2008-07-18 | 질화갈륨 결정의 성장 방법, 질화갈륨 결정 기판, 에피택셜웨이퍼의 제조 방법 및 에피택셜 웨이퍼 |
US12/179,587 US8409350B2 (en) | 2007-07-27 | 2008-07-25 | Gallium nitride crystal growth method, gallium nitride crystal substrate, epi-wafer manufacturing method, and epi-wafer |
RU2008130820/15A RU2008130820A (ru) | 2007-07-27 | 2008-07-25 | Способ роста кристаллов нитрида галлия, подложки из кристаллов нитрида галлия, способ получения эпитаксиальных пластин и эпитаксиальные пластины |
CNA2008101311040A CN101353819A (zh) | 2007-07-27 | 2008-07-28 | 氮化镓晶体生长方法、氮化镓晶体衬底、外延晶片制造方法和外延晶片 |
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JP5332168B2 (ja) * | 2006-11-17 | 2013-11-06 | 住友電気工業株式会社 | Iii族窒化物結晶の製造方法 |
US9064706B2 (en) | 2006-11-17 | 2015-06-23 | Sumitomo Electric Industries, Ltd. | Composite of III-nitride crystal on laterally stacked substrates |
EP2169713A4 (en) * | 2007-07-17 | 2012-06-06 | Sumitomo Electric Industries | METHOD FOR PRODUCING AN ELECTRONIC DEVICE, PROCESS FOR PREPARING AN EPITACTIC SUBSTRATE, III-NITRIDE SEMICONDUCTOR ELEMENT AND EPITACTIC SUBSTRATE FROM GALLIUM NITRIDE |
JP5045955B2 (ja) * | 2009-04-13 | 2012-10-10 | 日立電線株式会社 | Iii族窒化物半導体自立基板 |
JP2011213557A (ja) * | 2010-04-01 | 2011-10-27 | Hitachi Cable Ltd | 導電性iii族窒化物単結晶基板の製造方法 |
CN103132140A (zh) * | 2011-11-23 | 2013-06-05 | 甘志银 | 氢化物气相外延装置 |
CN102560676B (zh) * | 2012-01-18 | 2014-08-06 | 山东大学 | 一种使用减薄键合结构进行GaN单晶生长的方法 |
KR101946010B1 (ko) | 2012-10-23 | 2019-02-08 | 삼성전자주식회사 | 대면적 갈륨 나이트라이드 기판을 포함하는 구조체 및 그 제조방법 |
US9987391B2 (en) | 2013-03-13 | 2018-06-05 | St. Jude Medical Coordination Center Bvba | Injectable hydrogels |
CN103196850A (zh) * | 2013-04-03 | 2013-07-10 | 中国兵器工业集团第五三研究所 | 铟镓氮晶片外延层中铟元素含量的测试方法 |
CN107815730A (zh) * | 2016-09-14 | 2018-03-20 | 上海新昇半导体科技有限公司 | 掺杂气体缓冲装置、掺杂气体供给装置及方法 |
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EP2003230A2 (en) * | 2007-06-14 | 2008-12-17 | Sumitomo Electric Industries, Ltd. | GaN substrate, substrate with an epitaxial layer, semiconductor device, and GaN substrate manufacturing method |
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- 2008-07-18 KR KR1020080070111A patent/KR20090012091A/ko not_active Application Discontinuation
- 2008-07-25 US US12/179,587 patent/US8409350B2/en active Active
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US20090026417A1 (en) | 2009-01-29 |
CN101353819A (zh) | 2009-01-28 |
KR20090012091A (ko) | 2009-02-02 |
RU2008130820A (ru) | 2010-01-27 |
US8409350B2 (en) | 2013-04-02 |
TW200908098A (en) | 2009-02-16 |
EP2025779A2 (en) | 2009-02-18 |
JP2009032963A (ja) | 2009-02-12 |
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