DE602004010987D1 - Piezoelektrischer Resonator, piezoelektrische Vorrichtung, Herstellungsverfahren derselben, Mobiltelefon und elektronische Ausrüstung welche eine piezoelektrische Vorrichtung benutzen. - Google Patents

Piezoelektrischer Resonator, piezoelektrische Vorrichtung, Herstellungsverfahren derselben, Mobiltelefon und elektronische Ausrüstung welche eine piezoelektrische Vorrichtung benutzen.

Info

Publication number
DE602004010987D1
DE602004010987D1 DE200460010987 DE602004010987T DE602004010987D1 DE 602004010987 D1 DE602004010987 D1 DE 602004010987D1 DE 200460010987 DE200460010987 DE 200460010987 DE 602004010987 T DE602004010987 T DE 602004010987T DE 602004010987 D1 DE602004010987 D1 DE 602004010987D1
Authority
DE
Germany
Prior art keywords
piezoelectric
piezoelectric device
base portion
electronic equipment
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE200460010987
Other languages
English (en)
Other versions
DE602004010987T2 (de
Inventor
Hideo Tanaya
Toshinari Jokura
Atsushi Oshiro
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Publication of DE602004010987D1 publication Critical patent/DE602004010987D1/de
Application granted granted Critical
Publication of DE602004010987T2 publication Critical patent/DE602004010987T2/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/19—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator consisting of quartz
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/21—Crystal tuning forks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03B—GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
    • H03B5/00—Generation of oscillations using amplifier with regenerative feedback from output to input
    • H03B5/30—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator
    • H03B5/32—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator being a piezoelectric resonator

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
DE200460010987 2003-10-28 2004-10-27 Piezoelektrischer Resonator, piezoelektrische Vorrichtung, Herstellungsverfahren derselben, Mobiltelefon und elektronische Ausrüstung welche eine piezoelektrische Vorrichtung benutzen. Active DE602004010987T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003367743A JP4329492B2 (ja) 2003-10-28 2003-10-28 圧電振動片と圧電デバイスおよびこれらの製造方法、ならびに圧電デバイスを利用した携帯電話装置および圧電デバイスを利用した電子機器
JP2003367743 2003-10-28

Publications (2)

Publication Number Publication Date
DE602004010987D1 true DE602004010987D1 (de) 2008-02-14
DE602004010987T2 DE602004010987T2 (de) 2008-12-24

Family

ID=34420135

Family Applications (1)

Application Number Title Priority Date Filing Date
DE200460010987 Active DE602004010987T2 (de) 2003-10-28 2004-10-27 Piezoelektrischer Resonator, piezoelektrische Vorrichtung, Herstellungsverfahren derselben, Mobiltelefon und elektronische Ausrüstung welche eine piezoelektrische Vorrichtung benutzen.

Country Status (7)

Country Link
US (1) US7279824B2 (de)
EP (1) EP1528673B1 (de)
JP (1) JP4329492B2 (de)
KR (1) KR100617329B1 (de)
CN (1) CN1612472B (de)
AT (1) ATE382984T1 (de)
DE (1) DE602004010987T2 (de)

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JP2008096318A (ja) * 2006-10-13 2008-04-24 Fujitsu Media Device Kk 振動センサおよびその製造方法
JP4389924B2 (ja) * 2006-11-07 2009-12-24 エプソントヨコム株式会社 圧電デバイス
JP5059399B2 (ja) * 2006-12-28 2012-10-24 日本電波工業株式会社 圧電振動片の製造方法、圧電振動片および圧電デバイス
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JP5216288B2 (ja) * 2007-09-25 2013-06-19 日本電波工業株式会社 圧電振動片の製造方法、圧電デバイスの製造方法
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JP5103297B2 (ja) * 2008-06-24 2012-12-19 セイコーインスツル株式会社 圧電振動子の製造方法
JP5536994B2 (ja) * 2008-06-30 2014-07-02 株式会社東芝 慣性センサ及び慣性検出装置
JP2010034712A (ja) * 2008-07-25 2010-02-12 Citizen Finetech Miyota Co Ltd 水晶片の製造方法
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JP2010118784A (ja) * 2008-11-11 2010-05-27 Nippon Dempa Kogyo Co Ltd 圧電振動子の製造方法、圧電振動子及び電子部品
JP5446839B2 (ja) 2009-02-17 2014-03-19 セイコーエプソン株式会社 振動片および振動子
JP2010219992A (ja) * 2009-03-18 2010-09-30 Seiko Epson Corp 振動片および振動子
JP2010226608A (ja) * 2009-03-25 2010-10-07 Seiko Epson Corp 屈曲振動片およびそれを用いた発振器
JP2011082735A (ja) * 2009-10-06 2011-04-21 Seiko Epson Corp 水晶振動片の製造方法および水晶デバイス
CN103199817B (zh) * 2009-12-02 2015-11-18 威华微机电股份有限公司 音叉型石英晶体谐振器
JP2011155629A (ja) * 2009-12-29 2011-08-11 Seiko Epson Corp 振動片、振動子、発振器、電子機器、および周波数調整方法
JP2011160174A (ja) * 2010-02-01 2011-08-18 Seiko Epson Corp 振動片基板及び音叉型振動片
US20110227658A1 (en) * 2010-03-16 2011-09-22 Seiko Epson Corporation Resonator element, piezoelectric device, and electronic device
US20110227451A1 (en) * 2010-03-18 2011-09-22 Seiko Epson Corporation Resonator body, resonator device, and electronic device
US20110227450A1 (en) * 2010-03-18 2011-09-22 Seiko Epson Corporation Resonator body, resonator device, and electronic device
JP2011205425A (ja) * 2010-03-25 2011-10-13 Seiko Epson Corp 電子部品及び電子部品の製造方法
JP2011229100A (ja) * 2010-04-23 2011-11-10 Seiko Epson Corp 振動片、振動子
JP2011259120A (ja) * 2010-06-08 2011-12-22 Seiko Epson Corp 振動片、周波数調整方法、振動子、振動デバイス、および電子機器
JP5508192B2 (ja) * 2010-08-24 2014-05-28 日本電波工業株式会社 圧電デバイスの製造方法及び圧電デバイス
JP5994408B2 (ja) * 2011-08-29 2016-09-21 セイコーエプソン株式会社 パッケージの封止方法およびガスセルの製造方法
KR101882999B1 (ko) * 2011-12-01 2018-07-30 삼성전기주식회사 압전 진동편 및 압전 진동편을 이용한 압전 디바이스
JP5998688B2 (ja) * 2012-07-10 2016-09-28 セイコーエプソン株式会社 振動片、振動子、電子デバイス、電子機器、移動体
JP2014123911A (ja) * 2012-12-21 2014-07-03 Daishinku Corp 音叉型水晶振動片
JP6145288B2 (ja) * 2013-03-15 2017-06-07 エスアイアイ・クリスタルテクノロジー株式会社 圧電振動片、圧電振動子、発振器、電子機器、及び電波時計
US9464951B2 (en) * 2013-10-16 2016-10-11 Sercel Inc. Method and apparatus for electrical gap setting for a piezoelectric pressure sensor
JP2015088579A (ja) * 2013-10-30 2015-05-07 セイコーエプソン株式会社 パッケージ、光学デバイス、光センサー、電子デバイスおよび電子機器
JP6348727B2 (ja) * 2014-02-14 2018-06-27 エスアイアイ・クリスタルテクノロジー株式会社 圧電振動片、圧電振動子、発振器、電子機器、及び電波時計
JP6676403B2 (ja) * 2016-02-23 2020-04-08 エスアイアイ・クリスタルテクノロジー株式会社 圧電振動片、及び圧電振動子
CN109314501B (zh) * 2016-07-28 2022-07-26 京瓷株式会社 晶体振动元件、晶体振动器件以及晶体振动元件的制造方法
JP7026444B2 (ja) * 2017-03-06 2022-02-28 エスアイアイ・クリスタルテクノロジー株式会社 圧電振動片の製造方法
JP7050387B2 (ja) * 2018-09-28 2022-04-08 シチズンファインデバイス株式会社 音叉型圧電振動子の製造方法
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Also Published As

Publication number Publication date
KR100617329B1 (ko) 2006-08-30
CN1612472A (zh) 2005-05-04
CN1612472B (zh) 2011-06-22
KR20050040793A (ko) 2005-05-03
JP4329492B2 (ja) 2009-09-09
EP1528673B1 (de) 2008-01-02
JP2005136499A (ja) 2005-05-26
ATE382984T1 (de) 2008-01-15
DE602004010987T2 (de) 2008-12-24
EP1528673A1 (de) 2005-05-04
US7279824B2 (en) 2007-10-09
US20050116586A1 (en) 2005-06-02

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