DE602005020725D1 - Piezoelektrisches Resonatorelement und piezoelektrisches Bauelement - Google Patents

Piezoelektrisches Resonatorelement und piezoelektrisches Bauelement

Info

Publication number
DE602005020725D1
DE602005020725D1 DE602005020725T DE602005020725T DE602005020725D1 DE 602005020725 D1 DE602005020725 D1 DE 602005020725D1 DE 602005020725 T DE602005020725 T DE 602005020725T DE 602005020725 T DE602005020725 T DE 602005020725T DE 602005020725 D1 DE602005020725 D1 DE 602005020725D1
Authority
DE
Germany
Prior art keywords
piezoelectric
resonator element
component
piezoelectric resonator
piezoelectric component
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602005020725T
Other languages
English (en)
Inventor
Hideo Tanaya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2004277293A external-priority patent/JP4207873B2/ja
Priority claimed from JP2004309137A external-priority patent/JP4222288B2/ja
Priority claimed from JP2005129910A external-priority patent/JP4301201B2/ja
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Publication of DE602005020725D1 publication Critical patent/DE602005020725D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/19—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator consisting of quartz
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/21—Crystal tuning forks

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
DE602005020725T 2004-09-24 2005-09-23 Piezoelektrisches Resonatorelement und piezoelektrisches Bauelement Active DE602005020725D1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2004277293A JP4207873B2 (ja) 2004-09-24 2004-09-24 圧電振動片および圧電デバイス
JP2004309137A JP4222288B2 (ja) 2004-10-25 2004-10-25 圧電振動片および圧電デバイス
JP2005129910A JP4301201B2 (ja) 2005-04-27 2005-04-27 圧電発振器

Publications (1)

Publication Number Publication Date
DE602005020725D1 true DE602005020725D1 (de) 2010-06-02

Family

ID=35539445

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602005020725T Active DE602005020725D1 (de) 2004-09-24 2005-09-23 Piezoelektrisches Resonatorelement und piezoelektrisches Bauelement

Country Status (4)

Country Link
US (1) US7368861B2 (de)
EP (1) EP1641118B1 (de)
KR (1) KR100712758B1 (de)
DE (1) DE602005020725D1 (de)

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US10284143B2 (en) * 2002-03-06 2019-05-07 Piedek Technical Laboratory Quartz crystal unit, quartz crystal oscillator and electronic apparatus
JP4409979B2 (ja) * 2004-02-10 2010-02-03 シチズンホールディングス株式会社 振動子
JP4301200B2 (ja) * 2004-10-20 2009-07-22 セイコーエプソン株式会社 圧電振動片および圧電デバイス
JP4214412B2 (ja) * 2004-10-21 2009-01-28 セイコーエプソン株式会社 圧電振動片と圧電デバイスならびにジャイロセンサ
JP4277818B2 (ja) 2005-03-22 2009-06-10 セイコーエプソン株式会社 圧電振動片および圧電デバイス
US7694734B2 (en) * 2005-10-31 2010-04-13 Baker Hughes Incorporated Method and apparatus for insulating a resonator downhole
US20080211350A1 (en) * 2006-08-18 2008-09-04 Epson Toyocom Corporation Piezoelectric resonator element and piezoelectric device
JP2008058066A (ja) * 2006-08-30 2008-03-13 Fujitsu Media Device Kk 振動センサ
JP2008096318A (ja) * 2006-10-13 2008-04-24 Fujitsu Media Device Kk 振動センサおよびその製造方法
CN101772888B (zh) * 2007-08-06 2013-05-29 日本电波工业株式会社 音叉型晶体振子及其频率调整方法
WO2009143492A1 (en) * 2008-05-23 2009-11-26 Statek Corporation Piezoelectric resonator
JP5536994B2 (ja) * 2008-06-30 2014-07-02 株式会社東芝 慣性センサ及び慣性検出装置
JP5128671B2 (ja) * 2008-08-27 2013-01-23 セイコーインスツル株式会社 圧電振動子、発振器、電子機器及び電波時計、並びに圧電振動子の製造方法
JP4709884B2 (ja) * 2008-09-29 2011-06-29 日本電波工業株式会社 圧電振動片および圧電デバイス
JP4714770B2 (ja) * 2008-10-06 2011-06-29 日本電波工業株式会社 音叉型圧電振動片及び音叉型圧電振動片の製造方法
JP4709260B2 (ja) * 2008-10-16 2011-06-22 日本電波工業株式会社 圧電振動片および圧電デバイス
JP4843012B2 (ja) * 2008-11-17 2011-12-21 日本電波工業株式会社 圧電デバイスとその製造方法
JP5581887B2 (ja) * 2009-12-29 2014-09-03 セイコーエプソン株式会社 振動片、振動子、発振器、電子機器、および周波数調整方法
JP2011155629A (ja) 2009-12-29 2011-08-11 Seiko Epson Corp 振動片、振動子、発振器、電子機器、および周波数調整方法
US20110227658A1 (en) * 2010-03-16 2011-09-22 Seiko Epson Corporation Resonator element, piezoelectric device, and electronic device
US8304968B2 (en) 2010-03-17 2012-11-06 Seiko Epson Corporation Vibrator element, vibrator, oscillator, and electronic apparatus
US20110227458A1 (en) * 2010-03-17 2011-09-22 Seiko Epson Corporation Piezoelectric resonator element, piezoelectric device, and electronic apparatus
JP5384406B2 (ja) * 2010-03-30 2014-01-08 日本電波工業株式会社 音叉型水晶振動片の製造方法、水晶デバイス
JP5499852B2 (ja) * 2010-04-08 2014-05-21 セイコーエプソン株式会社 振動片、振動子
US8516886B2 (en) 2010-04-30 2013-08-27 Qualcomm Mems Technologies, Inc. Micromachined piezoelectric X-Axis gyroscope
EP2400662B1 (de) * 2010-06-18 2015-11-04 Nxp B.V. Mikroelektromechanische Resonatorgeometrie
KR101532115B1 (ko) * 2011-12-01 2015-06-29 삼성전기주식회사 압전 진동자 및 그 제조 방법
KR20140118792A (ko) * 2013-03-29 2014-10-08 세이코 엡슨 가부시키가이샤 진동 소자, 진동자, 발진기, 전자 기기, 센서, 및 이동체
JP6281254B2 (ja) * 2013-11-16 2018-02-21 セイコーエプソン株式会社 振動素子、振動子、発振器、電子機器および移動体
JP6375611B2 (ja) 2013-11-16 2018-08-22 セイコーエプソン株式会社 振動片、振動子、発振器、電子機器および移動体
JP2015097366A (ja) * 2013-11-16 2015-05-21 セイコーエプソン株式会社 振動素子、振動子、発振器、電子機器および移動体
JP6552225B2 (ja) * 2015-03-12 2019-07-31 エスアイアイ・クリスタルテクノロジー株式会社 圧電振動片及び圧電振動子
WO2017047207A1 (ja) * 2015-09-18 2017-03-23 株式会社村田製作所 共振子及び共振装置
US10352960B1 (en) * 2015-10-30 2019-07-16 Garmin International, Inc. Free mass MEMS accelerometer

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2247960A (en) * 1939-07-07 1941-07-01 Bell Telephone Labor Inc Tuning fork
JPS54113297A (en) 1978-01-26 1979-09-04 Seiko Epson Corp Tuning fork-type crystal vibrator
IT1192344B (it) 1978-12-20 1988-03-31 Ceda Spa Misuratore di livello
IL112770A0 (en) 1995-02-23 1996-06-18 Netzer Yishay Coupled resonator vibratory rate sensor
JP3752737B2 (ja) * 1996-08-12 2006-03-08 トヨタ自動車株式会社 角速度検出装置
US6262520B1 (en) 1999-09-15 2001-07-17 Bei Technologies, Inc. Inertial rate sensor tuning fork
US7523537B1 (en) 2000-07-13 2009-04-28 Custom Sensors & Technologies, Inc. Method of manufacturing a tuning fork with reduced quadrature errror and symmetrical mass balancing
JP3477618B2 (ja) * 2000-10-31 2003-12-10 有限会社ピエデック技術研究所 屈曲水晶振動子
EP1788702A3 (de) * 2000-12-25 2008-01-16 Seiko Epson Corporation Schwingelement, Vibrator, Oszillator und elektronisches Gerät
JP2002261575A (ja) 2000-12-25 2002-09-13 Seiko Epson Corp 振動片、振動子、発振器及び電子機器
JP4329286B2 (ja) * 2001-08-27 2009-09-09 セイコーエプソン株式会社 振動片、振動子、発振器及び電子機器
US7043986B2 (en) * 2003-02-05 2006-05-16 Ngk Insulators, Ltd. Vibrators and vibratory gyroscopes
JP4329492B2 (ja) * 2003-10-28 2009-09-09 セイコーエプソン株式会社 圧電振動片と圧電デバイスおよびこれらの製造方法、ならびに圧電デバイスを利用した携帯電話装置および圧電デバイスを利用した電子機器
JP4265499B2 (ja) 2004-05-12 2009-05-20 セイコーエプソン株式会社 圧電振動片および圧電デバイス

Also Published As

Publication number Publication date
KR100712758B1 (ko) 2007-04-30
EP1641118B1 (de) 2010-04-21
KR20060051580A (ko) 2006-05-19
US7368861B2 (en) 2008-05-06
EP1641118A1 (de) 2006-03-29
US20060066185A1 (en) 2006-03-30

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