DE602006002524D1 - Piezoelektrisches Oszillationselement und piezoelektrischer Oszillator - Google Patents

Piezoelektrisches Oszillationselement und piezoelektrischer Oszillator

Info

Publication number
DE602006002524D1
DE602006002524D1 DE602006002524T DE602006002524T DE602006002524D1 DE 602006002524 D1 DE602006002524 D1 DE 602006002524D1 DE 602006002524 T DE602006002524 T DE 602006002524T DE 602006002524 T DE602006002524 T DE 602006002524T DE 602006002524 D1 DE602006002524 D1 DE 602006002524D1
Authority
DE
Germany
Prior art keywords
piezoelectric
oscillation element
oscillator
piezoelectric oscillator
piezoelectric oscillation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602006002524T
Other languages
English (en)
Inventor
Masako Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Publication of DE602006002524D1 publication Critical patent/DE602006002524D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders; Supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/1035—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by two sealing substrates sandwiching the piezoelectric layer of the BAW device
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders; Supports
    • H03H9/0595—Holders; Supports the holder support and resonator being formed in one body

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
DE602006002524T 2005-02-28 2006-02-27 Piezoelektrisches Oszillationselement und piezoelektrischer Oszillator Active DE602006002524D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005052605A JP2006238266A (ja) 2005-02-28 2005-02-28 圧電振動片、及び圧電振動子

Publications (1)

Publication Number Publication Date
DE602006002524D1 true DE602006002524D1 (de) 2008-10-16

Family

ID=36087600

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602006002524T Active DE602006002524D1 (de) 2005-02-28 2006-02-27 Piezoelektrisches Oszillationselement und piezoelektrischer Oszillator

Country Status (6)

Country Link
US (1) US7365477B2 (de)
EP (1) EP1696561B1 (de)
JP (1) JP2006238266A (de)
KR (1) KR100691409B1 (de)
CN (1) CN100468806C (de)
DE (1) DE602006002524D1 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4704822B2 (ja) * 2005-06-30 2011-06-22 京セラキンセキ株式会社 水晶振動子の電極構造
JP4509152B2 (ja) * 2007-08-28 2010-07-21 シャープ株式会社 薄膜圧電トランスおよびその製造方法
JP4412506B2 (ja) * 2007-09-07 2010-02-10 エプソントヨコム株式会社 圧電デバイスおよびその製造方法
JP4539708B2 (ja) * 2007-11-02 2010-09-08 エプソントヨコム株式会社 圧電振動片、圧電振動子および加速度センサ
JP5196121B2 (ja) * 2007-11-07 2013-05-15 セイコーエプソン株式会社 デバイス
JP2012090252A (ja) * 2010-09-22 2012-05-10 Nippon Dempa Kogyo Co Ltd 圧電デバイスの製造方法及び圧電デバイス
JP5797961B2 (ja) 2011-07-21 2015-10-21 日本電波工業株式会社 圧電振動片及び圧電デバイス
JP5930532B2 (ja) * 2012-06-01 2016-06-08 日本電波工業株式会社 圧電振動片及び圧電デバイス

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2527865A1 (fr) * 1982-06-01 1983-12-02 Cepe Resonateur piezo-electrique a haute frequence et son procede de fabrication
JPS613514A (ja) 1984-06-18 1986-01-09 Nippon Dempa Kogyo Co Ltd 圧電振動子
FR2577362B1 (fr) 1985-02-13 1987-04-17 Ebauchesfabrik Eta Ag Procede de fabrication de resonateurs a quartz a haute frequence
JPH07212171A (ja) 1994-01-24 1995-08-11 Meidensha Corp 厚みすべり水晶振動子
JP3542416B2 (ja) 1995-07-12 2004-07-14 東洋通信機株式会社 厚味モード圧電振動子

Also Published As

Publication number Publication date
CN100468806C (zh) 2009-03-11
EP1696561B1 (de) 2008-09-03
KR100691409B1 (ko) 2007-03-12
KR20060095529A (ko) 2006-08-31
JP2006238266A (ja) 2006-09-07
EP1696561A2 (de) 2006-08-30
US20060192460A1 (en) 2006-08-31
CN1828961A (zh) 2006-09-06
US7365477B2 (en) 2008-04-29
EP1696561A3 (de) 2006-11-15

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition