JP4704822B2 - 水晶振動子の電極構造 - Google Patents
水晶振動子の電極構造 Download PDFInfo
- Publication number
- JP4704822B2 JP4704822B2 JP2005193063A JP2005193063A JP4704822B2 JP 4704822 B2 JP4704822 B2 JP 4704822B2 JP 2005193063 A JP2005193063 A JP 2005193063A JP 2005193063 A JP2005193063 A JP 2005193063A JP 4704822 B2 JP4704822 B2 JP 4704822B2
- Authority
- JP
- Japan
- Prior art keywords
- crystal
- electrode structure
- crystal resonator
- wafer
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000013078 crystal Substances 0.000 title claims description 59
- 239000011521 glass Substances 0.000 claims description 8
- 235000012431 wafers Nutrition 0.000 description 21
- 238000007789 sealing Methods 0.000 description 19
- 239000010408 film Substances 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 238000000034 method Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Description
4 枠体
5 内側面溝部
6 引き回し電極
7 内側面段差部
Claims (2)
- 水晶振動子が多数個形成されたウェハーを挟むように上下方向からそれぞれガラスから成るウェハーで封止される水晶振動子の電極構造において、
水晶振動子が形成された枠体の内側面溝部に引き回し電極が形成されたことを特徴とする水晶振動子の電極構造。 - 水晶振動子が多数個形成されたウェハーを挟むように上下方向からそれぞれガラスから成るウェハーで封止される水晶振動子の電極構造において、
水晶振動子が形成された枠体の内側面段差部に引き回し電極が形成されたことを特徴とする水晶振動子の電極構造。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005193063A JP4704822B2 (ja) | 2005-06-30 | 2005-06-30 | 水晶振動子の電極構造 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005193063A JP4704822B2 (ja) | 2005-06-30 | 2005-06-30 | 水晶振動子の電極構造 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007013729A JP2007013729A (ja) | 2007-01-18 |
JP4704822B2 true JP4704822B2 (ja) | 2011-06-22 |
Family
ID=37751582
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005193063A Expired - Fee Related JP4704822B2 (ja) | 2005-06-30 | 2005-06-30 | 水晶振動子の電極構造 |
Country Status (1)
Country | Link |
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JP (1) | JP4704822B2 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5196121B2 (ja) * | 2007-11-07 | 2013-05-15 | セイコーエプソン株式会社 | デバイス |
JP5277866B2 (ja) * | 2008-10-29 | 2013-08-28 | セイコーエプソン株式会社 | 圧電振動片、および圧電デバイス |
WO2017208866A1 (ja) * | 2016-05-31 | 2017-12-07 | 株式会社村田製作所 | 水晶振動子及びその製造方法 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6032827U (ja) * | 1983-08-11 | 1985-03-06 | キンセキ株式会社 | 長辺縦振動子 |
JPH0214608A (ja) * | 1987-12-02 | 1990-01-18 | Centre Electron Horlog Sa | 圧電共振子 |
JP2001267875A (ja) * | 2000-03-22 | 2001-09-28 | Seiko Epson Corp | 水晶振動子及びその製造方法 |
JP2004072609A (ja) * | 2002-08-08 | 2004-03-04 | Seiko Epson Corp | 水晶デバイスと水晶デバイスの製造方法、ならびに水晶デバイスを利用した携帯電話装置ならびに水晶デバイスを利用した電子機器 |
JP2006238266A (ja) * | 2005-02-28 | 2006-09-07 | Seiko Epson Corp | 圧電振動片、及び圧電振動子 |
-
2005
- 2005-06-30 JP JP2005193063A patent/JP4704822B2/ja not_active Expired - Fee Related
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6032827U (ja) * | 1983-08-11 | 1985-03-06 | キンセキ株式会社 | 長辺縦振動子 |
JPH0214608A (ja) * | 1987-12-02 | 1990-01-18 | Centre Electron Horlog Sa | 圧電共振子 |
JP2001267875A (ja) * | 2000-03-22 | 2001-09-28 | Seiko Epson Corp | 水晶振動子及びその製造方法 |
JP2004072609A (ja) * | 2002-08-08 | 2004-03-04 | Seiko Epson Corp | 水晶デバイスと水晶デバイスの製造方法、ならびに水晶デバイスを利用した携帯電話装置ならびに水晶デバイスを利用した電子機器 |
JP2006238266A (ja) * | 2005-02-28 | 2006-09-07 | Seiko Epson Corp | 圧電振動片、及び圧電振動子 |
Also Published As
Publication number | Publication date |
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JP2007013729A (ja) | 2007-01-18 |
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