DE602005016509D1 - Piezoelektrisches Resonatorelement, piezoelektrisches Bauelement und Kreiselsensor - Google Patents

Piezoelektrisches Resonatorelement, piezoelektrisches Bauelement und Kreiselsensor

Info

Publication number
DE602005016509D1
DE602005016509D1 DE200560016509 DE602005016509T DE602005016509D1 DE 602005016509 D1 DE602005016509 D1 DE 602005016509D1 DE 200560016509 DE200560016509 DE 200560016509 DE 602005016509 T DE602005016509 T DE 602005016509T DE 602005016509 D1 DE602005016509 D1 DE 602005016509D1
Authority
DE
Germany
Prior art keywords
piezoelectric
gyro sensor
resonator element
piezoelectric device
piezoelectric resonator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE200560016509
Other languages
English (en)
Inventor
Masayuki Kikushima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Publication of DE602005016509D1 publication Critical patent/DE602005016509D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/21—Crystal tuning forks
    • H03H9/215—Crystal tuning forks consisting of quartz
DE200560016509 2004-10-21 2005-10-20 Piezoelektrisches Resonatorelement, piezoelektrisches Bauelement und Kreiselsensor Active DE602005016509D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2004306888 2004-10-21
JP2005118400A JP4214412B2 (ja) 2004-10-21 2005-04-15 圧電振動片と圧電デバイスならびにジャイロセンサ

Publications (1)

Publication Number Publication Date
DE602005016509D1 true DE602005016509D1 (de) 2009-10-22

Family

ID=35613660

Family Applications (1)

Application Number Title Priority Date Filing Date
DE200560016509 Active DE602005016509D1 (de) 2004-10-21 2005-10-20 Piezoelektrisches Resonatorelement, piezoelektrisches Bauelement und Kreiselsensor

Country Status (4)

Country Link
US (1) US7397172B2 (de)
EP (1) EP1650867B1 (de)
JP (1) JP4214412B2 (de)
DE (1) DE602005016509D1 (de)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6018673A (en) 1996-10-10 2000-01-25 Nellcor Puritan Bennett Incorporated Motion compatible sensor for non-invasive optical blood analysis
JP4409979B2 (ja) * 2004-02-10 2010-02-03 シチズンホールディングス株式会社 振動子
US7902731B2 (en) * 2005-08-10 2011-03-08 Daishinku Corporation Piezoelectric resonator device and method for manufacturing the same
JP4552916B2 (ja) * 2005-12-21 2010-09-29 株式会社大真空 圧電振動デバイス
JP4935244B2 (ja) * 2006-08-29 2012-05-23 株式会社大真空 音叉型圧電振動片及び音叉型圧電振動デバイス
JP4990047B2 (ja) * 2007-07-02 2012-08-01 日本電波工業株式会社 圧電振動片及び圧電デバイス
US8446079B2 (en) * 2008-05-23 2013-05-21 Statek Corporation Piezoelectric resonator with vibration isolation
JP4879963B2 (ja) 2008-12-25 2012-02-22 日本電波工業株式会社 圧電振動片、圧電振動子及び圧電発振器
JP2010193133A (ja) 2009-02-18 2010-09-02 Epson Toyocom Corp 屈曲振動片および屈曲振動子
JP5786303B2 (ja) * 2009-12-10 2015-09-30 セイコーエプソン株式会社 振動片、振動子、物理量センサー、及び電子機器
JP2011155629A (ja) * 2009-12-29 2011-08-11 Seiko Epson Corp 振動片、振動子、発振器、電子機器、および周波数調整方法
JP5581887B2 (ja) * 2009-12-29 2014-09-03 セイコーエプソン株式会社 振動片、振動子、発振器、電子機器、および周波数調整方法
JP2011199333A (ja) * 2010-03-17 2011-10-06 Seiko Epson Corp 圧電振動片および圧電デバイス
JP5384406B2 (ja) * 2010-03-30 2014-01-08 日本電波工業株式会社 音叉型水晶振動片の製造方法、水晶デバイス
JP5057122B2 (ja) * 2010-06-25 2012-10-24 セイコーエプソン株式会社 圧電振動片および圧電振動子
JP5796280B2 (ja) * 2010-07-21 2015-10-21 セイコーエプソン株式会社 振動片、振動子及び発振器
JP2012120014A (ja) * 2010-12-02 2012-06-21 Seiko Epson Corp 圧電振動素子、その製造方法、圧電振動子及び圧電発振器
JP5765087B2 (ja) * 2011-06-27 2015-08-19 セイコーエプソン株式会社 屈曲振動片、その製造方法及び電子機器
JP6080449B2 (ja) * 2012-09-18 2017-02-15 エスアイアイ・クリスタルテクノロジー株式会社 圧電振動片、圧電振動子、発振器、電子機器及び電波時計
JP6150433B2 (ja) * 2013-12-11 2017-06-21 京セラ株式会社 水晶振動素子及びその製造方法
JP5839083B2 (ja) * 2014-05-26 2016-01-06 セイコーエプソン株式会社 振動片、振動子及び発振器
JP6137277B2 (ja) * 2015-11-12 2017-05-31 セイコーエプソン株式会社 振動片、振動子及び発振器
KR20220022945A (ko) * 2020-08-19 2022-03-02 삼성전자주식회사 지향성 음향 센서

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5760718A (en) 1980-09-27 1982-04-12 Citizen Watch Co Ltd Quartz oscillator
JPS57199314A (en) 1981-06-01 1982-12-07 Seiko Instr & Electronics Ltd Tuning fork type quartz oscillator
JP3811226B2 (ja) 1996-07-26 2006-08-16 トヨタ自動車株式会社 水晶振動子及びその製造方法
JP3729249B2 (ja) 2000-09-01 2005-12-21 セイコーエプソン株式会社 振動片の製造方法、振動片、振動片を有する振動子、発振器及び携帯電話装置
JP2003207338A (ja) 2002-01-15 2003-07-25 Ngk Insulators Ltd 振動型ジャイロスコープ用振動子および振動型ジャイロスコープ
JP4001029B2 (ja) * 2002-03-25 2007-10-31 セイコーエプソン株式会社 音叉型圧電振動片及びその製造方法、圧電デバイス
JP3975927B2 (ja) 2003-01-30 2007-09-12 セイコーエプソン株式会社 圧電振動片と圧電振動片を利用した圧電デバイス、ならびに圧電デバイスを利用した携帯電話装置および圧電デバイスを利用した電子機器
JP4305625B2 (ja) 2003-02-10 2009-07-29 セイコーエプソン株式会社 振動子および物理量測定用信号発生素子
KR100712758B1 (ko) * 2004-09-24 2007-04-30 세이코 엡슨 가부시키가이샤 압전 진동편 및 압전 디바이스

Also Published As

Publication number Publication date
US7397172B2 (en) 2008-07-08
JP2006148856A (ja) 2006-06-08
EP1650867B1 (de) 2009-09-09
EP1650867A1 (de) 2006-04-26
US20060087205A1 (en) 2006-04-27
JP4214412B2 (ja) 2009-01-28

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