DE602006002656D1 - Piezoelektrischer Dünnschichtresonator, Filter und Spannungsgesteuerter Oszillator - Google Patents

Piezoelektrischer Dünnschichtresonator, Filter und Spannungsgesteuerter Oszillator

Info

Publication number
DE602006002656D1
DE602006002656D1 DE200660002656 DE602006002656T DE602006002656D1 DE 602006002656 D1 DE602006002656 D1 DE 602006002656D1 DE 200660002656 DE200660002656 DE 200660002656 DE 602006002656 T DE602006002656 T DE 602006002656T DE 602006002656 D1 DE602006002656 D1 DE 602006002656D1
Authority
DE
Germany
Prior art keywords
filter
thin film
controlled oscillator
voltage controlled
piezoelectric thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE200660002656
Other languages
English (en)
Inventor
Naoko Yanase
Kenya Sano
Ryoichi Ohara
Kazuhiko Itaya
Takaaki Yasumoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Publication of DE602006002656D1 publication Critical patent/DE602006002656D1/de
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B42—BOOKBINDING; ALBUMS; FILES; SPECIAL PRINTED MATTER
    • B42F—SHEETS TEMPORARILY ATTACHED TOGETHER; FILING APPLIANCES; FILE CARDS; INDEXING
    • B42F13/00—Filing appliances with means for engaging perforations or slots
    • B42F13/02—Filing appliances with means for engaging perforations or slots with flexible or resilient means
    • B42F13/06—Filing appliances with means for engaging perforations or slots with flexible or resilient means with strips or bands
    • B42F13/08—Filing appliances with means for engaging perforations or slots with flexible or resilient means with strips or bands of metal
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02086—Means for compensation or elimination of undesirable effects
    • H03H9/02125—Means for compensation or elimination of undesirable effects of parasitic elements
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02157—Dimensional parameters, e.g. ratio between two dimension parameters, length, width or thickness
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/56—Monolithic crystal filters
    • H03H9/564—Monolithic crystal filters implemented with thin-film techniques
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/56—Monolithic crystal filters
    • H03H9/566—Electric coupling means therefor
    • H03H9/568—Electric coupling means therefor consisting of a ladder configuration
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B42—BOOKBINDING; ALBUMS; FILES; SPECIAL PRINTED MATTER
    • B42P—INDEXING SCHEME RELATING TO BOOKS, FILING APPLIANCES OR THE LIKE
    • B42P2241/00—Parts, details or accessories for books or filing appliances
    • B42P2241/20—Protecting; Reinforcing; Preventing deformations
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H03H2003/023—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks the resonators or networks being of the membrane type
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H03H2003/025—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks the resonators or networks comprising an acoustic mirror

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Oscillators With Electromechanical Resonators (AREA)
DE200660002656 2005-05-31 2006-03-15 Piezoelektrischer Dünnschichtresonator, Filter und Spannungsgesteuerter Oszillator Expired - Fee Related DE602006002656D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005160242A JP2006339873A (ja) 2005-05-31 2005-05-31 薄膜圧電共振器、フィルタ及び電圧制御発振器

Publications (1)

Publication Number Publication Date
DE602006002656D1 true DE602006002656D1 (de) 2008-10-23

Family

ID=37038326

Family Applications (1)

Application Number Title Priority Date Filing Date
DE200660002656 Expired - Fee Related DE602006002656D1 (de) 2005-05-31 2006-03-15 Piezoelektrischer Dünnschichtresonator, Filter und Spannungsgesteuerter Oszillator

Country Status (6)

Country Link
US (1) US7525399B2 (de)
EP (1) EP1732213B1 (de)
JP (1) JP2006339873A (de)
KR (1) KR100758093B1 (de)
CN (1) CN100530955C (de)
DE (1) DE602006002656D1 (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007221665A (ja) * 2006-02-20 2007-08-30 Toshiba Corp 薄膜圧電共振器及びその製造方法、並びに、これを用いたフィルタ
FR2927743B1 (fr) * 2008-02-15 2011-06-03 St Microelectronics Sa Circuit de filtrage comportant des resonateurs acoustiques couples
JP5136134B2 (ja) * 2008-03-18 2013-02-06 ソニー株式会社 バンドパスフィルタ装置、その製造方法、テレビジョンチューナおよびテレビジョン受信機
JP2010091467A (ja) * 2008-10-09 2010-04-22 Rohm Co Ltd 圧力センサおよび圧力センサの製造方法
US9515605B1 (en) 2015-08-25 2016-12-06 Microsemi Storage Solutions (U.S.), Inc. Variable gain electro-mechanical oscillator and method for starting balanced oscillations
US9490746B1 (en) 2015-08-27 2016-11-08 Maxlinear Asia Singapore PTE LTD Voltage-controlled oscillator and a method for tuning oscillations
JP2017103267A (ja) * 2015-11-30 2017-06-08 セイコーエプソン株式会社 圧電素子、圧電素子の形成方法および超音波装置
KR102460752B1 (ko) * 2016-08-03 2022-10-31 삼성전기주식회사 박막 벌크 음향 공진기 및 이를 포함하는 필터
CN107317565B (zh) * 2017-06-02 2023-06-30 四川省三台水晶电子有限公司 Baw梯形滤波器的布局设计方法
US11063558B2 (en) * 2018-08-28 2021-07-13 Texas Instruments Incorporated Direct-current tuning of bulk acoustic wave resonator devices
US10614842B1 (en) * 2018-09-19 2020-04-07 Sae Magnetics (H.K.) Ltd. Thin-film piezoelectric-material element with protective film composition and insulating film through hole exposing lower electrode film
CN110112284B (zh) * 2019-05-27 2021-09-17 京东方科技集团股份有限公司 柔性声电基板及其制备方法、柔性声电装置
DE112020003512T5 (de) * 2019-07-22 2022-04-07 Ngk Insulators, Ltd. Verbundkörper und akustisches Wellenelement
WO2021200677A1 (ja) * 2020-03-31 2021-10-07 株式会社村田製作所 弾性波装置
CN113644895B (zh) * 2021-06-30 2024-02-23 中国电子科技集团公司第十三研究所 薄膜体声波谐振器滤波器及滤波器组件

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5692279A (en) 1995-08-17 1997-12-02 Motorola Method of making a monolithic thin film resonator lattice filter
US6087198A (en) * 1998-02-12 2000-07-11 Texas Instruments Incorporated Low cost packaging for thin-film resonators and thin-film resonator-based filters
US6060818A (en) 1998-06-02 2000-05-09 Hewlett-Packard Company SBAR structures and method of fabrication of SBAR.FBAR film processing techniques for the manufacturing of SBAR/BAR filters
EP1170862B1 (de) * 2000-06-23 2012-10-10 Murata Manufacturing Co., Ltd. Piezoelektrischer Resonator und diesen enthaltendes piezoelektrisches Filter
DE10058339A1 (de) * 2000-11-24 2002-06-06 Infineon Technologies Ag Bulk-Acoustic-Wave-Filter
JP2002374145A (ja) 2001-06-15 2002-12-26 Ube Electronics Ltd 圧電薄膜共振子
JP3954395B2 (ja) * 2001-10-26 2007-08-08 富士通株式会社 圧電薄膜共振子、フィルタ、および圧電薄膜共振子の製造方法
US6670866B2 (en) * 2002-01-09 2003-12-30 Nokia Corporation Bulk acoustic wave resonator with two piezoelectric layers as balun in filters and duplexers
JP2003298392A (ja) * 2002-03-29 2003-10-17 Fujitsu Media Device Kk フィルタチップ及びフィルタ装置
JP3879643B2 (ja) * 2002-09-25 2007-02-14 株式会社村田製作所 圧電共振子、圧電フィルタ、通信装置
JP2004158970A (ja) * 2002-11-05 2004-06-03 Ube Ind Ltd 薄膜圧電共振器を用いた帯域フィルタ
US7242130B2 (en) * 2003-11-07 2007-07-10 Matsushita Electric Industrial Co., Ltd. Piezoelectric device, antenna duplexer, and method of manufacturing piezoelectric resonators used therefor
US7235915B2 (en) * 2003-11-18 2007-06-26 Matsushita Electric Industrial Co., Ltd. Acoustic resonator device, filter device, manufacturing method for acoustic resonator device, and communication apparatus
JP2005160242A (ja) 2003-11-27 2005-06-16 Matsushita Electric Ind Co Ltd モータ駆動装置およびモータ駆動方法

Also Published As

Publication number Publication date
KR100758093B1 (ko) 2007-09-11
EP1732213B1 (de) 2008-09-10
CN1874147A (zh) 2006-12-06
EP1732213A1 (de) 2006-12-13
JP2006339873A (ja) 2006-12-14
US20060267711A1 (en) 2006-11-30
US7525399B2 (en) 2009-04-28
KR20060124554A (ko) 2006-12-05
CN100530955C (zh) 2009-08-19

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee