DE602005020028D1 - Piezoelektrischer aktuator und einrichtung - Google Patents

Piezoelektrischer aktuator und einrichtung

Info

Publication number
DE602005020028D1
DE602005020028D1 DE200560020028 DE602005020028T DE602005020028D1 DE 602005020028 D1 DE602005020028 D1 DE 602005020028D1 DE 200560020028 DE200560020028 DE 200560020028 DE 602005020028 T DE602005020028 T DE 602005020028T DE 602005020028 D1 DE602005020028 D1 DE 602005020028D1
Authority
DE
Germany
Prior art keywords
piezoelectric actuator
piezoelectric
actuator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE200560020028
Other languages
English (en)
Inventor
Reiko Nagahama
Yutaka Yamazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Publication of DE602005020028D1 publication Critical patent/DE602005020028D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/202—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement
    • G—PHYSICS
    • G04—HOROLOGY
    • G04C—ELECTROMECHANICAL CLOCKS OR WATCHES
    • G04C3/00—Electromechanical clocks or watches independent of other time-pieces and in which the movement is maintained by electric means
    • G04C3/08—Electromechanical clocks or watches independent of other time-pieces and in which the movement is maintained by electric means wherein movement is regulated by a mechanical oscillator other than a pendulum or balance, e.g. by a tuning fork, e.g. electrostatically
    • G04C3/12—Electromechanical clocks or watches independent of other time-pieces and in which the movement is maintained by electric means wherein movement is regulated by a mechanical oscillator other than a pendulum or balance, e.g. by a tuning fork, e.g. electrostatically driven by piezoelectric means; driven by magneto-strictive means
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001—Driving devices, e.g. vibrators
    • H02N2/003—Driving devices, e.g. vibrators using longitudinal or radial modes combined with bending modes
    • H02N2/004—Rectangular vibrators
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/103—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors by pressing one or more vibrators against the rotor
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/14—Drive circuits; Control arrangements or methods
    • H02N2/142—Small signal circuits; Means for controlling position or derived quantities, e.g. speed, torque, starting, stopping, reversing

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Lens Barrels (AREA)
DE200560020028 2004-07-07 2005-07-05 Piezoelektrischer aktuator und einrichtung Active DE602005020028D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2004200794 2004-07-07
PCT/JP2005/012389 WO2006004108A1 (ja) 2004-07-07 2005-07-05 圧電アクチュエータおよび機器

Publications (1)

Publication Number Publication Date
DE602005020028D1 true DE602005020028D1 (de) 2010-04-29

Family

ID=35782907

Family Applications (1)

Application Number Title Priority Date Filing Date
DE200560020028 Active DE602005020028D1 (de) 2004-07-07 2005-07-05 Piezoelektrischer aktuator und einrichtung

Country Status (6)

Country Link
US (1) US7514843B2 (de)
EP (1) EP1786091B1 (de)
JP (1) JP4479725B2 (de)
CN (1) CN1981427B (de)
DE (1) DE602005020028D1 (de)
WO (1) WO2006004108A1 (de)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7545076B1 (en) * 2005-07-11 2009-06-09 Itt Manufacturing Enterprises, Inc. System and method for tracking drive frequency of piezoelectric motor
CN101213734B (zh) * 2006-02-07 2011-01-12 松下电器产业株式会社 压电元件与超声波执行机构
JP4795162B2 (ja) * 2006-08-09 2011-10-19 オリンパス株式会社 超音波モータ及び超音波モータの振動検出方法
US7646136B2 (en) * 2007-05-07 2010-01-12 Panasonic Corporation Piezoelectric element, vibratory actuator and drive unit
JP2008301673A (ja) * 2007-06-04 2008-12-11 Konica Minolta Opto Inc 摩擦駆動アクチュエータおよびそれを用いるハードディスク装置
JP2009254198A (ja) * 2008-04-10 2009-10-29 Sharp Corp 超音波モータおよび超音波振動子
JP5382320B2 (ja) * 2009-03-26 2014-01-08 セイコーエプソン株式会社 圧電モーター、液体噴射装置及び時計
JP2010233339A (ja) * 2009-03-26 2010-10-14 Seiko Epson Corp 圧電モーター、液体噴射装置及び時計
JP5467821B2 (ja) * 2009-09-07 2014-04-09 パナソニック株式会社 振動型アクチュエータ
KR20120114214A (ko) * 2009-11-25 2012-10-16 신포니아 테크놀로지 가부시끼가이샤 제진 장치 및 이것을 구비한 차량
JP5693310B2 (ja) * 2011-03-17 2015-04-01 キヤノン株式会社 異物除去装置およびそれを備える光学機器
US8801742B2 (en) 2011-06-01 2014-08-12 Devicor Medical Products, Inc. Needle assembly and blade assembly for biopsy device
JP6172975B2 (ja) 2012-03-19 2017-08-02 キヤノン株式会社 振動型アクチュエータの不要振動検出装置、駆動制御装置、振動型アクチュエータ、および電子機器
JP2014018027A (ja) 2012-07-11 2014-01-30 Canon Inc 振動型アクチュエータ、撮像装置、及びステージ
JP6112835B2 (ja) * 2012-11-26 2017-04-12 キヤノン株式会社 振動型アクチュエータの駆動装置及び駆動制御方法
CN103199603B (zh) * 2013-03-20 2015-01-21 瑞声科技（南京）有限公司 压电发电充电系统以及应用该系统的电子设备
JP6164044B2 (ja) * 2013-10-30 2017-07-19 セイコーエプソン株式会社 圧電モーター、ロボットハンド、ロボット、指アシスト装置、電子部品搬送装置、電子部品検査装置、送液ポンプ、印刷装置、電子時計、投影装置
JP2019030091A (ja) * 2017-07-28 2019-02-21 セイコーエプソン株式会社 圧電駆動装置、圧電駆動装置の駆動方法、ロボット、電子部品搬送装置、プリンター、及び、プロジェクター
JP6946893B2 (ja) * 2017-09-22 2021-10-13 セイコーエプソン株式会社 圧電駆動装置、圧電モーター、ロボット、電子部品搬送装置、プリンターおよびプロジェクター
JP6882685B2 (ja) * 2017-10-20 2021-06-02 シンフォニアテクノロジー株式会社 振動系の制御装置およびワーク搬送装置
JP7077682B2 (ja) 2018-03-12 2022-05-31 セイコーエプソン株式会社 圧電駆動装置、ロボット、電子部品搬送装置、プリンターおよびプロジェクター
JP7074987B2 (ja) * 2018-08-03 2022-05-25 株式会社シグマ レンズ駆動装置及びそれを有するレンズ鏡筒
JP7200550B2 (ja) * 2018-08-31 2023-01-10 セイコーエプソン株式会社 圧電駆動装置、ロボットおよびプリンター
JPWO2023048001A1 (de) * 2021-09-27 2023-03-30
CN118235544A (zh) * 2021-11-10 2024-06-21 株式会社村田制作所 激振电路、振动装置以及车辆

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0674350B1 (de) * 1994-03-23 2000-05-31 Nikon Corporation Ultraschallmotor
JPH11155290A (ja) * 1997-09-22 1999-06-08 Nikon Corp 振動アクチュエータ
JP3148729B2 (ja) * 1998-04-13 2001-03-26 セイコーインスツルメンツ株式会社 超音波モータ及び超音波モータ付電子機器
AT411946B (de) * 2001-03-09 2004-07-26 Fronius Schweissmasch Prod Verfahren zum regeln eines wechselrichtersystems
JP4770043B2 (ja) * 2001-03-27 2011-09-07 セイコーエプソン株式会社 圧電アクチュエータの駆動装置、圧電アクチュエータの駆動方法、時計および携帯機器
JP4144356B2 (ja) * 2001-03-27 2008-09-03 セイコーエプソン株式会社 圧電アクチュエータおよびその駆動回路
JP3719249B2 (ja) * 2002-02-06 2005-11-24 セイコーエプソン株式会社 圧電アクチュエータ、圧電アクチュエータの駆動制御回路、時計、携帯機器、圧電アクチュエータ駆動回路の制御方法、時計の制御方法および携帯機器の制御方法
WO2003077410A1 (fr) * 2002-03-11 2003-09-18 Seiko Epson Corporation Verin a transformation de rotation/mouvement
JP2004166479A (ja) * 2002-06-14 2004-06-10 Seiko Epson Corp 回転型駆動装置およびこれを備えた装置
JP4314088B2 (ja) * 2003-09-25 2009-08-12 キヤノン株式会社 振動型アクチュエータの制御装置および制御方法、振動型アクチュエータを駆動源とする装置
JP4795162B2 (ja) * 2006-08-09 2011-10-19 オリンパス株式会社 超音波モータ及び超音波モータの振動検出方法

Also Published As

Publication number Publication date
CN1981427A (zh) 2007-06-13
CN1981427B (zh) 2011-06-01
EP1786091B1 (de) 2010-03-17
US7514843B2 (en) 2009-04-07
EP1786091A1 (de) 2007-05-16
JPWO2006004108A1 (ja) 2008-04-24
EP1786091A4 (de) 2008-01-16
JP4479725B2 (ja) 2010-06-09
WO2006004108A1 (ja) 2006-01-12
US20070188048A1 (en) 2007-08-16

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