IL112770A0 - Coupled resonator vibratory rate sensor - Google Patents

Coupled resonator vibratory rate sensor

Info

Publication number
IL112770A0
IL112770A0 IL11277095A IL11277095A IL112770A0 IL 112770 A0 IL112770 A0 IL 112770A0 IL 11277095 A IL11277095 A IL 11277095A IL 11277095 A IL11277095 A IL 11277095A IL 112770 A0 IL112770 A0 IL 112770A0
Authority
IL
Israel
Prior art keywords
rate sensor
coupled resonator
vibratory rate
vibratory
resonator
Prior art date
Application number
IL11277095A
Original Assignee
Netzer Yishay
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Netzer Yishay filed Critical Netzer Yishay
Priority to IL11277095A priority Critical patent/IL112770A0/en
Priority to US08/718,434 priority patent/US5763781A/en
Priority to EP96908464A priority patent/EP0805984A4/en
Priority to AU51697/96A priority patent/AU5169796A/en
Priority to PCT/US1996/001716 priority patent/WO1996026445A1/en
Publication of IL112770A0 publication Critical patent/IL112770A0/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
    • G01C19/5621—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks the devices involving a micromechanical structure
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
    • H03H9/2468—Tuning fork resonators
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
    • H03H9/2468—Tuning fork resonators
    • H03H9/2494—H-shaped, i.e. two tuning forks with common base
IL11277095A 1995-02-23 1995-02-23 Coupled resonator vibratory rate sensor IL112770A0 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
IL11277095A IL112770A0 (en) 1995-02-23 1995-02-23 Coupled resonator vibratory rate sensor
US08/718,434 US5763781A (en) 1995-02-23 1996-02-08 Coupled resonator vibratory rate sensor
EP96908464A EP0805984A4 (en) 1995-02-23 1996-02-08 Coupled resonator vibratory rate sensor
AU51697/96A AU5169796A (en) 1995-02-23 1996-02-08 Coupled resonator vibratory rate sensor
PCT/US1996/001716 WO1996026445A1 (en) 1995-02-23 1996-02-08 Coupled resonator vibratory rate sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IL11277095A IL112770A0 (en) 1995-02-23 1995-02-23 Coupled resonator vibratory rate sensor

Publications (1)

Publication Number Publication Date
IL112770A0 true IL112770A0 (en) 1996-06-18

Family

ID=11067127

Family Applications (1)

Application Number Title Priority Date Filing Date
IL11277095A IL112770A0 (en) 1995-02-23 1995-02-23 Coupled resonator vibratory rate sensor

Country Status (4)

Country Link
EP (1) EP0805984A4 (en)
AU (1) AU5169796A (en)
IL (1) IL112770A0 (en)
WO (1) WO1996026445A1 (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5998911A (en) * 1996-11-26 1999-12-07 Ngk Insulators, Ltd. Vibrator, vibratory gyroscope, and vibration adjusting method
US6747393B2 (en) 1996-11-26 2004-06-08 Ngk Insulators, Ltd. Vibrator, vibratory gyroscope, and vibration adjusting method
US6437483B2 (en) 1996-11-26 2002-08-20 Ngk Insulators, Ltd. Vibrator, vibratory gyroscope, and vibration adjusting method
US6018212A (en) 1996-11-26 2000-01-25 Ngk Insulators, Ltd. Vibrator, vibratory gyroscope, and vibration adjusting method
US6262520B1 (en) 1999-09-15 2001-07-17 Bei Technologies, Inc. Inertial rate sensor tuning fork
US6858972B2 (en) 2002-06-21 2005-02-22 Ngk Insulators, Ltd. Vibrator, vibratory gyroscope, and vibration adjusting method
EP1641118B1 (en) * 2004-09-24 2010-04-21 Seiko Epson Corporation Piezoelectric resonator element and piezoelectric device
JP4709260B2 (en) * 2008-10-16 2011-06-22 日本電波工業株式会社 Piezoelectric vibrating piece and piezoelectric device

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4958519A (en) * 1982-01-25 1990-09-25 The Board Of Regents Of The University Of Nebraska Velocimeter
US5367217A (en) * 1992-11-18 1994-11-22 Alliedsignal Inc. Four bar resonating force transducer

Also Published As

Publication number Publication date
EP0805984A4 (en) 1999-04-28
WO1996026445A1 (en) 1996-08-29
EP0805984A1 (en) 1997-11-12
AU5169796A (en) 1996-09-11

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