WO2005017538A8 - Accelerometre a vibrations parasites reduites par rappel ameliore - Google Patents

Accelerometre a vibrations parasites reduites par rappel ameliore

Info

Publication number
WO2005017538A8
WO2005017538A8 PCT/FR2004/002125 FR2004002125W WO2005017538A8 WO 2005017538 A8 WO2005017538 A8 WO 2005017538A8 FR 2004002125 W FR2004002125 W FR 2004002125W WO 2005017538 A8 WO2005017538 A8 WO 2005017538A8
Authority
WO
WIPO (PCT)
Prior art keywords
accelerometer
moving mass
mass
fixed part
capacitance
Prior art date
Application number
PCT/FR2004/002125
Other languages
English (en)
Other versions
WO2005017538A1 (fr
Inventor
Jean-Paul Menard
Maurice Moreau
Original Assignee
Sercel Rech Const Elect
Jean-Paul Menard
Maurice Moreau
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sercel Rech Const Elect, Jean-Paul Menard, Maurice Moreau filed Critical Sercel Rech Const Elect
Priority to JP2006523033A priority Critical patent/JP5269313B2/ja
Priority to US11/547,899 priority patent/US7552638B2/en
Priority to EP04786297A priority patent/EP1664803A1/fr
Publication of WO2005017538A1 publication Critical patent/WO2005017538A1/fr
Publication of WO2005017538A8 publication Critical patent/WO2005017538A8/fr
Priority to NO20061113A priority patent/NO339398B1/no

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
    • G01P15/131—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electrostatic counterbalancing means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Geophysics And Detection Of Objects (AREA)
  • Fittings On The Vehicle Exterior For Carrying Loads, And Devices For Holding Or Mounting Articles (AREA)
  • Air Bags (AREA)

Abstract

L'invention concerne un accéléromètre à masse mobile (5) et partie fixe (2) utilisant des variations de capacitance (3,4) pour détecter le mouvement de la masse (5), dans lequel une première série d'électrodes (3, 4) solidaires de la masse (5) est interdigitée avec une série d'électrodes (3,4) solidaires de la partie fixe (2), chaque électrode mobile (4) formant, avec une électrode fixe (3) adjacente, une capacitance variable en fonction de la position de la masse mobile (5), l'accéléromètre comprenant en outre un circuit électronique prévu pour détecter la variation d'au moins une capacitance entre masse mobile (5) et partie fixe (2) en tant qu'indicateur du déplacement de la masse mobile, et pour générer également un effort électrostatique de rappel de la masse mobile (5) dans sa position d'origine, le circuit électronique étant prévu pour générer l'effort de rappel électrostatique de manière asservie sur une mesure de déplacement précédente, caractérisé en ce que l'effort répétitif de rappel ainsi généré est spécifiquement choisi pour que son spectre fréquencé de puissance mécanique (10,20) présente une zone à puissance sensiblement nulle à la fréquence de résonance mécanique des électrodes (4) de la masse mobile (5) et/ou de la partie fixe (2).
PCT/FR2004/002125 2003-08-13 2004-08-11 Accelerometre a vibrations parasites reduites par rappel ameliore WO2005017538A1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2006523033A JP5269313B2 (ja) 2003-08-13 2004-08-11 改良復帰移動式外来振動抑制形加速度計
US11/547,899 US7552638B2 (en) 2003-08-13 2004-08-11 Accelerometer with reduced extraneous vibrations owing to improved return movement
EP04786297A EP1664803A1 (fr) 2003-08-13 2004-08-11 Accelerometre a vibrations parasites reduites par rappel ameliore
NO20061113A NO339398B1 (no) 2003-08-13 2006-03-08 Akselerometer med redusert bakgrunnsvibrasjon på grunn av forbedret returbevegelse

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR0309901 2003-08-13
FR0309901A FR2858854B1 (fr) 2003-08-13 2003-08-13 Accelerometre a vibrations parasites reduites par rappel ameliore

Publications (2)

Publication Number Publication Date
WO2005017538A1 WO2005017538A1 (fr) 2005-02-24
WO2005017538A8 true WO2005017538A8 (fr) 2005-05-19

Family

ID=34112752

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/FR2004/002125 WO2005017538A1 (fr) 2003-08-13 2004-08-11 Accelerometre a vibrations parasites reduites par rappel ameliore

Country Status (7)

Country Link
US (1) US7552638B2 (fr)
EP (1) EP1664803A1 (fr)
JP (1) JP5269313B2 (fr)
CN (1) CN100570371C (fr)
FR (1) FR2858854B1 (fr)
NO (1) NO339398B1 (fr)
WO (1) WO2005017538A1 (fr)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2858853B1 (fr) * 2003-08-13 2006-01-13 Sercel Rech Const Elect Accelerometre a vibrations parasites reduites par forme des electrodes amelioree
FR2881568B1 (fr) * 2005-02-03 2011-01-14 Commissariat Energie Atomique Condensateur a capacite variable et a forme specifique, gyrometre comportant un tel condensateur et accelerometre comportant un tel condensateur
JP2007139505A (ja) * 2005-11-16 2007-06-07 Denso Corp 容量式力学量センサ
FR2924856B1 (fr) 2007-12-11 2012-02-10 Memscap Condensateur a capacite variable comprenant un peigne mobile et un peigne fixe interdigites, accelerometre et gyrometre comprenant un tel condensateur
JP4875227B2 (ja) * 2009-12-03 2012-02-15 パナソニック株式会社 振動発電器、振動発電装置、及び振動発電装置を搭載した電子機器と通信装置
FI124794B (fi) * 2012-06-29 2015-01-30 Murata Manufacturing Co Parannettu resonaattori
NO335565B1 (no) 2012-12-21 2014-12-29 Cggveritas Services Norway As Geofysisk akselerasjonssensor med justerbar støtbeskyttelse og fremgangsmåte
JPWO2014203903A1 (ja) * 2013-06-19 2017-02-23 株式会社村田製作所 共振周波数調整モジュール
FI126199B (en) * 2013-06-28 2016-08-15 Murata Manufacturing Co CAPACITIVE MICROMECHANICAL SENSOR STRUCTURE AND MICROMECHANICAL ACCELEROMETER
JP6413462B2 (ja) * 2014-08-15 2018-10-31 セイコーエプソン株式会社 物理量センサー、物理量センサー装置、電子機器および移動体
US10352960B1 (en) * 2015-10-30 2019-07-16 Garmin International, Inc. Free mass MEMS accelerometer
CN108225296B (zh) * 2018-01-26 2019-12-27 维沃移动通信有限公司 一种mems陀螺仪、电子设备及电子设备的控制方法

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5249465A (en) * 1990-12-11 1993-10-05 Motorola, Inc. Accelerometer utilizing an annular mass
FI93579C (fi) * 1993-08-20 1995-04-25 Vaisala Oy Sähköstaattisen voiman avulla takaisinkytketty kapasitiivinen anturi ja menetelmä sen aktiivisen elementin muodon ohjaamiseksi
DE4439203C2 (de) * 1994-11-03 2001-06-28 Bosch Gmbh Robert Schaltungsanordnung zur Auswertung eines Beschleunigungssensorsignals
JP3216455B2 (ja) * 1994-12-22 2001-10-09 株式会社村田製作所 容量型静電サーボ加速度センサ
KR100363247B1 (ko) * 1995-10-28 2003-02-14 삼성전자 주식회사 진동구조물및그것의고유진동수제어방법
JP3348240B2 (ja) * 1996-09-05 2002-11-20 松下電器産業株式会社 デジタルフィルタと、サーボモータ制御装置
FR2769369B1 (fr) * 1997-10-08 1999-12-24 Sercel Rech Const Elect Accelerometre a plaque mobile, avec moteur electrostatique de contre-reaction
DE19808549B4 (de) * 1998-02-28 2008-07-10 Robert Bosch Gmbh Mikromechanische Kammstruktur sowie Beschleunigungssensor und Antrieb mit dieser Kammstruktur
JPH11271830A (ja) * 1998-03-24 1999-10-08 Nikon Corp ブレ検出装置、ブレ補正装置及びブレ補正カメラ
JP4178658B2 (ja) * 1998-06-30 2008-11-12 株式会社デンソー 容量式物理量検出装置
JP2000206142A (ja) * 1998-11-13 2000-07-28 Denso Corp 半導体力学量センサおよびその製造方法
US6301965B1 (en) * 1999-12-14 2001-10-16 Sandia Corporation Microelectromechanical accelerometer with resonance-cancelling control circuit including an idle state
JP2001227954A (ja) * 2000-02-15 2001-08-24 Toyota Motor Corp 物理量検出装置
JP2002040045A (ja) * 2000-07-21 2002-02-06 Denso Corp 力学量センサ
EP1624286B1 (fr) * 2004-08-03 2017-10-04 STMicroelectronics Srl Capteur micro-éléctro-mécanique avec boucle de rétroaction de force

Also Published As

Publication number Publication date
CN1842710A (zh) 2006-10-04
NO339398B1 (no) 2016-12-12
US7552638B2 (en) 2009-06-30
FR2858854B1 (fr) 2005-12-16
NO20061113L (no) 2006-04-20
CN100570371C (zh) 2009-12-16
JP5269313B2 (ja) 2013-08-21
WO2005017538A1 (fr) 2005-02-24
EP1664803A1 (fr) 2006-06-07
FR2858854A1 (fr) 2005-02-18
US20080092651A1 (en) 2008-04-24
JP2007501939A (ja) 2007-02-01

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