JP2007501939A - 改良復帰移動式外来振動抑制形加速度計 - Google Patents
改良復帰移動式外来振動抑制形加速度計 Download PDFInfo
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- JP2007501939A JP2007501939A JP2006523033A JP2006523033A JP2007501939A JP 2007501939 A JP2007501939 A JP 2007501939A JP 2006523033 A JP2006523033 A JP 2006523033A JP 2006523033 A JP2006523033 A JP 2006523033A JP 2007501939 A JP2007501939 A JP 2007501939A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
- G01P15/131—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electrostatic counterbalancing means
Abstract
Description
・固定部としてのアーマチュア2
・アーマチュア2に固設された2組のくし歯状の固定側電極3、7
・可動質量部としての可動プレート5に固設された1組のくし歯状の可動側電極4
・可動プレート5とアーマチュア2との間を連結するばね6(図示の理解を容易にするため、ここでは単一のばねを示す)。
Claims (14)
- 可動質量部(5)と固定部(2)により静電容量(3、4)の変化を利用して可動質量部(5)の変位を検出する加速度計であって、可動質量部(5)に固設された一連のくし歯状の可動側電極(4)と固定部(2)に固設された一連のくし歯状の固定側電極(3)とが互いに入り込むように組み合わされ、各可動側電極(4)と各固定側電極(3)とによって可動質量部(5)の位置の関数として変化する可変静電容量が形成され、可動質量部の変位を測定するために可動質量部(5)と固定部(2)との間の少なくとも一カ所における静電容量の変化を検出すると共に可動質量部(5)を原位置に復帰させるための静電気力を反復的に発生する電子回路を備え、該電子回路が変位の測定結果に追従して復帰用静電気力を発生させるものにおいて、反復的に発生される復帰用静電気力が、特にその機械的出力の周波数スペクトル(10、20)が可動質量部(5)及び/又は固定部(2)の各電極(3、4)の機械的共振周波数で実質的にゼロ出力となる領域をもつように設定されていることを特徴とする加速度計。
- 電子回路が予め定められた時間幅の時間帯(Ta)内で可動質量部の復帰動作を反復的に実行するものであり、対応する時間帯の復帰動作信号の周波数変化(20)が可動質量部(5)及び/又は固定部(2)の各電極(3、4)の共振周波数で実質的にゼロ点へ復帰するように設定されていることとを特徴とする請求項1に記載の加速度計。
- 復帰動作信号の周波数変化(20)が可動質量部(5)及び/又は固定部(2)の各電極(3、4)の共振周波数でゼロ点(1/Ta)へ復帰するように時間帯(Ta)の平均持続時間幅が設定されていることを特徴とする請求項2に記載の加速度計。
- 復帰動作信号の周波数変化(20)が可動質量部(5)及び/又は固定部(2)の各電極(3、4)の共振周波数で最初にゼロ点(1/Ta)へ復帰するように時間帯(Ta)の平均持続時間幅が設定されていることを特徴とする請求項3に記載の加速度計。
- 復帰用静電気力が平均持続時間幅Taの時間帯を通じて出力され、この時間幅Taが、可動質量部(5)及び/又は固定部(2)の各電極(3、4)の共振周波数をfとするとき、式1/Ta=fに従って設定されていることを特徴とする請求項1〜4のいずれか1項に記載の加速度計。
- 復帰動作信号の周波数変化が基本サイン波形状を示すことを特徴とする請求項5に記載の加速度計。
- 可動質量部(5)及び/又は固定部(2)の各電極(3、4)が、それぞれの自由端へ向かって幅の変化する断面形状を有することを特徴とする請求項1〜6のいずれか1項に記載の加速度計。
- 可動質量部(5)及び/又は固定部(2)の各電極(3、4)が、少なくとも一部に連続的に幅の変化する部分を有することを特徴とする請求項7に記載の加速度計。
- 可動質量部(5)及び/又は固定部(2)の各電極(3、4)が、少なくとも一部に幅の急変する部分を有することを特徴とする請求項7又は8に記載の加速度計。
- 可動質量部(5)及び/又は固定部(2)の各電極(3、4)が、少なくとも一部に横断面の幅が先端へ向かって減少している部分を有することを特徴とする請求項7〜9のいずれか1項に記載の加速度計。
- 可動質量部(5)及び/又は固定部(2)の各電極(3、4)が、それぞれの自由端へ向かって幅(L、I)が減少する台形部分を備えていることを特徴とする請求項7〜10のいずれか1項に記載の加速度計。
- 可動質量部(5)及び/又は固定部(2)の各電極(3、4)が、横断面の幅(L、I)が一定幅ずつ段階的に変化する部分を有し、この幅(L、I)が各段毎に急変していることを特徴とする請求項7〜11のいずれか1項に記載の加速度計。
- 可動質量部(5)及び/又は固定部(2)の各電極(3、4)が、先端へ向かって幅が徐々に減少して少なくとも一つの丸味のついた縁部を形成している部分を有することを特徴とする請求項7〜12のいずれか1項に記載の加速度計。
- 固定部(2)側の各電極(3)が可動質量部(5)側のそれぞれ隣接する二つの電極(4)間の隙間と相補的な形状を有することを特徴とする請求項7〜13のいずれか1項に記載の加速度計。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0309901 | 2003-08-13 | ||
FR0309901A FR2858854B1 (fr) | 2003-08-13 | 2003-08-13 | Accelerometre a vibrations parasites reduites par rappel ameliore |
PCT/FR2004/002125 WO2005017538A1 (fr) | 2003-08-13 | 2004-08-11 | Accelerometre a vibrations parasites reduites par rappel ameliore |
Publications (2)
Publication Number | Publication Date |
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JP2007501939A true JP2007501939A (ja) | 2007-02-01 |
JP5269313B2 JP5269313B2 (ja) | 2013-08-21 |
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Application Number | Title | Priority Date | Filing Date |
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JP2006523033A Active JP5269313B2 (ja) | 2003-08-13 | 2004-08-11 | 改良復帰移動式外来振動抑制形加速度計 |
Country Status (7)
Country | Link |
---|---|
US (1) | US7552638B2 (ja) |
EP (1) | EP1664803A1 (ja) |
JP (1) | JP5269313B2 (ja) |
CN (1) | CN100570371C (ja) |
FR (1) | FR2858854B1 (ja) |
NO (1) | NO339398B1 (ja) |
WO (1) | WO2005017538A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2014203903A1 (ja) * | 2013-06-19 | 2014-12-24 | ヤマハ株式会社 | 共振周波数調整モジュール |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2858853B1 (fr) * | 2003-08-13 | 2006-01-13 | Sercel Rech Const Elect | Accelerometre a vibrations parasites reduites par forme des electrodes amelioree |
FR2881568B1 (fr) * | 2005-02-03 | 2011-01-14 | Commissariat Energie Atomique | Condensateur a capacite variable et a forme specifique, gyrometre comportant un tel condensateur et accelerometre comportant un tel condensateur |
JP2007139505A (ja) * | 2005-11-16 | 2007-06-07 | Denso Corp | 容量式力学量センサ |
FR2924856B1 (fr) | 2007-12-11 | 2012-02-10 | Memscap | Condensateur a capacite variable comprenant un peigne mobile et un peigne fixe interdigites, accelerometre et gyrometre comprenant un tel condensateur |
US8803401B2 (en) * | 2009-12-03 | 2014-08-12 | Panasonic Corporation | Vibration power generator, vibration power generating device, and electronic device and communication device that have the vibration power generating device installed |
FI124794B (fi) * | 2012-06-29 | 2015-01-30 | Murata Manufacturing Co | Parannettu resonaattori |
NO335565B1 (no) | 2012-12-21 | 2014-12-29 | Cggveritas Services Norway As | Geofysisk akselerasjonssensor med justerbar støtbeskyttelse og fremgangsmåte |
FI126199B (en) * | 2013-06-28 | 2016-08-15 | Murata Manufacturing Co | CAPACITIVE MICROMECHANICAL SENSOR STRUCTURE AND MICROMECHANICAL ACCELEROMETER |
JP6413462B2 (ja) * | 2014-08-15 | 2018-10-31 | セイコーエプソン株式会社 | 物理量センサー、物理量センサー装置、電子機器および移動体 |
US10352960B1 (en) * | 2015-10-30 | 2019-07-16 | Garmin International, Inc. | Free mass MEMS accelerometer |
CN108225296B (zh) * | 2018-01-26 | 2019-12-27 | 维沃移动通信有限公司 | 一种mems陀螺仪、电子设备及电子设备的控制方法 |
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2003
- 2003-08-13 FR FR0309901A patent/FR2858854B1/fr not_active Expired - Lifetime
-
2004
- 2004-08-11 WO PCT/FR2004/002125 patent/WO2005017538A1/fr active Application Filing
- 2004-08-11 CN CNB2004800231918A patent/CN100570371C/zh not_active Expired - Fee Related
- 2004-08-11 EP EP04786297A patent/EP1664803A1/fr not_active Withdrawn
- 2004-08-11 US US11/547,899 patent/US7552638B2/en active Active
- 2004-08-11 JP JP2006523033A patent/JP5269313B2/ja active Active
-
2006
- 2006-03-08 NO NO20061113A patent/NO339398B1/no unknown
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JPH04269659A (ja) * | 1990-12-11 | 1992-09-25 | Motorola Inc | 環状質量部材を用いた加速度計 |
JPH08211093A (ja) * | 1994-11-03 | 1996-08-20 | Robert Bosch Gmbh | 加速度センサの容量性信号を評価する回路装置 |
JPH08178955A (ja) * | 1994-12-22 | 1996-07-12 | Murata Mfg Co Ltd | 容量型静電サーボ加速度センサ |
JPH09178494A (ja) * | 1995-10-28 | 1997-07-11 | Samsung Electron Co Ltd | 振動構造物及び振動構造物を備えるアクチュエータと振動構造物の固有振動数の制御方法 |
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JP2001519534A (ja) * | 1997-10-08 | 2001-10-23 | セルセル | 静電帰還モーターを備えた可動プレート形加速度計 |
JPH11311635A (ja) * | 1998-02-28 | 1999-11-09 | Robert Bosch Gmbh | マイクロメカニックなコ―ム構造 |
JPH11271830A (ja) * | 1998-03-24 | 1999-10-08 | Nikon Corp | ブレ検出装置、ブレ補正装置及びブレ補正カメラ |
JP2000206142A (ja) * | 1998-11-13 | 2000-07-28 | Denso Corp | 半導体力学量センサおよびその製造方法 |
US6301965B1 (en) * | 1999-12-14 | 2001-10-16 | Sandia Corporation | Microelectromechanical accelerometer with resonance-cancelling control circuit including an idle state |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
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WO2014203903A1 (ja) * | 2013-06-19 | 2014-12-24 | ヤマハ株式会社 | 共振周波数調整モジュール |
JPWO2014203903A1 (ja) * | 2013-06-19 | 2017-02-23 | 株式会社村田製作所 | 共振周波数調整モジュール |
Also Published As
Publication number | Publication date |
---|---|
WO2005017538A8 (fr) | 2005-05-19 |
FR2858854B1 (fr) | 2005-12-16 |
JP5269313B2 (ja) | 2013-08-21 |
EP1664803A1 (fr) | 2006-06-07 |
NO339398B1 (no) | 2016-12-12 |
US20080092651A1 (en) | 2008-04-24 |
FR2858854A1 (fr) | 2005-02-18 |
CN1842710A (zh) | 2006-10-04 |
US7552638B2 (en) | 2009-06-30 |
NO20061113L (no) | 2006-04-20 |
CN100570371C (zh) | 2009-12-16 |
WO2005017538A1 (fr) | 2005-02-24 |
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