NO20061113L - Akselerometer med redusert bakgrunnsvibrasjon pa grunn av forbedret returbevegelse - Google Patents

Akselerometer med redusert bakgrunnsvibrasjon pa grunn av forbedret returbevegelse

Info

Publication number
NO20061113L
NO20061113L NO20061113A NO20061113A NO20061113L NO 20061113 L NO20061113 L NO 20061113L NO 20061113 A NO20061113 A NO 20061113A NO 20061113 A NO20061113 A NO 20061113A NO 20061113 L NO20061113 L NO 20061113L
Authority
NO
Norway
Prior art keywords
accelerometer
mass
movable mass
capacitance
electrodes
Prior art date
Application number
NO20061113A
Other languages
English (en)
Other versions
NO339398B1 (no
Inventor
Jean-Paul Menard
Maurice Moreau
Original Assignee
Sercel Rech Const Elect
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sercel Rech Const Elect filed Critical Sercel Rech Const Elect
Publication of NO20061113L publication Critical patent/NO20061113L/no
Publication of NO339398B1 publication Critical patent/NO339398B1/no

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
    • G01P15/131—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electrostatic counterbalancing means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Geophysics And Detection Of Objects (AREA)
  • Fittings On The Vehicle Exterior For Carrying Loads, And Devices For Holding Or Mounting Articles (AREA)
  • Air Bags (AREA)

Abstract

Oppfinnelsen vedrører et akselerometer innbefattende en bevegbar masse (5) og en fast del, hvor variasjoner i kapasitansen (3, 4) benyttes for detektering av massens (5) bevegelse. Akselerometeret ifølge oppfinnelsen innbefatter en første serie av elektroder (4) som er fast forbundne med massen (5) og har fingerinngrep med en serie av elektroder (3, 7) som er fast forbundet med den faste del (2). Ifølge oppfinnelsen har hver bevegbar elektrode (4), sammen med en hosliggende fast elektrode (3), en kapasitans som varierer i samsvar med stillingen av den bevegelige masse (5). Akselerometeret innbefatter videre en elektronisk krets som benyttes for detektering av variasjonen til i det minste én kapasitans mellom den bevegbare masse (5) og den faste del, i form av en forskyvningsindikator for den bevegbare masse. Oppfinnelsen er kjennetegnet ved at den tilveiebrakte returbelastning velges spesifikt slik at det mekaniske energifrekvensspektrum (10, 20) har en i hovedsaken nullenergisone ved den mekaniske resonansfrekvensen til elektrodene (4) på den bevegbare masse (5) og/eller den faste del (2).
NO20061113A 2003-08-13 2006-03-08 Akselerometer med redusert bakgrunnsvibrasjon på grunn av forbedret returbevegelse NO339398B1 (no)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR0309901A FR2858854B1 (fr) 2003-08-13 2003-08-13 Accelerometre a vibrations parasites reduites par rappel ameliore
PCT/FR2004/002125 WO2005017538A1 (fr) 2003-08-13 2004-08-11 Accelerometre a vibrations parasites reduites par rappel ameliore

Publications (2)

Publication Number Publication Date
NO20061113L true NO20061113L (no) 2006-04-20
NO339398B1 NO339398B1 (no) 2016-12-12

Family

ID=34112752

Family Applications (1)

Application Number Title Priority Date Filing Date
NO20061113A NO339398B1 (no) 2003-08-13 2006-03-08 Akselerometer med redusert bakgrunnsvibrasjon på grunn av forbedret returbevegelse

Country Status (7)

Country Link
US (1) US7552638B2 (no)
EP (1) EP1664803A1 (no)
JP (1) JP5269313B2 (no)
CN (1) CN100570371C (no)
FR (1) FR2858854B1 (no)
NO (1) NO339398B1 (no)
WO (1) WO2005017538A1 (no)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2858853B1 (fr) * 2003-08-13 2006-01-13 Sercel Rech Const Elect Accelerometre a vibrations parasites reduites par forme des electrodes amelioree
FR2881568B1 (fr) * 2005-02-03 2011-01-14 Commissariat Energie Atomique Condensateur a capacite variable et a forme specifique, gyrometre comportant un tel condensateur et accelerometre comportant un tel condensateur
JP2007139505A (ja) * 2005-11-16 2007-06-07 Denso Corp 容量式力学量センサ
FR2924856B1 (fr) 2007-12-11 2012-02-10 Memscap Condensateur a capacite variable comprenant un peigne mobile et un peigne fixe interdigites, accelerometre et gyrometre comprenant un tel condensateur
JP4875227B2 (ja) * 2009-12-03 2012-02-15 パナソニック株式会社 振動発電器、振動発電装置、及び振動発電装置を搭載した電子機器と通信装置
FI124794B (fi) * 2012-06-29 2015-01-30 Murata Manufacturing Co Parannettu resonaattori
NO335565B1 (no) 2012-12-21 2014-12-29 Cggveritas Services Norway As Geofysisk akselerasjonssensor med justerbar støtbeskyttelse og fremgangsmåte
JPWO2014203903A1 (ja) * 2013-06-19 2017-02-23 株式会社村田製作所 共振周波数調整モジュール
FI126199B (en) * 2013-06-28 2016-08-15 Murata Manufacturing Co CAPACITIVE MICROMECHANICAL SENSOR STRUCTURE AND MICROMECHANICAL ACCELEROMETER
JP6413462B2 (ja) * 2014-08-15 2018-10-31 セイコーエプソン株式会社 物理量センサー、物理量センサー装置、電子機器および移動体
US10352960B1 (en) * 2015-10-30 2019-07-16 Garmin International, Inc. Free mass MEMS accelerometer
CN108225296B (zh) * 2018-01-26 2019-12-27 维沃移动通信有限公司 一种mems陀螺仪、电子设备及电子设备的控制方法

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5249465A (en) * 1990-12-11 1993-10-05 Motorola, Inc. Accelerometer utilizing an annular mass
FI93579C (fi) * 1993-08-20 1995-04-25 Vaisala Oy Sähköstaattisen voiman avulla takaisinkytketty kapasitiivinen anturi ja menetelmä sen aktiivisen elementin muodon ohjaamiseksi
DE4439203C2 (de) * 1994-11-03 2001-06-28 Bosch Gmbh Robert Schaltungsanordnung zur Auswertung eines Beschleunigungssensorsignals
JP3216455B2 (ja) * 1994-12-22 2001-10-09 株式会社村田製作所 容量型静電サーボ加速度センサ
KR100363247B1 (ko) * 1995-10-28 2003-02-14 삼성전자 주식회사 진동구조물및그것의고유진동수제어방법
JP3348240B2 (ja) * 1996-09-05 2002-11-20 松下電器産業株式会社 デジタルフィルタと、サーボモータ制御装置
FR2769369B1 (fr) * 1997-10-08 1999-12-24 Sercel Rech Const Elect Accelerometre a plaque mobile, avec moteur electrostatique de contre-reaction
DE19808549B4 (de) * 1998-02-28 2008-07-10 Robert Bosch Gmbh Mikromechanische Kammstruktur sowie Beschleunigungssensor und Antrieb mit dieser Kammstruktur
JPH11271830A (ja) * 1998-03-24 1999-10-08 Nikon Corp ブレ検出装置、ブレ補正装置及びブレ補正カメラ
JP4178658B2 (ja) * 1998-06-30 2008-11-12 株式会社デンソー 容量式物理量検出装置
JP2000206142A (ja) * 1998-11-13 2000-07-28 Denso Corp 半導体力学量センサおよびその製造方法
US6301965B1 (en) * 1999-12-14 2001-10-16 Sandia Corporation Microelectromechanical accelerometer with resonance-cancelling control circuit including an idle state
JP2001227954A (ja) * 2000-02-15 2001-08-24 Toyota Motor Corp 物理量検出装置
JP2002040045A (ja) * 2000-07-21 2002-02-06 Denso Corp 力学量センサ
EP1624286B1 (en) * 2004-08-03 2017-10-04 STMicroelectronics Srl Micro-electro-mechanical sensor with force feedback loop

Also Published As

Publication number Publication date
CN1842710A (zh) 2006-10-04
NO339398B1 (no) 2016-12-12
US7552638B2 (en) 2009-06-30
FR2858854B1 (fr) 2005-12-16
CN100570371C (zh) 2009-12-16
JP5269313B2 (ja) 2013-08-21
WO2005017538A1 (fr) 2005-02-24
EP1664803A1 (fr) 2006-06-07
FR2858854A1 (fr) 2005-02-18
US20080092651A1 (en) 2008-04-24
WO2005017538A8 (fr) 2005-05-19
JP2007501939A (ja) 2007-02-01

Similar Documents

Publication Publication Date Title
NO20061113L (no) Akselerometer med redusert bakgrunnsvibrasjon pa grunn av forbedret returbevegelse
NO20061114L (no) Akselerometer med redusert bakgrunnsvibrasjon grunnet forbedret elektrodeform
US5618989A (en) Acceleration sensor and measurement method
US20200096536A1 (en) High performance micro-electro-mechanical systems accelerometer with electrostatic control of proof mass
TW200628794A (en) Angular speed measuring transducer
US20150268268A1 (en) Inertial sensor with trim capacitance and method of trimming offset
ATE384306T1 (de) Sensoreinheit, insbesondere für fingerabdrucksensoren
WO2006036858A3 (en) Mems capacitive cantilever strain sensor, devices, and formation methods
KR20010039758A (ko) 센서 신호 처리 장치
AU2000269919A1 (en) Piezo-ceramic multilayer component for measuring instruments and method for the production thereof
US20230296643A1 (en) Micromechanical device with elastic assembly having variable elastic constant
Chao et al. An aluminum nitride on silicon resonant MEMS accelerometer operating in ambient pressure
KR101825902B1 (ko) 피에조 저항성 마이크로메커니컬 센서 소자 및 측정 방법
Hezarjaribi et al. Capacitive pressure sensors based on MEMS, operating in harsh environments
JP2007122891A (ja) タッチキーとそれを用いた電気機器
CN105858375B (zh) 压力触控电梯按钮
US9291455B2 (en) Method for operating and/or for measuring a micromechanical device, and micromechanical device
WO2003042653A3 (de) Sensor zur bestimmung der dielektrizitätskonstanten eines kraftstoffs
JP2004294254A (ja) 静電容量型荷重センサ
CN106201125A (zh) 感测装置
Kavitha et al. An improved SPICE model for MEMS based Capacitive Accelerometers
WO2019205085A8 (en) Target material sensing using resonant circuit with sensing capacitor and electrical isolation
Kirankumar et al. Design and simulation of MEMS capacitive pressure sensor
Blaž et al. Capacitive displacement sensor embedded in LTCC packaging
RU190397U1 (ru) Микромеханический осевой акселерометр