NO20061114L - Akselerometer med redusert bakgrunnsvibrasjon grunnet forbedret elektrodeform - Google Patents

Akselerometer med redusert bakgrunnsvibrasjon grunnet forbedret elektrodeform

Info

Publication number
NO20061114L
NO20061114L NO20061114A NO20061114A NO20061114L NO 20061114 L NO20061114 L NO 20061114L NO 20061114 A NO20061114 A NO 20061114A NO 20061114 A NO20061114 A NO 20061114A NO 20061114 L NO20061114 L NO 20061114L
Authority
NO
Norway
Prior art keywords
accelerometer
electrodes
mass
movable mass
capacitance
Prior art date
Application number
NO20061114A
Other languages
English (en)
Other versions
NO339401B1 (no
Inventor
Jean-Paul Menard
Maurice Moreau
Original Assignee
Sercel Rech Const Elect
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sercel Rech Const Elect filed Critical Sercel Rech Const Elect
Publication of NO20061114L publication Critical patent/NO20061114L/no
Publication of NO339401B1 publication Critical patent/NO339401B1/no

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
    • B81B3/004—Angular deflection
    • B81B3/0045—Improve properties related to angular swinging, e.g. control resonance frequency
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
    • G01P15/131—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electrostatic counterbalancing means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0136—Comb structures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
    • G01P2015/0811—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass
    • G01P2015/0817—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass for pivoting movement of the mass, e.g. in-plane pendulum

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Pressure Sensors (AREA)
  • Micromachines (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)

Abstract

Oppfinnelsen vedrører et akselerometer innbefattende en bevegbar masse (5) og en fast del, hvor variasjoner i kapasitansen (3, 4) benyttes for detektering av massens (5) bevegelse. Akselerometeret ifølge oppfinnelsen innbefatter en første serie av elektroder (4) som er fast forbundne med massen (5) og har fingerinngrep med en serie av elektroder (3, 7) som er fast forbundet med den faste del (2). Ifølge oppfinnelsen har hver bevegbar elektrode (4), sammen med en hosliggende fast elektrode (3), en kapasitans som varierer i samsvar med stillingen av den bevegelige masse (5). Akselerometeret innbefatter videre en elektronisk krets som benyttes for detektering av variasjonen til i det minste én kapasitans mellom den bevegbare masse (5) og den faste del, i form av en forskyvningsindikator for den bevegbare masse. Oppfinnelsen er kjennetegnet ved at én eller flere av elektrodene (3, 4) på den bevegbare masse (5) og/eller den faste del har form av en finger med en stor basis og med en profil som avsmalner i retning mot den frie enden. Returpåkjenningen kan velges slik at den mekaniske kraften vil ha en i hovedsaken nullenergisone ved elektrodenes mekaniske resonansfrekvens.
NO20061114A 2003-08-13 2006-03-08 Akselerometer med redusert bakgrunnsvibrasjon grunnet forbedret elektrodeform NO339401B1 (no)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR0309899A FR2858853B1 (fr) 2003-08-13 2003-08-13 Accelerometre a vibrations parasites reduites par forme des electrodes amelioree
PCT/FR2004/002123 WO2005017537A1 (fr) 2003-08-13 2004-08-11 Accelerometre a vibrations parasites reduites par forme des electrodes amelioree

Publications (2)

Publication Number Publication Date
NO20061114L true NO20061114L (no) 2006-04-20
NO339401B1 NO339401B1 (no) 2016-12-12

Family

ID=34112750

Family Applications (1)

Application Number Title Priority Date Filing Date
NO20061114A NO339401B1 (no) 2003-08-13 2006-03-08 Akselerometer med redusert bakgrunnsvibrasjon grunnet forbedret elektrodeform

Country Status (7)

Country Link
US (1) US7797998B2 (no)
EP (1) EP1660890B1 (no)
JP (3) JP2007501938A (no)
CN (1) CN1836168B (no)
FR (1) FR2858853B1 (no)
NO (1) NO339401B1 (no)
WO (1) WO2005017537A1 (no)

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FR2888394A1 (fr) * 2005-07-08 2007-01-12 Commissariat Energie Atomique Dispositif capacitif a volume capacitif optimise
US8042396B2 (en) 2007-09-11 2011-10-25 Stmicroelectronics S.R.L. Microelectromechanical sensor with improved mechanical decoupling of sensing and driving modes
FR2924856B1 (fr) 2007-12-11 2012-02-10 Memscap Condensateur a capacite variable comprenant un peigne mobile et un peigne fixe interdigites, accelerometre et gyrometre comprenant un tel condensateur
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IT1392741B1 (it) 2008-12-23 2012-03-16 St Microelectronics Rousset Giroscopio microelettromeccanico con migliorata reiezione di disturbi di accelerazione
CN102356323B (zh) * 2009-03-19 2014-07-30 惠普开发有限公司 基于三相电容的感测
IT1394007B1 (it) 2009-05-11 2012-05-17 St Microelectronics Rousset Struttura microelettromeccanica con reiezione migliorata di disturbi di accelerazione
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Also Published As

Publication number Publication date
JP2012118087A (ja) 2012-06-21
JP5599832B2 (ja) 2014-10-01
NO339401B1 (no) 2016-12-12
FR2858853A1 (fr) 2005-02-18
JP2007501938A (ja) 2007-02-01
EP1660890B1 (fr) 2016-03-09
CN1836168B (zh) 2010-08-25
FR2858853B1 (fr) 2006-01-13
JP2012127971A (ja) 2012-07-05
US20080196500A1 (en) 2008-08-21
US7797998B2 (en) 2010-09-21
EP1660890A1 (fr) 2006-05-31
CN1836168A (zh) 2006-09-20
WO2005017537A1 (fr) 2005-02-24
JP5442785B2 (ja) 2014-03-12

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