JP2012118087A - 改良電極形状による外来振動抑制形加速度計 - Google Patents
改良電極形状による外来振動抑制形加速度計 Download PDFInfo
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- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
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- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
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- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
- G01P2015/0811—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass
- G01P2015/0817—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass for pivoting movement of the mass, e.g. in-plane pendulum
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Abstract
【解決手段】可動質量部5を初期位置に復帰させる反復的な静電気復帰力を、可動質量部5及び/又は固定部2の各電極3、4の機械的共振周波数で実質的にゼロ出力となる領域をもつように設定する。更に可動質量部5及び/又は固定部2の各電極3、4のうち、少なくとも一つが幅広の基部と先端部で幅狭の輪郭をもつフィンガー形状を有する。
【選択図】図1
Description
・固定部としてのアーマチュア2
・アーマチュア2に固設された2組のくし歯状の固定側電極3、7
・可動質量部としての可動プレート5に固設された1組のくし歯状の可動側電極4
・可動プレート5とアーマチュア2との間を連結するばね6(図示の理解を容易にするため、ここでは単一のばねを示す)。
Claims (17)
- 可動質量部(5)と固定部(2)により静電容量(3、4)の変化を利用して可動質量部(5)の変位を検出する加速度計であって、可動質量部(5)に固設された一連のくし歯状の可動側電極(4)と固定部(2)に固設された一連のくし歯状の固定側電極とが互いに入り込むように組み合わされ、各可動側電極(4)と各固定側電極(3)とによって可動質量部(5)の位置の関数として変化する可変静電容量が形成され、可動質量部の変位を測定するために可動質量部(5)と固定部(2)との間の少なくとも一カ所における静電容量の変化を検出する電子回路を備えているものにおいて、可動質量部(5)及び/又は固定部(2)の各電極(3、4)のうちの少なくとも一つが幅広の基部と先端部で幅狭の輪郭をもつフィンガー形状を有することを特徴とする加速度計。
- 電子回路が可動質量部(5)を原位置に復帰させるための静電気力を発生するものであることを特徴とする請求項1に記載の加速度計。
- 電子回路が可動質量部(5)の変位の測定結果に追従して復帰用静電気力を発生するものであることを特徴とする請求項2に記載の加速度計。
- 可動質量部(5)及び/又は固定部(2)の各電極(3、4)が、少なくとも一部に亘って横断面の幅が連続的に変化している部分を有することを特徴とする請求項1〜3のいずれか1項に記載の加速度計。
- 可動質量部(5)及び/又は固定部(2)の各電極(3、4)が、少なくとも一部において横断面の幅が急変している部分を有することを特徴とする請求項1〜4のいずれか1項に記載の加速度計。
- 可動質量部(5)及び/又は固定部(2)の各電極(3、4)が、少なくとも一部において横断面の幅が先端へ向かって減少している部分を有することを特徴とする請求項1〜5のいずれか1項に記載の加速度計。
- 可動質量部(5)及び/又は固定部(2)の各電極(3、4)が、先端へ向かって幅(L、I)が減少する台形部分を備えていることを特徴とする請求項1〜6のいずれか1項に記載の加速度計。
- 可動質量部(5)及び/又は固定部(2)の各電極(3、4)が、横断面の幅(L、I)が一定幅ずつ段階的に変化する部分を有し、この幅(L、I)が各段毎に急変していることを特徴とする請求項1〜7のいずれか1項に記載の加速度計。
- 可動質量部(5)及び/又は固定部(2)の各電極(3、4)が、先端へ向かって幅が徐々に減少して少なくとも一つの丸味のついた縁部を形成している部分を有することを特徴とする請求項1〜8のいずれか1項に記載の加速度計。
- 固定部(2)側の各電極(3)が可動質量部(5)側のそれぞれ隣接する二つの電極(4)間の隙間と相補的な形状を有することを特徴とする請求項1〜9のいずれか1項に記載の加速度計。
- 電子回路が反復的な復帰用静電気力を発生するものであり、この反復的な復帰用静電気力は特にその機械的出力の周波数スペクトル(10、20)が可動質量部(5)及び/又は固定部(2)の各電極(3、4)の機械的共振周波数で実質的にゼロ出力となる領域をもつように設定されていることを特徴とする請求項1〜10のいずれか1項に記載の加速度計。
- 電子回路が予め定められた時間幅の時間帯(Ta)内における可動質量部の復帰動作を可動質量部の変位の測定結果に追従して反復的に実行するものであり、対応する時間帯の復帰動作信号の周波数変化(20)が可動質量部(5)及び/又は固定部(2)の各電極(3、4)の共振周波数で実質的にゼロ点へ復帰するように設定されていることを特徴とする請求項11に記載の加速度計。
- 復帰動作信号の周波数変化(20)が可動質量部(5)及び/又は固定部(2)の各電極(3、4)の共振周波数でゼロ点へ復帰するように時間帯(Ta)の平均持続時間幅が設定されていることを特徴とする請求項12に記載の加速度計。
- 復帰動作信号の周波数変化(20)が可動質量部(5)及び/又は固定部(2)の各電極(3、4)の共振周波数で最初にゼロ点(1/Ta)へ復帰するように時間帯(Ta)の平均持続時間幅が設定されていることを特徴とする請求項13に記載の加速度計。
- 復帰用静電気力が平均持続時間幅Taの時間帯を通じて出力され、この時間幅Taが、可動質量部(5)及び/又は固定部(2)の各電極(3、4)の共振周波数をfとするとき、式1/Ta=fに従って設定されていることを特徴とする請求項11〜14のいずれか1項に記載の加速度計。
- 復帰動作信号の周波数変化が基本サイン波形状を示すことを特徴とする請求項15に記載の加速度計。
- 各電極のフィンガー形状の先端部が曲率ゼロ又は凸状湾曲の縁部を形成していることを特徴とする請求項1〜16のいずれか1項に記載の加速度計。
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FR0309899A FR2858853B1 (fr) | 2003-08-13 | 2003-08-13 | Accelerometre a vibrations parasites reduites par forme des electrodes amelioree |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112035738A (zh) * | 2020-08-14 | 2020-12-04 | 北京奇艺世纪科技有限公司 | 一种电子书单推荐方法及装置、电子设备 |
Families Citing this family (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2881568B1 (fr) * | 2005-02-03 | 2011-01-14 | Commissariat Energie Atomique | Condensateur a capacite variable et a forme specifique, gyrometre comportant un tel condensateur et accelerometre comportant un tel condensateur |
FR2888394A1 (fr) * | 2005-07-08 | 2007-01-12 | Commissariat Energie Atomique | Dispositif capacitif a volume capacitif optimise |
US8042394B2 (en) | 2007-09-11 | 2011-10-25 | Stmicroelectronics S.R.L. | High sensitivity microelectromechanical sensor with rotary driving motion |
FR2924856B1 (fr) | 2007-12-11 | 2012-02-10 | Memscap | Condensateur a capacite variable comprenant un peigne mobile et un peigne fixe interdigites, accelerometre et gyrometre comprenant un tel condensateur |
IT1391972B1 (it) | 2008-11-26 | 2012-02-02 | St Microelectronics Rousset | Giroscopio microelettromeccanico con movimento di azionamento rotatorio e migliorate caratteristiche elettriche |
IT1391973B1 (it) | 2008-11-26 | 2012-02-02 | St Microelectronics Rousset | Giroscopio microelettromeccanico mono o biassiale con aumentata sensibilita' al rilevamento di velocita' angolari |
ITTO20090489A1 (it) | 2008-11-26 | 2010-12-27 | St Microelectronics Srl | Circuito di lettura per un giroscopio mems multi-asse avente direzioni di rilevamento inclinate rispetto agli assi di riferimento, e corrispondente giroscopio mems multi-asse |
IT1392741B1 (it) * | 2008-12-23 | 2012-03-16 | St Microelectronics Rousset | Giroscopio microelettromeccanico con migliorata reiezione di disturbi di accelerazione |
CN102356323B (zh) * | 2009-03-19 | 2014-07-30 | 惠普开发有限公司 | 基于三相电容的感测 |
IT1394007B1 (it) | 2009-05-11 | 2012-05-17 | St Microelectronics Rousset | Struttura microelettromeccanica con reiezione migliorata di disturbi di accelerazione |
DE102009028924A1 (de) * | 2009-08-27 | 2011-03-03 | Robert Bosch Gmbh | Kapazitiver Sensor und Aktor |
ITTO20091042A1 (it) | 2009-12-24 | 2011-06-25 | St Microelectronics Srl | Giroscopio integrato microelettromeccanico con migliorata struttura di azionamento |
US20120202421A1 (en) * | 2011-02-04 | 2012-08-09 | Research In Motion Limited | Mobile wireless communications device to detect movement of an adjacent non-radiating object and associated methods |
US9239222B2 (en) | 2011-08-09 | 2016-01-19 | Toyota Jidosha Kabushiki Kaisha | Displacement amount monitoring electrode structure |
CN103140736B (zh) | 2011-08-26 | 2016-05-11 | 丰田自动车株式会社 | 位移量监测电极的构造 |
ITTO20110806A1 (it) | 2011-09-12 | 2013-03-13 | St Microelectronics Srl | Dispositivo microelettromeccanico integrante un giroscopio e un accelerometro |
FI126199B (en) * | 2013-06-28 | 2016-08-15 | Murata Manufacturing Co | CAPACITIVE MICROMECHANICAL SENSOR STRUCTURE AND MICROMECHANICAL ACCELEROMETER |
US9404747B2 (en) | 2013-10-30 | 2016-08-02 | Stmicroelectroncs S.R.L. | Microelectromechanical gyroscope with compensation of quadrature error drift |
JP6211463B2 (ja) | 2014-05-23 | 2017-10-11 | 日立オートモティブシステムズ株式会社 | 慣性センサ |
TWI531806B (zh) * | 2014-09-18 | 2016-05-01 | 溫瓌岸 | 兩用共振型磁力計 |
GB201514319D0 (en) * | 2015-08-12 | 2015-09-23 | Atlantic Inertial Systems Ltd | Accelerometers |
ITUA20162172A1 (it) | 2016-03-31 | 2017-10-01 | St Microelectronics Srl | Sensore accelerometrico realizzato in tecnologia mems avente elevata accuratezza e ridotta sensibilita' nei confronti della temperatura e dell'invecchiamento |
US11287441B2 (en) | 2019-11-07 | 2022-03-29 | Honeywell International Inc. | Resonator including one or more mechanical beams with added mass |
US11634319B2 (en) * | 2020-07-02 | 2023-04-25 | National Taiwan University | Device and method for monitoring surface condition of contact surface of detected object |
US20220252636A1 (en) * | 2021-02-05 | 2022-08-11 | Kionix, Inc. | Accelerometer apparatuses and systems |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08178955A (ja) * | 1994-12-22 | 1996-07-12 | Murata Mfg Co Ltd | 容量型静電サーボ加速度センサ |
JPH11132771A (ja) * | 1997-07-14 | 1999-05-21 | Litton Syst Inc | 慣性センサ用の信号処理システム |
JP2000206142A (ja) * | 1998-11-13 | 2000-07-28 | Denso Corp | 半導体力学量センサおよびその製造方法 |
JP2001014782A (ja) * | 1999-06-30 | 2001-01-19 | Hitachi Ltd | 磁気ディスク装置 |
JP2002040045A (ja) * | 2000-07-21 | 2002-02-06 | Denso Corp | 力学量センサ |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5428259A (en) * | 1990-02-02 | 1995-06-27 | Nec Corporation | Micromotion mechanical structure and a process for the production thereof |
JPH05134707A (ja) * | 1991-11-11 | 1993-06-01 | Mitsubishi Heavy Ind Ltd | サーボ制御装置 |
US5343766A (en) * | 1992-02-25 | 1994-09-06 | C & J Industries, Inc. | Switched capacitor transducer |
US5610335A (en) * | 1993-05-26 | 1997-03-11 | Cornell Research Foundation | Microelectromechanical lateral accelerometer |
JP3348240B2 (ja) * | 1996-09-05 | 2002-11-20 | 松下電器産業株式会社 | デジタルフィルタと、サーボモータ制御装置 |
FR2769369B1 (fr) * | 1997-10-08 | 1999-12-24 | Sercel Rech Const Elect | Accelerometre a plaque mobile, avec moteur electrostatique de contre-reaction |
JP3307328B2 (ja) * | 1998-05-11 | 2002-07-24 | 株式会社デンソー | 半導体力学量センサ |
JP4277333B2 (ja) * | 1998-09-22 | 2009-06-10 | 神鋼電機株式会社 | ディジタルフィルタ |
US6105428A (en) * | 1998-12-10 | 2000-08-22 | Motorola, Inc. | Sensor and method of use |
US6507138B1 (en) * | 1999-06-24 | 2003-01-14 | Sandia Corporation | Very compact, high-stability electrostatic actuator featuring contact-free self-limiting displacement |
US6301965B1 (en) * | 1999-12-14 | 2001-10-16 | Sandia Corporation | Microelectromechanical accelerometer with resonance-cancelling control circuit including an idle state |
AU2929601A (en) * | 2000-01-05 | 2001-07-16 | Iolon, Inc. | Tiltable electrostatic microactuator and method for using same |
US6508126B2 (en) * | 2000-07-21 | 2003-01-21 | Denso Corporation | Dynamic quantity sensor having movable and fixed electrodes with high rigidity |
JP2002340929A (ja) * | 2001-05-18 | 2002-11-27 | Aisin Seiki Co Ltd | 加速度センサ |
FR2858854B1 (fr) * | 2003-08-13 | 2005-12-16 | Sercel Rech Const Elect | Accelerometre a vibrations parasites reduites par rappel ameliore |
-
2003
- 2003-08-13 FR FR0309899A patent/FR2858853B1/fr not_active Expired - Fee Related
-
2004
- 2004-08-11 EP EP04786295.8A patent/EP1660890B1/fr active Active
- 2004-08-11 CN CN2004800232145A patent/CN1836168B/zh not_active Expired - Fee Related
- 2004-08-11 WO PCT/FR2004/002123 patent/WO2005017537A1/fr active Application Filing
- 2004-08-11 US US11/630,703 patent/US7797998B2/en active Active
- 2004-08-11 JP JP2006523032A patent/JP2007501938A/ja active Pending
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2006
- 2006-03-08 NO NO20061114A patent/NO339401B1/no unknown
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2012
- 2012-02-13 JP JP2012028706A patent/JP5442785B2/ja active Active
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Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08178955A (ja) * | 1994-12-22 | 1996-07-12 | Murata Mfg Co Ltd | 容量型静電サーボ加速度センサ |
JPH11132771A (ja) * | 1997-07-14 | 1999-05-21 | Litton Syst Inc | 慣性センサ用の信号処理システム |
JP2000206142A (ja) * | 1998-11-13 | 2000-07-28 | Denso Corp | 半導体力学量センサおよびその製造方法 |
JP2001014782A (ja) * | 1999-06-30 | 2001-01-19 | Hitachi Ltd | 磁気ディスク装置 |
JP2002040045A (ja) * | 2000-07-21 | 2002-02-06 | Denso Corp | 力学量センサ |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112035738A (zh) * | 2020-08-14 | 2020-12-04 | 北京奇艺世纪科技有限公司 | 一种电子书单推荐方法及装置、电子设备 |
Also Published As
Publication number | Publication date |
---|---|
NO339401B1 (no) | 2016-12-12 |
US20080196500A1 (en) | 2008-08-21 |
EP1660890B1 (fr) | 2016-03-09 |
EP1660890A1 (fr) | 2006-05-31 |
CN1836168A (zh) | 2006-09-20 |
JP5599832B2 (ja) | 2014-10-01 |
US7797998B2 (en) | 2010-09-21 |
FR2858853B1 (fr) | 2006-01-13 |
JP5442785B2 (ja) | 2014-03-12 |
CN1836168B (zh) | 2010-08-25 |
WO2005017537A1 (fr) | 2005-02-24 |
JP2007501938A (ja) | 2007-02-01 |
NO20061114L (no) | 2006-04-20 |
JP2012127971A (ja) | 2012-07-05 |
FR2858853A1 (fr) | 2005-02-18 |
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