FR2858854B1 - Accelerometre a vibrations parasites reduites par rappel ameliore - Google Patents

Accelerometre a vibrations parasites reduites par rappel ameliore

Info

Publication number
FR2858854B1
FR2858854B1 FR0309901A FR0309901A FR2858854B1 FR 2858854 B1 FR2858854 B1 FR 2858854B1 FR 0309901 A FR0309901 A FR 0309901A FR 0309901 A FR0309901 A FR 0309901A FR 2858854 B1 FR2858854 B1 FR 2858854B1
Authority
FR
France
Prior art keywords
parasites
accelerometer
vibration
reduced
reminder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
FR0309901A
Other languages
English (en)
Other versions
FR2858854A1 (fr
Inventor
Jean Paul Menard
Maurice Moreau
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sercel SAS
Original Assignee
Sercel SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to FR0309901A priority Critical patent/FR2858854B1/fr
Application filed by Sercel SAS filed Critical Sercel SAS
Priority to US11/547,899 priority patent/US7552638B2/en
Priority to CNB2004800231918A priority patent/CN100570371C/zh
Priority to EP04786297A priority patent/EP1664803A1/fr
Priority to PCT/FR2004/002125 priority patent/WO2005017538A1/fr
Priority to JP2006523033A priority patent/JP5269313B2/ja
Publication of FR2858854A1 publication Critical patent/FR2858854A1/fr
Application granted granted Critical
Publication of FR2858854B1 publication Critical patent/FR2858854B1/fr
Priority to NO20061113A priority patent/NO339398B1/no
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
    • G01P15/131—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electrostatic counterbalancing means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Geophysics And Detection Of Objects (AREA)
  • Fittings On The Vehicle Exterior For Carrying Loads, And Devices For Holding Or Mounting Articles (AREA)
  • Air Bags (AREA)
FR0309901A 2003-08-13 2003-08-13 Accelerometre a vibrations parasites reduites par rappel ameliore Expired - Lifetime FR2858854B1 (fr)

Priority Applications (7)

Application Number Priority Date Filing Date Title
FR0309901A FR2858854B1 (fr) 2003-08-13 2003-08-13 Accelerometre a vibrations parasites reduites par rappel ameliore
CNB2004800231918A CN100570371C (zh) 2003-08-13 2004-08-11 由于改进的回归移动而具有减少的额外振动的加速度计
EP04786297A EP1664803A1 (fr) 2003-08-13 2004-08-11 Accelerometre a vibrations parasites reduites par rappel ameliore
PCT/FR2004/002125 WO2005017538A1 (fr) 2003-08-13 2004-08-11 Accelerometre a vibrations parasites reduites par rappel ameliore
US11/547,899 US7552638B2 (en) 2003-08-13 2004-08-11 Accelerometer with reduced extraneous vibrations owing to improved return movement
JP2006523033A JP5269313B2 (ja) 2003-08-13 2004-08-11 改良復帰移動式外来振動抑制形加速度計
NO20061113A NO339398B1 (no) 2003-08-13 2006-03-08 Akselerometer med redusert bakgrunnsvibrasjon på grunn av forbedret returbevegelse

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0309901A FR2858854B1 (fr) 2003-08-13 2003-08-13 Accelerometre a vibrations parasites reduites par rappel ameliore

Publications (2)

Publication Number Publication Date
FR2858854A1 FR2858854A1 (fr) 2005-02-18
FR2858854B1 true FR2858854B1 (fr) 2005-12-16

Family

ID=34112752

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0309901A Expired - Lifetime FR2858854B1 (fr) 2003-08-13 2003-08-13 Accelerometre a vibrations parasites reduites par rappel ameliore

Country Status (7)

Country Link
US (1) US7552638B2 (fr)
EP (1) EP1664803A1 (fr)
JP (1) JP5269313B2 (fr)
CN (1) CN100570371C (fr)
FR (1) FR2858854B1 (fr)
NO (1) NO339398B1 (fr)
WO (1) WO2005017538A1 (fr)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2858853B1 (fr) * 2003-08-13 2006-01-13 Sercel Rech Const Elect Accelerometre a vibrations parasites reduites par forme des electrodes amelioree
FR2881568B1 (fr) * 2005-02-03 2011-01-14 Commissariat Energie Atomique Condensateur a capacite variable et a forme specifique, gyrometre comportant un tel condensateur et accelerometre comportant un tel condensateur
JP2007139505A (ja) * 2005-11-16 2007-06-07 Denso Corp 容量式力学量センサ
FR2924856B1 (fr) 2007-12-11 2012-02-10 Memscap Condensateur a capacite variable comprenant un peigne mobile et un peigne fixe interdigites, accelerometre et gyrometre comprenant un tel condensateur
WO2011067936A1 (fr) * 2009-12-03 2011-06-09 パナソニック株式会社 Générateur d'énergie par vibration, dispositif de génération d'énergie par vibration, et dispositif électronique et dispositif de communication ayant un dispositif de génération d'énergie par vibration installé
FI124794B (fi) * 2012-06-29 2015-01-30 Murata Manufacturing Co Parannettu resonaattori
NO335565B1 (no) 2012-12-21 2014-12-29 Cggveritas Services Norway As Geofysisk akselerasjonssensor med justerbar støtbeskyttelse og fremgangsmåte
WO2014203903A1 (fr) * 2013-06-19 2014-12-24 ヤマハ株式会社 Module de réglage de la fréquence de résonance
FI126199B (en) * 2013-06-28 2016-08-15 Murata Manufacturing Co CAPACITIVE MICROMECHANICAL SENSOR STRUCTURE AND MICROMECHANICAL ACCELEROMETER
JP6413462B2 (ja) * 2014-08-15 2018-10-31 セイコーエプソン株式会社 物理量センサー、物理量センサー装置、電子機器および移動体
US10352960B1 (en) * 2015-10-30 2019-07-16 Garmin International, Inc. Free mass MEMS accelerometer
CN108225296B (zh) * 2018-01-26 2019-12-27 维沃移动通信有限公司 一种mems陀螺仪、电子设备及电子设备的控制方法

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5249465A (en) * 1990-12-11 1993-10-05 Motorola, Inc. Accelerometer utilizing an annular mass
FI93579C (fi) * 1993-08-20 1995-04-25 Vaisala Oy Sähköstaattisen voiman avulla takaisinkytketty kapasitiivinen anturi ja menetelmä sen aktiivisen elementin muodon ohjaamiseksi
DE4439203C2 (de) * 1994-11-03 2001-06-28 Bosch Gmbh Robert Schaltungsanordnung zur Auswertung eines Beschleunigungssensorsignals
JP3216455B2 (ja) * 1994-12-22 2001-10-09 株式会社村田製作所 容量型静電サーボ加速度センサ
KR100363247B1 (ko) * 1995-10-28 2003-02-14 삼성전자 주식회사 진동구조물및그것의고유진동수제어방법
JP3348240B2 (ja) * 1996-09-05 2002-11-20 松下電器産業株式会社 デジタルフィルタと、サーボモータ制御装置
FR2769369B1 (fr) * 1997-10-08 1999-12-24 Sercel Rech Const Elect Accelerometre a plaque mobile, avec moteur electrostatique de contre-reaction
DE19808549B4 (de) * 1998-02-28 2008-07-10 Robert Bosch Gmbh Mikromechanische Kammstruktur sowie Beschleunigungssensor und Antrieb mit dieser Kammstruktur
JPH11271830A (ja) * 1998-03-24 1999-10-08 Nikon Corp ブレ検出装置、ブレ補正装置及びブレ補正カメラ
JP4178658B2 (ja) * 1998-06-30 2008-11-12 株式会社デンソー 容量式物理量検出装置
JP2000206142A (ja) * 1998-11-13 2000-07-28 Denso Corp 半導体力学量センサおよびその製造方法
US6301965B1 (en) * 1999-12-14 2001-10-16 Sandia Corporation Microelectromechanical accelerometer with resonance-cancelling control circuit including an idle state
JP2001227954A (ja) * 2000-02-15 2001-08-24 Toyota Motor Corp 物理量検出装置
JP2002040045A (ja) * 2000-07-21 2002-02-06 Denso Corp 力学量センサ
EP1624286B1 (fr) * 2004-08-03 2017-10-04 STMicroelectronics Srl Capteur micro-éléctro-mécanique avec boucle de rétroaction de force

Also Published As

Publication number Publication date
US7552638B2 (en) 2009-06-30
NO20061113L (no) 2006-04-20
US20080092651A1 (en) 2008-04-24
FR2858854A1 (fr) 2005-02-18
NO339398B1 (no) 2016-12-12
JP5269313B2 (ja) 2013-08-21
WO2005017538A1 (fr) 2005-02-24
JP2007501939A (ja) 2007-02-01
CN100570371C (zh) 2009-12-16
CN1842710A (zh) 2006-10-04
WO2005017538A8 (fr) 2005-05-19
EP1664803A1 (fr) 2006-06-07

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