DE602004015689D1 - Beschleunigungsaufnehmer - Google Patents

Beschleunigungsaufnehmer

Info

Publication number
DE602004015689D1
DE602004015689D1 DE602004015689T DE602004015689T DE602004015689D1 DE 602004015689 D1 DE602004015689 D1 DE 602004015689D1 DE 602004015689 T DE602004015689 T DE 602004015689T DE 602004015689 T DE602004015689 T DE 602004015689T DE 602004015689 D1 DE602004015689 D1 DE 602004015689D1
Authority
DE
Germany
Prior art keywords
accelerometers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602004015689T
Other languages
English (en)
Inventor
Hiroyuki Hatano
Shinji Furuichi
Masakatsu Saitoh
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Proterial Ltd
Original Assignee
Hitachi Metals Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Metals Ltd filed Critical Hitachi Metals Ltd
Publication of DE602004015689D1 publication Critical patent/DE602004015689D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/12—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance
    • G01P15/123—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance by piezo-resistive elements, e.g. semiconductor strain gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/084—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass
    • G01P2015/0842—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass the mass being of clover leaf shape

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Micromachines (AREA)
DE602004015689T 2003-09-16 2004-09-13 Beschleunigungsaufnehmer Active DE602004015689D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003322452A JP4416460B2 (ja) 2003-09-16 2003-09-16 加速度センサー

Publications (1)

Publication Number Publication Date
DE602004015689D1 true DE602004015689D1 (de) 2008-09-25

Family

ID=34191271

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602004015689T Active DE602004015689D1 (de) 2003-09-16 2004-09-13 Beschleunigungsaufnehmer

Country Status (6)

Country Link
US (1) US7111514B2 (de)
EP (1) EP1517151B1 (de)
JP (1) JP4416460B2 (de)
KR (1) KR100817736B1 (de)
CN (1) CN100373161C (de)
DE (1) DE602004015689D1 (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005283402A (ja) * 2004-03-30 2005-10-13 Fujitsu Media Device Kk 慣性センサ
JP4337099B2 (ja) * 2004-11-08 2009-09-30 日立金属株式会社 加速度センサ
JP2006201041A (ja) * 2005-01-20 2006-08-03 Oki Electric Ind Co Ltd 加速度センサ
JP2006275896A (ja) * 2005-03-30 2006-10-12 Yokohama Rubber Co Ltd:The 半導体加速度センサ
US7562575B2 (en) * 2005-08-05 2009-07-21 Hitachi Metals, Ltd. Impact-resistant acceleration sensor
US20070246665A1 (en) * 2006-04-20 2007-10-25 Lafond Peter H Mechanical isolation for mems devices
TW200813431A (en) * 2006-08-09 2008-03-16 Hitachi Metals Ltd Multi-range three-axis acceleration sensor device
JP4637074B2 (ja) * 2006-09-28 2011-02-23 トレックス・セミコンダクター株式会社 ピエゾ抵抗型加速度センサー
JP2008190961A (ja) * 2007-02-02 2008-08-21 Hitachi Metals Ltd ピエゾ抵抗型加速度センサー
JP4404143B2 (ja) * 2007-07-02 2010-01-27 株式会社デンソー 半導体装置およびその製造方法
JP2010071799A (ja) * 2008-09-18 2010-04-02 Rohm Co Ltd 加速度センサおよび加速度センサの製造方法
KR101127862B1 (ko) * 2010-04-28 2012-03-21 한국원자력연구원 튜브 유체유발진동 측정용 삽입형 가속도센서
WO2011161917A1 (ja) * 2010-06-25 2011-12-29 パナソニック株式会社 加速度センサ
KR101367049B1 (ko) 2012-12-21 2014-02-24 삼성전기주식회사 가속도 센서
JP6475503B2 (ja) * 2014-02-12 2019-02-27 本田技研工業株式会社 車両用振動騒音低減装置
JP6318760B2 (ja) * 2014-03-25 2018-05-09 セイコーエプソン株式会社 物理量センサー、高度計、電子機器および移動体
US20230211755A1 (en) * 2022-01-06 2023-07-06 GM Global Technology Operations LLC Capacitive/acoustic sensor lenses for cleaning feedback

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5134881A (en) * 1986-06-22 1992-08-04 Triton Technologies, Inc. Micro-machined accelerometer with composite material springs
US4882933A (en) * 1988-06-03 1989-11-28 Novasensor Accelerometer with integral bidirectional shock protection and controllable viscous damping
JPH04274005A (ja) 1991-03-01 1992-09-30 Nec Corp 半導体加速度センサ
JPH0541148A (ja) 1991-08-02 1993-02-19 Nec Corp 半導体加速度センサの製造方法
JP2831195B2 (ja) * 1992-03-25 1998-12-02 富士電機株式会社 半導体加速度センサ
JP2658949B2 (ja) 1995-02-23 1997-09-30 日本電気株式会社 半導体加速度センサ
US6293149B1 (en) * 1997-02-21 2001-09-25 Matsushita Electric Works, Ltd. Acceleration sensor element and method of its manufacture
JPH10253657A (ja) * 1997-03-14 1998-09-25 Nikon Corp 半導体加速度センサ
JP3494022B2 (ja) * 1997-08-29 2004-02-03 松下電工株式会社 半導体加速度センサの製造方法
JP3282570B2 (ja) 1997-11-28 2002-05-13 松下電工株式会社 半導体加速度センサ
JP2000022169A (ja) * 1998-06-29 2000-01-21 Matsushita Electric Works Ltd 半導体加速度センサ及びその製造方法
JP2004506176A (ja) * 2000-04-04 2004-02-26 ローズマウント　エアロスペイス　インコーポレイテッド ３軸加速度計
JP3597806B2 (ja) 2001-09-25 2004-12-08 東京エレクトロン株式会社 可動構造部を有する微小構造体及びその製造方法
JP2003172745A (ja) * 2001-09-26 2003-06-20 Hitachi Metals Ltd 半導体加速度センサ
JP4216525B2 (ja) * 2002-05-13 2009-01-28 株式会社ワコー 加速度センサおよびその製造方法
US6892578B2 (en) * 2002-11-29 2005-05-17 Hitachi Metals Ltd. Acceleration sensor

Also Published As

Publication number Publication date
EP1517151A1 (de) 2005-03-23
US20050056093A1 (en) 2005-03-17
JP4416460B2 (ja) 2010-02-17
CN100373161C (zh) 2008-03-05
EP1517151B1 (de) 2008-08-13
US7111514B2 (en) 2006-09-26
JP2005091056A (ja) 2005-04-07
KR20050027915A (ko) 2005-03-21
KR100817736B1 (ko) 2008-03-31
CN1598596A (zh) 2005-03-23

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Legal Events

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