JP5269313B2 - 改良復帰移動式外来振動抑制形加速度計 - Google Patents
改良復帰移動式外来振動抑制形加速度計 Download PDFInfo
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- JP5269313B2 JP5269313B2 JP2006523033A JP2006523033A JP5269313B2 JP 5269313 B2 JP5269313 B2 JP 5269313B2 JP 2006523033 A JP2006523033 A JP 2006523033A JP 2006523033 A JP2006523033 A JP 2006523033A JP 5269313 B2 JP5269313 B2 JP 5269313B2
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
- G01P15/131—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electrostatic counterbalancing means
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- General Physics & Mathematics (AREA)
- Pressure Sensors (AREA)
- Geophysics And Detection Of Objects (AREA)
- Fittings On The Vehicle Exterior For Carrying Loads, And Devices For Holding Or Mounting Articles (AREA)
- Air Bags (AREA)
Description
・固定部としてのアーマチュア2
・アーマチュア2に固設された2組のくし歯状の固定側電極3、7
・可動質量部としての可動プレート5に固設された1組のくし歯状の可動側電極4
・可動プレート5とアーマチュア2との間を連結するばね6(図示の理解を容易にするため、ここでは単一のばねを示す)。
Claims (13)
- 可動質量部(5)と固定部(2)により静電容量(3、4)の変化を利用して可動質量部(5)の変位を検出する加速度計であって、
可動質量部(5)に固設された一連のくし歯状の可動側電極(4)と固定部(2)に固設された一連のくし歯状の固定側電極(3)とが互いに入り込むように組み合わされ、
各可動側電極(4)と各固定側電極(3)とによって可動質量部(5)の位置の関数として変化する可変静電容量が形成され、
可動質量部の原位置からの変位を測定するために予め定められたサンプリング周波数で可動質量部(5)と固定部(2)との間の少なくとも一カ所における静電容量の変化を検出すると共に可動質量部(5)を原位置に復帰させるための静電気力を反復的に発生する電子回路を備え、
該電子回路が変位の測定結果に追従して復帰用静電気力を発生させるものにおいて、
前記電子回路によって反復的に発生される復帰用静電気力のパルス幅(Ta)の周波数変化(1/Ta)を前記可動質量部(5)及び前記固定部(2)の各電極(3、4)の機械的共振周波数と等しくすることにより、復帰動作信号の周波数パワースペクトル(20)が前記可動質量部(5)及び前記固定部(2)の各電極(3、4)の機械的共振周波数においてゼロとなる領域を有するよう、前記バルス幅(Ta)の平均持続時間が設定されており、
前記サンプリング周波数が前記機械的共振周波数よりも低く選ばれていることを特徴とする加速度計。 - 電子回路が予め定められた時間幅(Ta)内で可動質量部の復帰動作を反復的に実行するものであり、この電子回路から発生される復帰動作用信号が前記時間幅(Ta)に対応するパルス幅の繰り返しパルス波形をもつと共にその周波数スペクトル(20)が可動質量部(5)及び/又は固定部(2)の各電極(3、4)の共振周波数で実質的にゼロ出力となる領域を有するものであることを特徴とする請求項1に記載の加速度計。
- サンプリング周波数が可動質量部(5)及び/又は固定部(2)の各電極(3、4)の共振周波数の32/14に等しいことを特徴とする請求項1または2に記載の加速度計。
- 復帰用静電気力が平均持続時間幅Taを通じて出力され、この時間幅Taが、可動質量部(5)及び/又は固定部(2)の各電極(3、4)の共振周波数をfとするとき、式1/Ta=fに従って設定されていることを特徴とする請求項1〜3のいずれか1項に記載の加速度計。
- 復帰動作信号の周波数スペクトルが周波数1/Taに出力の零点を有する基本サイン波信号成分を有することを特徴とする請求項4に記載の加速度計。
- 可動質量部(5)及び/又は固定部(2)の各電極(3、4)が、それぞれの自由端へ向かって幅の変化する断面形状を有することを特徴とする請求項1〜5のいずれか1項に記載の加速度計。
- 可動質量部(5)及び/又は固定部(2)の各電極(3、4)が、少なくとも一部に連続的に幅の変化する部分を有することを特徴とする請求項6に記載の加速度計。
- 可動質量部(5)及び/又は固定部(2)の各電極(3、4)が、少なくとも一部に幅の急変する部分を有することを特徴とする請求項6又は7に記載の加速度計。
- 可動質量部(5)及び/又は固定部(2)の各電極(3、4)が、少なくとも一部に横断面の幅が先端へ向かって減少している部分を有することを特徴とする請求項6〜8のいずれか1項に記載の加速度計。
- 可動質量部(5)及び/又は固定部(2)の各電極(3、4)が、それぞれの自由端へ向かって幅(L、I)が減少する台形部分を備えていることを特徴とする請求項6〜9のいずれか1項に記載の加速度計。
- 可動質量部(5)及び/又は固定部(2)の各電極(3、4)が、横断面の幅(L、I)が一定幅ずつ段階的に変化する部分を有し、この幅(L、I)が各段毎に急変していることを特徴とする請求項6〜10のいずれか1項に記載の加速度計。
- 可動質量部(5)及び/又は固定部(2)の各電極(3、4)が、先端へ向かって幅が徐々に減少して少なくとも一つの丸味のついた縁部を形成している部分を有することを特徴とする請求項6〜11のいずれか1項に記載の加速度計。
- 固定部(2)側の各電極(3)が可動質量部(5)側のそれぞれ隣接する二つの電極(4)間の隙間と相補的な形状を有することを特徴とする請求項6〜12のいずれか1項に記載の加速度計。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0309901 | 2003-08-13 | ||
FR0309901A FR2858854B1 (fr) | 2003-08-13 | 2003-08-13 | Accelerometre a vibrations parasites reduites par rappel ameliore |
PCT/FR2004/002125 WO2005017538A1 (fr) | 2003-08-13 | 2004-08-11 | Accelerometre a vibrations parasites reduites par rappel ameliore |
Publications (2)
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JP2007501939A JP2007501939A (ja) | 2007-02-01 |
JP5269313B2 true JP5269313B2 (ja) | 2013-08-21 |
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JP2006523033A Active JP5269313B2 (ja) | 2003-08-13 | 2004-08-11 | 改良復帰移動式外来振動抑制形加速度計 |
Country Status (7)
Country | Link |
---|---|
US (1) | US7552638B2 (ja) |
EP (1) | EP1664803A1 (ja) |
JP (1) | JP5269313B2 (ja) |
CN (1) | CN100570371C (ja) |
FR (1) | FR2858854B1 (ja) |
NO (1) | NO339398B1 (ja) |
WO (1) | WO2005017538A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2015528108A (ja) * | 2012-06-29 | 2015-09-24 | 株式会社村田製作所 | 改良された共振器 |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2858853B1 (fr) * | 2003-08-13 | 2006-01-13 | Sercel Rech Const Elect | Accelerometre a vibrations parasites reduites par forme des electrodes amelioree |
FR2881568B1 (fr) * | 2005-02-03 | 2011-01-14 | Commissariat Energie Atomique | Condensateur a capacite variable et a forme specifique, gyrometre comportant un tel condensateur et accelerometre comportant un tel condensateur |
JP2007139505A (ja) * | 2005-11-16 | 2007-06-07 | Denso Corp | 容量式力学量センサ |
FR2924856B1 (fr) | 2007-12-11 | 2012-02-10 | Memscap | Condensateur a capacite variable comprenant un peigne mobile et un peigne fixe interdigites, accelerometre et gyrometre comprenant un tel condensateur |
WO2011067936A1 (ja) * | 2009-12-03 | 2011-06-09 | パナソニック株式会社 | 振動発電器、振動発電装置、及び振動発電装置を搭載した電子機器と通信装置 |
NO335565B1 (no) | 2012-12-21 | 2014-12-29 | Cggveritas Services Norway As | Geofysisk akselerasjonssensor med justerbar støtbeskyttelse og fremgangsmåte |
JPWO2014203903A1 (ja) * | 2013-06-19 | 2017-02-23 | 株式会社村田製作所 | 共振周波数調整モジュール |
FI126199B (en) * | 2013-06-28 | 2016-08-15 | Murata Manufacturing Co | CAPACITIVE MICROMECHANICAL SENSOR STRUCTURE AND MICROMECHANICAL ACCELEROMETER |
JP6413462B2 (ja) * | 2014-08-15 | 2018-10-31 | セイコーエプソン株式会社 | 物理量センサー、物理量センサー装置、電子機器および移動体 |
US10352960B1 (en) * | 2015-10-30 | 2019-07-16 | Garmin International, Inc. | Free mass MEMS accelerometer |
CN108225296B (zh) * | 2018-01-26 | 2019-12-27 | 维沃移动通信有限公司 | 一种mems陀螺仪、电子设备及电子设备的控制方法 |
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US5249465A (en) * | 1990-12-11 | 1993-10-05 | Motorola, Inc. | Accelerometer utilizing an annular mass |
FI93579C (fi) * | 1993-08-20 | 1995-04-25 | Vaisala Oy | Sähköstaattisen voiman avulla takaisinkytketty kapasitiivinen anturi ja menetelmä sen aktiivisen elementin muodon ohjaamiseksi |
DE4439203C2 (de) * | 1994-11-03 | 2001-06-28 | Bosch Gmbh Robert | Schaltungsanordnung zur Auswertung eines Beschleunigungssensorsignals |
JP3216455B2 (ja) * | 1994-12-22 | 2001-10-09 | 株式会社村田製作所 | 容量型静電サーボ加速度センサ |
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FR2769369B1 (fr) * | 1997-10-08 | 1999-12-24 | Sercel Rech Const Elect | Accelerometre a plaque mobile, avec moteur electrostatique de contre-reaction |
DE19808549B4 (de) * | 1998-02-28 | 2008-07-10 | Robert Bosch Gmbh | Mikromechanische Kammstruktur sowie Beschleunigungssensor und Antrieb mit dieser Kammstruktur |
JPH11271830A (ja) * | 1998-03-24 | 1999-10-08 | Nikon Corp | ブレ検出装置、ブレ補正装置及びブレ補正カメラ |
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JP2000206142A (ja) * | 1998-11-13 | 2000-07-28 | Denso Corp | 半導体力学量センサおよびその製造方法 |
US6301965B1 (en) * | 1999-12-14 | 2001-10-16 | Sandia Corporation | Microelectromechanical accelerometer with resonance-cancelling control circuit including an idle state |
JP2001227954A (ja) * | 2000-02-15 | 2001-08-24 | Toyota Motor Corp | 物理量検出装置 |
JP2002040045A (ja) * | 2000-07-21 | 2002-02-06 | Denso Corp | 力学量センサ |
EP1624286B1 (en) * | 2004-08-03 | 2017-10-04 | STMicroelectronics Srl | Micro-electro-mechanical sensor with force feedback loop |
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2003
- 2003-08-13 FR FR0309901A patent/FR2858854B1/fr not_active Expired - Lifetime
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2004
- 2004-08-11 CN CNB2004800231918A patent/CN100570371C/zh not_active Expired - Fee Related
- 2004-08-11 WO PCT/FR2004/002125 patent/WO2005017538A1/fr active Application Filing
- 2004-08-11 JP JP2006523033A patent/JP5269313B2/ja active Active
- 2004-08-11 US US11/547,899 patent/US7552638B2/en active Active
- 2004-08-11 EP EP04786297A patent/EP1664803A1/fr not_active Withdrawn
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- 2006-03-08 NO NO20061113A patent/NO339398B1/no unknown
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2015528108A (ja) * | 2012-06-29 | 2015-09-24 | 株式会社村田製作所 | 改良された共振器 |
Also Published As
Publication number | Publication date |
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JP2007501939A (ja) | 2007-02-01 |
US7552638B2 (en) | 2009-06-30 |
WO2005017538A8 (fr) | 2005-05-19 |
US20080092651A1 (en) | 2008-04-24 |
CN1842710A (zh) | 2006-10-04 |
CN100570371C (zh) | 2009-12-16 |
FR2858854A1 (fr) | 2005-02-18 |
FR2858854B1 (fr) | 2005-12-16 |
NO20061113L (no) | 2006-04-20 |
NO339398B1 (no) | 2016-12-12 |
EP1664803A1 (fr) | 2006-06-07 |
WO2005017538A1 (fr) | 2005-02-24 |
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