JP2007501938A - 改良電極形状による外来振動抑制形加速度計 - Google Patents
改良電極形状による外来振動抑制形加速度計 Download PDFInfo
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- JP2007501938A JP2007501938A JP2006523032A JP2006523032A JP2007501938A JP 2007501938 A JP2007501938 A JP 2007501938A JP 2006523032 A JP2006523032 A JP 2006523032A JP 2006523032 A JP2006523032 A JP 2006523032A JP 2007501938 A JP2007501938 A JP 2007501938A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
- B81B3/004—Angular deflection
- B81B3/0045—Improve properties related to angular swinging, e.g. control resonance frequency
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
- G01P15/131—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electrostatic counterbalancing means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/01—Suspended structures, i.e. structures allowing a movement
- B81B2203/0136—Comb structures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
- G01P2015/0811—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass
- G01P2015/0817—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass for pivoting movement of the mass, e.g. in-plane pendulum
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Pressure Sensors (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
- Micromachines (AREA)
Abstract
Description
・固定部としてのアーマチュア2
・アーマチュア2に固設された2組のくし歯状の固定側電極3、7
・可動質量部としての可動プレート5に固設された1組のくし歯状の可動側電極4
・可動プレート5とアーマチュア2との間を連結するばね6(図示の理解を容易にするため、ここでは単一のばねを示す)。
Claims (17)
- 可動質量部(5)と固定部(2)により静電容量(3、4)の変化を利用して可動質量部(5)の変位を検出する加速度計であって、可動質量部(5)に固設された一連のくし歯状の可動側電極(4)と固定部(2)に固設された一連のくし歯状の固定側電極とが互いに入り込むように組み合わされ、各可動側電極(4)と各固定側電極(3)とによって可動質量部(5)の位置の関数として変化する可変静電容量が形成され、可動質量部の変位を測定するために可動質量部(5)と固定部(2)との間の少なくとも一カ所における静電容量の変化を検出する電子回路を備えているものにおいて、可動質量部(5)及び/又は固定部(2)の各電極(3、4)のうちの少なくとも一つが幅広の基部と先端部で幅狭の輪郭をもつフィンガー形状を有することを特徴とする加速度計。
- 電子回路が可動質量部(5)を原位置に復帰させるための静電気力を発生するものであることを特徴とする請求項1に記載の加速度計。
- 電子回路が可動質量部(5)の変位の測定結果に追従して復帰用静電気力を発生するものであることを特徴とする請求項2に記載の加速度計。
- 可動質量部(5)及び/又は固定部(2)の各電極(3、4)が、少なくとも一部に亘って横断面の幅が連続的に変化している部分を有することを特徴とする請求項1〜3のいずれか1項に記載の加速度計。
- 可動質量部(5)及び/又は固定部(2)の各電極(3、4)が、少なくとも一部において横断面の幅が急変している部分を有することを特徴とする請求項1〜4のいずれか1項に記載の加速度計。
- 可動質量部(5)及び/又は固定部(2)の各電極(3、4)が、少なくとも一部において横断面の幅が先端へ向かって減少している部分を有することを特徴とする請求項1〜5のいずれか1項に記載の加速度計。
- 可動質量部(5)及び/又は固定部(2)の各電極(3、4)が、先端へ向かって幅(L、I)が減少する台形部分を備えていることを特徴とする請求項1〜6のいずれか1項に記載の加速度計。
- 可動質量部(5)及び/又は固定部(2)の各電極(3、4)が、横断面の幅(L、I)が一定幅ずつ段階的に変化する部分を有し、この幅(L、I)が各段毎に急変していることを特徴とする請求項1〜7のいずれか1項に記載の加速度計。
- 可動質量部(5)及び/又は固定部(2)の各電極(3、4)が、先端へ向かって幅が徐々に減少して少なくとも一つの丸味のついた縁部を形成している部分を有することを特徴とする請求項1〜8のいずれか1項に記載の加速度計。
- 固定部(2)側の各電極(3)が可動質量部(5)側のそれぞれ隣接する二つの電極(4)間の隙間と相補的な形状を有することを特徴とする請求項1〜9のいずれか1項に記載の加速度計。
- 電子回路が反復的な復帰用静電気力を発生するものであり、この反復的な復帰用静電気力は特にその機械的出力の周波数スペクトル(10、20)が可動質量部(5)及び/又は固定部(2)の各電極(3、4)の機械的共振周波数で実質的にゼロ出力となる領域をもつように設定されていることを特徴とする請求項1〜10のいずれか1項に記載の加速度計。
- 電子回路が予め定められた時間幅の時間帯(Ta)内における可動質量部の復帰動作を可動質量部の変位の測定結果に追従して反復的に実行するものであり、対応する時間帯の復帰動作信号の周波数変化(20)が可動質量部(5)及び/又は固定部(2)の各電極(3、4)の共振周波数で実質的にゼロ点へ復帰するように設定されていることを特徴とする請求項11に記載の加速度計。
- 復帰動作信号の周波数変化(20)が可動質量部(5)及び/又は固定部(2)の各電極(3、4)の共振周波数でゼロ点へ復帰するように時間帯(Ta)の平均持続時間幅が設定されていることを特徴とする請求項12に記載の加速度計。
- 復帰動作信号の周波数変化(20)が可動質量部(5)及び/又は固定部(2)の各電極(3、4)の共振周波数で最初にゼロ点(1/Ta)へ復帰するように時間帯(Ta)の平均持続時間幅が設定されていることを特徴とする請求項13に記載の加速度計。
- 復帰用静電気力が平均持続時間幅Taの時間帯を通じて出力され、この時間幅Taが、可動質量部(5)及び/又は固定部(2)の各電極(3、4)の共振周波数をfとするとき、式1/Ta=fに従って設定されていることを特徴とする請求項11〜14のいずれか1項に記載の加速度計。
- 復帰動作信号の周波数変化が基本サイン波形状を示すことを特徴とする請求項15に記載の加速度計。
- 各電極のフィンガー形状の先端部が曲率ゼロ又は凸状湾曲の縁部を形成していることを特徴とする請求項1〜16のいずれか1項に記載の加速度計。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0309899A FR2858853B1 (fr) | 2003-08-13 | 2003-08-13 | Accelerometre a vibrations parasites reduites par forme des electrodes amelioree |
PCT/FR2004/002123 WO2005017537A1 (fr) | 2003-08-13 | 2004-08-11 | Accelerometre a vibrations parasites reduites par forme des electrodes amelioree |
Related Child Applications (2)
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JP2012028706A Division JP5442785B2 (ja) | 2003-08-13 | 2012-02-13 | 改良電極形状による外来振動抑制形加速度計 |
JP2012028705A Division JP5599832B2 (ja) | 2003-08-13 | 2012-02-13 | 改良電極形状による外来振動抑制形加速度計 |
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JP2007501938A true JP2007501938A (ja) | 2007-02-01 |
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JP2006523032A Pending JP2007501938A (ja) | 2003-08-13 | 2004-08-11 | 改良電極形状による外来振動抑制形加速度計 |
JP2012028705A Expired - Fee Related JP5599832B2 (ja) | 2003-08-13 | 2012-02-13 | 改良電極形状による外来振動抑制形加速度計 |
JP2012028706A Active JP5442785B2 (ja) | 2003-08-13 | 2012-02-13 | 改良電極形状による外来振動抑制形加速度計 |
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JP2012028705A Expired - Fee Related JP5599832B2 (ja) | 2003-08-13 | 2012-02-13 | 改良電極形状による外来振動抑制形加速度計 |
JP2012028706A Active JP5442785B2 (ja) | 2003-08-13 | 2012-02-13 | 改良電極形状による外来振動抑制形加速度計 |
Country Status (7)
Country | Link |
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US (1) | US7797998B2 (ja) |
EP (1) | EP1660890B1 (ja) |
JP (3) | JP2007501938A (ja) |
CN (1) | CN1836168B (ja) |
FR (1) | FR2858853B1 (ja) |
NO (1) | NO339401B1 (ja) |
WO (1) | WO2005017537A1 (ja) |
Cited By (4)
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US8991252B2 (en) | 2011-08-26 | 2015-03-31 | Toyota Jidosha Kabushiki Kaisha | Displacement amount monitoring electrode arrangement |
WO2015178117A1 (ja) * | 2014-05-23 | 2015-11-26 | 日立オートモティブシステムズ株式会社 | 慣性センサ |
US9239222B2 (en) | 2011-08-09 | 2016-01-19 | Toyota Jidosha Kabushiki Kaisha | Displacement amount monitoring electrode structure |
JP2018525634A (ja) * | 2015-08-12 | 2018-09-06 | アトランティック・イナーシャル・システムズ・リミテッドAtlantic Inertial Systems Limited | 加速度計 |
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FR2888394A1 (fr) * | 2005-07-08 | 2007-01-12 | Commissariat Energie Atomique | Dispositif capacitif a volume capacitif optimise |
US8042396B2 (en) | 2007-09-11 | 2011-10-25 | Stmicroelectronics S.R.L. | Microelectromechanical sensor with improved mechanical decoupling of sensing and driving modes |
FR2924856B1 (fr) | 2007-12-11 | 2012-02-10 | Memscap | Condensateur a capacite variable comprenant un peigne mobile et un peigne fixe interdigites, accelerometre et gyrometre comprenant un tel condensateur |
IT1391972B1 (it) | 2008-11-26 | 2012-02-02 | St Microelectronics Rousset | Giroscopio microelettromeccanico con movimento di azionamento rotatorio e migliorate caratteristiche elettriche |
IT1391973B1 (it) | 2008-11-26 | 2012-02-02 | St Microelectronics Rousset | Giroscopio microelettromeccanico mono o biassiale con aumentata sensibilita' al rilevamento di velocita' angolari |
ITTO20090489A1 (it) | 2008-11-26 | 2010-12-27 | St Microelectronics Srl | Circuito di lettura per un giroscopio mems multi-asse avente direzioni di rilevamento inclinate rispetto agli assi di riferimento, e corrispondente giroscopio mems multi-asse |
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JP2012521006A (ja) | 2009-03-19 | 2012-09-10 | ヒューレット−パッカード デベロップメント カンパニー エル.ピー. | 三相容量ベース検知 |
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US20120202421A1 (en) * | 2011-02-04 | 2012-08-09 | Research In Motion Limited | Mobile wireless communications device to detect movement of an adjacent non-radiating object and associated methods |
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US9404747B2 (en) | 2013-10-30 | 2016-08-02 | Stmicroelectroncs S.R.L. | Microelectromechanical gyroscope with compensation of quadrature error drift |
TWI531806B (zh) * | 2014-09-18 | 2016-05-01 | 溫瓌岸 | 兩用共振型磁力計 |
ITUA20162172A1 (it) | 2016-03-31 | 2017-10-01 | St Microelectronics Srl | Sensore accelerometrico realizzato in tecnologia mems avente elevata accuratezza e ridotta sensibilita' nei confronti della temperatura e dell'invecchiamento |
US11287441B2 (en) | 2019-11-07 | 2022-03-29 | Honeywell International Inc. | Resonator including one or more mechanical beams with added mass |
US11634319B2 (en) * | 2020-07-02 | 2023-04-25 | National Taiwan University | Device and method for monitoring surface condition of contact surface of detected object |
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US20220252636A1 (en) * | 2021-02-05 | 2022-08-11 | Kionix, Inc. | Accelerometer apparatuses and systems |
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2003
- 2003-08-13 FR FR0309899A patent/FR2858853B1/fr not_active Expired - Fee Related
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2004
- 2004-08-11 JP JP2006523032A patent/JP2007501938A/ja active Pending
- 2004-08-11 CN CN2004800232145A patent/CN1836168B/zh not_active Expired - Fee Related
- 2004-08-11 US US11/630,703 patent/US7797998B2/en active Active
- 2004-08-11 EP EP04786295.8A patent/EP1660890B1/fr active Active
- 2004-08-11 WO PCT/FR2004/002123 patent/WO2005017537A1/fr active Application Filing
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2006
- 2006-03-08 NO NO20061114A patent/NO339401B1/no unknown
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2012
- 2012-02-13 JP JP2012028705A patent/JP5599832B2/ja not_active Expired - Fee Related
- 2012-02-13 JP JP2012028706A patent/JP5442785B2/ja active Active
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JP2000206142A (ja) * | 1998-11-13 | 2000-07-28 | Denso Corp | 半導体力学量センサおよびその製造方法 |
JP2002040045A (ja) * | 2000-07-21 | 2002-02-06 | Denso Corp | 力学量センサ |
JP2002340929A (ja) * | 2001-05-18 | 2002-11-27 | Aisin Seiki Co Ltd | 加速度センサ |
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US9239222B2 (en) | 2011-08-09 | 2016-01-19 | Toyota Jidosha Kabushiki Kaisha | Displacement amount monitoring electrode structure |
US8991252B2 (en) | 2011-08-26 | 2015-03-31 | Toyota Jidosha Kabushiki Kaisha | Displacement amount monitoring electrode arrangement |
WO2015178117A1 (ja) * | 2014-05-23 | 2015-11-26 | 日立オートモティブシステムズ株式会社 | 慣性センサ |
JP2015222246A (ja) * | 2014-05-23 | 2015-12-10 | 日立オートモティブシステムズ株式会社 | 慣性センサ |
US10551192B2 (en) | 2014-05-23 | 2020-02-04 | Hitachi Automotive Systems, Ltd. | Inertial sensor |
JP2018525634A (ja) * | 2015-08-12 | 2018-09-06 | アトランティック・イナーシャル・システムズ・リミテッドAtlantic Inertial Systems Limited | 加速度計 |
Also Published As
Publication number | Publication date |
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JP5599832B2 (ja) | 2014-10-01 |
JP2012118087A (ja) | 2012-06-21 |
EP1660890B1 (fr) | 2016-03-09 |
JP2012127971A (ja) | 2012-07-05 |
US20080196500A1 (en) | 2008-08-21 |
FR2858853A1 (fr) | 2005-02-18 |
CN1836168A (zh) | 2006-09-20 |
CN1836168B (zh) | 2010-08-25 |
JP5442785B2 (ja) | 2014-03-12 |
EP1660890A1 (fr) | 2006-05-31 |
NO20061114L (no) | 2006-04-20 |
FR2858853B1 (fr) | 2006-01-13 |
WO2005017537A1 (fr) | 2005-02-24 |
NO339401B1 (no) | 2016-12-12 |
US7797998B2 (en) | 2010-09-21 |
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