JPH11508418A - キャパシタンスに基づくチューニング可能な超小型機械共振器 - Google Patents
キャパシタンスに基づくチューニング可能な超小型機械共振器Info
- Publication number
- JPH11508418A JPH11508418A JP9503889A JP50388997A JPH11508418A JP H11508418 A JPH11508418 A JP H11508418A JP 9503889 A JP9503889 A JP 9503889A JP 50388997 A JP50388997 A JP 50388997A JP H11508418 A JPH11508418 A JP H11508418A
- Authority
- JP
- Japan
- Prior art keywords
- actuator
- electrodes
- finger
- resonator
- movable
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02244—Details of microelectro-mechanical resonators
- H03H9/02393—Post-fabrication trimming of parameters, e.g. resonance frequency, Q factor
- H03H9/02417—Post-fabrication trimming of parameters, e.g. resonance frequency, Q factor involving adjustment of the transducing gap
- H03H9/02425—Post-fabrication trimming of parameters, e.g. resonance frequency, Q factor involving adjustment of the transducing gap by electrostatically pulling the beam
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
- H02N1/002—Electrostatic motors
- H02N1/006—Electrostatic motors of the gap-closing type
- H02N1/008—Laterally driven motors, e.g. of the comb-drive type
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02244—Details of microelectro-mechanical resonators
- H03H9/02393—Post-fabrication trimming of parameters, e.g. resonance frequency, Q factor
- H03H9/02417—Post-fabrication trimming of parameters, e.g. resonance frequency, Q factor involving adjustment of the transducing gap
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02244—Details of microelectro-mechanical resonators
- H03H2009/02488—Vibration modes
- H03H2009/02496—Horizontal, i.e. parallel to the substrate plane
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Micromachines (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
Description
Claims (1)
- 【特許請求の範囲】 1.超小型機械アクチュエータであって、上記超小型機械アクチュエータは、 第1の静止コンポーネントと、上記第1のコンポーネントに対して相対的に移 動可能な第2のコンポーネントとを有する超小型構造と、 上記第1のコンポーネント上に設けられた、所定の間隔を離れて置かれて実質 的に平行な第1の組の櫛形の電極の指状突起物と、 上記第2のコンポーネント上に設けられた、所定の間隔を離れて置かれて実質 的に平行な第2の組の櫛形の電極の指状突起物とを備え、上記第1及び第2の組 の上記指状突起物は、同一平面上にあり、それらの間に隙間を有して対向してか つ重ならない関係にあり、 上記第1及び第2の組の電極の間に接続されてそれらの間に静電界を発生する バイアス電源を備えた超小型機械アクチュエータ。 2.上記電源は変化可能である請求項1記載のアクチュエータ。 3.上記第2のコンポーネントは軸に沿って移動可能であり、上記隙間は上記軸 に平行である請求項2記載のアクチュエータ。 4.上記第1の組の上記電極の指状突起物は上記第2の上記電極の指状突起物か らオフセットされる請求項3記載のアクチュエータ。 5.上記第1の組の上記電極の指状突起物は上記第2の組の上記電極の指状突起 物と整列される請求項3記載のアクチュエータ。 5.上記第2のコンポーネントは単結晶シリコン基板における空胴内に設けられ る可動ビームであり、上記第1の組の電極の指状突起物は上記基板に一体化され 、上記第2の組の電極の指状突起物は上記可動ビームに一体化される請求項3記 載のアクチュエータ。 6.上記相対的に移動可能なコンポーネントは固有の機械スティフネスを有し、 上記電源は上記スティフネスを調整するように変化可能である請求項5記載のア クチュエータ。 7.上記ビームは動きのために、上記基板にしっかりと固定された少なくとも1 つのスプリングアームによって設けられ、上記可動ビーム、上記スプリングアー ム及び第2の組の電極は固有の共振周波数で移動可能であり、上記電源は上記共 振周波数を調整するように調整可能である請求項5記載のアクチュエータ。 8.上記第1の組の上記電極の指状突起物は上記第2の組の上記電極の指状突起 物と整列され、上記電源は上記共振周波数を増大するように変化可能である請求 項7記載のアクチュエータ。 9.上記第1の組の上記電極の指状突起物は上記第2の組の上記電極の指状突起 物からオフセットされ、上記電源は上記共振周波数を減少するように変化可能で ある請求項7記載のアクチュエータ。 10.上記電源は十分に高いバイアスを上記アクチュエータに提供して2つの井 戸の電位を形成する請求項9記載のアクチュエータ。 11.超小型電気機械共振器であって、上記超小型電気機械共振器は、 基板と、 軸に沿って上記基板に対して移動可能な超小型サイズの寸法を有する超小型機 械ビームと、 上記ビームと上記基板との間に接続されたスプリングアームとを備え、上記ス プリングアームと上記可動ビームは静止位置と固有の共振周波数とを有し、 第1及び第2の静電アクチュエータを備え、各アクチュエータは上記ビーム上 に設けられた指状電極の第1の組を有し、各アクチュエータは上記基板上に設け られた指状電極の第2の組を有し、各アクチュエータの上記指状電極の上記第1 及び第2の組はそれらの間に隙間を与えるように対向しかつ重ならず、 上記共振周波数を調整するように指状電極の各組に沿って接続された調整可能 なバイアス電圧を備えた超小型電気機械共振器。 12.各アクチュエータのための上記指状電極の上記第1の組の上記電極は、上 記指状電極の第2の組の対応する電極と整列される請求項11記載の共振器。 13.各アクチュエータに対する上記指状電極の上記第1の組の電極は、上記指 状電極の上記第2の組の対応する電極からオフセットされる請求項11記載の共 振器。 14.上記第1及び第2のアクチュエータは同一平面上にありかつ対称であり、 上記2つのアクチュエータは静止位置における上記ビーム上に正味の応力を提供 しない請求項11記載の共振器。 15.上記固有周波数での周波数又は上記固有周波数に近い周波数で上記ビーム を移動させる駆動手段をさらに含む請求項14記載の共振器。 16.上記隙間は上記軸に平行である請求項11記載の共振器。 17.上記隙間は上記軸に垂直である請求項11記載の共振器。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US494,024 | 1995-06-23 | ||
US08/494,024 US5640133A (en) | 1995-06-23 | 1995-06-23 | Capacitance based tunable micromechanical resonators |
PCT/US1996/010479 WO1997001221A1 (en) | 1995-06-23 | 1996-06-20 | Capacitance based tunable micromechanical resonators |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH11508418A true JPH11508418A (ja) | 1999-07-21 |
JP4011617B2 JP4011617B2 (ja) | 2007-11-21 |
Family
ID=23962701
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50388997A Expired - Lifetime JP4011617B2 (ja) | 1995-06-23 | 1996-06-20 | キャパシタンスに基づくチューニング可能な超小型機械共振器 |
Country Status (10)
Country | Link |
---|---|
US (1) | US5640133A (ja) |
EP (1) | EP0834218B1 (ja) |
JP (1) | JP4011617B2 (ja) |
AT (1) | ATE425582T1 (ja) |
CA (1) | CA2224402C (ja) |
DE (1) | DE69637863D1 (ja) |
DK (1) | DK0834218T3 (ja) |
ES (1) | ES2321889T3 (ja) |
PT (1) | PT834218E (ja) |
WO (1) | WO1997001221A1 (ja) |
Cited By (13)
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---|---|---|---|---|
JP2004032132A (ja) * | 2002-06-24 | 2004-01-29 | Seiko Epson Corp | 振動子、マイクロレゾネーター、弾性表面波素子、薄膜バルク振動子、電子機器およびそれらの製造方法 |
JP2004112378A (ja) * | 2002-09-19 | 2004-04-08 | Nec Corp | フィルタ、複合フィルタ、それらを搭載したフィルタ実装体、集積回路チップ、電子機器およびそれらの周波数特性変更方法 |
WO2004032320A1 (ja) * | 2002-10-03 | 2004-04-15 | Sharp Kabushiki Kaisha | マイクロ共振装置、マイクロフィルタ装置、マイクロ発振器および無線通信機器 |
JP2005510108A (ja) * | 2001-11-15 | 2005-04-14 | サントル ナシオナル ドゥ ラ ルシェルシェサイアンティフィク(セエヌエールエス) | 実質的に平面的な微細機械構造及び相当する電気機械的共振器の二つの機械要素のギャップ調整に対する方法 |
JP2005533400A (ja) * | 2001-09-28 | 2005-11-04 | インテル・コーポレーション | 極超短波mem共振器のための中心質量の減少したマイクロブリッジ構造 |
JP2008504771A (ja) * | 2004-07-01 | 2008-02-14 | コミツサリア タ レネルジー アトミーク | 変形量が大きな複合型微小共振器 |
JP2008537658A (ja) * | 2005-03-31 | 2008-09-18 | エスティーマイクロエレクトロニクス エス.アール.エル. | 共振微小電気機械システムの共振周波数を制御する装置 |
JP2010011134A (ja) * | 2008-06-27 | 2010-01-14 | Seiko Instruments Inc | 共振周波数可変mems振動子 |
JP2010028792A (ja) * | 2008-06-18 | 2010-02-04 | Seiko Epson Corp | 共振回路、発振回路、フィルタ回路及び電子装置 |
JP2010056764A (ja) * | 2008-08-27 | 2010-03-11 | Seiko Instruments Inc | Mems振動子 |
JP2011041179A (ja) * | 2009-08-18 | 2011-02-24 | Nippon Telegr & Teleph Corp <Ntt> | 微小共振子およびその製造方法 |
JP2013519230A (ja) * | 2010-02-03 | 2013-05-23 | ハリス コーポレイション | 高精度memsに基づくバラクタ |
JP2020076749A (ja) * | 2018-10-26 | 2020-05-21 | ブランパン・エス アー | 少なくとも1つの音響放射膜を備えるストライク携行式時計又はミュージカル携行式時計、及び音響放射膜を製造する方法 |
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JP2020076749A (ja) * | 2018-10-26 | 2020-05-21 | ブランパン・エス アー | 少なくとも1つの音響放射膜を備えるストライク携行式時計又はミュージカル携行式時計、及び音響放射膜を製造する方法 |
Also Published As
Publication number | Publication date |
---|---|
EP0834218A4 (en) | 2002-04-10 |
ATE425582T1 (de) | 2009-03-15 |
WO1997001221A1 (en) | 1997-01-09 |
CA2224402A1 (en) | 1997-01-09 |
EP0834218B1 (en) | 2009-03-11 |
DE69637863D1 (de) | 2009-04-23 |
DK0834218T3 (da) | 2009-04-20 |
US5640133A (en) | 1997-06-17 |
EP0834218A1 (en) | 1998-04-08 |
CA2224402C (en) | 2008-06-17 |
PT834218E (pt) | 2009-05-06 |
ES2321889T3 (es) | 2009-06-12 |
JP4011617B2 (ja) | 2007-11-21 |
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