DE69637863D1 - Kapazitiv abstimmbare mikromechanische resonatoren - Google Patents

Kapazitiv abstimmbare mikromechanische resonatoren

Info

Publication number
DE69637863D1
DE69637863D1 DE69637863T DE69637863T DE69637863D1 DE 69637863 D1 DE69637863 D1 DE 69637863D1 DE 69637863 T DE69637863 T DE 69637863T DE 69637863 T DE69637863 T DE 69637863T DE 69637863 D1 DE69637863 D1 DE 69637863D1
Authority
DE
Germany
Prior art keywords
fingers
sets
resonant frequency
capacitive tuning
micromechanical resonators
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69637863T
Other languages
English (en)
Inventor
Scott G Adams
Fred M Bertsch
Kevin A Shaw
Noel C Macdonald
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Cornell Research Foundation Inc
Original Assignee
Cornell Research Foundation Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cornell Research Foundation Inc filed Critical Cornell Research Foundation Inc
Application granted granted Critical
Publication of DE69637863D1 publication Critical patent/DE69637863D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H9/02393—Post-fabrication trimming of parameters, e.g. resonance frequency, Q factor
    • H03H9/02417—Post-fabrication trimming of parameters, e.g. resonance frequency, Q factor involving adjustment of the transducing gap
    • H03H9/02425—Post-fabrication trimming of parameters, e.g. resonance frequency, Q factor involving adjustment of the transducing gap by electrostatically pulling the beam
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H02N1/006—Electrostatic motors of the gap-closing type
    • H02N1/008—Laterally driven motors, e.g. of the comb-drive type
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H9/02393—Post-fabrication trimming of parameters, e.g. resonance frequency, Q factor
    • H03H9/02417—Post-fabrication trimming of parameters, e.g. resonance frequency, Q factor involving adjustment of the transducing gap
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H2009/02488—Vibration modes
    • H03H2009/02496—Horizontal, i.e. parallel to the substrate plane

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Micromachines (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Measuring Fluid Pressure (AREA)
DE69637863T 1995-06-23 1996-06-20 Kapazitiv abstimmbare mikromechanische resonatoren Expired - Lifetime DE69637863D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/494,024 US5640133A (en) 1995-06-23 1995-06-23 Capacitance based tunable micromechanical resonators
PCT/US1996/010479 WO1997001221A1 (en) 1995-06-23 1996-06-20 Capacitance based tunable micromechanical resonators

Publications (1)

Publication Number Publication Date
DE69637863D1 true DE69637863D1 (de) 2009-04-23

Family

ID=23962701

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69637863T Expired - Lifetime DE69637863D1 (de) 1995-06-23 1996-06-20 Kapazitiv abstimmbare mikromechanische resonatoren

Country Status (10)

Country Link
US (1) US5640133A (de)
EP (1) EP0834218B1 (de)
JP (1) JP4011617B2 (de)
AT (1) ATE425582T1 (de)
CA (1) CA2224402C (de)
DE (1) DE69637863D1 (de)
DK (1) DK0834218T3 (de)
ES (1) ES2321889T3 (de)
PT (1) PT834218E (de)
WO (1) WO1997001221A1 (de)

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JPH11508418A (ja) 1999-07-21
DK0834218T3 (da) 2009-04-20
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EP0834218A4 (de) 2002-04-10
PT834218E (pt) 2009-05-06
ATE425582T1 (de) 2009-03-15
CA2224402C (en) 2008-06-17
JP4011617B2 (ja) 2007-11-21
ES2321889T3 (es) 2009-06-12

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