JP5599832B2 - 改良電極形状による外来振動抑制形加速度計 - Google Patents
改良電極形状による外来振動抑制形加速度計 Download PDFInfo
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- G—PHYSICS
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- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
- B81B3/004—Angular deflection
- B81B3/0045—Improve properties related to angular swinging, e.g. control resonance frequency
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
- G01P15/131—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electrostatic counterbalancing means
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/01—Suspended structures, i.e. structures allowing a movement
- B81B2203/0136—Comb structures
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
- G01P2015/0811—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass
- G01P2015/0817—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass for pivoting movement of the mass, e.g. in-plane pendulum
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Description
・固定部としてのアーマチュア2
・アーマチュア2に固設された2組のくし歯状の固定側電極3、7
・可動質量部としての可動プレート5に固設された1組のくし歯状の可動側電極4
・可動プレート5とアーマチュア2との間を連結するばね6(図示の理解を容易にするため、ここでは単一のばねを示す)。
Claims (16)
- 可動質量部(5)および固定部(2)を備え、静電容量(3、4)の変化を利用して前記可動質量部(5)の変位を検出する加速度計であって、
前記可動質量部(5)に固設された第1の一連の電極電極(4)が、前記固定部(2)に固設された第2の一連の電極(3、7)と互いに入り込むように組み合わされ、
各可動電極(4)は、隣接する固定電極(3)とともに、前記可動質量部(5)の位置の関数として変化する可変静電容量を形成し、
当該加速度計は、前記可動質量部のずれの指標として、前記可動質量部(5)と前記固定部(2)との間の少なくとも1つの静電容量の、初期位置からの変化を検出するとともに、前記可動質量部(5)をその初期位置に復帰させるための静電気力を生成するように構成された電子回路を備え、
前記電子回路は、前回のずれ測定により制御される手法で、前記静電気復帰力を生成するように構成され、
前記可動質量部(5)及び/又は前記固定部(2)の1または複数の電極(3、4)のそれぞれは、幅広の基部と、自由端の方向で狭くなるプロファイルと、をもつフィンガー形状を示し、
前記フィンガーは、その共振周波数が前記静電気復帰力の周波数井戸まで低下するよう、構成されることを特徴とする加速度計。 - それぞれ持続期間Taを有する矩形波信号に対応する繰り返し持続期間中、前記静電気復帰力が与えられ、
前記フィンガーの狭くなるプロファイルは、前記フィンガーの共振周波数が1/Taと等しくなるよう構成される請求項1に記載の加速度計。 - 前記可動質量部(5)及び/ 又は前記固定部(2)の電極(3、4)は、電極(3、4)の断面の幅が連続的に変化する少なくとも一部を示すことを特徴とする請求項1または2に記載の加速度計。
- 前記可動質量部(5)及び/ 又は前記固定部(2)の電極(3、4)は、断面の幅が急変を示す少なくとも一部を示すことを特徴とする請求項1〜3のいずれか1項に記載の加速度計。
- 前記可動質量部(5)及び/ 又は前記固定部(2)の電極(3、4)は、断面の幅が、考慮している前記電極の自由端に向かって減少する少なくとも一部を示すことを特徴とする請求項1〜4のいずれか1項に記載の加速度計。
- 前記可動質量部(5)及び/ 又は前記固定部(2)の電極(3、4)は、電極(3、4)の自由端へ向かって減少する幅(L、I)の台形形状を含むことを特徴とする請求項1〜5のいずれか1項に記載の加速度計。
- 前記可動質量部(5)及び/ 又は前記固定部(2)の電極(3、4)は、断面の幅(L、I) が一定幅ずつ段階的に変化する部分を有し、
この幅(L、I)は、各段階の間に急変することを特徴とする請求項1〜6のいずれか1項に記載の加速度計。 - 前記可動質量部(5)及び/ 又は前記固定部(2)の電極(3、4)は、前記電極の自由端へ向かって幅が徐々に減少する、少なくとも1つの丸味のついた外側縁を形成する部分を有することを特徴とする請求項1〜7のいずれか1項に記載の加速度計。
- 前記固定部(2)の電極(3)は、前記可動質量部(5)の隣接する2つの電極(4)間の隙間と相補的な形状を示すことを特徴とする請求項1〜8のいずれか1項に記載の加速度計。
- 電子回路は、繰り返し静電気復帰圧力を発生するように構成され、
特に、前記可動質量部(5)及び/又は前記固定部(2)の電極(4)の機械的共振周波数にて、前記繰り返し静電気復帰圧力の機械的電力周波数スペクトル(10、20)が実質的にゼロ電力となる領域を示すよう、前記繰り返し静電気復帰圧力は選択されることを特徴とする請求項1〜9のいずれか1項に記載の加速度計。 - スレーブ手段は、時間スロット(Ta)で、前記可動質量部の繰り返し復帰を実行し、 対応するスロットのような信号の周波数変換(20)は、前記可動質量部(5)及び/又は固定部(2)の電極(3、4)の共振周波数のレベルで、実質的にゼロへの復帰を示すことを特徴とする請求項10に記載の加速度計。
- 前記可動質量部(5)及び/又は前記固定部(2)の電極(4)の共振周波数のレベルで、前記スロットのような信号の周波数変換(20)がゼロ交差(3、4)を示すよう、前記スロットの平均持続期間は予め定められていることを特徴とする請求項11に記載の加速度計。
- 前記可動質量部(5)及び/又は前記固定部(2)の電極(4)の共振周波数のレベルで、スロット(Ta)の平均持続時間の周波数変換(20)が最初のゼロ(1/Ta)への復帰を示すよう、前記スロット(Ta)の平均持続時間は選択されることを特徴とする請求項12に記載の加速度計。
- 平均幅(Ta)の時間スロットを通して前記静電気復帰力が実行され、
前記可動質量部(5)及び/又は前記固定部(2)の電極(4)の共振周波数をFとするとき、1/Ta=Fの関係にしたがって幅(Ta)が選択されることを特徴とする請求項11〜13のいずれか1項に記載の加速度計。 - 前記スロットのような信号の前記周波数変換は、基本正弦波を示すことを特徴とする請求項14に記載の加速度計。
- 電極のフィンガーのエッジは、ゼロと凸面との間の曲率を有することを特徴とする請求項1〜15のいずれか1項に記載の加速度計。
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FR0309899A FR2858853B1 (fr) | 2003-08-13 | 2003-08-13 | Accelerometre a vibrations parasites reduites par forme des electrodes amelioree |
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2003
- 2003-08-13 FR FR0309899A patent/FR2858853B1/fr not_active Expired - Fee Related
-
2004
- 2004-08-11 JP JP2006523032A patent/JP2007501938A/ja active Pending
- 2004-08-11 EP EP04786295.8A patent/EP1660890B1/fr not_active Expired - Lifetime
- 2004-08-11 US US11/630,703 patent/US7797998B2/en active Active
- 2004-08-11 CN CN2004800232145A patent/CN1836168B/zh not_active Expired - Fee Related
- 2004-08-11 WO PCT/FR2004/002123 patent/WO2005017537A1/fr active Application Filing
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2006
- 2006-03-08 NO NO20061114A patent/NO339401B1/no unknown
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2012
- 2012-02-13 JP JP2012028705A patent/JP5599832B2/ja not_active Expired - Fee Related
- 2012-02-13 JP JP2012028706A patent/JP5442785B2/ja not_active Expired - Lifetime
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2018525634A (ja) * | 2015-08-12 | 2018-09-06 | アトランティック・イナーシャル・システムズ・リミテッドAtlantic Inertial Systems Limited | 加速度計 |
Also Published As
Publication number | Publication date |
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JP2012127971A (ja) | 2012-07-05 |
EP1660890B1 (fr) | 2016-03-09 |
US20080196500A1 (en) | 2008-08-21 |
FR2858853A1 (fr) | 2005-02-18 |
FR2858853B1 (fr) | 2006-01-13 |
JP5442785B2 (ja) | 2014-03-12 |
CN1836168B (zh) | 2010-08-25 |
JP2007501938A (ja) | 2007-02-01 |
NO20061114L (no) | 2006-04-20 |
US7797998B2 (en) | 2010-09-21 |
WO2005017537A1 (fr) | 2005-02-24 |
EP1660890A1 (fr) | 2006-05-31 |
NO339401B1 (no) | 2016-12-12 |
CN1836168A (zh) | 2006-09-20 |
JP2012118087A (ja) | 2012-06-21 |
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