DE60037251D1 - Anordnung zur Herstellung von Löthöckern auf Halbleitersubstraten unter Generierung elektrischer Ladung, Methode und Anordnung zum Entfernen dieser Ladungen, und elektrische Ladung generierendes Halbleitersubstrat - Google Patents
Anordnung zur Herstellung von Löthöckern auf Halbleitersubstraten unter Generierung elektrischer Ladung, Methode und Anordnung zum Entfernen dieser Ladungen, und elektrische Ladung generierendes HalbleitersubstratInfo
- Publication number
- DE60037251D1 DE60037251D1 DE60037251T DE60037251T DE60037251D1 DE 60037251 D1 DE60037251 D1 DE 60037251D1 DE 60037251 T DE60037251 T DE 60037251T DE 60037251 T DE60037251 T DE 60037251T DE 60037251 D1 DE60037251 D1 DE 60037251D1
- Authority
- DE
- Germany
- Prior art keywords
- charge
- wafer
- arrangement
- electrical charge
- semiconductor substrates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000004065 semiconductor Substances 0.000 title abstract 6
- 239000000758 substrate Substances 0.000 title abstract 6
- 238000000034 method Methods 0.000 title abstract 2
- 229910000679 solder Inorganic materials 0.000 title 1
- 230000015556 catabolic process Effects 0.000 abstract 2
- 238000001816 cooling Methods 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67144—Apparatus for mounting on conductive members, e.g. leadframes or conductors on insulating substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/60—Attaching or detaching leads or other conductive members, to be used for carrying current to or from the device in operation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67138—Apparatus for wiring semiconductor or solid state device
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S438/00—Semiconductor device manufacturing: process
- Y10S438/974—Substrate surface preparation
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Wire Bonding (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Light Receiving Elements (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Micromachines (AREA)
Applications Claiming Priority (11)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18905399 | 1999-07-02 | ||
JP18905399 | 1999-07-02 | ||
JP29370299 | 1999-10-15 | ||
JP29370299 | 1999-10-15 | ||
JP30885599A JP3655787B2 (ja) | 1999-07-02 | 1999-10-29 | 電荷発生基板用バンプ形成装置及び電荷発生基板の除電方法 |
JP30885599 | 1999-10-29 | ||
JP32397999 | 1999-11-15 | ||
JP32397999 | 1999-11-15 | ||
JP2000184467 | 2000-06-20 | ||
JP2000184467A JP4570210B2 (ja) | 1999-07-02 | 2000-06-20 | 電荷発生基板用バンプ形成装置 |
PCT/JP2000/004280 WO2001003176A1 (fr) | 1999-07-02 | 2000-06-29 | Dispositif de formation de bosses sur substrat semi-conducteur generateur de charge electrique, procede de suppression de la charge electrique d'un substrat generateur de charge electrique, dispositif de suppression de la charge electrique d'un substrat generateur de charge electrique et substrat semi-conducteur generateur |
Publications (2)
Publication Number | Publication Date |
---|---|
DE60037251D1 true DE60037251D1 (de) | 2008-01-10 |
DE60037251T2 DE60037251T2 (de) | 2008-10-09 |
Family
ID=27528983
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60037251T Expired - Fee Related DE60037251T2 (de) | 1999-07-02 | 2000-06-29 | Anordnung zur Herstellung von Löthöckern auf Halbleitersubstraten unter Generierung elektrischer Ladung, Methode und Anordnung zum Entfernen dieser Ladungen, und elektrische Ladung generierendes Halbleitersubstrat |
Country Status (7)
Country | Link |
---|---|
US (3) | US6818975B1 (de) |
EP (1) | EP1202336B1 (de) |
KR (1) | KR100446262B1 (de) |
CN (1) | CN100382261C (de) |
AT (1) | ATE379847T1 (de) |
DE (1) | DE60037251T2 (de) |
WO (1) | WO2001003176A1 (de) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4456234B2 (ja) * | 2000-07-04 | 2010-04-28 | パナソニック株式会社 | バンプ形成方法 |
US20030209310A1 (en) * | 2002-05-13 | 2003-11-13 | Fuentes Anastacio C. | Apparatus, system and method to reduce wafer warpage |
JP4206320B2 (ja) * | 2003-09-19 | 2009-01-07 | 株式会社ルネサステクノロジ | 半導体集積回路装置の製造方法 |
US8020281B2 (en) * | 2008-08-19 | 2011-09-20 | Silverbrook Research Pty Ltd | Printed circuit board bonding device |
US8296933B2 (en) * | 2008-08-19 | 2012-10-30 | Zamtec Limited | Fastening apparatus with authentication system |
CN102426412A (zh) * | 2011-07-12 | 2012-04-25 | 上海华力微电子有限公司 | 一种掩模板表面微尘去除的方法 |
US8324783B1 (en) | 2012-04-24 | 2012-12-04 | UltraSolar Technology, Inc. | Non-decaying electric power generation from pyroelectric materials |
WO2015073808A2 (en) | 2013-11-15 | 2015-05-21 | Greenlee Textron Inc. | Automated bender and systems and methods for providing data to operate an automated bender |
JP6077023B2 (ja) * | 2015-01-09 | 2017-02-08 | 株式会社伸興 | 静電気除去装置及び静電気除去方法 |
JP6456768B2 (ja) * | 2015-05-18 | 2019-01-23 | 株式会社ディスコ | 加工装置 |
KR102355419B1 (ko) * | 2016-07-13 | 2022-01-24 | 어플라이드 머티어리얼스, 인코포레이티드 | 개선된 기판 지지부 |
JP2022510960A (ja) * | 2018-12-03 | 2022-01-28 | アプライド マテリアルズ インコーポレイテッド | マランゴニ乾燥の方法及び装置 |
JP7489865B2 (ja) * | 2020-08-24 | 2024-05-24 | 東京エレクトロン株式会社 | 基板処理方法及び基板処理装置 |
Family Cites Families (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5925370B2 (ja) | 1978-12-26 | 1984-06-16 | 富士通株式会社 | 半導体装置の製造方法 |
JPS62173428A (ja) * | 1986-01-28 | 1987-07-30 | Fujitsu Ltd | 導波路光デバイス |
JPS6477111A (en) * | 1987-09-18 | 1989-03-23 | Fujikura Ltd | Removal of static electricity of wafer |
JPH02203180A (ja) * | 1989-02-02 | 1990-08-13 | Sawafuji Electric Co Ltd | 冷却装置 |
JPH03293808A (ja) * | 1990-04-11 | 1991-12-25 | Fujitsu Ltd | 弾性表面波素子の製造方法 |
JPH0491422A (ja) * | 1990-08-01 | 1992-03-24 | Mitsubishi Electric Corp | 半導体装置の製造方法 |
JPH06232132A (ja) | 1993-02-02 | 1994-08-19 | Toshiba Corp | バンプ形成装置 |
US5665167A (en) * | 1993-02-16 | 1997-09-09 | Tokyo Electron Kabushiki Kaisha | Plasma treatment apparatus having a workpiece-side electrode grounding circuit |
US5341979A (en) * | 1993-09-03 | 1994-08-30 | Motorola, Inc. | Method of bonding a semiconductor substrate to a support substrate and structure therefore |
US5719739A (en) * | 1994-01-13 | 1998-02-17 | Horiguchi; Noboru | Static eliminator |
JP3339164B2 (ja) | 1994-02-16 | 2002-10-28 | 東レ株式会社 | 樹脂硬化tabテープの製造装置および製造方法 |
JP3415283B2 (ja) * | 1994-08-31 | 2003-06-09 | 株式会社東芝 | バンプ形成装置、バンプ形成方法および半導体素子の製造方法 |
JP3079921B2 (ja) * | 1994-11-28 | 2000-08-21 | 松下電器産業株式会社 | 半田ボールの搭載装置および搭載方法 |
JPH1116874A (ja) | 1997-06-26 | 1999-01-22 | Nec Kansai Ltd | 遠心乾燥装置 |
JPH1187392A (ja) | 1997-09-09 | 1999-03-30 | Oki Electric Ind Co Ltd | バンプ形成方法 |
JPH11168074A (ja) | 1997-12-03 | 1999-06-22 | Hitachi Denshi Ltd | 圧電体基板のダイシング方法 |
US6198616B1 (en) * | 1998-04-03 | 2001-03-06 | Applied Materials, Inc. | Method and apparatus for supplying a chucking voltage to an electrostatic chuck within a semiconductor wafer processing system |
US6056191A (en) * | 1998-04-30 | 2000-05-02 | International Business Machines Corporation | Method and apparatus for forming solder bumps |
JPH11330573A (ja) | 1998-05-11 | 1999-11-30 | Toyo Commun Equip Co Ltd | バンプ形成方法及びバンプ形成装置 |
JP2000059165A (ja) * | 1998-08-06 | 2000-02-25 | Toshiba Corp | 弾性表面波装置およびその製造方法 |
JP4203152B2 (ja) * | 1998-09-11 | 2008-12-24 | 株式会社日立メディアエレクトロニクス | 弾性表面波装置 |
WO2000022898A1 (fr) * | 1998-10-13 | 2000-04-20 | Matsushita Electric Industrial Co., Ltd. | Dispositif de chauffage et procede de chauffage |
JP2002009569A (ja) * | 2000-06-26 | 2002-01-11 | Toshiba Corp | 弾性表面波装置の製造方法 |
JP2002203995A (ja) * | 2000-12-27 | 2002-07-19 | Toshiba Corp | 基板加熱方法、基板冷却方法、及びそれらの装置 |
-
2000
- 2000-06-29 WO PCT/JP2000/004280 patent/WO2001003176A1/ja active IP Right Grant
- 2000-06-29 CN CNB008098964A patent/CN100382261C/zh not_active Expired - Fee Related
- 2000-06-29 EP EP00942389A patent/EP1202336B1/de not_active Expired - Lifetime
- 2000-06-29 US US10/019,700 patent/US6818975B1/en not_active Expired - Fee Related
- 2000-06-29 DE DE60037251T patent/DE60037251T2/de not_active Expired - Fee Related
- 2000-06-29 AT AT00942389T patent/ATE379847T1/de not_active IP Right Cessation
- 2000-06-29 KR KR10-2001-7016543A patent/KR100446262B1/ko not_active IP Right Cessation
-
2003
- 2003-08-29 US US10/651,103 patent/US7014092B2/en not_active Expired - Fee Related
- 2003-08-29 US US10/651,199 patent/US7005368B1/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP1202336A1 (de) | 2002-05-02 |
CN100382261C (zh) | 2008-04-16 |
US20040035849A1 (en) | 2004-02-26 |
KR100446262B1 (ko) | 2004-09-01 |
EP1202336A4 (de) | 2004-06-23 |
CN1359534A (zh) | 2002-07-17 |
ATE379847T1 (de) | 2007-12-15 |
DE60037251T2 (de) | 2008-10-09 |
US6818975B1 (en) | 2004-11-16 |
US7005368B1 (en) | 2006-02-28 |
EP1202336B1 (de) | 2007-11-28 |
US7014092B2 (en) | 2006-03-21 |
WO2001003176A1 (fr) | 2001-01-11 |
KR20020022076A (ko) | 2002-03-23 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: PANASONIC CORP., KADOMA, OSAKA, JP |
|
8320 | Willingness to grant licences declared (paragraph 23) | ||
8339 | Ceased/non-payment of the annual fee |