DE60016771D1 - Verfahren und vorrichtung zur herstellung von siliziumkarbid-kristallen - Google Patents
Verfahren und vorrichtung zur herstellung von siliziumkarbid-kristallenInfo
- Publication number
- DE60016771D1 DE60016771D1 DE60016771T DE60016771T DE60016771D1 DE 60016771 D1 DE60016771 D1 DE 60016771D1 DE 60016771 T DE60016771 T DE 60016771T DE 60016771 T DE60016771 T DE 60016771T DE 60016771 D1 DE60016771 D1 DE 60016771D1
- Authority
- DE
- Germany
- Prior art keywords
- carbide
- silicon carbide
- preparing silicon
- carbide crystals
- boules
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/36—Carbides
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10S117/90—Apparatus characterized by composition or treatment thereof, e.g. surface finish, surface coating
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10S117/901—Levitation, reduced gravity, microgravity, space
- Y10S117/902—Specified orientation, shape, crystallography, or size of seed or substrate
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Carbon And Carbon Compounds (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US415402 | 1999-10-08 | ||
US09/415,402 US6824611B1 (en) | 1999-10-08 | 1999-10-08 | Method and apparatus for growing silicon carbide crystals |
PCT/US2000/041076 WO2001027361A1 (en) | 1999-10-08 | 2000-10-05 | Method and apparatus for growing silicon carbide crystals |
Publications (2)
Publication Number | Publication Date |
---|---|
DE60016771D1 true DE60016771D1 (de) | 2005-01-20 |
DE60016771T2 DE60016771T2 (de) | 2006-02-23 |
Family
ID=23645557
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60016771T Expired - Lifetime DE60016771T2 (de) | 1999-10-08 | 2000-10-05 | Verfahren und vorrichtung zur herstellung von siliciumcarbid-kristallen |
Country Status (12)
Country | Link |
---|---|
US (2) | US6824611B1 (de) |
EP (1) | EP1218572B1 (de) |
JP (1) | JP2003511337A (de) |
KR (1) | KR100855650B1 (de) |
CN (2) | CN1384892A (de) |
AT (1) | ATE284986T1 (de) |
AU (1) | AU1631601A (de) |
CA (1) | CA2385621C (de) |
DE (1) | DE60016771T2 (de) |
ES (1) | ES2233478T3 (de) |
TW (1) | TW552325B (de) |
WO (1) | WO2001027361A1 (de) |
Families Citing this family (48)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7601441B2 (en) * | 2002-06-24 | 2009-10-13 | Cree, Inc. | One hundred millimeter high purity semi-insulating single crystal silicon carbide wafer |
US6814801B2 (en) * | 2002-06-24 | 2004-11-09 | Cree, Inc. | Method for producing semi-insulating resistivity in high purity silicon carbide crystals |
ATE335872T1 (de) * | 2003-04-24 | 2006-09-15 | Norstel Ab | Vorrichtung und verfahren zur herstellung von einkristallen durch dampfphasenabscheidung |
US7147713B2 (en) | 2003-04-30 | 2006-12-12 | Cree, Inc. | Phase controlled sublimation |
US7247513B2 (en) | 2003-05-08 | 2007-07-24 | Caracal, Inc. | Dissociation of silicon clusters in a gas phase during chemical vapor deposition homo-epitaxial growth of silicon carbide |
ITMI20031196A1 (it) * | 2003-06-13 | 2004-12-14 | Lpe Spa | Sistema per crescere cristalli di carburo di silicio |
KR100561701B1 (ko) * | 2004-01-30 | 2006-03-17 | 한국과학기술연구원 | 탄화규소 나노로드 및 나노와이어의 제조 방법 |
JP2006001786A (ja) * | 2004-06-17 | 2006-01-05 | Hitachi Chem Co Ltd | フッ化カルシウム結晶育成ルツボ、フッ化カルシウム結晶の製造方法及びフッ化カルシウム結晶 |
JP4609003B2 (ja) * | 2004-08-30 | 2011-01-12 | 株式会社デンソー | 炭化珪素単結晶の製造装置 |
US7314520B2 (en) | 2004-10-04 | 2008-01-01 | Cree, Inc. | Low 1c screw dislocation 3 inch silicon carbide wafer |
JP5068423B2 (ja) * | 2004-10-13 | 2012-11-07 | 新日本製鐵株式会社 | 炭化珪素単結晶インゴット、炭化珪素単結晶ウェハ及びその製造方法 |
KR20060094769A (ko) * | 2005-02-26 | 2006-08-30 | 네오세미테크 주식회사 | 대구경 탄화규소 단결정 성장 장치 |
JP4522898B2 (ja) * | 2005-03-25 | 2010-08-11 | 日本碍子株式会社 | 単結晶製造装置 |
US7608524B2 (en) * | 2005-04-19 | 2009-10-27 | Ii-Vi Incorporated | Method of and system for forming SiC crystals having spatially uniform doping impurities |
US7615801B2 (en) * | 2005-05-18 | 2009-11-10 | Cree, Inc. | High voltage silicon carbide devices having bi-directional blocking capabilities |
US20060267043A1 (en) | 2005-05-27 | 2006-11-30 | Emerson David T | Deep ultraviolet light emitting devices and methods of fabricating deep ultraviolet light emitting devices |
NO326797B1 (no) * | 2005-06-10 | 2009-02-16 | Elkem As | Fremgangsmate og apparat for raffinering av smeltet materiale |
US8052794B2 (en) * | 2005-09-12 | 2011-11-08 | The United States Of America As Represented By The Secretary Of The Navy | Directed reagents to improve material uniformity |
US20070169687A1 (en) * | 2006-01-26 | 2007-07-26 | Caracal, Inc. | Silicon carbide formation by alternating pulses |
US8044567B2 (en) * | 2006-03-31 | 2011-10-25 | General Electric Company | Light source incorporating a high temperature ceramic composite and gas phase for selective emission |
KR100760336B1 (ko) * | 2006-06-22 | 2007-09-20 | (주)글로벌코센테크 | 화학적 기상 반응 방법을 이용하여 흑연의 표면 특성을개질하는 방법 |
ITMI20062213A1 (it) * | 2006-11-20 | 2008-05-21 | Lpe Spa | Reattore per crescere cristalli |
JP4735622B2 (ja) * | 2007-08-28 | 2011-07-27 | 株式会社デンソー | 炭化珪素単結晶の製造装置 |
CN100523315C (zh) * | 2007-09-28 | 2009-08-05 | 中国科学院物理研究所 | 分体式钽坩埚及其制造方法 |
JP4547031B2 (ja) * | 2009-03-06 | 2010-09-22 | 新日本製鐵株式会社 | 炭化珪素単結晶製造用坩堝、並びに炭化珪素単結晶の製造装置及び製造方法 |
WO2011010394A1 (ja) * | 2009-07-21 | 2011-01-27 | トヨタ自動車株式会社 | 溶液法による単結晶成長用種結晶軸 |
JP5500953B2 (ja) * | 2009-11-19 | 2014-05-21 | 株式会社ニューフレアテクノロジー | 成膜装置および成膜方法 |
EP2657373A1 (de) | 2012-04-23 | 2013-10-30 | Chung-Shan Institute of Science and Technology, Armaments, Bureau, Ministry of National Defense | Tiegel zum Züchten von Kristallen |
KR101458183B1 (ko) * | 2013-03-07 | 2014-11-05 | 에스케이씨 주식회사 | 탄화규소 단결정 성장 장치 및 방법 |
EP2823703A1 (de) | 2013-07-10 | 2015-01-14 | Heliospectra AB | Verfahren und Vorrichtung zur Steuerung von Pflanzenwachstum |
US9580837B2 (en) * | 2014-09-03 | 2017-02-28 | Ii-Vi Incorporated | Method for silicon carbide crystal growth by reacting elemental silicon vapor with a porous carbon solid source material |
CN105702561B (zh) * | 2014-12-12 | 2018-09-18 | 韩国东海炭素株式会社 | 半导体处理组件再生方法 |
CN104514034B (zh) * | 2015-01-08 | 2017-10-27 | 中国科学院半导体研究所 | 用于碳化硅生长的高温装置及方法 |
CN114000197A (zh) | 2015-09-24 | 2022-02-01 | 帕里杜斯有限公司 | 气相沉积装置以及使用高纯度聚合物衍生的碳化硅的技术 |
CN106929919A (zh) * | 2015-12-29 | 2017-07-07 | 中国科学院上海硅酸盐研究所 | 一种碳化硅晶体生长用坩埚 |
CN105525352B (zh) * | 2016-01-12 | 2018-07-10 | 台州市一能科技有限公司 | 一种采用升华法高速制造碳化硅晶体的装置及方法 |
JP6390628B2 (ja) * | 2016-01-12 | 2018-09-19 | トヨタ自動車株式会社 | SiC単結晶の製造方法及び製造装置 |
CN105543964A (zh) * | 2016-02-02 | 2016-05-04 | 北京华进创威电子有限公司 | 消除碳化硅单晶生长过程中硅对石墨体腐蚀的方法和装置 |
CN108070908A (zh) * | 2016-11-17 | 2018-05-25 | 上海新昇半导体科技有限公司 | 4H-SiC晶体生长设备及方法 |
JP7068914B2 (ja) * | 2018-04-26 | 2022-05-17 | 昭和電工株式会社 | 断熱性遮蔽部材及びそれを備えた単結晶製造装置 |
CN109234798B (zh) * | 2018-11-02 | 2019-07-23 | 山东天岳先进材料科技有限公司 | 碳化硅单晶的连续长晶方法 |
KR102233751B1 (ko) * | 2019-03-12 | 2021-03-30 | 주식회사 카보넥스 | 탄화규소 제조장치 및 그를 이용한 탄화규소의 제조방법 |
CN111732448A (zh) * | 2020-06-16 | 2020-10-02 | 璨隆科技发展有限公司 | 一种石墨坩埚及其制备方法 |
JP2023537503A (ja) * | 2020-08-06 | 2023-09-01 | エスジーエル・カーボン・エスイー | 耐火性炭化物多層 |
CN113026099A (zh) * | 2021-03-05 | 2021-06-25 | 广州爱思威科技股份有限公司 | 碳化硅单晶生长控制装置及控制方法 |
CN113463197A (zh) * | 2021-06-18 | 2021-10-01 | 广州爱思威科技股份有限公司 | 一种碳化硅晶体的制备方法、碳化硅晶片、碳化硅衬底及半导体器件 |
CN114045558B (zh) * | 2021-10-19 | 2023-06-09 | 江苏超芯星半导体有限公司 | 一种以单一气体为源气体制备碳化硅晶体的方法 |
CN115287760A (zh) * | 2022-08-04 | 2022-11-04 | 顾赢速科技(合肥)有限公司 | 高温化学气相沉积法生长碳化硅晶体的方法及其装置 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3230727A1 (de) | 1982-08-18 | 1984-02-23 | Siemens AG, 1000 Berlin und 8000 München | Verfahren zum herstellen von siliziumkarbid |
US4664944A (en) * | 1986-01-31 | 1987-05-12 | The United States Of America As Represented By The United States Department Of Energy | Deposition method for producing silicon carbide high-temperature semiconductors |
US4866005A (en) | 1987-10-26 | 1989-09-12 | North Carolina State University | Sublimation of silicon carbide to produce large, device quality single crystals of silicon carbide |
AU2250392A (en) * | 1991-06-12 | 1993-01-12 | Case Western Reserve University | Process for the controlled growth of single-crystal films of silicon carbide polytypes on silicon carbide wafers |
JPH05208900A (ja) * | 1992-01-28 | 1993-08-20 | Nisshin Steel Co Ltd | 炭化ケイ素単結晶の成長装置 |
JP3491402B2 (ja) | 1995-08-07 | 2004-01-26 | 株式会社デンソー | 単結晶製造方法及びその単結晶製造装置 |
SE9503426D0 (sv) * | 1995-10-04 | 1995-10-04 | Abb Research Ltd | A device for heat treatment of objects and a method for producing a susceptor |
US5746827A (en) | 1995-12-27 | 1998-05-05 | Northrop Grumman Corporation | Method of producing large diameter silicon carbide crystals |
RU2094547C1 (ru) | 1996-01-22 | 1997-10-27 | Юрий Александрович Водаков | Сублимационный способ выращивания монокристаллов карбида кремния и источник карбида кремния для осуществления способа |
JP3384242B2 (ja) * | 1996-03-29 | 2003-03-10 | 株式会社豊田中央研究所 | 炭化珪素単結晶の製造方法 |
US5873937A (en) | 1997-05-05 | 1999-02-23 | Northrop Grumman Corporation | Method of growing 4H silicon carbide crystal |
US5915194A (en) * | 1997-07-03 | 1999-06-22 | The United States Of America As Represented By The Administrator Of National Aeronautics And Space Administration | Method for growth of crystal surfaces and growth of heteroepitaxial single crystal films thereon |
JP4122548B2 (ja) * | 1997-10-15 | 2008-07-23 | 昭和電工株式会社 | 炭化珪素単結晶の製造方法 |
JPH11116399A (ja) * | 1997-10-16 | 1999-04-27 | Denso Corp | 炭化タンタルのコーティング方法及びこの方法を用いて製造した単結晶製造装置 |
US5985024A (en) * | 1997-12-11 | 1999-11-16 | Northrop Grumman Corporation | Method and apparatus for growing high purity single crystal silicon carbide |
RU2162117C2 (ru) * | 1999-01-21 | 2001-01-20 | Макаров Юрий Николаевич | Способ эпитаксиального выращивания карбида кремния и реактор для его осуществления |
-
1999
- 1999-10-08 US US09/415,402 patent/US6824611B1/en not_active Expired - Lifetime
-
2000
- 2000-10-05 WO PCT/US2000/041076 patent/WO2001027361A1/en active IP Right Grant
- 2000-10-05 CN CN00814001A patent/CN1384892A/zh active Pending
- 2000-10-05 CA CA002385621A patent/CA2385621C/en not_active Expired - Lifetime
- 2000-10-05 AU AU16316/01A patent/AU1631601A/en not_active Abandoned
- 2000-10-05 DE DE60016771T patent/DE60016771T2/de not_active Expired - Lifetime
- 2000-10-05 CN CNA2007101619502A patent/CN101220504A/zh active Pending
- 2000-10-05 ES ES00978907T patent/ES2233478T3/es not_active Expired - Lifetime
- 2000-10-05 JP JP2001529488A patent/JP2003511337A/ja active Pending
- 2000-10-05 KR KR1020027003677A patent/KR100855650B1/ko active IP Right Grant
- 2000-10-05 EP EP00978907A patent/EP1218572B1/de not_active Expired - Lifetime
- 2000-10-05 AT AT00978907T patent/ATE284986T1/de not_active IP Right Cessation
- 2000-11-13 TW TW089121008A patent/TW552325B/zh not_active IP Right Cessation
-
2004
- 2004-09-24 US US10/949,577 patent/US20050120943A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
EP1218572A1 (de) | 2002-07-03 |
KR20020042682A (ko) | 2002-06-05 |
US20050120943A1 (en) | 2005-06-09 |
ATE284986T1 (de) | 2005-01-15 |
CN1384892A (zh) | 2002-12-11 |
WO2001027361A1 (en) | 2001-04-19 |
US6824611B1 (en) | 2004-11-30 |
ES2233478T3 (es) | 2005-06-16 |
TW552325B (en) | 2003-09-11 |
CA2385621A1 (en) | 2001-04-19 |
DE60016771T2 (de) | 2006-02-23 |
CN101220504A (zh) | 2008-07-16 |
KR100855650B1 (ko) | 2008-09-03 |
JP2003511337A (ja) | 2003-03-25 |
AU1631601A (en) | 2001-04-23 |
EP1218572B1 (de) | 2004-12-15 |
CA2385621C (en) | 2009-12-22 |
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Legal Events
Date | Code | Title | Description |
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8364 | No opposition during term of opposition |