CN107406978B - 用于碳掺杂含硅膜的组合物以及使用所述组合物的方法 - Google Patents

用于碳掺杂含硅膜的组合物以及使用所述组合物的方法 Download PDF

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CN107406978B
CN107406978B CN201680019197.0A CN201680019197A CN107406978B CN 107406978 B CN107406978 B CN 107406978B CN 201680019197 A CN201680019197 A CN 201680019197A CN 107406978 B CN107406978 B CN 107406978B
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disilacyclobutane
carbon
film
cyclic
doped silicon
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CN107406978A (zh
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H·钱德拉
K·S·卡西尔
A·马利卡朱南
雷新建
M·R·麦克唐纳
萧满超
M·B·拉奥
李建恒
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Versum Materials US LLC
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    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
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    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
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CN201680019197.0A 2015-02-06 2016-02-04 用于碳掺杂含硅膜的组合物以及使用所述组合物的方法 Active CN107406978B (zh)

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