CN105593410A - 用于衬底表面金属化的新颖粘着促进方法 - Google Patents

用于衬底表面金属化的新颖粘着促进方法 Download PDF

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Publication number
CN105593410A
CN105593410A CN201480052346.4A CN201480052346A CN105593410A CN 105593410 A CN105593410 A CN 105593410A CN 201480052346 A CN201480052346 A CN 201480052346A CN 105593410 A CN105593410 A CN 105593410A
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CN
China
Prior art keywords
metal
substrate
plating
oxide
aforementioned
Prior art date
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Pending
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CN201480052346.4A
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English (en)
Inventor
刘志明
付海罗
色拉·汉格那
卢茨·勃兰特
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Atotech Deutschland GmbH
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Atotech Deutschland GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Priority to EP13186150 priority Critical
Priority to EP13186150.2 priority
Application filed by Atotech Deutschland GmbH filed Critical Atotech Deutschland GmbH
Priority to PCT/EP2014/070145 priority patent/WO2015044091A1/en
Publication of CN105593410A publication Critical patent/CN105593410A/zh
Pending legal-status Critical Current

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