JP7261545B2 - 配線基板、半導体パッケージ及び配線基板の製造方法 - Google Patents
配線基板、半導体パッケージ及び配線基板の製造方法 Download PDFInfo
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Description
先ず、第1の実施形態について説明する。第1の実施形態はインターポーザに関し、インターポーザは配線基板の一例である。図1は、第1の実施形態に係るインターポーザを示す断面図である。
次に、第2の実施形態について説明する。第2の実施形態は、第1の実施形態に係るインターポーザを製造する方法に関する。図2~図4は、第2の実施形態に係る配線基板の製造方法を示す断面図である。
CH2(OH)2+OH-⇔CH2OHO-+H2O (2)
・CHOHO-+OH-→HCOO-+H2O+e- (4)
次に、第3の実施形態について説明する。第3の実施形態は半導体パッケージに関する。図8は、第3の実施形態に係る半導体パッケージを示す断面図である。
本開示において、合金膜112が形成されれば、所望の目的を達成することができる。また、より適切な合金膜112が形成されれば、より優れた効果を得ることができる。そこで、本発明者は、より好ましい合金膜112を形成することができる条件を解明すべく、無電解Cuめっき液中の硫酸ニッケル(II)六水和物の濃度と密着性との関係に関する実験を行った。
本発明者は、第2の実施形態に倣った方法により無電解Cuめっき層を形成し、種々の段階で電子顕微鏡観察を行った。図10は、ガラス基材の表面の走査型電子顕微鏡(scanning electron microscope:SEM)像を示す図であり、図11は、酸化膜の表面のSEM像を示す図であり、図12は、無電解Cuめっき層の表面のSEM像を示す図である。また、図13は、参考例における無電解Cuめっき層の表面のSEM像を示す図である。参考例では、酸化膜を形成せずにガラス基材上に無電解Cuめっき層を形成した。
101 ガラス基材
102 貫通孔
111 酸化膜
112 合金膜
113 無電解Cuめっき層
114 電解Cuめっき層
115 Cuめっき層
300 半導体パッケージ
310 半導体チップ
320 バンプ
330 アンダーフィル樹脂
Claims (13)
- 基材と、
前記基材の表面に形成された、Ti若しくはZr又はこれらの両方の酸化膜と、
前記酸化膜上に形成された、Ni、Co若しくはW又はこれらの任意の組み合わせとCuとの合金膜と、
前記合金膜上に形成された無電解Cuめっき層と、
前記無電解Cuめっき層上に形成された電解Cuめっき層と、
を有し、
前記基材はガラス基材又はシリコン基材であり、
前記合金膜及び前記無電解Cuめっき層は、Ni、Co若しくはW又はこれらの任意の組み合わせを含む無電解Cuめっき液を用いた無電解めっきにより連続して形成されていることを特徴とする配線基板。 - 前記基材に貫通孔が形成されていることを特徴とする請求項1に記載の配線基板。
- 前記酸化膜、前記合金膜、前記無電解Cuめっき層及び前記電解Cuめっき層は、前記貫通孔の側面から前記基材の第1の面及び前記第1の面とは反対側の第2の面にかけて形成されていることを特徴とする請求項2に記載の配線基板。
- 前記酸化膜の表面粗さRaは0.5nm~2.0nmであることを特徴とする請求項1乃至3のいずれか1項に記載の配線基板。
- 前記無電解Cuめっき液は、
硫酸銅五水和物と、
硫酸ニッケル(II)六水和物、硫酸コバルト(II)七水和物、タングステン酸カリウム若しくは酸化タングステン又はこれらの任意の組み合わせと、
酒石酸ナトリウムカリウムと、
ホルムアルデヒド溶液と、
を含むことを特徴とする請求項1乃至4のいずれか1項に記載の配線基板。 - 請求項1乃至5のいずれか1項に記載の配線基板と、
前記配線基板に実装された半導体チップと、
を有し、
前記半導体チップは、
前記電解Cuめっき層に接続された接続端子を有することを特徴とする半導体パッケージ。 - Ti若しくはZr又はこれらの両方の有機金属錯体を用いて基材の表面上にTi若しくはZr又はこれらの両方の酸化膜を形成する工程と、
Ni、Co若しくはW又はこれらの任意の組み合わせを含む無電解Cuめっき液を用いた無電解めっきにより、前記酸化膜上にNi、Co若しくはW又はこれらの任意の組み合わせとCuとの合金膜を形成し、前記合金膜の形成に連続して前記合金膜上に無電解Cuめっき層を形成する工程と、
前記無電解Cuめっき層上に電解Cuめっき層を形成する工程と、
を有し、
前記基材はガラス基材又はシリコン基材であることを特徴とする配線基板の製造方法。 - 前記基材に貫通孔が形成されていることを特徴とする請求項7に記載の配線基板の製造方法。
- 前記酸化膜、前記合金膜、前記無電解Cuめっき層及び前記電解Cuめっき層を、前記貫通孔の側面から前記基材の第1の面及び前記第1の面とは反対側の第2の面にかけて形成することを特徴とする請求項8に記載の配線基板の製造方法。
- 前記酸化膜の表面粗さRaは0.5nm~2.0nmであることを特徴とする請求項7乃至9のいずれか1項に記載の配線基板の製造方法。
- 前記酸化膜を形成する工程は、
前記有機金属錯体を溶媒に溶解させたコーティング液を前記基材の表面に設ける工程と、
前記コーティング液を乾燥させる工程と、
を有することを特徴とする請求項7乃至10のいずれか1項に記載の配線基板の製造方法。 - 前記電解Cuめっき層を形成する工程の後に、アニールにより、前記電解Cuめっき層を再結晶させる工程を有することを特徴とする請求項7乃至11のいずれか1項に記載の配線基板の製造方法。
- 前記無電解Cuめっき液は、
硫酸銅五水和物と、
硫酸ニッケル(II)六水和物、硫酸コバルト(II)七水和物、タングステン酸カリウム若しくは酸化タングステン又はこれらの任意の組み合わせと、
酒石酸ナトリウムカリウムと、
ホルムアルデヒド溶液と、
を含むことを特徴とする請求項7乃至12のいずれか1項に記載の配線基板の製造方法。
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