CN105359409A - 高线性可变电容器阵列 - Google Patents
高线性可变电容器阵列 Download PDFInfo
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Abstract
一种从多个小单元(100-0、100-1、……100-N)构造的高度线性可变电容器阵列(400)。每个小单元包括反平行连接的一对无源的两端子电容器组件。电容器组件可以是金属氧化物半导体MOS电容器。控制电路(410)将偏置电压(411-0、411-1、……411-N)施加到与每个电容器组件关联的偏置电压端子,以由此控制阵列的总体电容。每个小单元中的两个电容器反平行连接,以减少小单元的和阵列的电容的电压系数。MOS电容器优选地操作在反转模式或累积模式下。
Description
技术领域
该专利申请涉及电容器,具体地说,涉及一种从半导体电容器小单元的阵列实现的高度线性可变电容器。
背景技术
电容器是用于存储电场中的能量的两端子无源电组件。电容器可以采取很多不同的物理形式,但通常将包含介质(绝缘体)所分离的至少两个电导体。当穿过导体施加电势差(电压)时,静电场穿过介质发生,使得正电荷聚集在一个导体上而负电荷聚集在另一导体上。能量由此存储在所得静电场中。电容器最一般地由单个恒定值——电容——来表征,电容是每个导体上的电荷对于它们之间的电势差的比率。其它参数(例如品质因数(Q)、频率响应和/或线性)在选择适当电容器设计方面也是重要的。
电容器一般用在很多不同类型的交流(AC)电路中,并且尤其是射频(RF)电路中。电容器与电感器和其它组件组合以实现滤波器、双工器、谐振器、调谐器以及这些电路中的其它功能。在同时尽可能小并且廉价的同时,电子设备(例如智能电话、平板、膝上型计算机等)现在典型地期待使用很多不同的无线电通信协议并且在宽的各种频率上操作。谐振器设计并且因此电容器设计变为实现这些目标的关键方面。
发明内容
问题描述
为了满足很多电子设备的需求,前端滤波器、双工器和相似组件应是可主动地配置的。但作为一个示例,智能电话期待操作的最新近的数字无线协议(例如长期演进(LTE))需要用于选择很多不同操作频率的能力。
这种要求使得难以在过滤掉干扰信号的同时还遵守精确地发送并且接收RF信号所需的线性规范。
用于可配置的滤波器和双工器的其它设计是基于微机电系统(MEMS)技术的。然而,基于MEMS的电路设计典型地展现糟糕的品质因数、糟糕的可靠性以及受限的可调谐性。
例如耦合谐振器的方法遭受大的尺寸和受限的保持性,并且因此对于便携式无线设备中的应用也是不合适的。
因此,混合信号前端保留至少一个领域,其中,替选IC技术(例如砷化镓(GaAs))仍提出对于更常见的硅技术的有吸引力的选项。
优选解决方案的概述
上述问题和其它有关的问题激发本发明,其为高度线性可配置的半导体电容器。
包括两个或更多个电容小单元的电容器阵列提供所述电容器。每个小单元耦合在第一端子和第二端子与控制信号输入中的至少一个之间。每个小单元包括一对无源的两端子电容器组件。可以是金属氧化物半导体(MOS)电容器的每个两端子电容器组件具有阳极和阴极,并且具有进一步受控于输入偏置电压的电容。每个小单元中的所述一对电容器组件通过反平行配置而连接,从而第一电容器的阳极连接到所述第二电容器的阴极,并且所述第二电容器的阳极连接到所述第一电容器的阴极。控制电路接收一个或多个控制输入,并且作用于所述阵列所提供的总体电容的改变。典型地通过作用于对应偏置电压输入的改变来选择用于小单元的多个可能的电容之一而作用于这种改变。
在优选配置中,选择所述偏置电压,从而所述电容器组件操作在响应于两个或更多个预定偏置电压的电容的变化相对很小的范围中。这种变化方面的减少提供对于所施加的RF信号的差异的存在性的更小的易感性。这种布置还允许控制信号成为具有两个状态的数字逻辑信号;控制信号的给定状态选择每个小单元中的偏置电压设置中的对应偏置电压设置。
小单元可以陈设在例如阶梯的等级中,从而控制输入激活用于阵列中的每个元件的一个偏置电平或另一偏置电平。对于阶梯的每个台阶,阶梯中的相邻小单元的电容大小可以增加达预定因子(例如2)。这种布置允许通过将多比特数字控制字应用为输入来选择用于阵列的总电容。
可以在单个半导体封装中制造共享公共控制输入但不同信号输入的多个阵列。
这种配置提供很多优点,包括高品质因数和高线性。
对于电容器阵列的合适应用是可编程滤波器、天线调谐器、网络匹配调谐器、移相器、锁相环、双工器和其它电路功能。
附图说明
以下的详细描述参照附图,其中:
图1A示出具有通过反平行配置连接的并且受控于第一偏置电压V1以提供第一总电容2C1的两个电容器元件的电容器小单元;
图1B示出在第二电压V2处所偏置以提供第二总电容2C2的电容器小单元;
图2示出用于金属氧化物半导体(MOS)电容器的典型电容针对所施加的偏置电压;
图3示出用于图1A和图1B的电容器元件的V1和V2的优选操作电压范围;
图4示出以经由N个输入控制信号控制的数量N个电容器小单元构成的电容器阵列;
图5A和图5B是图4的电容器阵列的电容和品质因数;
图6是包括四个可调整电容器阵列的半导体集成电路(IC)芯片的高级框图;以及
图7是图6的IC的更详细示图。
具体实施方式
简言之,从多个电容小单元构造用于在此所讨论的矢量电容器的优选设计。每个电容小单元耦合在矢量电容器的第一信号端子与第二信号端子之间。每个电容小单元还包括一对无源的两端子电容器组件,其中,每个电容器组件具有阳极端子和阴极端子以及偏置电压输入端子。每个小单元中的一对电容器通过反平行而连接,从而第一电容器的阳极连接到第二电容器的阴极,并且第二电容器的阳极连接到第一电容器的阴极。控制电路将偏置电压施加到偏置电压输入端子,以由此控制阵列的总体电容。
我们现在转向讨论用于电容器阵列的优选配置。我们可以优选地考虑在硅中构造电容器;深亚微米互补金属氧化物半导体(DSM-CMOS)集成电路(IC)技术是一种可能性。在此优选的DSM-CMOS技术实施例可以通过十分小的形状因子提供非常满意的可编程电容结构。
多数MOS电容器设计中出现的典型问题是它们导致非线性。在用于射频信号处理的实际实现方式中,这些电容器将典型地展现随所施加的信号而在量值方面变化的交变交流(AC)效应。为了使得这种效应最小化,根据每个大小C的N个电容器小单元的阵列构造在此优选的矢量电容器结构。凭借通过使用数字的字以选择电容值所提供的可编程性,可以实现大于3:1的电容比率。通过在每个特定范围中操作电容器元件的MOS结合点,也可以减少非线性效应。
图1A示出用于矢量电容器阵列中的示例电容性小单元110的一个布置。提供一对CMOS(互补金属氧化物半导体)电容器结构112-1、112-2。虽然在此未详细示出,但可以通过任何合适的方式在物理上形成每个半导体电容器结构。例如,DSM-CMOS中所制造的电容器结构可以包括导电层,其被部署在栅极氧化物上,进而被部署在基底半导体衬底上。衬底可以具有接触覆盖P衬底区域或N衬底区域的N阱或P阱的一个或多个扩散。所得电容器具有栅极端子(即连接到栅极氧化物上所覆盖的导电层的端子)所提供的阳极;扩散形成阴极(例如源极-漏极)。
构成每个小单元110的两个电容器112-1、112-2通过反平行配置而连接,从而一个电容器的极性给定端子连接到另一电容器的相反极性端子。换言之,第一电容器的阳极连接到第二电容器的阴极,第二电容器的阳极连接到第一电容器的阴极。
通过调整每个小单元的电容(例如通过改变所施加的偏置电压)来控制阵列的总电容。例如,如图1A所示,施加偏置电压V1提供2C1的总电容;如图1B所示,施加偏置电压V2提供2C2的总电容。
更具体地说,取决于所施加的偏置电压Vc,MOS电容器元件提供电容C。图2示出所得电容C针对所施加的偏置电压Vc的示例曲线。设计多数MOS电容器,从而偏置电压Vc处于某范围内,从而半导体结合点操作在提供通常随所施加的电压线性增加的电容的曲线的区域中。然而,在模拟电压Vc在该区域中关于状态化电压V变化的情况下,所得电容C因此也变化。如果电容器阵列将要用在期待电容器接收变化RF信号的应用中,则这可能因不利线性效应而导致问题。
然而,于在此优选的实施例中,我们还有选择地选取用于每个电容器元件110的偏置电压。更具体地说,偏置电压被选择为处于V1或V2的范围中,典型地产生在电容曲线的相反外部范围中,其中,电容随电压的变化相当小。这些外部操作范围被称为用于MOS电容器的反转模式和累积模式。
虽然这限制从每个单个MOS电容器512提供的总体可用电容,但变化的减少在存在RF信号的情况下提供更少的变化。通过对图2中的在V处的输出正弦与图3中的在V1和/或V2处产生的减少幅度的正弦进行比较,这是明显的。
如果反平行电容器配对112-1、112-2的每个元件的电容值相同,则该配对的总电容可以表示如下:
在V1处的总电容CT1=[C1+ΔC1]+[C1-ΔC1]=2C1
并且类似地,
在V2处的总电容CT2=[C2+ΔC2]+[C2-ΔC2]=2C2
因此,作为图3的偏置曲线的斜率的结果的电容中的任何不同的效应ΔC作为反平行配置的结果而得以抵消。
图4示出阶梯(或其它等级)中所布置的数量(N+1)的这些电容器元件110-0、110-1、……110-N构成的示例阵列400。阶梯中的给定电容器元件110取决于其对应所施加的偏置电压而提供可选择的电容的量。也就是说,偏置电压V1或V2独立于施加到其它元件的偏置电压而施加到每个电容器元件。偏置电压进而取决于N+1个输入控制信号V{0}至V{N}中的对应输入控制信号的值。
输入控制信号是通过控制接口410提供的,并且可以是数字信号411-0、411-1、……、411-N,其选择一个偏置电压V1或另一偏置电压V2,以在给定时间施加到在任何给定时间的任何给定电容器元件。
在阶梯的每个台阶处的电容器的规模与其相邻台阶的不同。例如,取决于其所施加的偏置电压V1或V2,在阶梯的底部处的电容器元件110-0可以是C1或C2。取决于其所施加的偏置电压V1或V2,阶梯的下一电容器元件110-1(从底部向上一个)可以标定为2C1或2C2。阶梯上的下一电容器元件110-2可以随2的幂次级数而选择4C1或4C2,依此类推,从而阶梯中的N+1个电容器元件提供NC1或NC2。
在N=9的示例实现方式中,电容器元件110-9因此取决于输入的值V{9}提供512C1或512C2的可选择的电容,元件110-8取决于输入的值V{8}提供256C1或256C2的电容,依此类推,下至取决于输入的值V{0}提供1C1或1C2的输出电容的元件110-0。
图5A和图5B示出从被设计为通过10比特的控制输入(例如N=9并且电容代码范围从0到1023)和所得6.6pF的步长大小提供从2.97pF到9.64pF的可选择的电容的矢量电容器阵列可用的典型电容范围和品质因数。假设1GHz的输入RF信号,对曲线进行建模。
图6示出组合四个不同矢量电容器阵列400的集成电路(IC)610的高级框图。每个阵列配备有其自身的各个RF输入(RFin1、RFin2、RFin3、RFin4)和RF输出(RFout1、RFout2、RFout3、RFout4)。然而,控制输入可以共同馈送到阵列中的每一个。
图7更详细地示出该IC610。在此情况下,在同一芯片衬底上提供四个阵列400-1、400-2、400-3和400-4。施加到一个阵列(例如400-1)中的偏置端子的控制电压与从公共控制接口410施加到其它阵列400-2、400-3和400-4的控制电压相同。
在例如智能电话的应用中,这允许不同的阵列用于实现调谐到不同射频波段的不同滤波器。作为一个示例,这些电容器阵列构造可以与固定电感器配对,以形成可调谐的矢量谐振器,其可以然后级联以形成矢量滤波器。结果可以是高度线性紧凑并且可编程的矢量滤波器。
虽然本发明各个实施例现在已经特定地示出于附图中并且描述于上述文本中,但本领域技术人员应理解,在不脱离本发明的范围的情况下,可以在形式和细节方面在其中进行各种改变。因此,意图本发明仅由所附权利要求限定。
Claims (7)
1.一种可变电容器装置,包括:
第一端子;
第二端子;
多个控制字输入端子,用于接收多个控制输入信号;
多个电容小单元,每个小单元耦合在所述第一端子与所述第二端子之间,每个单元电容小单元包括一对无源的两端子电容器组件,每个电容器组件具有阳极端子和阴极端子以及偏置电压输入端子,所述一对电容器反平行连接,从而第一电容器的阳极连接到第二电容器的阴极,所述第二电容器的阳极连接到所述第一电容器的阴极;以及
控制电路,其耦合到所述控制字输入端子和所述多个偏置电压输入端子,用于根据所述控制输入信号的状态有选择地控制施加到所述电容小单元的偏置电压。
2.如权利要求1所述的装置,其中,所述电容器组件是金属氧化物半导体电容器,所述控制电路提供取决于用于所述半导体电容器中的每一个的两个相应偏置点的偏置电压。
3.如权利要求1所述的装置,其中,所述电容小单元被布置在阶梯中,其中,给定电容器小单元的两个电容值大于所述阶梯中的相邻电容器小单元的两个电容元件。
4.如权利要求3所述的装置,其中,所述阶梯中的每个相邻小单元的电容值增加达2的因子。
5.如权利要求1所述的装置,其中,所述多个电容器阵列形成在公共半导体衬底上。
6.如权利要求5所述的装置,其中,所述多个电容器阵列共享公共控制输入,但被提供单独RF信号输入。
7.如权利要求2所述的装置,其中,所述两个相应偏置点位于用于分别包括反转模式和累积模式的半导体电容器的偏置电压操作范围的相对端处。
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US14/014,496 US9019007B2 (en) | 2013-05-28 | 2013-08-30 | High linearity variable capacitor array |
US14/014,496 | 2013-08-30 | ||
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Families Citing this family (31)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9086709B2 (en) | 2013-05-28 | 2015-07-21 | Newlans, Inc. | Apparatus and methods for variable capacitor arrays |
US9570222B2 (en) | 2013-05-28 | 2017-02-14 | Tdk Corporation | Vector inductor having multiple mutually coupled metalization layers providing high quality factor |
US9324490B2 (en) | 2013-05-28 | 2016-04-26 | Tdk Corporation | Apparatus and methods for vector inductors |
US9461610B2 (en) | 2014-12-03 | 2016-10-04 | Tdk Corporation | Apparatus and methods for high voltage variable capacitors |
US9735752B2 (en) | 2014-12-03 | 2017-08-15 | Tdk Corporation | Apparatus and methods for tunable filters |
US9671812B2 (en) * | 2014-12-17 | 2017-06-06 | Tdk Corporation | Apparatus and methods for temperature compensation of variable capacitors |
US10014692B2 (en) * | 2014-12-18 | 2018-07-03 | Intel Corporation | Apparatuses, methods, and systems with cross-coupling noise reduction |
US9362882B1 (en) | 2015-01-23 | 2016-06-07 | Tdk Corporation | Apparatus and methods for segmented variable capacitor arrays |
US9680426B2 (en) | 2015-03-27 | 2017-06-13 | Tdk Corporation | Power amplifiers with tunable notches |
US10382002B2 (en) | 2015-03-27 | 2019-08-13 | Tdk Corporation | Apparatus and methods for tunable phase networks |
US10073482B2 (en) | 2015-03-30 | 2018-09-11 | Tdk Corporation | Apparatus and methods for MOS capacitor structures for variable capacitor arrays |
US10042376B2 (en) | 2015-03-30 | 2018-08-07 | Tdk Corporation | MOS capacitors for variable capacitor arrays and methods of forming the same |
US9595942B2 (en) | 2015-03-30 | 2017-03-14 | Tdk Corporation | MOS capacitors with interleaved fingers and methods of forming the same |
US9973155B2 (en) | 2015-07-09 | 2018-05-15 | Tdk Corporation | Apparatus and methods for tunable power amplifiers |
US9502586B1 (en) * | 2015-09-14 | 2016-11-22 | Qualcomm Incorporated | Backside coupled symmetric varactor structure |
US9859357B1 (en) * | 2016-07-14 | 2018-01-02 | International Business Machines Corporation | Magnetic inductor stacks with multilayer isolation layers |
KR20180048244A (ko) * | 2016-10-31 | 2018-05-10 | 삼성전기주식회사 | 체적 음향 공진기를 포함하는 필터 |
US10812033B2 (en) * | 2017-12-29 | 2020-10-20 | Lam Research Corporation | High-power radio-frequency spiral-coil filter |
CN108259021A (zh) * | 2018-01-10 | 2018-07-06 | 广西师范大学 | 一种cmos宽带分布式可调带通滤波器 |
JP2020195115A (ja) * | 2019-05-30 | 2020-12-03 | 株式会社村田製作所 | 高周波回路および通信装置 |
CN110518345B (zh) * | 2019-08-26 | 2023-09-08 | 深圳迈睿智能科技有限公司 | 具有接地点的微波探测器及其制造方法 |
CN112444767A (zh) * | 2019-08-30 | 2021-03-05 | 通用电气精准医疗有限责任公司 | 用于磁共振成像的射频功率变换器和射频发射系统 |
CN110677139A (zh) * | 2019-09-25 | 2020-01-10 | 北京中石正旗技术有限公司 | 一种数控带通滤波模块 |
JP7395978B2 (ja) * | 2019-11-14 | 2023-12-12 | 株式会社レゾナック | 磁気センサ |
US11368181B2 (en) * | 2020-06-30 | 2022-06-21 | Apple Inc. | Duplexer with balanced impedance ladder |
US11201602B1 (en) | 2020-09-17 | 2021-12-14 | Analog Devices, Inc. | Apparatus and methods for tunable filtering |
US20220109220A1 (en) * | 2020-10-01 | 2022-04-07 | Mobix Labs, Inc. | Power splitter-combiner circuits in 5g mm-wave beamformer architectures |
US11201600B1 (en) | 2020-10-05 | 2021-12-14 | Analog Devices, Inc. | Apparatus and methods for control and calibration of tunable filters |
CN112383057B (zh) * | 2020-11-27 | 2022-08-09 | 佛山市广诚电气安装有限公司 | 基于电网潮流的电力耦合系统互感和自感设计方法 |
US11876384B2 (en) * | 2020-12-15 | 2024-01-16 | Otis Elevator Company | Wireless power transfer device |
CN114326898B (zh) * | 2021-12-27 | 2023-07-18 | 苏州云芯微电子科技有限公司 | 电容电压系数的补偿方法 |
Citations (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63308366A (ja) * | 1987-06-10 | 1988-12-15 | Nec Corp | 半導体集積回路 |
US5208597A (en) * | 1988-10-13 | 1993-05-04 | Crystal Semiconductor | Compensated capacitors for switched capacitor input of an analog-to-digital converter |
EP0581702A1 (fr) * | 1992-07-30 | 1994-02-02 | STMicroelectronics S.A. | Condensateur en technologie CMOS |
US6211745B1 (en) * | 1999-05-03 | 2001-04-03 | Silicon Wave, Inc. | Method and apparatus for digitally controlling the capacitance of an integrated circuit device using mos-field effect transistors |
US6351020B1 (en) * | 1999-11-12 | 2002-02-26 | Motorola, Inc. | Linear capacitor structure in a CMOS process |
US6657509B1 (en) * | 2001-01-25 | 2003-12-02 | National Semiconductor Corporation | Differentially controlled varactor |
US20050184812A1 (en) * | 2004-02-20 | 2005-08-25 | Samsung Electronics Co., Ltd. | Capacitor bank and voltage controlled oscillator having the same |
JP2006128468A (ja) * | 2004-10-29 | 2006-05-18 | Seiko Epson Corp | 半導体装置 |
US20080048236A1 (en) * | 2006-07-21 | 2008-02-28 | Integrant Technologies Inc. | Parallel varactor capacitor |
US7408422B2 (en) * | 2005-08-23 | 2008-08-05 | Stmicroelectronics S.A. | Variable-capacitance circuit element |
US20090096507A1 (en) * | 2004-07-22 | 2009-04-16 | Silicon Storage Technology, Inc. | Integrated Semiconductor Metal-Insulator-Semiconductor Capacitor |
US20100052778A1 (en) * | 2008-08-28 | 2010-03-04 | Dalius Baranauskas | Nth Order Tunable Low-Pass Continuous Time Filter for Fiber Optic Receivers |
US20110109380A1 (en) * | 2009-11-12 | 2011-05-12 | Qualcomm Incorporated | Active analog filter having a mos capacitor device with improved linearity |
US20120211868A1 (en) * | 2009-09-23 | 2012-08-23 | X-Fab Semiconductor Foundries Ag | Ultra-low voltage coefficient capacitors |
Family Cites Families (150)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6110339Y2 (zh) * | 1979-01-16 | 1986-04-03 | ||
US4363009A (en) | 1980-05-08 | 1982-12-07 | Wavetek Indiana, Inc. | L-C Filter with impedance transformers |
JPS5761313A (en) | 1980-09-30 | 1982-04-13 | Matsushita Electric Ind Co Ltd | Band-pass filter for ultra-high frequency |
US4456895A (en) | 1982-05-25 | 1984-06-26 | Rockwell International Corporation | Band selectable tunable bandpass filter |
JPS6280421U (zh) * | 1985-11-08 | 1987-05-22 | ||
US4754242A (en) * | 1986-03-04 | 1988-06-28 | Murata Manufacturing Co., Ltd. | Resonator |
US4878151A (en) | 1987-04-10 | 1989-10-31 | National Semiconductor Corporation | Anti-parallel capacitor |
US4918454A (en) * | 1988-10-13 | 1990-04-17 | Crystal Semiconductor Corporation | Compensated capacitors for switched capacitor input of an analog-to-digital converter |
KR930000414B1 (ko) | 1989-08-01 | 1993-01-18 | 티이디이케이 가부시기사이샤 | 자기(自己)유도성 인덕터와 수동유도성 인덕터를 포함하는 복합 권선형 적층 인덕터 및 그 제조방법, 그리고 두줄 권선형 적층변성기 |
JPH04103209A (ja) * | 1990-08-22 | 1992-04-06 | Tdk Corp | 磁界結合型ディプレクサ |
CA2059864C (en) * | 1991-01-23 | 1995-10-17 | Mitsunobu Esaki | Lc filter |
FR2674385A1 (fr) | 1991-03-22 | 1992-09-25 | Alsthom Gec | Dispositif d'isolement galvanique pour signaux electriques continus ou susceptibles de comporter une composante continue. |
JP2575368Y2 (ja) * | 1992-02-10 | 1998-06-25 | 株式会社村田製作所 | 積層型lcフィルタ |
JPH06140250A (ja) * | 1992-10-29 | 1994-05-20 | Kyocera Corp | 基板内層型コイル |
US6148221A (en) | 1993-08-27 | 2000-11-14 | Murata Manufacturing Co., Ltd. | Thin film multilayered electrode of high frequency electromagnetic field coupling |
US5330931A (en) | 1993-09-22 | 1994-07-19 | Northern Telecom Limited | Method of making a capacitor for an integrated circuit |
US5621366A (en) | 1994-08-15 | 1997-04-15 | Motorola, Inc. | High-Q multi-layer ceramic RF transmission line resonator |
KR100231356B1 (ko) | 1994-09-12 | 1999-11-15 | 모리시타요이찌 | 적층형 세라믹칩 인덕터 및 그 제조방법 |
US5543751A (en) | 1995-07-21 | 1996-08-06 | Motorola, Inc. | Power combiner for use in a radio frequency system and a method of constructing a power combiner |
US5760456A (en) | 1995-12-21 | 1998-06-02 | Grzegorek; Andrew Z. | Integrated circuit compatible planar inductors with increased Q |
JPH10144526A (ja) * | 1996-11-05 | 1998-05-29 | Murata Mfg Co Ltd | 積層チップインダクタ |
JPH10163028A (ja) * | 1996-11-26 | 1998-06-19 | Murata Mfg Co Ltd | 積層コイル装置 |
DE69737411T2 (de) | 1997-02-28 | 2007-10-31 | Telefonaktiebolaget Lm Ericsson (Publ) | Verbesserter q-Induktor mit mehreren Metallisierungsschichten |
JPH1197963A (ja) * | 1997-09-19 | 1999-04-09 | Murata Mfg Co Ltd | Lcバンドパスフィルタ |
US6069050A (en) * | 1997-10-20 | 2000-05-30 | Taiwan Semiconductor Manufacturing Company | Cross-coupled capacitors for improved voltage coefficient |
JP3399409B2 (ja) * | 1998-09-11 | 2003-04-21 | 株式会社村田製作所 | 複合回路基板、非可逆回路素子、共振器、フィルタ、デュプレクサ、通信機装置、回路モジュール、ならびに複合回路基板の製造方法と非可逆回路素子の製造方法 |
US6885275B1 (en) | 1998-11-12 | 2005-04-26 | Broadcom Corporation | Multi-track integrated spiral inductor |
DE69921430T2 (de) | 1998-12-11 | 2005-03-03 | Matsushita Electric Industrial Co., Ltd., Kadoma | Hochfrequenzinduktivität mit hohem Q-Faktor |
AU2509700A (en) | 1999-01-25 | 2000-08-07 | E.I. Du Pont De Nemours And Company | Polysaccharide fibers |
US6198374B1 (en) * | 1999-04-01 | 2001-03-06 | Midcom, Inc. | Multi-layer transformer apparatus and method |
JP3680627B2 (ja) * | 1999-04-27 | 2005-08-10 | 富士電機機器制御株式会社 | ノイズフィルタ |
JP4763192B2 (ja) | 1999-06-29 | 2011-08-31 | コクレア リミテッド | 標準cmosプロセスの高電圧保護回路 |
US7060584B1 (en) | 1999-07-12 | 2006-06-13 | Zilog, Inc. | Process to improve high performance capacitor properties in integrated MOS technology |
JP3446681B2 (ja) | 1999-09-28 | 2003-09-16 | 株式会社村田製作所 | 積層インダクタアレイ |
US6410954B1 (en) | 2000-04-10 | 2002-06-25 | Koninklijke Philips Electronics N.V. | Multilayered capacitor structure with alternately connected concentric lines for deep sub-micron CMOS |
US6885081B2 (en) * | 2000-11-13 | 2005-04-26 | Sharp Kabushiki Kaisha | Semiconductor capacitor device having reduced voltage dependence |
JP2002158135A (ja) | 2000-11-16 | 2002-05-31 | Tdk Corp | 電子部品 |
US20020158305A1 (en) | 2001-01-05 | 2002-10-31 | Sidharth Dalmia | Organic substrate having integrated passive components |
TW480770B (en) * | 2001-02-22 | 2002-03-21 | Ind Tech Res Inst | Miniaturized trisection cross-coupled bandpass filter structure |
JP2002289490A (ja) | 2001-03-27 | 2002-10-04 | Toshiba Corp | 半導体装置 |
JP2002374138A (ja) * | 2001-06-15 | 2002-12-26 | Alps Electric Co Ltd | ノイズ吸収素子ならびにその製造方法 |
JP5073136B2 (ja) * | 2001-08-24 | 2012-11-14 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
US6674321B1 (en) | 2001-10-31 | 2004-01-06 | Agile Materials & Technologies, Inc. | Circuit configuration for DC-biased capacitors |
CN1280981C (zh) * | 2001-11-16 | 2006-10-18 | 松下电器产业株式会社 | 功率放大器、功率放大方法和无线电通信装置 |
US6635948B2 (en) * | 2001-12-05 | 2003-10-21 | Micron Technology, Inc. | Semiconductor device with electrically coupled spiral inductors |
US6700472B2 (en) | 2001-12-11 | 2004-03-02 | Intersil Americas Inc. | Magnetic thin film inductors |
JP2003304118A (ja) * | 2002-04-09 | 2003-10-24 | Mitsubishi Electric Corp | Lc発振回路 |
US6930562B2 (en) | 2002-07-16 | 2005-08-16 | Matsushita Electric Industrial Co., Ltd. | Oscillation with multiple series circuits in parallel |
JP2004056818A (ja) * | 2002-07-16 | 2004-02-19 | Matsushita Electric Ind Co Ltd | 発振器、pll回路、通信機器、発振方法 |
JP4370838B2 (ja) * | 2002-08-21 | 2009-11-25 | 株式会社村田製作所 | ノイズフィルタ |
KR20050061574A (ko) | 2002-10-29 | 2005-06-22 | 코닌클리즈케 필립스 일렉트로닉스 엔.브이. | 반도체 스위치 및 이를 포함하는 시스템 |
KR100466542B1 (ko) | 2002-11-13 | 2005-01-15 | 한국전자통신연구원 | 적층형 가변 인덕터 |
US7212789B2 (en) | 2002-12-30 | 2007-05-01 | Motorola, Inc. | Tunable duplexer |
US7263336B2 (en) * | 2002-12-31 | 2007-08-28 | Marvell International Ltd. | Device, system and method to provide different bias voltages and common tuning voltage |
US20050116797A1 (en) | 2003-02-05 | 2005-06-02 | Khosro Shamsaifar | Electronically tunable block filter |
US6882548B1 (en) | 2003-02-24 | 2005-04-19 | Tyco Electronics Power Systems, Inc. | Auxiliary active clamp circuit, a method of clamping a voltage of a rectifier switch and a power converter employing the circuit or method |
US6765778B1 (en) | 2003-04-04 | 2004-07-20 | Freescale Semiconductor, Inc. | Integrated vertical stack capacitor |
US6903628B2 (en) | 2003-07-18 | 2005-06-07 | Chi Mei Communication Systems, Inc. | Lowpass filter formed in multi-layer ceramic |
US7161516B2 (en) | 2003-07-22 | 2007-01-09 | Maxim Integrated Products, Inc. | Layout of dummy and active cells forming capacitor array in integrated circuit |
JP2005064691A (ja) | 2003-08-08 | 2005-03-10 | Sony Ericsson Mobilecommunications Japan Inc | 共振回路および電圧制御発振器 |
US7250827B2 (en) | 2003-09-10 | 2007-07-31 | Merrimac Industries, Inc. | Circuitry module |
US7042307B2 (en) * | 2003-09-10 | 2006-05-09 | Merrimac Industries, Inc. | Coupler resource module |
JP4325337B2 (ja) * | 2003-09-19 | 2009-09-02 | 日立化成工業株式会社 | 樹脂組成物、それを用いたプリプレグ、積層板及び多層プリント配線板 |
CN1695213A (zh) * | 2003-09-22 | 2005-11-09 | 美蓓亚株式会社 | 信号辨别器 |
US6940386B2 (en) | 2003-11-19 | 2005-09-06 | Scintera Networks, Inc | Multi-layer symmetric inductor |
KR100552482B1 (ko) | 2003-11-28 | 2006-02-15 | 삼성전자주식회사 | Rf 듀플렉서 |
US7255801B2 (en) | 2004-04-08 | 2007-08-14 | Taiwan Semiconductor Manufacturing Company, Ltd. | Deep submicron CMOS compatible suspending inductor |
US7012484B2 (en) * | 2004-04-26 | 2006-03-14 | Integrated System Solution Corp. | Filter using multilayer ceramic technology and structure thereof |
TWI296159B (en) | 2004-07-06 | 2008-04-21 | Realtek Semiconductor Corp | Mos varactor and method for making the same |
US7683433B2 (en) | 2004-07-07 | 2010-03-23 | Semi Solution, Llc | Apparatus and method for improving drive-strength and leakage of deep submicron MOS transistors |
JP2006066647A (ja) * | 2004-08-26 | 2006-03-09 | Kyocera Corp | 可変コンデンサ |
US20060077020A1 (en) | 2004-10-13 | 2006-04-13 | Cyntec Company | Circuits and manufacturing configurations of compact band-pass filter |
US7199651B2 (en) | 2004-11-18 | 2007-04-03 | Agere Systems Inc. | Frequency selection using capacitance multiplication |
EP1829126B1 (en) | 2004-12-09 | 2020-05-27 | Wispry, Inc. | Micro-electro-mechanical system (mems) capacitors, inductors, and related systems and methods |
US20060125121A1 (en) | 2004-12-15 | 2006-06-15 | Chih-Hsin Ko | Capacitor-less 1T-DRAM cell with Schottky source and drain |
JP4178264B2 (ja) | 2005-01-11 | 2008-11-12 | 株式会社村田製作所 | チューナブルフィルタ |
US7251121B2 (en) | 2005-03-05 | 2007-07-31 | Innovation Engineering Llc | Electronically variable capacitor array |
WO2006133159A2 (en) * | 2005-06-08 | 2006-12-14 | The Regents Of The University Of California | Linear variable voltage diode capacitor and adaptive matching networks |
JPWO2006134916A1 (ja) * | 2005-06-13 | 2009-01-08 | 太陽誘電株式会社 | 積層フィルタ |
US7245519B2 (en) | 2005-08-22 | 2007-07-17 | Freescale Semiconductor, Inc. | Digitally programmable capacitor array |
US7280001B2 (en) | 2005-09-14 | 2007-10-09 | Silicon Laboratories Inc. | Capacitor array segmentation |
EP2392382A1 (en) | 2005-11-11 | 2011-12-07 | Greatbatch Ltd. | Tank filters placed in series with the lead wires or circuits of active medical devices to enhance MRI compatibility |
US7528667B1 (en) | 2005-11-16 | 2009-05-05 | Marvell International Ltd. | T-network capbank |
JP4170337B2 (ja) * | 2005-12-20 | 2008-10-22 | 日本電信電話株式会社 | 電界通信システム |
EP2002213B1 (en) * | 2006-03-29 | 2012-07-11 | Rosemount, Inc. | Capacitance sensing circuit |
US7576627B2 (en) | 2006-04-24 | 2009-08-18 | Bradley University | Electronically tunable active duplexer |
US7586389B2 (en) | 2006-06-19 | 2009-09-08 | Maxim Integrated Products, Inc. | Impedance transformation and filter using bulk acoustic wave technology |
KR100821126B1 (ko) | 2006-07-31 | 2008-04-11 | 한국전자통신연구원 | 선형적인 정전용량 변화를 갖는 가변 캐패시터 회로를구비한 장치 |
EP2051377A4 (en) | 2006-08-03 | 2012-03-28 | Panasonic Corp | FREQUENCY VARIABLE ACOUSTIC FILM RESONATOR, FILTER AND COMMUNICATION APPARATUS USING THE SAME |
US7948055B2 (en) | 2006-08-31 | 2011-05-24 | United Microelectronics Corp. | Inductor formed on semiconductor substrate |
US7825745B1 (en) | 2006-09-12 | 2010-11-02 | Rf Magic Inc. | Variable bandwidth tunable silicon duplexer |
TW200822528A (en) | 2006-11-07 | 2008-05-16 | Univ Nat Taiwan Science Tech | Multi-phase voltage-control osillator |
US8289103B2 (en) * | 2006-11-20 | 2012-10-16 | Panasonic Corporation | Filter device having attenuation poles |
CN101212198B (zh) * | 2006-12-30 | 2011-06-15 | 北京六合万通微电子技术股份有限公司 | 压控振荡器 |
JP2008205794A (ja) | 2007-02-20 | 2008-09-04 | Renesas Technology Corp | 半導体集積回路装置および高周波電力増幅モジュール |
US7719383B2 (en) | 2007-04-30 | 2010-05-18 | Zeji Gu | High isolation electronic multiple pole multiple throw switch |
TW200908430A (en) | 2007-05-18 | 2009-02-16 | Murata Manufacturing Co | Stacked bandpass filter |
JP4518103B2 (ja) | 2007-05-21 | 2010-08-04 | Tdk株式会社 | コモンモードチョークコイル |
JP2009010599A (ja) * | 2007-06-27 | 2009-01-15 | Panasonic Corp | デジタル制御発振回路、周波数シンセサイザ、それを用いた無線通信機器及びその制御方法 |
US7656251B1 (en) | 2007-07-09 | 2010-02-02 | Rf Micro Devices, Inc. | Split band duplexer |
JP2009064860A (ja) * | 2007-09-05 | 2009-03-26 | Renesas Technology Corp | 半導体装置 |
US20090128992A1 (en) | 2007-11-19 | 2009-05-21 | Broadcom Corporation | Mos capacitor structure and linearization method for reduced variation of the capacitance |
US7728427B2 (en) | 2007-12-07 | 2010-06-01 | Lctank Llc | Assembling stacked substrates that can form cylindrical inductors and adjustable transformers |
US7777369B2 (en) | 2007-12-22 | 2010-08-17 | At&T Intellectual Property I, L.P. | Apparatus, system and methods for enabling linearity improvement in voltage controlled variable capacitors |
US7838383B2 (en) | 2008-01-04 | 2010-11-23 | Freescale Semiconductor, Inc. | Methods for forming MOS capacitors |
US7724117B2 (en) * | 2008-01-11 | 2010-05-25 | Northrop Grumman Systems Corporation | Multilayer passive circuit topology |
US7679473B2 (en) | 2008-01-15 | 2010-03-16 | California Micro Devices | Low pass filter incorporating coupled inductors to enhance stop band attenuation |
JP5417346B2 (ja) | 2008-02-28 | 2014-02-12 | ペレグリン セミコンダクター コーポレーション | 集積回路素子内でキャパシタをデジタル処理で同調するときに用いられる方法及び装置 |
US20090243743A1 (en) | 2008-03-31 | 2009-10-01 | International Business Machines Corporation | Varactor bank switching based on anti-parallel branch configuration |
US8073414B2 (en) | 2008-06-27 | 2011-12-06 | Sirf Technology Inc. | Auto-tuning system for an on-chip RF filter |
US8204031B2 (en) | 2008-09-24 | 2012-06-19 | Rockstar Bidco, LP | Duplexer/multiplexer having filters that include at least one band reject filter |
US7821290B2 (en) | 2008-09-26 | 2010-10-26 | Vitesse Semiconductor Corporation | Differential voltage mode driver and digital impedance caliberation of same |
US8531862B2 (en) | 2008-10-27 | 2013-09-10 | Nxp B.V. | Generating and exploiting an asymmetric capacitance hysteresis of ferroelectric MIM capacitors |
JP2010246075A (ja) * | 2009-03-16 | 2010-10-28 | Tdk Corp | 電子部品の実装構造 |
US9231630B2 (en) | 2009-05-05 | 2016-01-05 | San Diego, CA | Radio device having dynamic intermediate frequency scaling |
US8098110B2 (en) | 2009-11-20 | 2012-01-17 | Qualcomm Incorporated | Phase locked loop apparatus with selectable capacitance device |
US9246536B2 (en) | 2009-12-03 | 2016-01-26 | Rf Micro Devices, Inc. | Duplexer with active temperature compensation |
CN102087995A (zh) | 2009-12-04 | 2011-06-08 | 中芯国际集成电路制造(上海)有限公司 | 集成电路电感及其制作方法 |
CN102231313B (zh) | 2009-12-08 | 2014-04-16 | 上海华虹宏力半导体制造有限公司 | 利用金属并联的多层堆叠电感 |
EP2337038B1 (en) | 2009-12-21 | 2014-03-12 | Nxp B.V. | Inductor |
KR101244902B1 (ko) | 2010-01-19 | 2013-03-18 | 가부시키가이샤 무라타 세이사쿠쇼 | 안테나 장치 및 통신단말장치 |
US9001032B2 (en) | 2010-03-30 | 2015-04-07 | Korea Institute Of Science And Technology | Tactile transmission system using glove type actuator device and method thereof |
US8395880B2 (en) | 2010-03-30 | 2013-03-12 | Medtronic, Inc. | High density capacitor array patterns |
US20110298280A1 (en) | 2010-06-07 | 2011-12-08 | Skyworks Solutions, Inc | Apparatus and method for variable voltage distribution |
JP5530265B2 (ja) | 2010-06-21 | 2014-06-25 | パナソニック株式会社 | 電力増幅器 |
JP5632663B2 (ja) | 2010-06-29 | 2014-11-26 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
US8995944B2 (en) | 2010-12-09 | 2015-03-31 | Rf Micro Devices, Inc. | Radio frequency switch for suppressing intermodulation |
JP2012156362A (ja) | 2011-01-27 | 2012-08-16 | Fujitsu Ltd | 伝送線路、集積回路搭載装置および通信機モジュール |
US9391650B2 (en) | 2011-02-11 | 2016-07-12 | Qualcomm Incorporated | Front-end RF filters with embedded impedance transformation |
US8345498B2 (en) | 2011-02-17 | 2013-01-01 | Taiwan Semiconductor Manufacturing Company, Ltd. | Sense amplifier |
CN102355221A (zh) * | 2011-06-17 | 2012-02-15 | 雷良军 | 多频带功率放大器及输出匹配电路 |
WO2013028546A1 (en) | 2011-08-19 | 2013-02-28 | Cavendish Kinetics, Inc | Routing of mems variable capacitors for rf applications |
US9048805B2 (en) | 2011-10-04 | 2015-06-02 | Rf Micro Devices, Inc. | Tunable duplexer architecture |
US8600330B2 (en) | 2011-10-05 | 2013-12-03 | Kathrein-Werke Kg | Filter arrangement |
US9083311B2 (en) | 2011-12-30 | 2015-07-14 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Apparatus having double phase-matched configuration for reducing magnitude of intermodulation products |
JP5451791B2 (ja) * | 2012-02-08 | 2014-03-26 | 太陽誘電株式会社 | 積層インダクタ |
KR101350461B1 (ko) | 2012-04-03 | 2014-01-09 | 주식회사 하이딥 | 튜너블 커패시터 |
US9276570B2 (en) | 2012-07-07 | 2016-03-01 | Skyworks Solutions, Inc. | Radio-frequency switch having gate node voltage compensation network |
US9190994B2 (en) | 2012-08-29 | 2015-11-17 | Newport Fab, Llc | RF switch branch having improved linearity |
US9362883B2 (en) | 2013-03-13 | 2016-06-07 | Tdk Corporation | Passive radio frequency signal handler |
WO2014145687A1 (en) | 2013-03-15 | 2014-09-18 | Wispry, Inc. | Tuning systems, devices, and methods |
CN105210291B (zh) | 2013-03-15 | 2018-10-02 | 维斯普瑞公司 | 可调滤波器系统、装置以及方法 |
US8760241B1 (en) | 2013-03-15 | 2014-06-24 | Wilson Electronics, Llc | Circuit isolation using a signal splitter/combiner |
US9570222B2 (en) | 2013-05-28 | 2017-02-14 | Tdk Corporation | Vector inductor having multiple mutually coupled metalization layers providing high quality factor |
US9324490B2 (en) | 2013-05-28 | 2016-04-26 | Tdk Corporation | Apparatus and methods for vector inductors |
US9086709B2 (en) | 2013-05-28 | 2015-07-21 | Newlans, Inc. | Apparatus and methods for variable capacitor arrays |
US9312221B2 (en) | 2013-06-13 | 2016-04-12 | Taiwan Semiconductor Manufacturing Co., Ltd. | Variable capacitance devices |
US9640532B2 (en) | 2014-02-14 | 2017-05-02 | Qualcomm Incorporated | Stacked metal oxide semiconductor (MOS) and metal oxide metal (MOM) capacitor architecture |
US9735752B2 (en) | 2014-12-03 | 2017-08-15 | Tdk Corporation | Apparatus and methods for tunable filters |
US9461610B2 (en) | 2014-12-03 | 2016-10-04 | Tdk Corporation | Apparatus and methods for high voltage variable capacitors |
-
2013
- 2013-07-31 US US13/955,617 patent/US9570222B2/en active Active
- 2013-08-30 US US14/014,496 patent/US9019007B2/en not_active Expired - Fee Related
- 2013-09-12 US US14/025,069 patent/US9449749B2/en active Active
-
2014
- 2014-02-26 WO PCT/US2014/018673 patent/WO2014193503A1/en active Application Filing
- 2014-02-26 JP JP2016516637A patent/JP2016521931A/ja active Pending
- 2014-02-26 CN CN201480037474.1A patent/CN105453424A/zh active Pending
- 2014-02-26 CN CN201480030574.1A patent/CN105359409A/zh active Pending
- 2014-02-26 WO PCT/US2014/018611 patent/WO2014193502A1/en active Application Filing
- 2014-02-26 WO PCT/US2014/018555 patent/WO2014193501A1/en active Application Filing
- 2014-02-26 EP EP14714439.8A patent/EP3005558A1/en not_active Withdrawn
- 2014-02-26 CN CN201480036976.2A patent/CN105340176A/zh active Pending
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- 2014-02-26 JP JP2016516639A patent/JP2016523446A/ja active Pending
- 2014-02-26 EP EP14710166.1A patent/EP3005560A1/en not_active Withdrawn
- 2014-02-26 EP EP14710712.2A patent/EP3005557A1/en not_active Withdrawn
- 2014-05-27 EP EP14733447.8A patent/EP3005561A1/en not_active Withdrawn
- 2014-05-27 JP JP2016516739A patent/JP2016526300A/ja active Pending
- 2014-05-27 CN CN201480039717.5A patent/CN105379114A/zh active Pending
- 2014-05-27 EP EP14733446.0A patent/EP3005382A2/en not_active Withdrawn
- 2014-05-27 JP JP2016516738A patent/JP2016527705A/ja active Pending
- 2014-05-27 CN CN201480041033.9A patent/CN105408971A/zh active Pending
- 2014-05-27 WO PCT/US2014/039595 patent/WO2014193845A2/en active Application Filing
- 2014-05-27 WO PCT/US2014/039599 patent/WO2014193846A1/en active Application Filing
Patent Citations (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63308366A (ja) * | 1987-06-10 | 1988-12-15 | Nec Corp | 半導体集積回路 |
US5208597A (en) * | 1988-10-13 | 1993-05-04 | Crystal Semiconductor | Compensated capacitors for switched capacitor input of an analog-to-digital converter |
EP0581702A1 (fr) * | 1992-07-30 | 1994-02-02 | STMicroelectronics S.A. | Condensateur en technologie CMOS |
US6211745B1 (en) * | 1999-05-03 | 2001-04-03 | Silicon Wave, Inc. | Method and apparatus for digitally controlling the capacitance of an integrated circuit device using mos-field effect transistors |
US6351020B1 (en) * | 1999-11-12 | 2002-02-26 | Motorola, Inc. | Linear capacitor structure in a CMOS process |
US6657509B1 (en) * | 2001-01-25 | 2003-12-02 | National Semiconductor Corporation | Differentially controlled varactor |
US20050184812A1 (en) * | 2004-02-20 | 2005-08-25 | Samsung Electronics Co., Ltd. | Capacitor bank and voltage controlled oscillator having the same |
US20090096507A1 (en) * | 2004-07-22 | 2009-04-16 | Silicon Storage Technology, Inc. | Integrated Semiconductor Metal-Insulator-Semiconductor Capacitor |
JP2006128468A (ja) * | 2004-10-29 | 2006-05-18 | Seiko Epson Corp | 半導体装置 |
US7408422B2 (en) * | 2005-08-23 | 2008-08-05 | Stmicroelectronics S.A. | Variable-capacitance circuit element |
US20080048236A1 (en) * | 2006-07-21 | 2008-02-28 | Integrant Technologies Inc. | Parallel varactor capacitor |
US20100052778A1 (en) * | 2008-08-28 | 2010-03-04 | Dalius Baranauskas | Nth Order Tunable Low-Pass Continuous Time Filter for Fiber Optic Receivers |
US20120211868A1 (en) * | 2009-09-23 | 2012-08-23 | X-Fab Semiconductor Foundries Ag | Ultra-low voltage coefficient capacitors |
US20110109380A1 (en) * | 2009-11-12 | 2011-05-12 | Qualcomm Incorporated | Active analog filter having a mos capacitor device with improved linearity |
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EP3005558A1 (en) | 2016-04-13 |
JP2016523446A (ja) | 2016-08-08 |
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WO2014193845A3 (en) | 2015-03-05 |
CN105379114A (zh) | 2016-03-02 |
WO2014193845A2 (en) | 2014-12-04 |
EP3005561A1 (en) | 2016-04-13 |
WO2014193503A1 (en) | 2014-12-04 |
US20140354370A1 (en) | 2014-12-04 |
US9449749B2 (en) | 2016-09-20 |
WO2014193846A1 (en) | 2014-12-04 |
US9019007B2 (en) | 2015-04-28 |
WO2014193501A1 (en) | 2014-12-04 |
JP2016524816A (ja) | 2016-08-18 |
CN105453424A (zh) | 2016-03-30 |
EP3005560A1 (en) | 2016-04-13 |
JP2016526300A (ja) | 2016-09-01 |
JP2016527705A (ja) | 2016-09-08 |
WO2014193502A1 (en) | 2014-12-04 |
CN105408971A (zh) | 2016-03-16 |
US9570222B2 (en) | 2017-02-14 |
EP3005557A1 (en) | 2016-04-13 |
CN105340176A (zh) | 2016-02-17 |
JP2016521931A (ja) | 2016-07-25 |
EP3005382A2 (en) | 2016-04-13 |
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