JP5530265B2 - 電力増幅器 - Google Patents
電力増幅器 Download PDFInfo
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- JP5530265B2 JP5530265B2 JP2010141044A JP2010141044A JP5530265B2 JP 5530265 B2 JP5530265 B2 JP 5530265B2 JP 2010141044 A JP2010141044 A JP 2010141044A JP 2010141044 A JP2010141044 A JP 2010141044A JP 5530265 B2 JP5530265 B2 JP 5530265B2
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
- H01P5/00—Coupling devices of the waveguide type
- H01P5/08—Coupling devices of the waveguide type for linking dissimilar lines or devices
- H01P5/10—Coupling devices of the waveguide type for linking dissimilar lines or devices for coupling balanced with unbalanced lines or devices
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03F—AMPLIFIERS
- H03F3/00—Amplifiers with only discharge tubes or only semiconductor devices as amplifying elements
- H03F3/68—Combinations of amplifiers, e.g. multi-channel amplifiers for stereophonics
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
- H01P5/00—Coupling devices of the waveguide type
- H01P5/12—Coupling devices having more than two ports
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03F—AMPLIFIERS
- H03F1/00—Details of amplifiers with only discharge tubes, only semiconductor devices or only unspecified devices as amplifying elements
- H03F1/56—Modifications of input or output impedances, not otherwise provided for
- H03F1/565—Modifications of input or output impedances, not otherwise provided for using inductive elements
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03F—AMPLIFIERS
- H03F3/00—Amplifiers with only discharge tubes or only semiconductor devices as amplifying elements
- H03F3/04—Amplifiers with only discharge tubes or only semiconductor devices as amplifying elements with semiconductor devices only
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03F—AMPLIFIERS
- H03F3/00—Amplifiers with only discharge tubes or only semiconductor devices as amplifying elements
- H03F3/189—High frequency amplifiers, e.g. radio frequency amplifiers
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03F—AMPLIFIERS
- H03F3/00—Amplifiers with only discharge tubes or only semiconductor devices as amplifying elements
- H03F3/189—High frequency amplifiers, e.g. radio frequency amplifiers
- H03F3/19—High frequency amplifiers, e.g. radio frequency amplifiers with semiconductor devices only
- H03F3/193—High frequency amplifiers, e.g. radio frequency amplifiers with semiconductor devices only with field-effect devices
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03F—AMPLIFIERS
- H03F3/00—Amplifiers with only discharge tubes or only semiconductor devices as amplifying elements
- H03F3/20—Power amplifiers, e.g. Class B amplifiers, Class C amplifiers
- H03F3/21—Power amplifiers, e.g. Class B amplifiers, Class C amplifiers with semiconductor devices only
- H03F3/211—Power amplifiers, e.g. Class B amplifiers, Class C amplifiers with semiconductor devices only using a combination of several amplifiers
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03F—AMPLIFIERS
- H03F3/00—Amplifiers with only discharge tubes or only semiconductor devices as amplifying elements
- H03F3/20—Power amplifiers, e.g. Class B amplifiers, Class C amplifiers
- H03F3/24—Power amplifiers, e.g. Class B amplifiers, Class C amplifiers of transmitter output stages
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03F—AMPLIFIERS
- H03F3/00—Amplifiers with only discharge tubes or only semiconductor devices as amplifying elements
- H03F3/20—Power amplifiers, e.g. Class B amplifiers, Class C amplifiers
- H03F3/24—Power amplifiers, e.g. Class B amplifiers, Class C amplifiers of transmitter output stages
- H03F3/245—Power amplifiers, e.g. Class B amplifiers, Class C amplifiers of transmitter output stages with semiconductor devices only
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03F—AMPLIFIERS
- H03F3/00—Amplifiers with only discharge tubes or only semiconductor devices as amplifying elements
- H03F3/26—Push-pull amplifiers; Phase-splitters therefor
- H03F3/265—Push-pull amplifiers; Phase-splitters therefor with field-effect transistors only
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03F—AMPLIFIERS
- H03F2200/00—Indexing scheme relating to amplifiers
- H03F2200/222—A circuit being added at the input of an amplifier to adapt the input impedance of the amplifier
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03F—AMPLIFIERS
- H03F2200/00—Indexing scheme relating to amplifiers
- H03F2200/318—A matching circuit being used as coupling element between two amplifying stages
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03F—AMPLIFIERS
- H03F2200/00—Indexing scheme relating to amplifiers
- H03F2200/387—A circuit being added at the output of an amplifier to adapt the output impedance of the amplifier
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03F—AMPLIFIERS
- H03F2200/00—Indexing scheme relating to amplifiers
- H03F2200/451—Indexing scheme relating to amplifiers the amplifier being a radio frequency amplifier
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03F—AMPLIFIERS
- H03F2200/00—Indexing scheme relating to amplifiers
- H03F2200/534—Transformer coupled at the input of an amplifier
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03F—AMPLIFIERS
- H03F2200/00—Indexing scheme relating to amplifiers
- H03F2200/541—Transformer coupled at the output of an amplifier
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03F—AMPLIFIERS
- H03F2203/00—Indexing scheme relating to amplifiers with only discharge tubes or only semiconductor devices as amplifying elements covered by H03F3/00
- H03F2203/20—Indexing scheme relating to power amplifiers, e.g. Class B amplifiers, Class C amplifiers
- H03F2203/21—Indexing scheme relating to power amplifiers, e.g. Class B amplifiers, Class C amplifiers with semiconductor devices only
- H03F2203/211—Indexing scheme relating to power amplifiers, e.g. Class B amplifiers, Class C amplifiers with semiconductor devices only using a combination of several amplifiers
- H03F2203/21106—An input signal being distributed in parallel over the inputs of a plurality of power amplifiers
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03F—AMPLIFIERS
- H03F2203/00—Indexing scheme relating to amplifiers with only discharge tubes or only semiconductor devices as amplifying elements covered by H03F3/00
- H03F2203/20—Indexing scheme relating to power amplifiers, e.g. Class B amplifiers, Class C amplifiers
- H03F2203/21—Indexing scheme relating to power amplifiers, e.g. Class B amplifiers, Class C amplifiers with semiconductor devices only
- H03F2203/211—Indexing scheme relating to power amplifiers, e.g. Class B amplifiers, Class C amplifiers with semiconductor devices only using a combination of several amplifiers
- H03F2203/21142—Output signals of a plurality of power amplifiers are parallel combined to a common output
Description
以下、本発明の実施の形態1に係る電力増幅器について、図面を参照して説明する。
本発明の実施の形態1では、入力側トランスフォーマ120及び出力側トランスフォーマ130は、縦方向の磁界結合を利用したトランスフォーマについて説明した。これに対して、本発明の実施の形態2に係る電力増幅器が備える入力トランスフォーマ、及び、出力トランスフォーマは、CPW(coplanar waveguide)タイプの線路間隔の横方向の磁界結合を利用したトランスフォーマである。
本発明の実施の形態1及び実施の形態2では、シリコンプロセスで一般的に使用されている金属配線、いわゆる内層配線を使用して形成する縦型、及び、横型の磁界結合を利用したトランスフォーマについて説明した。これに対して、本発明の実施の形態3に係る電力増幅器が備える入力トランスフォーマ、及び、出力トランスフォーマは、厚膜再配線プロセスを用いた伝送線路の磁界結合を利用したトランスフォーマである。
本発明の実施の形態1及び実施の形態2では、シリコンプロセスで一般的に使用されている金属配線を使用して形成する縦型、及び、横型の磁界結合を利用したトランスフォーマについて説明した。また、実施の形態3では、厚膜再配線プロセスを用いた伝送線路を利用したトランスフォーマについて説明した。
21、110 プッシュプル増幅器
22 スラブインダクタ
23 金属コイル
30 スパイラルトランスフォーマバラン
40、41 差動ライン
50 分配ネットワーク
111 トランジスタ
120、220、320、420 入力側トランスフォーマ
121、221、321、421 環状1次コイル
122、222、322、422 直線2次コイル
130、230、330、430 出力側トランスフォーマ
131、231、331、431 環状2次コイル
132、232、332、432 直線1次コイル
501 キャパシタ
601 インダクタ
700 バラン
701 不平衡線路
702、703 平衡線路
1000 Si半導体基板
1100 Si内層プロセス内誘電体層
1200 Si内層プロセス内配線層
1300 Si内層プロセス内パッシベーション膜
1600a、1600b 厚膜再配線プロセス誘電体層
1700a 厚膜再配線プロセス下層配線層
1700b 厚膜再配線プロセス上層配線層
1700c 厚膜再配線プロセス最上層配線層
Claims (8)
- 入力信号を増幅し、増幅した入力信号を出力信号として出力する電力増幅器であって、
前記入力信号が入力される入力端子を有する1次巻線としての環状の第1金属配線、及び、2次巻線としての複数の第2金属配線を有し、入力インピーダンスの整合をとるとともに、前記入力信号を複数の分配信号に分配する第1トランスフォーマと、
前記複数の分配信号の1つを増幅する1対のトランジスタを、それぞれが備える複数のプッシュプル増幅器と、
前記出力信号が出力される出力端子を有する2次巻線としての環状の第3金属配線、及び、1次巻線としての複数の第4金属配線を有し、前記複数のプッシュプル増幅器によって増幅された複数の分配信号を合成することで前記出力信号を出力するとともに、出力インピーダンスの整合をとる第2トランスフォーマとを備え、
前記1対のトランジスタの2つの入力端子は、前記第2金属配線を介して互いに接続され、
前記1対のトランジスタの2つの出力端子は、前記第4金属配線を介して互いに接続され、
前記第1金属配線は、前記第3金属配線の内側に配置され、
平面視において、前記第1金属配線が形成する環の中心及び前記入力端子を結ぶ第1直線と、前記第3金属配線が形成する環の中心及び前記出力端子を結ぶ第2直線とがなす角度は、略180度であり、
前記第1金属配線は、前記第2金属配線の上方に配置され、かつ、平面視において前記第2金属配線と重なり、
前記第4金属配線は、前記第1金属配線の上方に配置され、
前記第3金属配線は、前記第4金属配線の上方に配置され、かつ、平面視において前記第4金属配線と重なっている
電力増幅器。 - 前記複数の第2金属配線の長さの合計は、前記第1金属配線の長さに略等しく、
前記複数の第4金属配線の長さの合計は、前記第3金属配線の長さに略等しい
請求項1記載の電力増幅器。 - 前記第2金属配線の中点は、前記1対のトランジスタに第1バイアス電圧を供給するための第1電源に接続され、
前記第4金属配線の中点は、前記1対のトランジスタに第2バイアス電圧を供給するための第2電源に接続される
請求項1又は2記載の電力増幅器。 - 前記複数のプッシュプル増幅器のそれぞれは、前記第1金属配線と前記第3金属配線との間に配置されている
請求項1〜3のいずれか1項に記載の電力増幅器。 - 前記電力増幅器は、
前記第1トランスフォーマ及び前記第2トランスフォーマの少なくとも一方と、半導体基板との間に形成された10μm以上の厚さの誘電体層を備える
請求項1〜4のいずれか1項に記載の電力増幅器。 - 前記誘電体層は、ベンゾシクロブテン、ポリイミド、ポリテトラフルオロエチレン又はポリフェニレンオキシドを含む
請求項5記載の電力増幅器。 - 前記誘電体層は、第1の材料からなる粒子が第2の材料中に分散されてなるナノコンポジット膜を含む
請求項5記載の電力増幅器。 - 前記電力増幅器は、
前記第1トランスフォーマ及び前記第2トランスフォーマの少なくとも一方を、バランを用いて構成されている
請求項1〜7のいずれか1項に記載の電力増幅器。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010141044A JP5530265B2 (ja) | 2010-06-21 | 2010-06-21 | 電力増幅器 |
PCT/JP2011/000349 WO2011161847A1 (ja) | 2010-06-21 | 2011-01-24 | 電力増幅器 |
US13/712,547 US8536948B2 (en) | 2010-06-21 | 2012-12-12 | Power amplifier |
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JP2010141044A JP5530265B2 (ja) | 2010-06-21 | 2010-06-21 | 電力増幅器 |
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JP2012005077A JP2012005077A (ja) | 2012-01-05 |
JP5530265B2 true JP5530265B2 (ja) | 2014-06-25 |
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JP2010141044A Expired - Fee Related JP5530265B2 (ja) | 2010-06-21 | 2010-06-21 | 電力増幅器 |
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US (1) | US8536948B2 (ja) |
JP (1) | JP5530265B2 (ja) |
WO (1) | WO2011161847A1 (ja) |
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US9570222B2 (en) * | 2013-05-28 | 2017-02-14 | Tdk Corporation | Vector inductor having multiple mutually coupled metalization layers providing high quality factor |
US9831026B2 (en) * | 2013-07-24 | 2017-11-28 | Globalfoundries Inc. | High efficiency on-chip 3D transformer structure |
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EP1400012B1 (en) | 2000-10-10 | 2011-08-31 | California Institute Of Technology | Distributed circular geometry power amplifier architecture |
JP2008263432A (ja) * | 2007-04-12 | 2008-10-30 | Renesas Technology Corp | 分布型電力増幅器 |
JP2008278345A (ja) * | 2007-05-02 | 2008-11-13 | Renesas Technology Corp | 半導体装置 |
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US8400237B2 (en) | 2007-10-09 | 2013-03-19 | Panasonic Corporation | Circuit device including a nano-composite dielectric film |
US20100019858A1 (en) * | 2008-07-22 | 2010-01-28 | Star Rf, Inc. | N:m transformer and impedance matching |
JP5247367B2 (ja) * | 2008-11-13 | 2013-07-24 | ルネサスエレクトロニクス株式会社 | Rf電力増幅器 |
WO2010085366A2 (en) * | 2009-01-26 | 2010-07-29 | Cymatics Laboratories Corporation | Switchable power combiner |
JP2011182107A (ja) * | 2010-02-26 | 2011-09-15 | Renesas Electronics Corp | 電力増幅装置 |
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US20130099864A1 (en) | 2013-04-25 |
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