CN103325733A - 基板的分离方法以及分离装置 - Google Patents
基板的分离方法以及分离装置 Download PDFInfo
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- CN103325733A CN103325733A CN2013100639326A CN201310063932A CN103325733A CN 103325733 A CN103325733 A CN 103325733A CN 2013100639326 A CN2013100639326 A CN 2013100639326A CN 201310063932 A CN201310063932 A CN 201310063932A CN 103325733 A CN103325733 A CN 103325733A
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
- Y10T156/19—Delaminating means
- Y10T156/1994—Means for delaminating from release surface
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TWI529799B (zh) | 2016-04-11 |
US8771456B2 (en) | 2014-07-08 |
JP2013201251A (ja) | 2013-10-03 |
CN103325733B (zh) | 2016-09-28 |
JP5591859B2 (ja) | 2014-09-17 |
US20130248099A1 (en) | 2013-09-26 |
TW201347034A (zh) | 2013-11-16 |
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