CN102189332A - 激光加工方法及激光加工装置 - Google Patents

激光加工方法及激光加工装置 Download PDF

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Publication number
CN102189332A
CN102189332A CN2011100598721A CN201110059872A CN102189332A CN 102189332 A CN102189332 A CN 102189332A CN 2011100598721 A CN2011100598721 A CN 2011100598721A CN 201110059872 A CN201110059872 A CN 201110059872A CN 102189332 A CN102189332 A CN 102189332A
Authority
CN
China
Prior art keywords
mentioned
laser
irradiation
area
defective
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN2011100598721A
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English (en)
Chinese (zh)
Inventor
赤羽隆之
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Corp filed Critical Olympus Corp
Publication of CN102189332A publication Critical patent/CN102189332A/zh
Pending legal-status Critical Current

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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1306—Details
    • G02F1/1309—Repairing; Testing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/03—Observing, e.g. monitoring, the workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/0869—Devices involving movement of the laser head in at least one axial direction

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Laser Beam Processing (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Manufacturing Of Printed Wiring (AREA)
CN2011100598721A 2010-03-18 2011-03-11 激光加工方法及激光加工装置 Pending CN102189332A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2010-063312 2010-03-18
JP2010063312A JP5495875B2 (ja) 2010-03-18 2010-03-18 レーザ加工方法、及び、レーザ加工装置

Publications (1)

Publication Number Publication Date
CN102189332A true CN102189332A (zh) 2011-09-21

Family

ID=44598678

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2011100598721A Pending CN102189332A (zh) 2010-03-18 2011-03-11 激光加工方法及激光加工装置

Country Status (4)

Country Link
JP (1) JP5495875B2 (enExample)
KR (1) KR20110105339A (enExample)
CN (1) CN102189332A (enExample)
TW (1) TW201134590A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108139664A (zh) * 2015-09-04 2018-06-08 Eo科技股份有限公司 移除接着剂的方法与装置

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5818721B2 (ja) * 2012-03-06 2015-11-18 住友重機械工業株式会社 レーザ加工装置及びレーザ加工方法
CN115351426B (zh) * 2022-08-11 2025-04-25 莆田市雷腾激光数控设备有限公司 一种鞋底激光打标方法及系统
WO2025002322A1 (zh) 2023-06-28 2025-01-02 广州童心制物科技有限公司 加工元素的限位方法、装置、设备、程序介质和数控机器

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002039960A (ja) * 2000-07-27 2002-02-06 Hitachi Ltd パターン欠陥検査方法及びその装置
CN1483547A (zh) * 2002-07-29 2004-03-24 Lg������ʽ���� 激光修复装置和方法
JP2007007660A (ja) * 2005-06-28 2007-01-18 Olympus Corp レーザ加工装置
CN1904676A (zh) * 2005-07-26 2007-01-31 奥林巴斯株式会社 激光修补装置
CN101101857A (zh) * 2006-07-03 2008-01-09 奥林巴斯株式会社 缺陷修复装置
US20080129950A1 (en) * 2005-03-24 2008-06-05 Olympus Corporation Repair method and apparatus therefor
JP2008153024A (ja) * 2006-12-15 2008-07-03 Ntn Corp 微細パターン修正方法
CN101673666A (zh) * 2008-09-12 2010-03-17 奥林巴斯株式会社 激光修复装置及激光修复方法
JP2011203710A (ja) * 2010-03-05 2011-10-13 Olympus Corp 欠陥修正装置、欠陥追跡方法および欠陥追跡プログラム

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58138588A (ja) * 1982-02-12 1983-08-17 Hitachi Ltd 光照射加工装置
JPH02241686A (ja) * 1989-03-14 1990-09-26 Nec Corp レーザ加工装置用結像光学系
JPH0542381A (ja) * 1991-08-09 1993-02-23 Nec Corp レーザ加工装置を用いた欠陥修正方法
JP3042155B2 (ja) * 1992-03-05 2000-05-15 日本電気株式会社 フォトマスク修正装置およびフォトマスク修正方法
JP2809134B2 (ja) * 1995-06-20 1998-10-08 日本電気株式会社 液晶表示用カラーフィルタの欠陥修正方法および装置
JP4335422B2 (ja) * 2000-07-31 2009-09-30 Ｎｔｎ株式会社 パターン修正装置
JP4646805B2 (ja) * 2003-05-09 2011-03-09 オリンパス株式会社 欠陥修正装置及びその欠陥修正方法
JP2005103581A (ja) * 2003-09-29 2005-04-21 Olympus Corp リペア方法及びその装置
JP4688525B2 (ja) * 2004-09-27 2011-05-25 株式会社 日立ディスプレイズ パターン修正装置および表示装置の製造方法
JP4951323B2 (ja) * 2006-12-08 2012-06-13 オリンパス株式会社 欠陥修正方法及び欠陥修正装置
JP5064778B2 (ja) * 2006-12-11 2012-10-31 オリンパス株式会社 レーザ加工装置
JP5114943B2 (ja) * 2006-12-25 2013-01-09 ソニー株式会社 欠陥修正装置及び欠陥修正方法
JP5110894B2 (ja) * 2007-02-05 2012-12-26 株式会社ジャパンディスプレイウェスト 欠陥修正装置、配線基板の製造方法、ディスプレイ装置の製造方法
JP4955425B2 (ja) * 2007-03-08 2012-06-20 オリンパス株式会社 レーザ加工装置
JP4937185B2 (ja) * 2008-05-15 2012-05-23 Ｎｔｎ株式会社 パターン修正方法

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002039960A (ja) * 2000-07-27 2002-02-06 Hitachi Ltd パターン欠陥検査方法及びその装置
CN1483547A (zh) * 2002-07-29 2004-03-24 Lg������ʽ���� 激光修复装置和方法
US20080129950A1 (en) * 2005-03-24 2008-06-05 Olympus Corporation Repair method and apparatus therefor
JP2007007660A (ja) * 2005-06-28 2007-01-18 Olympus Corp レーザ加工装置
CN1904676A (zh) * 2005-07-26 2007-01-31 奥林巴斯株式会社 激光修补装置
CN101101857A (zh) * 2006-07-03 2008-01-09 奥林巴斯株式会社 缺陷修复装置
JP2008153024A (ja) * 2006-12-15 2008-07-03 Ntn Corp 微細パターン修正方法
CN101673666A (zh) * 2008-09-12 2010-03-17 奥林巴斯株式会社 激光修复装置及激光修复方法
JP2011203710A (ja) * 2010-03-05 2011-10-13 Olympus Corp 欠陥修正装置、欠陥追跡方法および欠陥追跡プログラム

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108139664A (zh) * 2015-09-04 2018-06-08 Eo科技股份有限公司 移除接着剂的方法与装置
US11478828B2 (en) 2015-09-04 2022-10-25 Eo Technics Co., Ltd. Adhesive removing device and method

Also Published As

Publication number Publication date
JP5495875B2 (ja) 2014-05-21
JP2011194432A (ja) 2011-10-06
KR20110105339A (ko) 2011-09-26
TW201134590A (en) 2011-10-16

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Application publication date: 20110921