JP5495875B2 - レーザ加工方法、及び、レーザ加工装置 - Google Patents

レーザ加工方法、及び、レーザ加工装置 Download PDF

Info

Publication number
JP5495875B2
JP5495875B2 JP2010063312A JP2010063312A JP5495875B2 JP 5495875 B2 JP5495875 B2 JP 5495875B2 JP 2010063312 A JP2010063312 A JP 2010063312A JP 2010063312 A JP2010063312 A JP 2010063312A JP 5495875 B2 JP5495875 B2 JP 5495875B2
Authority
JP
Japan
Prior art keywords
region
irradiation
defect
laser beam
laser processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2010063312A
Other languages
English (en)
Japanese (ja)
Other versions
JP2011194432A (ja
JP2011194432A5 (enExample
Inventor
隆之 赤羽
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Corp filed Critical Olympus Corp
Priority to JP2010063312A priority Critical patent/JP5495875B2/ja
Priority to TW100105771A priority patent/TW201134590A/zh
Priority to KR1020110021815A priority patent/KR20110105339A/ko
Priority to CN2011100598721A priority patent/CN102189332A/zh
Publication of JP2011194432A publication Critical patent/JP2011194432A/ja
Publication of JP2011194432A5 publication Critical patent/JP2011194432A5/ja
Application granted granted Critical
Publication of JP5495875B2 publication Critical patent/JP5495875B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1306—Details
    • G02F1/1309—Repairing; Testing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/03—Observing, e.g. monitoring, the workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/0869—Devices involving movement of the laser head in at least one axial direction

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Laser Beam Processing (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Manufacturing Of Printed Wiring (AREA)
JP2010063312A 2010-03-18 2010-03-18 レーザ加工方法、及び、レーザ加工装置 Expired - Fee Related JP5495875B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2010063312A JP5495875B2 (ja) 2010-03-18 2010-03-18 レーザ加工方法、及び、レーザ加工装置
TW100105771A TW201134590A (en) 2010-03-18 2011-02-22 Laser processing method and laser processing device
KR1020110021815A KR20110105339A (ko) 2010-03-18 2011-03-11 레이저 가공 방법 및 레이저 가공 장치
CN2011100598721A CN102189332A (zh) 2010-03-18 2011-03-11 激光加工方法及激光加工装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010063312A JP5495875B2 (ja) 2010-03-18 2010-03-18 レーザ加工方法、及び、レーザ加工装置

Publications (3)

Publication Number Publication Date
JP2011194432A JP2011194432A (ja) 2011-10-06
JP2011194432A5 JP2011194432A5 (enExample) 2013-05-02
JP5495875B2 true JP5495875B2 (ja) 2014-05-21

Family

ID=44598678

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010063312A Expired - Fee Related JP5495875B2 (ja) 2010-03-18 2010-03-18 レーザ加工方法、及び、レーザ加工装置

Country Status (4)

Country Link
JP (1) JP5495875B2 (enExample)
KR (1) KR20110105339A (enExample)
CN (1) CN102189332A (enExample)
TW (1) TW201134590A (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5818721B2 (ja) * 2012-03-06 2015-11-18 住友重機械工業株式会社 レーザ加工装置及びレーザ加工方法
KR101821239B1 (ko) 2015-09-04 2018-01-24 주식회사 이오테크닉스 접착제 제거장치 및 방법
CN115351426B (zh) * 2022-08-11 2025-04-25 莆田市雷腾激光数控设备有限公司 一种鞋底激光打标方法及系统
WO2025002322A1 (zh) 2023-06-28 2025-01-02 广州童心制物科技有限公司 加工元素的限位方法、装置、设备、程序介质和数控机器

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58138588A (ja) * 1982-02-12 1983-08-17 Hitachi Ltd 光照射加工装置
JPH02241686A (ja) * 1989-03-14 1990-09-26 Nec Corp レーザ加工装置用結像光学系
JPH0542381A (ja) * 1991-08-09 1993-02-23 Nec Corp レーザ加工装置を用いた欠陥修正方法
JP3042155B2 (ja) * 1992-03-05 2000-05-15 日本電気株式会社 フォトマスク修正装置およびフォトマスク修正方法
JP2809134B2 (ja) * 1995-06-20 1998-10-08 日本電気株式会社 液晶表示用カラーフィルタの欠陥修正方法および装置
JP3858571B2 (ja) * 2000-07-27 2006-12-13 株式会社日立製作所 パターン欠陥検査方法及びその装置
JP4335422B2 (ja) * 2000-07-31 2009-09-30 Ｎｔｎ株式会社 パターン修正装置
KR100457565B1 (ko) * 2002-07-29 2004-11-18 엘지전자 주식회사 레이저 수리 장치 및 방법
JP4646805B2 (ja) * 2003-05-09 2011-03-09 オリンパス株式会社 欠陥修正装置及びその欠陥修正方法
JP2005103581A (ja) * 2003-09-29 2005-04-21 Olympus Corp リペア方法及びその装置
JP4688525B2 (ja) * 2004-09-27 2011-05-25 株式会社 日立ディスプレイズ パターン修正装置および表示装置の製造方法
CN101147093B (zh) * 2005-03-24 2011-10-05 奥林巴斯株式会社 维修方法及其装置
JP5036144B2 (ja) * 2005-06-28 2012-09-26 オリンパス株式会社 レーザ加工装置
JP4947933B2 (ja) * 2005-07-26 2012-06-06 オリンパス株式会社 レーザリペア装置
TWI408358B (zh) * 2006-07-03 2013-09-11 Olympus Corp 缺陷修正裝置
JP4951323B2 (ja) * 2006-12-08 2012-06-13 オリンパス株式会社 欠陥修正方法及び欠陥修正装置
JP5064778B2 (ja) * 2006-12-11 2012-10-31 オリンパス株式会社 レーザ加工装置
JP2008153024A (ja) * 2006-12-15 2008-07-03 Ntn Corp 微細パターン修正方法
JP5114943B2 (ja) * 2006-12-25 2013-01-09 ソニー株式会社 欠陥修正装置及び欠陥修正方法
JP5110894B2 (ja) * 2007-02-05 2012-12-26 株式会社ジャパンディスプレイウェスト 欠陥修正装置、配線基板の製造方法、ディスプレイ装置の製造方法
JP4955425B2 (ja) * 2007-03-08 2012-06-20 オリンパス株式会社 レーザ加工装置
JP4937185B2 (ja) * 2008-05-15 2012-05-23 Ｎｔｎ株式会社 パターン修正方法
JP5331421B2 (ja) * 2008-09-12 2013-10-30 オリンパス株式会社 レーザリペア装置およびレーザリペア方法
JP5730528B2 (ja) * 2010-03-05 2015-06-10 オリンパス株式会社 欠陥修正装置および欠陥追跡方法

Also Published As

Publication number Publication date
JP2011194432A (ja) 2011-10-06
KR20110105339A (ko) 2011-09-26
CN102189332A (zh) 2011-09-21
TW201134590A (en) 2011-10-16

Similar Documents

Publication Publication Date Title
CN203265909U (zh) 修复装置
KR100915418B1 (ko) 웨이퍼 마킹 방법, 불량 다이의 마킹 방법, 웨이퍼 정렬방법 및 웨이퍼 검사 방법
US20080204737A1 (en) Mask pattern inspection apparatus with koehler illumination system using light source of high spatial coherency
CN203409425U (zh) 修复装置
US7830502B2 (en) Substrate inspection device and substrate inspection method
JP2011025316A (ja) 欠陥修正装置
JP2011257303A (ja) 画像取得装置、欠陥修正装置および画像取得方法
JP5495875B2 (ja) レーザ加工方法、及び、レーザ加工装置
CN100395586C (zh) 缺陷修正装置及其缺陷修正方法
KR20130098838A (ko) 레이저 가공 장치, 레이저 가공 방법 및 레이저 가공 프로그램을 기록한 컴퓨터가 판독 가능한 기록 매체
WO2019083598A1 (en) EMPIRICAL LENS ABERRATION DETECTION FOR OPTICAL SYSTEM WITH LIMITED DIFFRACTION
US8755040B2 (en) Illuminating apparatus, pattern inspection apparatus, and method of forming illuminating light
KR100879007B1 (ko) 기판의 광학검사기능을 구비한 리페어장치
KR101665764B1 (ko) 묘화 장치, 기판 처리 시스템 및 묘화 방법
KR102197572B1 (ko) 조명 소스로서의 마이크로 led 어레이
TW201541771A (zh) 雷射處理設備和方法
JP2005338555A (ja) 露光装置、露光方法および露光処理プログラム
JP2013123721A (ja) 欠陥修正装置、欠陥修正方法および欠陥修正プログラム
JP2013146760A (ja) 欠陥修正装置、及び、欠陥修正方法
CN116643461A (zh) 曝光方法以及曝光装置
JP2006023270A (ja) ディスプレーベアガラス検査装置および方法
KR100867298B1 (ko) 평판디스플레이 패널의 리페어 장치
KR101584900B1 (ko) 듀얼헤드 노광시스템 및 이를 이용한 노광방법
JP2010060991A (ja) 液晶パネル検査装置及び液晶パネル検査方法
JP4209661B2 (ja) 表示用基板の処理装置

Legal Events

Date Code Title Description
A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20130313

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20130313

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20140124

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20140212

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20140304

S531 Written request for registration of change of domicile

Free format text: JAPANESE INTERMEDIATE CODE: R313531

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

LAPS Cancellation because of no payment of annual fees