CN101175986B - 玻璃检测系统及其使用方法 - Google Patents

玻璃检测系统及其使用方法 Download PDF

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Publication number
CN101175986B
CN101175986B CN200680016105XA CN200680016105A CN101175986B CN 101175986 B CN101175986 B CN 101175986B CN 200680016105X A CN200680016105X A CN 200680016105XA CN 200680016105 A CN200680016105 A CN 200680016105A CN 101175986 B CN101175986 B CN 101175986B
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CN
China
Prior art keywords
glass plate
plate material
transparent plate
detection system
light
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Expired - Fee Related
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CN200680016105XA
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English (en)
Chinese (zh)
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CN101175986A (zh
Inventor
L·R·左勒三世
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Corning Inc
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Corning Inc
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N2021/1765—Method using an image detector and processing of image signal
    • G01N2021/177—Detector of the video camera type
    • G01N2021/1772—Array detector
    • G01N2021/1774—Line array detector
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
    • G01N2021/8965—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod using slant illumination, using internally reflected light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
    • G01N21/45—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/061—Sources
    • G01N2201/06113—Coherent sources; lasers
    • G01N2201/0612—Laser diodes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/063—Illuminating optical parts
    • G01N2201/0635—Structured illumination, e.g. with grating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/063—Illuminating optical parts
    • G01N2201/0638—Refractive parts
CN200680016105XA 2005-04-06 2006-04-06 玻璃检测系统及其使用方法 Expired - Fee Related CN101175986B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US66917105P 2005-04-06 2005-04-06
US60/669,171 2005-04-06
PCT/US2006/013012 WO2006108137A2 (en) 2005-04-06 2006-04-06 Glass inspection systems and methods for using same

Publications (2)

Publication Number Publication Date
CN101175986A CN101175986A (zh) 2008-05-07
CN101175986B true CN101175986B (zh) 2010-10-13

Family

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Family Applications (1)

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CN200680016105XA Expired - Fee Related CN101175986B (zh) 2005-04-06 2006-04-06 玻璃检测系统及其使用方法

Country Status (6)

Country Link
EP (1) EP1866625A4 (ja)
JP (1) JP2008536127A (ja)
KR (1) KR20070121820A (ja)
CN (1) CN101175986B (ja)
TW (1) TWI360652B (ja)
WO (1) WO2006108137A2 (ja)

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CN102608132B (zh) * 2012-04-09 2014-06-11 昆山胜泽光电科技有限公司 多类型玻璃瑕疵检测装置及检测方法
CN102645435A (zh) * 2012-04-19 2012-08-22 深圳市华星光电技术有限公司 基板的检测方法和装置
CN102721692B (zh) * 2012-06-19 2015-11-25 深圳市华星光电技术有限公司 玻璃基板卡匣的检测装置
CN102778460A (zh) * 2012-07-31 2012-11-14 法国圣戈班玻璃公司 一种检测基质内缺陷的方法
WO2014027375A1 (ja) * 2012-08-13 2014-02-20 川崎重工業株式会社 板ガラスの検査ユニット及び製造設備
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CN103886573B (zh) * 2012-12-20 2018-10-12 联想(北京)有限公司 物体检测方法和物体检测装置
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KR20160102244A (ko) * 2013-12-23 2016-08-29 코닝 인코포레이티드 광학 검사를 위한 비-이미징 코히어런트 라인 스캐너 시스템 및 방법
CN103791835A (zh) * 2014-01-26 2014-05-14 扬州苏庆非标装备研发有限公司 条状光学玻璃截面轮廓及体积检测方法
CN103868478A (zh) * 2014-04-01 2014-06-18 四川虹视显示技术有限公司 透明平板平面度的快速检测方法及装置
CN103913466A (zh) * 2014-04-08 2014-07-09 上海华力微电子有限公司 晶圆缺陷的检测装置及其检测方法
KR101952617B1 (ko) * 2014-07-03 2019-02-28 (주)엘지하우시스 유리 기판의 부식 검출 방법
KR101942260B1 (ko) 2014-07-03 2019-01-28 (주)엘지하우시스 유리 기판의 부식 검출 방법
CN104297264A (zh) * 2014-11-03 2015-01-21 苏州精创光学仪器有限公司 玻璃表面缺陷在线检测系统
JP6668353B2 (ja) 2014-12-19 2020-03-18 メルク パテント ゲゼルシャフト ミット ベシュレンクテル ハフツングＭｅｒｃｋ Ｐａｔｅｎｔ Ｇｅｓｅｌｌｓｃｈａｆｔ ｍｉｔ ｂｅｓｃｈｒａｅｎｋｔｅｒ Ｈａｆｔｕｎｇ クロマトグラフ試料を光学的に検知する方法及び装置
JP2018528396A (ja) * 2015-06-19 2018-09-27 コーニング インコーポレイテッド 光学技術を使用して基板に欠陥があるかを検査し、かつ、かかる欠陥を三次元で位置決めするための方法および装置
CN105372253A (zh) * 2015-12-14 2016-03-02 陈艳 一种灯管瑕疵检测系统
CN107132244B (zh) * 2016-02-29 2020-01-07 鞍钢股份有限公司 一种钢中夹杂物定量评价方法
CN105675617B (zh) * 2016-04-06 2020-05-01 东旭科技集团有限公司 用于测量平板玻璃表面颗粒度的方法及设备
US10732126B2 (en) 2016-11-02 2020-08-04 Corning Incorporated Method and apparatus for inspecting defects on transparent substrate and method emitting incident light
CN110073203B (zh) 2016-11-02 2022-07-08 康宁股份有限公司 检查透明基材上的缺陷的方法和设备
CN106556573B (zh) * 2016-11-17 2018-01-12 仝宁瑶 一种用于测定玻璃折射率的实验装置
TWI622764B (zh) * 2017-01-11 2018-05-01 由田新技股份有限公司 用於表面異物檢測的自動光學檢測系統
WO2018158824A1 (ja) * 2017-02-28 2018-09-07 東洋ガラス株式会社 容器の検査装置及び容器の検査方法
JP6285597B1 (ja) * 2017-06-05 2018-02-28 大塚電子株式会社 光学測定装置および光学測定方法
CN107345918B (zh) * 2017-08-16 2023-05-23 广西大学 一种板材质量检测装置及方法
CN107515222A (zh) * 2017-09-20 2017-12-26 哈尔滨工程大学 一种冰的微观结构观测装置
CN111226110A (zh) * 2018-08-10 2020-06-02 合刃科技（深圳）有限公司 检测方法和系统
CN109187550A (zh) * 2018-08-15 2019-01-11 苏州富鑫林光电科技有限公司 一种基于光栅成像的缺陷检测成像方法
CN109827974B (zh) * 2018-08-30 2022-03-08 东莞市微科光电科技有限公司 一种树脂滤光片膜裂检测设备及检测方法
CN110044931B (zh) * 2019-04-23 2021-03-26 华中科技大学 一种曲面玻璃表面和内部缺陷的检测装置
CN110095590A (zh) * 2019-04-23 2019-08-06 深圳市华星光电半导体显示技术有限公司 玻璃基板残材侦测方法及装置
CN110031481B (zh) * 2019-05-05 2021-11-12 苏州天准科技股份有限公司 一种基于偏振的方波结构光照明实现方法
CN112147710B (zh) * 2019-06-26 2022-02-18 上海微电子装备（集团）股份有限公司 一种湿法光胶装置的检测方法及检测装置
CN114796730B (zh) * 2022-03-29 2024-02-27 深圳市好克医疗仪器股份有限公司 气泡检测装置、方法、设备及计算机可读存储介质
CN115338168A (zh) * 2022-07-28 2022-11-15 宜昌中威清洗机有限公司 一种曲轴清洗系统
CN116934752B (zh) * 2023-09-18 2023-12-08 山东国泰民安玻璃科技有限公司 一种基于人工智能的玻璃检测方法及系统

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Also Published As

Publication number Publication date
EP1866625A4 (en) 2010-12-29
TWI360652B (en) 2012-03-21
TW200706859A (en) 2007-02-16
KR20070121820A (ko) 2007-12-27
WO2006108137A3 (en) 2006-11-16
WO2006108137A2 (en) 2006-10-12
CN101175986A (zh) 2008-05-07
JP2008536127A (ja) 2008-09-04
EP1866625A2 (en) 2007-12-19

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