TW200706859A - Glass inspection systems and method for using same - Google Patents

Glass inspection systems and method for using same

Info

Publication number
TW200706859A
TW200706859A TW095112334A TW95112334A TW200706859A TW 200706859 A TW200706859 A TW 200706859A TW 095112334 A TW095112334 A TW 095112334A TW 95112334 A TW95112334 A TW 95112334A TW 200706859 A TW200706859 A TW 200706859A
Authority
TW
Taiwan
Prior art keywords
inspection systems
same
glass inspection
glass
onclusions
Prior art date
Application number
TW095112334A
Other languages
Chinese (zh)
Other versions
TWI360652B (en
Inventor
Leon R Zoeller Iii
Original Assignee
Corning Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Corning Inc filed Critical Corning Inc
Publication of TW200706859A publication Critical patent/TW200706859A/en
Application granted granted Critical
Publication of TWI360652B publication Critical patent/TWI360652B/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N2021/1765—Method using an image detector and processing of image signal
    • G01N2021/177—Detector of the video camera type
    • G01N2021/1772—Array detector
    • G01N2021/1774—Line array detector
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
    • G01N2021/8965—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod using slant illumination, using internally reflected light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
    • G01N21/45—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/061—Sources
    • G01N2201/06113—Coherent sources; lasers
    • G01N2201/0612—Laser diodes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/063—Illuminating optical parts
    • G01N2201/0635—Structured illumination, e.g. with grating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/063—Illuminating optical parts
    • G01N2201/0638—Refractive parts

Landscapes

  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Pathology (AREA)
  • Biochemistry (AREA)
  • Immunology (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

Several different inspection systems and methods are described herein that identify defects (e.g., inclusions, onclusions, scratches, stains, blisters, cords or other imperfections associated with surface discontinuities or material non-homogeneities) on or within a glass sheet.
TW95112334A 2005-04-06 2006-04-06 Glass inspection systems and method for using same TWI360652B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US66917105P 2005-04-06 2005-04-06

Publications (2)

Publication Number Publication Date
TW200706859A true TW200706859A (en) 2007-02-16
TWI360652B TWI360652B (en) 2012-03-21

Family

ID=37074107

Family Applications (1)

Application Number Title Priority Date Filing Date
TW95112334A TWI360652B (en) 2005-04-06 2006-04-06 Glass inspection systems and method for using same

Country Status (6)

Country Link
EP (1) EP1866625A4 (en)
JP (1) JP2008536127A (en)
KR (1) KR20070121820A (en)
CN (1) CN101175986B (en)
TW (1) TWI360652B (en)
WO (1) WO2006108137A2 (en)

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CN103868478A (en) * 2014-04-01 2014-06-18 四川虹视显示技术有限公司 Rapid detection method and device for flatness of transparent flat plate
CN103913466A (en) * 2014-04-08 2014-07-09 上海华力微电子有限公司 Detection device and detection method for wafer defect
KR101952617B1 (en) * 2014-07-03 2019-02-28 (주)엘지하우시스 Method of detecting corrosion of glass substrate
KR101942260B1 (en) 2014-07-03 2019-01-28 (주)엘지하우시스 Method of detecting corrosion of glass substrate
CN104297264A (en) * 2014-11-03 2015-01-21 苏州精创光学仪器有限公司 Glass surface blemish on-line detecting system
JP6668353B2 (en) 2014-12-19 2020-03-18 メルク パテント ゲゼルシャフト ミット ベシュレンクテル ハフツングＭｅｒｃｋ Ｐａｔｅｎｔ Ｇｅｓｅｌｌｓｃｈａｆｔ ｍｉｔ ｂｅｓｃｈｒａｅｎｋｔｅｒ Ｈａｆｔｕｎｇ Method and apparatus for optically detecting a chromatographic sample
JP2018528396A (en) * 2015-06-19 2018-09-27 コーニング インコーポレイテッド Method and apparatus for inspecting a substrate for defects using optical techniques and positioning such defects in three dimensions
CN105372253A (en) * 2015-12-14 2016-03-02 陈艳 Light tube defect detection system
CN107132244B (en) * 2016-02-29 2020-01-07 鞍钢股份有限公司 Quantitative evaluation method for inclusions in steel
CN105675617B (en) * 2016-04-06 2020-05-01 东旭科技集团有限公司 Method and apparatus for measuring surface granularity of plate glass
KR102537558B1 (en) 2016-11-02 2023-05-26 코닝 인코포레이티드 Method and apparatus for inspecting defects on a transparent substrate
CN110050184B (en) 2016-11-02 2023-06-13 康宁股份有限公司 Method and apparatus for inspecting defect on transparent substrate and method of emitting incident light
CN106556573B (en) * 2016-11-17 2018-01-12 仝宁瑶 A kind of experimental provision for being used to determine glass refraction
TWI622764B (en) * 2017-01-11 2018-05-01 由田新技股份有限公司 An automatic optical inspecting system for particle inspection from the surface
KR102205582B1 (en) * 2017-02-28 2021-01-21 도요 가라스 가부시키가이샤 Container inspection device and container inspection method
JP6285597B1 (en) * 2017-06-05 2018-02-28 大塚電子株式会社 Optical measuring apparatus and optical measuring method
CN107345918B (en) * 2017-08-16 2023-05-23 广西大学 Plate material quality detection device and method
CN107515222A (en) * 2017-09-20 2017-12-26 哈尔滨工程大学 A kind of microstructure observation device of ice
CN111226110A (en) * 2018-08-10 2020-06-02 合刃科技（深圳）有限公司 Detection method and system
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Also Published As

Publication number Publication date
EP1866625A2 (en) 2007-12-19
TWI360652B (en) 2012-03-21
WO2006108137A2 (en) 2006-10-12
CN101175986B (en) 2010-10-13
WO2006108137A3 (en) 2006-11-16
KR20070121820A (en) 2007-12-27
EP1866625A4 (en) 2010-12-29
JP2008536127A (en) 2008-09-04
CN101175986A (en) 2008-05-07

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