CN101175986B - Glass inspection systems and methods for using same - Google Patents
Glass inspection systems and methods for using same Download PDFInfo
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- CN101175986B CN101175986B CN200680016105XA CN200680016105A CN101175986B CN 101175986 B CN101175986 B CN 101175986B CN 200680016105X A CN200680016105X A CN 200680016105XA CN 200680016105 A CN200680016105 A CN 200680016105A CN 101175986 B CN101175986 B CN 101175986B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
- G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N2021/1765—Method using an image detector and processing of image signal
- G01N2021/177—Detector of the video camera type
- G01N2021/1772—Array detector
- G01N2021/1774—Line array detector
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
- G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
- G01N2021/8965—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod using slant illumination, using internally reflected light
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/21—Polarisation-affecting properties
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
- G01N21/45—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/06—Illumination; Optics
- G01N2201/061—Sources
- G01N2201/06113—Coherent sources; lasers
- G01N2201/0612—Laser diodes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/06—Illumination; Optics
- G01N2201/063—Illuminating optical parts
- G01N2201/0635—Structured illumination, e.g. with grating
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/06—Illumination; Optics
- G01N2201/063—Illuminating optical parts
- G01N2201/0638—Refractive parts
Abstract
The present invention describes several different inspection systems and methods are described herein that identify defects (e.g. inclusions, occlusions, scratches, stains, blisters, cords or other imperfections associated with surface discontinuities or materal non-homogeneities) on or within a lass sheet.
Description
CROSS-REFERENCE TO RELATED APPLICATIONS
The application requires to submit on April 6th, 2005 is entitled as " glass inspection systems and using method thereof ", sequence number is the rights and interests of No. 60/669171 U. S. application, and this application is with reference to being incorporated in this.
Technical field
Relate generally to of the present invention is used for identifying on glass plate or the detection system of its inner flaw and method.
Background technology
Glass plate manufacturer is designing novel, improved detection system always by every means, is used for identifying at glass plate [for example liquid crystal display (LCD) glass substrate] going up or its inner defective [snotter for example (inclusions), surface inclusion (onclusions), scuffing, stain, bubble, streak (cord) or other and the discontinuous or inhomogeneous relevant flaw of material in surface].Target of the present invention is several novel, improved detection systems.
Summary of the invention
The present invention includes and severally be used to identify on the glass plate or the detection system of its inner flaw (snotter, surface irregularities, scuffing, stain, bubble, streak for example) and the different embodiments of method.In one embodiment, detection system comprises illuminator, lens and line scan sensor.Illuminator emission light beam, the lens receiving beam, the emitting parallel light bundle passes through glass sheet partial then.Then, line scan sensor receives the parallel beam by glass plate, and described light beam can focus on the defective of glass plate, and need not place lens between line scan sensor and glass plate again.
The accompanying drawing summary
Detailed description with reference to doing below in conjunction with accompanying drawing can have more complete understanding to the present invention, wherein:
Figure 1A-1F has shown 6 width of cloth figures relevant with first kind of embodiment of detection system of the present invention;
Fig. 2 A-2C has shown 3 width of cloth figures relevant with second kind of embodiment of detection system of the present invention;
Fig. 3 A-3E has shown 5 width of cloth figures relevant with the third embodiment of detection system of the present invention;
Fig. 4 A-4C has shown 3 width of cloth figures relevant with the 4th kind of embodiment of detection system of the present invention;
Fig. 5 A-5C has shown 3 width of cloth figures relevant with the 5th kind of embodiment of detection system of the present invention;
Fig. 6 A-6D has shown 4 width of cloth figures relevant with the 6th kind of embodiment of detection system of the present invention;
Fig. 7 A-7D has shown 4 width of cloth figures relevant with the 7th kind of embodiment of detection system of the present invention.
Detailed Description Of The Invention
Referring to Figure 1A-1F, 6 width of cloth figures relevant with the detection system 100 of first kind of embodiment of the present invention are shown.Detection system 100 shown in Figure 1A comprises the diode laser 102 of emission laser rays (laser line) 104, described laser rays 104 is by cylindrical lens 106, cylindrical lens 106 reflects into parallel beam 108 with all rays (ray) in the laser rays 104, parallel beam 108 transmissions are received by line scan sensor 112 by glass plate 110.An importance of detection system 100 is that line scan sensor 112 can focus on the flaw of glass plate 110, and need not place lens again between line scan sensor 112 and glass plate 110.In this example, the distance between cylindrical lens 106 and the sensor 112 is about 4 inches.The beamwidth of parallel beam 108 is 3-5 inches.In addition, the position of glass plate 110 between cylindrical lens 106 and sensor 112 can change ± 1 inch.
Figure 1B-1E has shown the image of the different flaws that obtain with 110 scannings of 100 pairs of different glass plates of detection system.In order to obtain each image, sensor 112 is exported a signal, and this signal is quantized and imports the computing machine (not shown), and computing machine is analyzed signal with the Flame Image Process algorithm, thereby shows with the form of picture.The image that observation post produces, the height that should be noted that signal is that flaw causes.Described flaw is little embedded snotter, in this serial experiment, is the granule of platinum, zirconium, stainless steel or other pollutants.In order to produce these images, laser instrument 102 must send highly relevant light 104, to produce Fresnel effect.To be exactly luminous energy propagate around dark flaw Fresnel effect, and form the higher peak of the light that produces than laser instrument 102 104.Therefore, Fresnel effect produces very high signal to noise ratio (S/N ratio), makes nibs be detected easily.
Fig. 1 F is being respectively 1 inch, 1.5 inches, 2.0 inches, 2.5 inches and the 3 inches change in size of locating to scan a defective in the resulting glass plate 110 from sensor 112.The size of this defective changes really, but amplitude of variation is little with respect to other measuring methods, and this amplitude of variation can be measured and estimate.This figure shows that also when defective locations was far away more away from sensor 112, the driven dimension of this defective was big more, and goes out pre-metering greatly.In addition, this figure shows that the inverse (inverse) of this change in size can be used as correction factor, when between known glass plate 110 and the sensor 112 apart from the time, available it calculate the just size of defective.
Shown in detection system 100 also have some other advantages described below:
● the optics geometry that detection system 100 has (angle of incident light/catoptrical angle) can produce the false depth of field or the equivalent depth of field (pseudo or equivalent depth of field) of inch rather than millimeter magnitude, and promptly the depth of field is greater than 1 inch.Big LCD glass plate (for example 2 meters * 2 meters) for being difficult for handling or moving this means that the distance of sensor and glass surface can change several inches, and flaw still can detected and mensuration.
● detection system 100 adopts the transmission laser geometry, and this structure is the very effective approach that light arrives sensor 112.The geometry insufficient light that other use little high speed sensing element makes them in fact can't detect the flaw of 5-100 micron.
● detection system 100 also can be without cylindrical lens 106, but the result is so accurate.For example, in this optional embodiment, more handle possibly just can calculate and whether have defective in the glass plate 110 and measure.
Referring to Fig. 2 A-2C, 3 width of cloth figures relevant with the detection system 200 of second kind of embodiment of the present invention are shown.Detection system 200 shown in Fig. 2 A comprises diode laser 202, this laser instrument emission laser rays 204, described laser rays 204 is by cylindrical lens 206, cylindrical lens 206 reflects into parallel beam 208 with all rays in the laser rays 204, and parallel beam 208 passes through glass plate 210 with subvertical as far as possible angle transmission.In this process, the part of light beam 208 (about 4%) is reflected at the front surface of glass plate 210, and a part (about 4-5%) light beam 208 is reflected in the rear surface of glass plate 210.Article two, folded light beam 211 is received by line scan sensor 212.Because laser beam 208 is highly relevant, these two folded light beams 211 can make sensor 212 and computing machine (not shown) produce the image of interference figure.
As can be seen from Figure 2A, when coherent light beam 208 directive glass plates 210, also can reflect simultaneously, but two ripple homophases that produced and out-phase are propagated generation interference fringe picture (seeing Fig. 2 B) in the front surface and the rear surface of glass plate 210.Can change this interference fringe picture by thickness or the change refractive index that changes glass plate 210.If the thickness and/or the refractive index generation minor variations of glass plate 210, interference fringe picture will be got south-north trend.If east-west to unit area on have a large amount of stripeds, show that then significant variation has taken place for thickness and/or refractive index.Therefore, the coherent light 204 that laser instrument 202 produces allows to be detected thickness or change of refractive by sensor 212, and is drawn by the computing machine (not shown).And, by the cylindricality in the interference fringe picture is asked mean deviation seek to add with minimum value (notice that described minimum value and maximal value are the values of 90 ° of phasic differences mutually with maximal value, the variation in thickness of the half-wavelength of the light that expression is used for measuring), computing machine can be used to improve the thickness of mensuration glass plate 210 or the precision of variations in refractive index.Also the zone between minimum point and the maximum of points can be divided into ten parts, carry out little mensuration to 1/10 wavelength.
Two exemplary interference patterns are shown in Fig. 2 B and 2C.In Fig. 2 B, each striped in the interferogram is represented the variation in thickness of glass plate 210, and this variable quantity equals the half-wavelength of light beam 204.In Fig. 2 C, the image that line scanning CCD produces has shown the interior snotter in the glass plate 210.The core that should be noted that this image is 192 microns reflections on the dark interior snotter.This image also is included in some stripeds around the core.These stripeds show thickness and/or the change of refractive that is caused by the dark interior snotter in the glass plate 210.
Why might produce these images, be because two folded light beams 211 form relevant waveforms, and they are in the process of spatial transmission, and with the interval of the half-wavelength of laser 204, homophase and out-phase (intensity is strengthened and strength reduction) are propagated.For example, if the employing wavelength equals the violet laser 202 of 400 nanometers, then can see the area pellucida of striped every 200 nanometers, 200 nanometers of being separated by again can be seen the dark space of striped.The interval in dark space and area pellucida is about 1/6 of light 211 wavelength.If adopt purple light 211, then described area pellucida and dark space be spaced apart 66 nanometers.Just because of there is this phenomenon, the geometric mode that sensor 212 can scan (RBF) with reflection bright field uses, and it can survey the light and shade candy strip like this.By crossing this candy strip, can be to bright line (or dark line) counting, and this counting be multiply by light 211 wavelength 1/3, can obtain the amplitude of variation in thickness in the glass plate 210.Usually, this analysis itself can not determine the variation of bar graph causes still to be to be caused by variations in refractive index by variation in thickness.Yet, if be rich in the experience of technology for making glass aspect, just can analyze interference figure, determine what causes unique candy strip.
● be bordering on the normal of glass plate 210 if the incident angle of incident light 204 can keep connecting, then this optics geometric properties can produce the false depth of field of inch level rather than millimeter magnitude.Big glass plate (for example 2 meters * 2 meters) for being difficult for handling or moving this means that the distance of sensor and glass surface can change several inches, and flaw can detect and measure still.Obtain scanning in the degree of freedom that this scan setting obtains can be transported glass plate on the manufacturer's standard induction system the process.
● detection system 200 can be measured thickness of slab, detects slight flaws, and accurate Locating Glass plate.
● detection system 200 can produce the local message whether relevant flaw causes the plate surface deformation, even this distortion is little of for 1% of the used optical maser wavelength of scanning, also can measure.
● can the analyzing and testing system 200 candy strips that produce, determine the overall variation of glass plate 210 thickness then.
● can detect and measure the thickness or the change of refractive of interior snotter region with detection system 200.
● detection system 200 can also detect any thickness or the change of refractive on the draw direction of glass plate 210, and this variation itself shows as the striped that passes this flaw scope.
● detection system 200 also can be without cylindrical lens 206, but the result is so accurate.For example, in this optional embodiment, more handle thickness or the change of refractive that just can calculate glass plate 210 possibly.
Referring to Fig. 3 A-3E, 5 width of cloth figures relevant with the detection system 300 of the third embodiment of the present invention are shown.Detection system 300 shown in Fig. 3 A comprises sensor 302 and illuminator 304, is used for identifying the stress in the glass plate 306.Illuminator 304 in this example comprises laser instrument 306 and lens 308 (choosing wantonly), and the light beam 310a of emission is by the part of mobile glass plate 306.Sensor 302 (for example three wire sensor 302) utilizes three row's detector 312a, 312b and 312c (for example ccd detector 312a, 312b and 312c) to receive the light beam 310b (seeing Fig. 3 B) that passes glass plate 306.In this example, the wide 3-5 inch of light beam 310a.In addition, sensor 302 is positioned at the about 2 inches place of the mobile glass plate of distance 306.
Shown in Fig. 3 B, first row's ccd detector 312a covers/covers with the first polarizing coating 314a, and described coating makes incident light 310b with 0 degree orientation polarization take place.The second row ccd detector 312b covers/covers with the second polarizing coating 314b, and described coating makes incident light 310b with respect to ccd detector 312a to be 120 ° orientation generation polarization.In addition, the 3rd row ccd detector 312c covers/covers with the 3rd polarizing coating 314c, makes incident light 310b with respect to ccd detector 312a to be 240 ° orientation generation polarization.Should be noted that perhaps detection system 300 can work under polarizing coating 312a, 312b and 312c get the situation of any three angles, as long as the distance of the relative angle between them is about 120 degree.The relative angle distance that departs from 120 degree is far away more, and the degree of accuracy of detection system 300 is low more, but its endure.Angle such as 15 degree, 135 degree and 255 degree is the same good with the work effect of 0 degree, 120 degree and 240 degree, because their relative angle distance is 120 degree.Angle such as 15 degree, 160 degree and 230 degree can be worked, but may can not give the most accurate result.Therefore, the relative angle distance should depart from the degree of accuracy reduction that all will cause detection system 300 with any of this ideal situation, but perhaps still can provide acceptable result near 120 degree.
In operation, when sensor 302 usefulness polarized light 310b shone, the output of every row's ccd detector 312a, 312b and 312c all was the polarized light 310b of input and the vector product at the relevant polarizing filter angle of every row's ccd detector 312a, 312b and 312c.Therefore, but when the glass plate 306 of the stress of polarized light 310a by comprising detection limit, described stress will change the polarization angle of light beam 310b, thereby cause also changing with respect to stress intensity from the signal of three seniority among brothers and sisters scanning ccd detector 312a, 312b and 312c.These signals are used for differentiating the stress of glass plate 306.
Therefore, if do not have stress in the glass plate 306, the polarization angle of the polarized light 310b that receives so will be identical with the angle of the light 310a of laser instrument 306 emission.If there is a small amount of stress in the glass plate 306, this stress will make the polarization angle of light 310b that a small amount of the variation taken place so, and this variation can be measured and calculate by the output of analyzing three row's polarization ccd detector 312a, 312b and 312c.If there is bigger stress in the glass plate 306, so the light 310b by glass plate 306 polarization angle will great changes will take place, this polarization variations can be measured by three row's polarization ccd detector 312a, 312b and 312c equally.
Can expect, might comprise the ccd detector 312a of crossed polarizers and 312b comes to determine uniquely polarization angle, but be not unique in some situation by two rows' (for example).For this problem is described, can be referring to Fig. 3 C and 3D, wherein, when two incident waveforms projected on two cross polarization ccd detector 312a and the 312b, their two different polarization angles changed into identical polarization amplitude.For these two waveforms, can not determine their polarization angle uniquely.This problem can increase by the 3rd row's ccd detector 312c by (for example) and solve.
Fig. 3 E is a photo, has shown a line scanning image that LCD glass 306 generations of dynamic bending (dynamically flexed) are just taking place by 302 pairs of examples of sensor.Shown the variation of stress in the candy strip over time.Usually, the STRESS VARIATION amount in zone usually depends on how many environmental factors and glass plate 306 form on glass plate 306.
● detection system 300 does not need moving-member.
● detection system 300 is fit to carry out on-line determination.
● detection system 300 can be used to be created in the stress diagram of All Ranges on the LCD glass plate 306.For example, a plurality of sensors 302 can be arranged in a row, form with the equally big long pass sensor of glass plate 306, with the complete stress diagram on its generation glass plate 306, can be from the signal that these sensors 302 produce at the stress image that is used under the area of computer aided produce on the monolithic glass plate 306.
● as mentioned above, detection system 300 also can be without cylindrical lens 308, but that the possibility of result is so inaccurate.For example, in this optional mode, may need more processing just can calculate/identify stress in the glass plate 306.
Referring to Fig. 4 A-4C, show 3 width of cloth figures relevant with the detection system 400 of the 4th kind of embodiment of the present invention.Detection system 400 shown in Fig. 4 A comprises colored fine scanning sensor (color multi-linescan sensor) 402 and multichannel illuminator (laser instrument) 404a, 404b, 404c and 404d (four shown in the figure), is used for identifying glass plate 406 inner or surperficial flaws.In this example, fine scanning sensor 402 has many row's ccd detector 412a, 412b, 412c and 412d, covers optical filter 414a, 414b, 414c and a 414d (seeing Fig. 4 B) on each detector.And, four each self-emission colored light beam 416a of different illuminator 404a, 404b, 404c and 404d, 416b, 416c and 416d, the energy of each light beam are positioned at through within being with of one of a few row's ccd detector 412a, 412b, 412c and 412d of optical filter.Fig. 4 B-4C has shown that each optical filter 414a, 414b, 414c and 414d are that the light that how only to allow a kind of required particular color (wavelength) among color beam 416a, 416b, 416c and the 416d passes through and arrive to arrange accordingly among ccd detector 412a, 412b, 412c and the 412d, and stops light beam every other among light beam 416a, 416b, 416c and the 416d.
In the exemplary detection system shown in Fig. 4 A-4C 400, red light-emitting device 404a red-emitting bundle 416a, these light beam scioptics 418, then by glass plate 406, shine on the ccd detector 412a in a row, described detector has optical filter, and this detector 412a can receive red beam 416a can the interior energy of band scope.In this example, ccd detector 412a is to the small snotter sensitivity in the glass plate 406.Green luminescence device 406b transmitting green light bundle 416b, this light beam is reflected by glass plate 406, directive ccd detector 412b in a row, described detector has optical filter, and this detector 412b can receive blue beam 416b can the interior energy of band scope.In this example, ccd detector 412b is to snotter and thickness of glass sensitivity.Blue light emitting device 406c emission blue beam 416c, this light beam by glass plate 406, shines on the ccd detector 412c in a row then by grating 420, and described detector has optical filter, and this detector 412c can receive blue beam 416c can the interior energy of band scope.In this example, ccd detector 412c is to ripple in the glass plate 406 and variations in refractive index sensitivity.In addition, grey (infrared) illuminator 406d launches grey light beam 416d, these light beam scioptics 424, then by glass plate 406, shine on the ccd detector 412d in a row, fast detector has optical filter, and detector 412d can receive ash (IR) light beam 406d can the interior energy of band scope.In this example, utilize ccd detector 412d can measure the position of flaw in the glass plate 406.Similarly, detection system 400 can be designed to utilize the different light beams that can be with, can be with as infrared and ultraviolet, comes other features in the detection of glass plates 406.As can be seen, the detection system 400 that has a sensor 402 can be measured in the glass plate 406 about pollutant and and many features of glass sheet shape.
In the middle of practice, as for being inessential with which kind of feature of which wavelength detection among light 416a, 416b, 416c and the 416d (for example small snotter, thickness of glass).For example, can utilize the variations in refractive index rather than the small snotter of red beam 416a and ccd detector 412a detection of glass plates 406 easily.Equally, prevent that with colored filter 414b, 414c and 414d the ruddiness 416a of (for example) red laser 404a emission from being detected by non-ruddiness ccd detector 412b, 412c and 412d.This means that different colours light 416a, 416b, 416c and 416d can be used to the information separated that each feature (incident angle and the reflection angle of geometric properties---light on sensor 402) is provided, the information that makes it to be unlikely to be produced by other features (geometric properties) is disturbed.
As long as being divided by optical filter 414a, 414b, 414c and 414d, four kinds of laser 406a, 406b, 406c and 406d open, how many wavelength as for them also be inessential for, and described optical filter is placed in the front of four row's ccd detector 412a, 412b, 412c and 412d.Therefore, can be selected, be made it and commercial available cheap laser, as 404 nanometers, 750 nanometers, 870 nanometers and 950 nanophases coupling to the wavelength of laser 406a, 406b, 406c and 406d.In addition, any useful wavelength of light wavelength between 200 nanometers-2000 nanometer all is feasible.
● (spatial coordination) worked in coordination with in the space: all measurement results all produce the spatial relationship between the different views that so just is more prone to coordinate to be provided by each different rows scanning array 412a, 412b, 412c and 412d from a cover fine scanning sensor 402.
● cost reduces: two or more rows ccd detector 412a, 412b, 412c and 412d can be placed on the substrate here, and just an installing device, an interface also may be on one group of lens.
● size reduces: in the case, detection system 400 has a sensor 402, rather than two or more, a plurality of sensors will take more spaces.
Referring to Fig. 5 A-5C, show 3 width of cloth figures relevant with the detection system 500 of the 5th kind of embodiment of the present invention.Nowadays well-known, detection system is used to scan many materials (for example paper, plastics, steel, aluminium and glass plate), to survey and to distinguish unusual problem (flaw), because they need to obtain quality control and process information in the mill.Yet if the detected system of the foreign particle that is positioned at material surface that produces in manufacture process detects, these scanning processes may be interfered.For the transparent material of glass plate and so on, when particle (for example dirt, dust, chips of glass) when being positioned on this material surface, detection system will be regarded it as the particle (snotter) that is equal to this material internal.This will make detection system produce incorrect result.In fact, in some process, the number of surface particles can be 10-100 a times of internal particle quantity, and this will make scanning result become meaningless.Detection system 500 of the present invention has solved this problem, and what it detected is the flaw 502 that is embedded in the transparent material 504 (for example glass plate 504), and does not detect surface particles 506.
Shown in Fig. 5 A and 5B, the illuminator 508 that detection system 500 adopts is at a certain angle to glass plate 504 emission light 510.Described angle is selected, and internal reflections take place in that mobile glass plate 504 is inner in a part that makes light 510, and directive departs from that light 510 enters mobile glass plate 504 and from the zone of the position that mobile glass plate 504 penetrates.Then, line scan camera 512 can be placed on the appropriate location, make it can focus on this zone, and detect the light 510 that defective 502 internally reflects, be positioned at the light that locational surface particle reflected 510 that light 510 enters mobile glass plate 504 and penetrates from this glass plate but can not detect.This two width of cloth figure display line smear camera 512 whereabouts have departed from the position that enters this glass plate 504 and penetrate from this glass plate from the light 510 that covers device 508 on the mobile glass plate 504.Equally, this locational line scan camera 512 can focus on the inherent vice 502 and detect this defective, and can not detect surface particle 506.
In optional embodiment, line scan camera 512 available rows scanning sensors, time delay integration (timedelay integration) sensor (TDI) and feeler replace.In addition, illuminator 508 can be laser instrument, laser line source (laser line) or any other illuminator, as fluorescent light 508a (seeing Fig. 5 C).If adopt the illuminator as fluorescent light 508a, need to use outer cover 514 so, and place it in suitable position, so that light 510a from mobile glass plate 504 internal reflection takes place downwards, stop light 510a to enter mobile glass plate 504 or penetrate (seeing detection system 500a shown in Fig. 5 C) simultaneously from this glass plate from the site that line scan camera 512 is faced glass plate 504.
● except glass plate 504, detection system 500 also can scan other product forms, comprises the transparent material of (for example) glass web (glass web) and other templates or net form formula.
Referring to Fig. 6 A-6D, show 4 width of cloth figures relevant with the detection system 600 of the 6th kind of embodiment of the present invention.The technician of glass manufacturing area is perfectly clear, when glass plate 602 can be refracted to the degree that can detect difference in the collimation with collimated light, and the refractive index of the glass plate 602 of generation and/or the slight variation of thickness.This effect can detect by eye-observation glass plate 602 (LCD display 602), and it can be considered as flaw.Fig. 6 A and 6B have illustrated this effect, and when light 604 is sent by pointolite 606 (laser instrument 606), transmission is by not good flat glass sheet 602, this glass plate refract light 604, thus when causing on white background 608, producing the light and shade striped, just produced this effect.Detection system 600 of the present invention can detect the thickness of glass plate 602 (or any transparent plate material) and/or these slight changes that refractive index takes place.This is very important, because not good glass plate 602 just can be detected before being used for the product of LCD display and so on.
Fig. 6 C has shown the detection system 600 that comprises laser instrument 610, and described laser instrument 610 produces the relative uniform fan light 612 of optical density.Detection system 600 also comprises collimation lens 614, and these lens are diffracted into linear directional light 616 with light 612 from fan-shaped.Light 616 incides on the grating 618, and the cycle of the grating in this example is 500 lines to (line pair)/inch and has 50% fill factor, curve factor (fill factor).Grating 618 forms a series of concealed wire 622a and open-wire line 622b, and they project on the line scanning ccd sensor 620 by glass plate 602 (for example the LCD glass plate 602).In this example, the distance between grating 618 and the glass plate 602 is 2 inches.Distance between grating 618 and the sensor 620 is 4 inches.In addition, the beamwidth of parallel beam 616 is 3-5 inches.
If analyze extremely flat " reference " glass plate 602, can produce the such reference waveform of the waveform 1 shown in Fig. 6 D top so, and be stored in (not shown) in the computing machine with constant thickness and refractive index with detection system 600.Waveform 1 has shown the light and shade graded area that is caused in the presence of grating 618.Computing machine uses waveform 1 as reference or standard, and compares from the waveform of other glass plates 602.For example, glass plate 602 is placed between grating 618 and the sensor 620 if incite somebody to action relatively preferably, then generation is very similar to the waveform of waveform 2.If clip the top of waveform 1 and 2, make the area pellucida identical, and waveform 1 and 2 is subtracted each other, then generation is similar to the waveform of waveform 3.Waveform 3 has shown the spiking (blip) that the square wave edge is little, and they can be positive or negative on amplitude.The width of described spiking is less, because the waveform 1 relevant with reference glass plate 602 follows the waveform 3 relevant with good glass plate 602 roughly the same.Waveform 4 is integrations of spike shown in the waveform 3, and they only produce [ignoring the spike that negative-going edge produces along (negative edge)] by the forward edge (positive edge) of each waveform.In this case, the integration of the spike shown in the waveform 4 is less, because the quality of good glass plate 602 and reference glass plate 602 are much at one.Below, when the waveform of heterogeneous body glass plate 602 is compared with reference glass plate 602, the more details of the correlativity of relevant these spikes are described.
● detection system 600 can be used to measure the fine striped in the glass plate 602, and described striped can be the result that refractive index, thickness or the shape of glass plate 602 changes.This detection system can produce the information of direction and relative value aspect, can produce 1000 reading/inches on the surface of glass plate 602.
Referring to Fig. 7 A-7D, show 4 width of cloth figures relevant with the detection system 700 of the 7th kind of embodiment of the present invention.Though because of detection system 100,200 ... 600 the depth of field is bigger, the used aforementioned techniques of their scanning microcosmic flaws is showing well aspect the flaw of detection space, but, this big depth of field (for example 2 inches) mean these scanning techniques survey flaw and sensor apart from aspect ability not good enough.On the other hand, concerning LCD glass, still be the B side if there is a kind of detection system can determine whether to exist in the LCD glass defective and this defective to be located on or near its A side, that will be very useful.This ability is useful, because in the process that applies LCD glass, it is more responsive more than the defective on the opposite side to the defective on the side that glass plate becomes.Therefore, it is very important to determine which side is defective be positioned at because defective be positioned at the B side may be harmless and near or be positioned at the A side may be very harmful.The detection system 700 that describes below can be determined the position of defective on the z direction, and this direction is the depth direction with respect to glass plate.
Fig. 7 A illustrates the side view of detection system 700, this system adopts two and has different wavelength of laser line source 702a and 702b, and sensor 706 with two line scan arrays 712a and 712b, it can determine two defectives 706 and and 708 relative position, these two defectives are positioned at horizontal level identical on the glass plate 710 in this example.This figure shows that glass plate 710 moves up with constant rate of speed (V), and with sensor 704 fixed range (D) of being separated by.Two line scan arrays 712a and the 712b known distance (d) of being separated by.In addition, line scan arrays 712a and 712b have susceptibility to the light of different wave length separately.For example, following line scan arrays 712b is to the ruddiness 714a sensitivity of red laser instrument 702a emission, and top line scan arrays 712a is to the green glow 714b sensitivity of green laser 702b emission.Line scan arrays 712a above among the figure is become the angular illumination of α angle (A) with the normal with respect to sensor 704.And among the figure below line scan arrays 712b by following laser instrument 702a with angular illumination perpendicular to glass plate 710 and sensor 704.In this example, new pixel of CCD line scan sensor 704 per 5 microns generations is through the image of one or many scanning back recording defect 706 and 708.Fig. 7 A be illustrated in defective 706 and 708 stop simultaneously from the light 714a of laser instrument 702a 0 constantly, the snapshot of detection system 700.
Fig. 7 B be the light 714b that stops laser instrument 702 emission of the defective 708 on the A of glass plate 710 side T1 constantly, the snapshot of detection system 700.CCD line scan sensor 704 writes down the image of this defective 708 in the one or many picture element scan.
Fig. 7 C be the light 714b that stops laser instrument 702b emission of the defective 706 on the B of glass plate 710 side T2 constantly, the snapshot of detection system 700.CCD line scan sensor 704 writes down the image of this defective 706 in the one or many picture element scan.
Fig. 7 D has shown the comprehensive condition of all sensor as aforementioned scannings, and it has shown three images of defective 706 and 708.At first, it has shown the image that A side defective 708 and B side defective 706 superpose each other, because they are to be detected in the 0 identical moment.Secondly, it has shown the image of A side defective 708 when T1 passes through laser instrument 702b emitted light beams 714b constantly.The 3rd, it has shown the image of B side defective 706 when T2 passes through laser instrument 702b emitted light beams 714b constantly.
By to 0 constantly and the number of scanning lines that produces constantly of T1 count, then this number be multiply by 5 (be in this example be the Pixel Dimensions of unit with the micron), can calculate the distance that A side defective 708 moves.Similarly, by to 0 constantly and the number of scanning lines that produces constantly of T2 count, then this number be multiply by 5 (in this example be equally be the Pixel Dimensions of unit with the micron), can calculate the distance that B side defective 706 moves.Because B side defective 706 is longer than A side defective 708 by light beam 714b take time,, also can calculate longer distance so B side defective 706 will have the more number of scanning lines.
However, the distance of A side defective 708 and sensor 704 tangent that can multiply by angle A by the distance that A side defective 708 is moved calculates.Similarly, the distance of B side defective 706 and sensor 704 tangent that can multiply by angle A by the distance that B side defective 706 is moved calculates.Will be appreciated that, can carry out this class distance calculation being positioned at glass plate 710 lip-deep one or more defectives.
In a kind of optional embodiment, can monitor the flight time of defective with detection system 700, thereby determine the position of defective, the described flight time, to be this defective from the front of first laser instrument 702a moved to second laser instrument 702b intersects the used time.
The flight time of case I:A side defective 708 can be calculated as follows:
t
a＝(d+D×tan(A))/V
The flight time of case I:B side defective 706 can be calculated as follows:
t
b＝(d+(D+T(n
a/n
g))×tan(A))/V
In above-mentioned equation, n
aBe the refractive index of air, n
gIt is the refractive index of glass plate 710.
Case III: the flight time that is positioned at the defective (not shown) of glass plate 710 interior location P can be calculated as follows:
t
p＝(d+(D+P(n
a/n
g))×tan(A))/V
If ask position P with this equation, this equation becomes so:
P＝n
g×((t
p×V)-d-D×tan(A))/(n
a×tan(A))
In an example, the angle of supposing laser instrument 702b is 20 degree, the speed of glass plate 710 equals 3 inch per seconds, glass plate 710 is 2 inches to the distance of sensor 704, the refractive index of air is 1, and the distance between line scan arrays 712a and the 712b is 90 microns, and pixel size is 5 microns, and the refractive index of glass plate is 1.5, can calculate by three diverse locations in glass plate 710 so: the A side that (1) P equals 0; (2) the P glass inside that equals 300 microns; (3) the P B side that equals 700 microns.
In these three positions, the flight time is as follows:
● in the B side: flight time=0.243827 second
● at 300 microns places: the flight time=0.243827+0.00095=0.244777 second
● in the A side: the flight time=0.243827+0.00220=0.246027 second
Next in order to calculate the position of defective, need know the measuring accuracy of detection system 700.In this example, sensor 702 can be measured with 5 microns pixel.In order to reach this resolution, the speed (V) that sweep velocity need equal glass plate 710 is divided by 5 microns Pixel Dimensions, and the result is per second scanning 15240 times.Get the inverse of this numerical value, can obtain sweep interval, scan 0.0000656 second time spent in other words at every turn.For the glass plate 710 of one 700 micron thickness, this makes that the scan difference (scan difference) between the flight time that B side and A side produce is 33.As can be seen, the degree of accuracy of this measurement is enough to provide good positional information.
Should be pointed out that aforementioned inspection systems 100,200 ... any sensor that can adopt such as the KLI of Kodak 14441 sensors and the KLI of Kodak 4104 sensors in 700.Yet the particular type of sensor is unimportant.Importantly sensor has the line scanning element of a plurality of arrays, and these elements can help to calibrate and coordinate information from a plurality of camera visual field or a plurality of camera geometrical constructions.
Though explained plurality of embodiments of the present invention in the detailed description in front in conjunction with the accompanying drawings, but be to be understood that the present invention is not subject to the embodiment that is disclosed, and can have many modes of rearranging, improving and substitute under the spirit of the present invention that proposes and limit not deviating from following claim.
Claims (10)
1. method that is used for differentiating the flaw of transparent plate material said method comprising the steps of:
Use the laser instrument of energy emission of lasering beam;
Use first lens, the collimated laser beam that is used to receive laser beam and launches a part of passing through the transparent plate material;
Use line scan sensor, be used to receive the described collimated laser beam that passes through the part of transparent plate material, and be used for focusing on the flaw of transparent plate material, need not to place second lens in described line scan sensor front.
2. the method for claim 1 is characterized in that, the collimated laser beam of a described part by the transparent plate material makes up by the flaw and the character of transparent plate material.
3. the method for claim 1 is characterized in that, described line scan sensor has the depth of field of inch magnitude.
4. the method for claim 1, it is characterized in that, described line scan sensor output signal, this signal produces an image after the machine analysis as calculated, this image shown and the relevant Fresnel effect of collimated laser beam by the transparent plate material, thereby can detect the flaw in the transparent plate material.
5. the method for claim 1, it is characterized in that, described line scan sensor output signal, this signal produces an image after the machine analysis as calculated, this image shown and the relevant interference figure of collimated laser beam by the transparent plate material, thereby can detect the thickness or the change of refractive of transparent plate material.
6. detection system that is used for differentiating the flaw of transparent plate material, described detection system comprises:
The laser instrument of energy emission of lasering beam;
First lens, these lens can receive laser beam and launch the collimated laser beam of a part of passing through the transparent plate material;
Line scan sensor, this sensor can receive the collimated laser beam by the part of transparent plate material, and can further focus on the flaw of transparent plate material, need not to place second lens in described line scan sensor front.
7. detection system as claimed in claim 6 is characterized in that, the described collimated laser beam of a described part by the transparent plate material makes up by the flaw and the character of transparent plate material.
8. detection system as claimed in claim 6 is characterized in that described line scan sensor has the depth of field of inch magnitude.
9. detection system as claimed in claim 6, it is characterized in that, described line scan sensor output signal, this signal produces an image after the machine analysis as calculated, this image shown and the relevant Fresnel effect of collimated laser beam by the transparent plate material, thereby can detect the flaw in the transparent plate material.
10. detection system as claimed in claim 6, it is characterized in that, described line scan sensor output signal, this signal produces an image after the machine analysis as calculated, this image shown and the relevant interference figure of collimated laser beam by the transparent plate material, thereby can survey the thickness or the change of refractive of transparent plate material.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US66917105P | 2005-04-06 | 2005-04-06 | |
| US60/669,171 | 2005-04-06 | ||
| PCT/US2006/013012 WO2006108137A2 (en) | 2005-04-06 | 2006-04-06 | Glass inspection systems and methods for using same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101175986A CN101175986A (en) | 2008-05-07 |
| CN101175986B true CN101175986B (en) | 2010-10-13 |
Family
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200680016105XA Expired - Fee Related CN101175986B (en) | 2005-04-06 | 2006-04-06 | Glass inspection systems and methods for using same |
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| Country | Link |
|---|---|
| EP (1) | EP1866625A4 (en) |
| JP (1) | JP2008536127A (en) |
| KR (1) | KR20070121820A (en) |
| CN (1) | CN101175986B (en) |
| TW (1) | TWI360652B (en) |
| WO (1) | WO2006108137A2 (en) |
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| US5452079A (en) * | 1992-06-26 | 1995-09-19 | Central Glass Company, Limited | Method of and apparatus for detecting defect of transparent sheet as sheet glass |
| US6091492A (en) * | 1994-04-15 | 2000-07-18 | Micromeritics Instrument Corporation | Apparatus and method for determining the size distribution of particles by light scattering |
| CN1052066C (en) * | 1994-08-25 | 2000-05-03 | 欧文斯-布洛克威玻璃容器有限公司 | Optical inspection of container finish dimensional parameters |
| US6404489B1 (en) * | 2000-03-29 | 2002-06-11 | Corning Incorporated | Inclusion detection |
| WO2004017061A1 (en) * | 2002-08-17 | 2004-02-26 | Paraytec Ltd | Optical assembly and method for detection of light transmission |
Also Published As
| Publication number | Publication date |
|---|---|
| EP1866625A4 (en) | 2010-12-29 |
| JP2008536127A (en) | 2008-09-04 |
| WO2006108137A3 (en) | 2006-11-16 |
| WO2006108137A2 (en) | 2006-10-12 |
| CN101175986A (en) | 2008-05-07 |
| EP1866625A2 (en) | 2007-12-19 |
| TW200706859A (en) | 2007-02-16 |
| TWI360652B (en) | 2012-03-21 |
| KR20070121820A (en) | 2007-12-27 |
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