TWI360652B - Glass inspection systems and method for using same - Google Patents

Glass inspection systems and method for using same Download PDF

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Publication number
TWI360652B
TWI360652B TW95112334A TW95112334A TWI360652B TW I360652 B TWI360652 B TW I360652B TW 95112334 A TW95112334 A TW 95112334A TW 95112334 A TW95112334 A TW 95112334A TW I360652 B TWI360652 B TW I360652B
Authority
TW
Taiwan
Prior art keywords
transparent flat
flat material
transparent
sensor
inspection system
Prior art date
Application number
TW95112334A
Other languages
English (en)
Chinese (zh)
Other versions
TW200706859A (en
Inventor
R Zoeller Leon Iii
Original Assignee
Corning Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Corning Inc filed Critical Corning Inc
Publication of TW200706859A publication Critical patent/TW200706859A/zh
Application granted granted Critical
Publication of TWI360652B publication Critical patent/TWI360652B/zh

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N2021/1765—Method using an image detector and processing of image signal
    • G01N2021/177—Detector of the video camera type
    • G01N2021/1772—Array detector
    • G01N2021/1774—Line array detector
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
    • G01N2021/8965—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod using slant illumination, using internally reflected light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
    • G01N21/45—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/061—Sources
    • G01N2201/06113—Coherent sources; lasers
    • G01N2201/0612—Laser diodes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/063—Illuminating optical parts
    • G01N2201/0635—Structured illumination, e.g. with grating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/063—Illuminating optical parts
    • G01N2201/0638—Refractive parts
TW95112334A 2005-04-06 2006-04-06 Glass inspection systems and method for using same TWI360652B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US66917105P 2005-04-06 2005-04-06

Publications (2)

Publication Number Publication Date
TW200706859A TW200706859A (en) 2007-02-16
TWI360652B true TWI360652B (en) 2012-03-21

Family

ID=37074107

Family Applications (1)

Application Number Title Priority Date Filing Date
TW95112334A TWI360652B (en) 2005-04-06 2006-04-06 Glass inspection systems and method for using same

Country Status (6)

Country Link
EP (1) EP1866625A4 (ja)
JP (1) JP2008536127A (ja)
KR (1) KR20070121820A (ja)
CN (1) CN101175986B (ja)
TW (1) TWI360652B (ja)
WO (1) WO2006108137A2 (ja)

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CN101650307B (zh) * 2009-07-17 2011-02-09 富美科技有限公司 刮刀片表面检测系统
CN102081047B (zh) * 2009-11-27 2015-04-08 法国圣-戈班玻璃公司 用于对基板的缺陷进行区分的方法和系统
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CN102721692B (zh) * 2012-06-19 2015-11-25 深圳市华星光电技术有限公司 玻璃基板卡匣的检测装置
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WO2014027375A1 (ja) * 2012-08-13 2014-02-20 川崎重工業株式会社 板ガラスの検査ユニット及び製造設備
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KR20160102244A (ko) * 2013-12-23 2016-08-29 코닝 인코포레이티드 광학 검사를 위한 비-이미징 코히어런트 라인 스캐너 시스템 및 방법
CN103791835A (zh) * 2014-01-26 2014-05-14 扬州苏庆非标装备研发有限公司 条状光学玻璃截面轮廓及体积检测方法
CN103868478A (zh) * 2014-04-01 2014-06-18 四川虹视显示技术有限公司 透明平板平面度的快速检测方法及装置
CN103913466A (zh) * 2014-04-08 2014-07-09 上海华力微电子有限公司 晶圆缺陷的检测装置及其检测方法
KR101952617B1 (ko) * 2014-07-03 2019-02-28 (주)엘지하우시스 유리 기판의 부식 검출 방법
KR101942260B1 (ko) 2014-07-03 2019-01-28 (주)엘지하우시스 유리 기판의 부식 검출 방법
CN104297264A (zh) * 2014-11-03 2015-01-21 苏州精创光学仪器有限公司 玻璃表面缺陷在线检测系统
JP6668353B2 (ja) 2014-12-19 2020-03-18 メルク パテント ゲゼルシャフト ミット ベシュレンクテル ハフツングＭｅｒｃｋ Ｐａｔｅｎｔ Ｇｅｓｅｌｌｓｃｈａｆｔ ｍｉｔ ｂｅｓｃｈｒａｅｎｋｔｅｒ Ｈａｆｔｕｎｇ クロマトグラフ試料を光学的に検知する方法及び装置
JP2018528396A (ja) * 2015-06-19 2018-09-27 コーニング インコーポレイテッド 光学技術を使用して基板に欠陥があるかを検査し、かつ、かかる欠陥を三次元で位置決めするための方法および装置
CN105372253A (zh) * 2015-12-14 2016-03-02 陈艳 一种灯管瑕疵检测系统
CN107132244B (zh) * 2016-02-29 2020-01-07 鞍钢股份有限公司 一种钢中夹杂物定量评价方法
CN105675617B (zh) * 2016-04-06 2020-05-01 东旭科技集团有限公司 用于测量平板玻璃表面颗粒度的方法及设备
US10732126B2 (en) 2016-11-02 2020-08-04 Corning Incorporated Method and apparatus for inspecting defects on transparent substrate and method emitting incident light
CN110073203B (zh) 2016-11-02 2022-07-08 康宁股份有限公司 检查透明基材上的缺陷的方法和设备
CN106556573B (zh) * 2016-11-17 2018-01-12 仝宁瑶 一种用于测定玻璃折射率的实验装置
TWI622764B (zh) * 2017-01-11 2018-05-01 由田新技股份有限公司 用於表面異物檢測的自動光學檢測系統
WO2018158824A1 (ja) * 2017-02-28 2018-09-07 東洋ガラス株式会社 容器の検査装置及び容器の検査方法
JP6285597B1 (ja) * 2017-06-05 2018-02-28 大塚電子株式会社 光学測定装置および光学測定方法
CN107345918B (zh) * 2017-08-16 2023-05-23 广西大学 一种板材质量检测装置及方法
CN107515222A (zh) * 2017-09-20 2017-12-26 哈尔滨工程大学 一种冰的微观结构观测装置
CN111226110A (zh) * 2018-08-10 2020-06-02 合刃科技（深圳）有限公司 检测方法和系统
CN109187550A (zh) * 2018-08-15 2019-01-11 苏州富鑫林光电科技有限公司 一种基于光栅成像的缺陷检测成像方法
CN109827974B (zh) * 2018-08-30 2022-03-08 东莞市微科光电科技有限公司 一种树脂滤光片膜裂检测设备及检测方法
CN110044931B (zh) * 2019-04-23 2021-03-26 华中科技大学 一种曲面玻璃表面和内部缺陷的检测装置
CN110095590A (zh) * 2019-04-23 2019-08-06 深圳市华星光电半导体显示技术有限公司 玻璃基板残材侦测方法及装置
CN110031481B (zh) * 2019-05-05 2021-11-12 苏州天准科技股份有限公司 一种基于偏振的方波结构光照明实现方法
CN112147710B (zh) * 2019-06-26 2022-02-18 上海微电子装备（集团）股份有限公司 一种湿法光胶装置的检测方法及检测装置
CN114796730B (zh) * 2022-03-29 2024-02-27 深圳市好克医疗仪器股份有限公司 气泡检测装置、方法、设备及计算机可读存储介质
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Also Published As

Publication number Publication date
EP1866625A4 (en) 2010-12-29
TW200706859A (en) 2007-02-16
KR20070121820A (ko) 2007-12-27
WO2006108137A3 (en) 2006-11-16
WO2006108137A2 (en) 2006-10-12
CN101175986A (zh) 2008-05-07
JP2008536127A (ja) 2008-09-04
CN101175986B (zh) 2010-10-13
EP1866625A2 (en) 2007-12-19

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