CN102721692B - 玻璃基板卡匣的检测装置 - Google Patents
玻璃基板卡匣的检测装置 Download PDFInfo
- Publication number
- CN102721692B CN102721692B CN201210203237.0A CN201210203237A CN102721692B CN 102721692 B CN102721692 B CN 102721692B CN 201210203237 A CN201210203237 A CN 201210203237A CN 102721692 B CN102721692 B CN 102721692B
- Authority
- CN
- China
- Prior art keywords
- glass substrate
- unit
- pick
- light
- supporting surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000011521 glass Substances 0.000 title claims abstract description 65
- 239000000758 substrate Substances 0.000 title claims abstract description 65
- 238000001514 detection method Methods 0.000 claims abstract description 27
- 230000002159 abnormal effect Effects 0.000 claims abstract description 6
- 238000009826 distribution Methods 0.000 claims abstract description 4
- 238000007689 inspection Methods 0.000 claims description 3
- 238000000034 method Methods 0.000 abstract description 10
- 238000012360 testing method Methods 0.000 abstract description 6
- 238000004519 manufacturing process Methods 0.000 description 6
- 238000003860 storage Methods 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000011514 reflex Effects 0.000 description 1
- 238000004148 unit process Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
- B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
- B65D85/48—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure for glass sheets
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
- H01L21/67265—Position monitoring, e.g. misposition detection or presence detection of substrates stored in a container, a magazine, a carrier, a boat or the like
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Biochemistry (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Chemical & Material Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Health & Medical Sciences (AREA)
- Mechanical Engineering (AREA)
- Analytical Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Controlling Sheets Or Webs (AREA)
Abstract
Description
Claims (4)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201210203237.0A CN102721692B (zh) | 2012-06-19 | 2012-06-19 | 玻璃基板卡匣的检测装置 |
US13/575,925 US20130335743A1 (en) | 2012-06-19 | 2012-06-21 | Inspection Device for Glass Substrate Cassette |
PCT/CN2012/077321 WO2013189066A1 (zh) | 2012-06-19 | 2012-06-21 | 玻璃基板卡匣的检测装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201210203237.0A CN102721692B (zh) | 2012-06-19 | 2012-06-19 | 玻璃基板卡匣的检测装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN102721692A CN102721692A (zh) | 2012-10-10 |
CN102721692B true CN102721692B (zh) | 2015-11-25 |
Family
ID=46947515
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201210203237.0A Expired - Fee Related CN102721692B (zh) | 2012-06-19 | 2012-06-19 | 玻璃基板卡匣的检测装置 |
Country Status (2)
Country | Link |
---|---|
CN (1) | CN102721692B (zh) |
WO (1) | WO2013189066A1 (zh) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103412347B (zh) * | 2013-07-23 | 2016-02-24 | 合肥京东方光电科技有限公司 | 卡匣和卡匣的检测方法 |
CN104807401B (zh) | 2015-03-04 | 2017-06-23 | 京东方科技集团股份有限公司 | 基板卡匣检测装置 |
CN107345913A (zh) * | 2016-05-04 | 2017-11-14 | 东莞大和化成汽车零配件有限公司 | 一种塑胶制品检测合格装置 |
CN106597709A (zh) * | 2017-01-06 | 2017-04-26 | 武汉华星光电技术有限公司 | 基板检测装置、显示面板加工系统及显示面板加工方法 |
CN110906980B (zh) * | 2019-11-14 | 2021-10-08 | 深圳市华星光电半导体显示技术有限公司 | 一种检测系统和检测方法 |
CN112945084B (zh) * | 2019-12-10 | 2023-01-24 | 合肥欣奕华智能机器股份有限公司 | 线扫描传感器、线扫描检测系统及线扫描检测方法 |
CN112362004B (zh) * | 2020-11-05 | 2022-12-23 | 惠科股份有限公司 | 卡匣的检测装置及检测方法,基板加工生产线 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN2707677Y (zh) * | 2004-06-07 | 2005-07-06 | 东捷科技股份有限公司 | 玻璃基板检知装置 |
CN1840445A (zh) * | 2005-04-01 | 2006-10-04 | 大福股份有限公司 | 卡匣保管及被处理板的处理设备 |
WO2006108137A2 (en) * | 2005-04-06 | 2006-10-12 | Corning Incorporated | Glass inspection systems and methods for using same |
CN101131366A (zh) * | 2006-08-22 | 2008-02-27 | 东京毅力科创株式会社 | 基板检测机构以及基板收纳容器 |
CN102393576A (zh) * | 2011-08-03 | 2012-03-28 | 深圳市华星光电技术有限公司 | 液晶显示器中玻璃基板的目视检查机及检查方法 |
CN102636460A (zh) * | 2012-04-13 | 2012-08-15 | 安徽鑫昊等离子显示器件有限公司 | 一种等离子显示器用玻璃基板检测系统及方法 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10116879A (ja) * | 1996-10-11 | 1998-05-06 | Dainippon Screen Mfg Co Ltd | 基板検出装置 |
CN2777491Y (zh) * | 2005-02-05 | 2006-05-03 | 欣禾国际企业有限公司 | 晶圆片或液晶面板卡匣的存取侦测装置 |
WO2007040379A1 (en) * | 2005-10-06 | 2007-04-12 | Jinoid Co., Ltd. | Apparatus for sensing glass substrates in a cassette |
JP4285708B2 (ja) * | 2008-12-19 | 2009-06-24 | 大日本スクリーン製造株式会社 | 基板検出装置 |
-
2012
- 2012-06-19 CN CN201210203237.0A patent/CN102721692B/zh not_active Expired - Fee Related
- 2012-06-21 WO PCT/CN2012/077321 patent/WO2013189066A1/zh active Application Filing
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN2707677Y (zh) * | 2004-06-07 | 2005-07-06 | 东捷科技股份有限公司 | 玻璃基板检知装置 |
CN1840445A (zh) * | 2005-04-01 | 2006-10-04 | 大福股份有限公司 | 卡匣保管及被处理板的处理设备 |
WO2006108137A2 (en) * | 2005-04-06 | 2006-10-12 | Corning Incorporated | Glass inspection systems and methods for using same |
CN101131366A (zh) * | 2006-08-22 | 2008-02-27 | 东京毅力科创株式会社 | 基板检测机构以及基板收纳容器 |
CN102393576A (zh) * | 2011-08-03 | 2012-03-28 | 深圳市华星光电技术有限公司 | 液晶显示器中玻璃基板的目视检查机及检查方法 |
CN102636460A (zh) * | 2012-04-13 | 2012-08-15 | 安徽鑫昊等离子显示器件有限公司 | 一种等离子显示器用玻璃基板检测系统及方法 |
Also Published As
Publication number | Publication date |
---|---|
CN102721692A (zh) | 2012-10-10 |
WO2013189066A1 (zh) | 2013-12-27 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN102721692B (zh) | 玻璃基板卡匣的检测装置 | |
CN102636498B (zh) | 玻璃基板的检测装置及检测方法 | |
CN103101643B (zh) | 连接器用ccd自动化检测设备 | |
CN104296938B (zh) | 一种阀门管件类气密性及机器视觉综合检查机 | |
CN107300791B (zh) | 一种Flicker值和TP值联合测试装置及方法 | |
CN104637427B (zh) | 检测治具 | |
CN101315402B (zh) | 具循序排列进料区、测试区及出料区的多测试座测试机台 | |
US20110232059A1 (en) | Method and device for fully automatically selecting and packing photovoltaic modules | |
US10386181B2 (en) | Cartridge and detection method for the same | |
AU2018213979A1 (en) | Device and method for detecting a photovoltaic module | |
DK2117969T3 (da) | Lagerreol | |
CN203938074U (zh) | 一种轮胎传输移载装置 | |
CN205810338U (zh) | 检测装置及检测系统 | |
CN205300529U (zh) | 平面度检测装置 | |
CN205300502U (zh) | 产品检测装置 | |
CN107843604B (zh) | 一种用于检测双层基板边缘缺陷的装置及检测方法 | |
CN116213297A (zh) | 汽车氛围灯检测装置和检测方法 | |
CN201037859Y (zh) | 具循序排列进料区、测试区及出料区的多测试座测试机台 | |
CN207861422U (zh) | 储料装置和测试设备 | |
CN215623175U (zh) | 视觉检测及称重一体机 | |
CN214333662U (zh) | 一种外观尺寸检测机 | |
KR101423540B1 (ko) | 전자 부품 검사 지그 교체 장치 및 방법 | |
CN205599539U (zh) | Ic外观检验装置 | |
CN204883957U (zh) | 带防倾挡板的自动售卖机 | |
CN106218200A (zh) | 一种带扫码功能的撕膜机构 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: Detecting device for glass substrate cassette Effective date of registration: 20190426 Granted publication date: 20151125 Pledgee: Bank of Beijing Limited by Share Ltd. Shenzhen branch Pledgor: SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY Co.,Ltd. Registration number: 2019440020032 |
|
PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20201016 Granted publication date: 20151125 Pledgee: Bank of Beijing Limited by Share Ltd. Shenzhen branch Pledgor: Shenzhen China Star Optoelectronics Technology Co.,Ltd. Registration number: 2019440020032 |
|
PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20151125 |
|
CF01 | Termination of patent right due to non-payment of annual fee |