KR20070121820A - 유리 검사 시스템 및 이를 이용한 유리 검사 방법 - Google Patents

유리 검사 시스템 및 이를 이용한 유리 검사 방법 Download PDF

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Publication number
KR20070121820A
KR20070121820A KR1020077025683A KR20077025683A KR20070121820A KR 20070121820 A KR20070121820 A KR 20070121820A KR 1020077025683 A KR1020077025683 A KR 1020077025683A KR 20077025683 A KR20077025683 A KR 20077025683A KR 20070121820 A KR20070121820 A KR 20070121820A
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KR
South Korea
Prior art keywords
transparent
flat material
light beam
sensor
incomplete
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KR1020077025683A
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English (en)
Korean (ko)
Inventor
레온 알. 3세 조엘러
Original Assignee
코닝 인코포레이티드
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Publication of KR20070121820A publication Critical patent/KR20070121820A/ko

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
    • G01N21/45—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N2021/1765—Method using an image detector and processing of image signal
    • G01N2021/177—Detector of the video camera type
    • G01N2021/1772—Array detector
    • G01N2021/1774—Line array detector
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
    • G01N2021/8965—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod using slant illumination, using internally reflected light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/061—Sources
    • G01N2201/06113—Coherent sources; lasers
    • G01N2201/0612—Laser diodes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/063—Illuminating optical parts
    • G01N2201/0635—Structured illumination, e.g. with grating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/063—Illuminating optical parts
    • G01N2201/0638—Refractive parts
KR1020077025683A 2005-04-06 2006-04-06 유리 검사 시스템 및 이를 이용한 유리 검사 방법 KR20070121820A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US66917105P 2005-04-06 2005-04-06
US60/669,171 2005-04-06

Publications (1)

Publication Number Publication Date
KR20070121820A true KR20070121820A (ko) 2007-12-27

Family

ID=37074107

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020077025683A KR20070121820A (ko) 2005-04-06 2006-04-06 유리 검사 시스템 및 이를 이용한 유리 검사 방법

Country Status (6)

Country Link
EP (1) EP1866625A4 (ja)
JP (1) JP2008536127A (ja)
KR (1) KR20070121820A (ja)
CN (1) CN101175986B (ja)
TW (1) TWI360652B (ja)
WO (1) WO2006108137A2 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101292570B1 (ko) * 2008-12-31 2013-08-12 엘지디스플레이 주식회사 액정표시장치의 변형 검사시스템
US9546967B2 (en) 2012-02-07 2017-01-17 Schott Ag Apparatus and method for identifying defects within the volume of a transparent sheet and use of the apparatus

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JP5581563B2 (ja) * 2007-03-08 2014-09-03 株式会社日立製作所 照明装置並びにそれを用いた欠陥検査装置及びその方法並びに高さ計測装置及びその方法
JP2010048745A (ja) * 2008-08-25 2010-03-04 Asahi Glass Co Ltd 欠陥検査システムおよび欠陥検査方法
EP2253949A1 (de) * 2009-05-22 2010-11-24 Dr. Schenk GmbH Industriemesstechnik Vorrichtung und Verfahren zum Detektieren eines optisch ablenkenden und/oder polarisationsdrehenden Fehlers
EP2261633A1 (en) * 2009-06-10 2010-12-15 Becton Dickinson France Supporting device for a transparent article and method for putting said article under compression
CN101650307B (zh) * 2009-07-17 2011-02-09 富美科技有限公司 刮刀片表面检测系统
CN102081047B (zh) * 2009-11-27 2015-04-08 法国圣-戈班玻璃公司 用于对基板的缺陷进行区分的方法和系统
CN101988908A (zh) * 2009-07-31 2011-03-23 法国圣-戈班玻璃公司 用于对基板的缺陷进行区分的方法和系统
BE1019378A3 (fr) * 2010-06-17 2012-06-05 Agc Glass Europe Analyse des marques de trempe.
KR20130126638A (ko) * 2010-12-15 2013-11-20 아사히 가라스 가부시키가이샤 유리판, 유리판의 검사 방법 및 유리판의 제조 방법
CN102621149B (zh) * 2012-03-21 2015-07-22 深圳市华星光电技术有限公司 基板的检测装置及方法
CN102608132B (zh) * 2012-04-09 2014-06-11 昆山胜泽光电科技有限公司 多类型玻璃瑕疵检测装置及检测方法
CN102645435A (zh) * 2012-04-19 2012-08-22 深圳市华星光电技术有限公司 基板的检测方法和装置
CN102721692B (zh) * 2012-06-19 2015-11-25 深圳市华星光电技术有限公司 玻璃基板卡匣的检测装置
CN102778460A (zh) * 2012-07-31 2012-11-14 法国圣戈班玻璃公司 一种检测基质内缺陷的方法
WO2014027375A1 (ja) * 2012-08-13 2014-02-20 川崎重工業株式会社 板ガラスの検査ユニット及び製造設備
EP2725348A1 (en) * 2012-10-29 2014-04-30 Scientific Visual SARL Optical quality control device
CN103886573B (zh) * 2012-12-20 2018-10-12 联想(北京)有限公司 物体检测方法和物体检测装置
DE102013105693A1 (de) 2013-06-03 2013-10-31 Viprotron Gmbh Verfahren und Vorrichtung zur optischen Fehlerinspektion
CN104237137B (zh) * 2013-06-07 2016-12-28 昆山胜泽光电科技有限公司 测量玻璃不同角度颜色、亮度和反射率光谱的装置
DE102013107215B3 (de) 2013-07-09 2014-10-09 Heraeus Quarzglas Gmbh & Co. Kg Verfahren zur Herstellung eines Spiegelsubstrat-Rohlings aus Titan-dotiertem Kieselglas für die EUV-Lithographie, sowie System zur Positionsbestimmung von Defekten in einem Rohling
KR20160102244A (ko) * 2013-12-23 2016-08-29 코닝 인코포레이티드 광학 검사를 위한 비-이미징 코히어런트 라인 스캐너 시스템 및 방법
CN103791835A (zh) * 2014-01-26 2014-05-14 扬州苏庆非标装备研发有限公司 条状光学玻璃截面轮廓及体积检测方法
CN103868478A (zh) * 2014-04-01 2014-06-18 四川虹视显示技术有限公司 透明平板平面度的快速检测方法及装置
CN103913466A (zh) * 2014-04-08 2014-07-09 上海华力微电子有限公司 晶圆缺陷的检测装置及其检测方法
KR101952617B1 (ko) * 2014-07-03 2019-02-28 (주)엘지하우시스 유리 기판의 부식 검출 방법
KR101942260B1 (ko) 2014-07-03 2019-01-28 (주)엘지하우시스 유리 기판의 부식 검출 방법
CN104297264A (zh) * 2014-11-03 2015-01-21 苏州精创光学仪器有限公司 玻璃表面缺陷在线检测系统
JP6668353B2 (ja) 2014-12-19 2020-03-18 メルク パテント ゲゼルシャフト ミット ベシュレンクテル ハフツングＭｅｒｃｋ Ｐａｔｅｎｔ Ｇｅｓｅｌｌｓｃｈａｆｔ ｍｉｔ ｂｅｓｃｈｒａｅｎｋｔｅｒ Ｈａｆｔｕｎｇ クロマトグラフ試料を光学的に検知する方法及び装置
JP2018528396A (ja) * 2015-06-19 2018-09-27 コーニング インコーポレイテッド 光学技術を使用して基板に欠陥があるかを検査し、かつ、かかる欠陥を三次元で位置決めするための方法および装置
CN105372253A (zh) * 2015-12-14 2016-03-02 陈艳 一种灯管瑕疵检测系统
CN107132244B (zh) * 2016-02-29 2020-01-07 鞍钢股份有限公司 一种钢中夹杂物定量评价方法
CN105675617B (zh) * 2016-04-06 2020-05-01 东旭科技集团有限公司 用于测量平板玻璃表面颗粒度的方法及设备
US10732126B2 (en) 2016-11-02 2020-08-04 Corning Incorporated Method and apparatus for inspecting defects on transparent substrate and method emitting incident light
CN110073203B (zh) 2016-11-02 2022-07-08 康宁股份有限公司 检查透明基材上的缺陷的方法和设备
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CN110031481B (zh) * 2019-05-05 2021-11-12 苏州天准科技股份有限公司 一种基于偏振的方波结构光照明实现方法
CN112147710B (zh) * 2019-06-26 2022-02-18 上海微电子装备（集团）股份有限公司 一种湿法光胶装置的检测方法及检测装置
CN114796730B (zh) * 2022-03-29 2024-02-27 深圳市好克医疗仪器股份有限公司 气泡检测装置、方法、设备及计算机可读存储介质
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US8786851B2 (en) 2008-12-31 2014-07-22 Lg Display Co., Ltd. System for testing distortion of liquid crystal display device
US9546967B2 (en) 2012-02-07 2017-01-17 Schott Ag Apparatus and method for identifying defects within the volume of a transparent sheet and use of the apparatus

Also Published As

Publication number Publication date
EP1866625A4 (en) 2010-12-29
TWI360652B (en) 2012-03-21
TW200706859A (en) 2007-02-16
WO2006108137A3 (en) 2006-11-16
WO2006108137A2 (en) 2006-10-12
CN101175986A (zh) 2008-05-07
JP2008536127A (ja) 2008-09-04
CN101175986B (zh) 2010-10-13
EP1866625A2 (en) 2007-12-19

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