EP1866625A4 - GLASS TESTING SYSTEM AND METHOD FOR ITS USE - Google Patents

GLASS TESTING SYSTEM AND METHOD FOR ITS USE

Info

Publication number
EP1866625A4
EP1866625A4 EP06749504A EP06749504A EP1866625A4 EP 1866625 A4 EP1866625 A4 EP 1866625A4 EP 06749504 A EP06749504 A EP 06749504A EP 06749504 A EP06749504 A EP 06749504A EP 1866625 A4 EP1866625 A4 EP 1866625A4
Authority
EP
European Patent Office
Prior art keywords
methods
same
inspection systems
glass inspection
glass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP06749504A
Other languages
German (de)
English (en)
French (fr)
Other versions
EP1866625A2 (en
Inventor
Leon R Zoeller Iii
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Corning Inc
Original Assignee
Corning Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Corning Inc filed Critical Corning Inc
Publication of EP1866625A2 publication Critical patent/EP1866625A2/en
Publication of EP1866625A4 publication Critical patent/EP1866625A4/en
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
    • G01N21/45—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N2021/1765—Method using an image detector and processing of image signal
    • G01N2021/177—Detector of the video camera type
    • G01N2021/1772—Array detector
    • G01N2021/1774—Line array detector
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
    • G01N2021/8965—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod using slant illumination, using internally reflected light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/061—Sources
    • G01N2201/06113—Coherent sources; lasers
    • G01N2201/0612—Laser diodes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/063—Illuminating optical parts
    • G01N2201/0635—Structured illumination, e.g. with grating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/063—Illuminating optical parts
    • G01N2201/0638—Refractive parts
EP06749504A 2005-04-06 2006-04-06 GLASS TESTING SYSTEM AND METHOD FOR ITS USE Withdrawn EP1866625A4 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US66917105P 2005-04-06 2005-04-06
PCT/US2006/013012 WO2006108137A2 (en) 2005-04-06 2006-04-06 Glass inspection systems and methods for using same

Publications (2)

Publication Number Publication Date
EP1866625A2 EP1866625A2 (en) 2007-12-19
EP1866625A4 true EP1866625A4 (en) 2010-12-29

Family

ID=37074107

Family Applications (1)

Application Number Title Priority Date Filing Date
EP06749504A Withdrawn EP1866625A4 (en) 2005-04-06 2006-04-06 GLASS TESTING SYSTEM AND METHOD FOR ITS USE

Country Status (6)

Country Link
EP (1) EP1866625A4 (ja)
JP (1) JP2008536127A (ja)
KR (1) KR20070121820A (ja)
CN (1) CN101175986B (ja)
TW (1) TWI360652B (ja)
WO (1) WO2006108137A2 (ja)

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JP5581563B2 (ja) * 2007-03-08 2014-09-03 株式会社日立製作所 照明装置並びにそれを用いた欠陥検査装置及びその方法並びに高さ計測装置及びその方法
JP2010048745A (ja) * 2008-08-25 2010-03-04 Asahi Glass Co Ltd 欠陥検査システムおよび欠陥検査方法
KR101292570B1 (ko) 2008-12-31 2013-08-12 엘지디스플레이 주식회사 액정표시장치의 변형 검사시스템
EP2253949A1 (de) * 2009-05-22 2010-11-24 Dr. Schenk GmbH Industriemesstechnik Vorrichtung und Verfahren zum Detektieren eines optisch ablenkenden und/oder polarisationsdrehenden Fehlers
EP2261633A1 (en) * 2009-06-10 2010-12-15 Becton Dickinson France Supporting device for a transparent article and method for putting said article under compression
CN101650307B (zh) * 2009-07-17 2011-02-09 富美科技有限公司 刮刀片表面检测系统
CN102081047B (zh) * 2009-11-27 2015-04-08 法国圣-戈班玻璃公司 用于对基板的缺陷进行区分的方法和系统
CN101988908A (zh) * 2009-07-31 2011-03-23 法国圣-戈班玻璃公司 用于对基板的缺陷进行区分的方法和系统
BE1019378A3 (fr) * 2010-06-17 2012-06-05 Agc Glass Europe Analyse des marques de trempe.
KR20130126638A (ko) * 2010-12-15 2013-11-20 아사히 가라스 가부시키가이샤 유리판, 유리판의 검사 방법 및 유리판의 제조 방법
DE102012002174B4 (de) 2012-02-07 2014-05-15 Schott Ag Vorrichtung und Verfahren zum Erkennen von Fehlstellen innerhalb des Volumens einer transparenten Scheibe und Verwendung der Vorrichtung
CN102621149B (zh) * 2012-03-21 2015-07-22 深圳市华星光电技术有限公司 基板的检测装置及方法
CN102608132B (zh) * 2012-04-09 2014-06-11 昆山胜泽光电科技有限公司 多类型玻璃瑕疵检测装置及检测方法
CN102645435A (zh) * 2012-04-19 2012-08-22 深圳市华星光电技术有限公司 基板的检测方法和装置
CN102721692B (zh) * 2012-06-19 2015-11-25 深圳市华星光电技术有限公司 玻璃基板卡匣的检测装置
CN102778460A (zh) * 2012-07-31 2012-11-14 法国圣戈班玻璃公司 一种检测基质内缺陷的方法
WO2014027375A1 (ja) * 2012-08-13 2014-02-20 川崎重工業株式会社 板ガラスの検査ユニット及び製造設備
EP2725348A1 (en) * 2012-10-29 2014-04-30 Scientific Visual SARL Optical quality control device
CN103886573B (zh) * 2012-12-20 2018-10-12 联想(北京)有限公司 物体检测方法和物体检测装置
DE102013105693A1 (de) 2013-06-03 2013-10-31 Viprotron Gmbh Verfahren und Vorrichtung zur optischen Fehlerinspektion
CN104237137B (zh) * 2013-06-07 2016-12-28 昆山胜泽光电科技有限公司 测量玻璃不同角度颜色、亮度和反射率光谱的装置
DE102013107215B3 (de) 2013-07-09 2014-10-09 Heraeus Quarzglas Gmbh & Co. Kg Verfahren zur Herstellung eines Spiegelsubstrat-Rohlings aus Titan-dotiertem Kieselglas für die EUV-Lithographie, sowie System zur Positionsbestimmung von Defekten in einem Rohling
KR20160102244A (ko) * 2013-12-23 2016-08-29 코닝 인코포레이티드 광학 검사를 위한 비-이미징 코히어런트 라인 스캐너 시스템 및 방법
CN103791835A (zh) * 2014-01-26 2014-05-14 扬州苏庆非标装备研发有限公司 条状光学玻璃截面轮廓及体积检测方法
CN103868478A (zh) * 2014-04-01 2014-06-18 四川虹视显示技术有限公司 透明平板平面度的快速检测方法及装置
CN103913466A (zh) * 2014-04-08 2014-07-09 上海华力微电子有限公司 晶圆缺陷的检测装置及其检测方法
KR101952617B1 (ko) * 2014-07-03 2019-02-28 (주)엘지하우시스 유리 기판의 부식 검출 방법
KR101942260B1 (ko) 2014-07-03 2019-01-28 (주)엘지하우시스 유리 기판의 부식 검출 방법
CN104297264A (zh) * 2014-11-03 2015-01-21 苏州精创光学仪器有限公司 玻璃表面缺陷在线检测系统
JP6668353B2 (ja) 2014-12-19 2020-03-18 メルク パテント ゲゼルシャフト ミット ベシュレンクテル ハフツングＭｅｒｃｋ Ｐａｔｅｎｔ Ｇｅｓｅｌｌｓｃｈａｆｔ ｍｉｔ ｂｅｓｃｈｒａｅｎｋｔｅｒ Ｈａｆｔｕｎｇ クロマトグラフ試料を光学的に検知する方法及び装置
JP2018528396A (ja) * 2015-06-19 2018-09-27 コーニング インコーポレイテッド 光学技術を使用して基板に欠陥があるかを検査し、かつ、かかる欠陥を三次元で位置決めするための方法および装置
CN105372253A (zh) * 2015-12-14 2016-03-02 陈艳 一种灯管瑕疵检测系统
CN107132244B (zh) * 2016-02-29 2020-01-07 鞍钢股份有限公司 一种钢中夹杂物定量评价方法
CN105675617B (zh) * 2016-04-06 2020-05-01 东旭科技集团有限公司 用于测量平板玻璃表面颗粒度的方法及设备
US10732126B2 (en) 2016-11-02 2020-08-04 Corning Incorporated Method and apparatus for inspecting defects on transparent substrate and method emitting incident light
CN110073203B (zh) 2016-11-02 2022-07-08 康宁股份有限公司 检查透明基材上的缺陷的方法和设备
CN106556573B (zh) * 2016-11-17 2018-01-12 仝宁瑶 一种用于测定玻璃折射率的实验装置
TWI622764B (zh) * 2017-01-11 2018-05-01 由田新技股份有限公司 用於表面異物檢測的自動光學檢測系統
WO2018158824A1 (ja) * 2017-02-28 2018-09-07 東洋ガラス株式会社 容器の検査装置及び容器の検査方法
JP6285597B1 (ja) * 2017-06-05 2018-02-28 大塚電子株式会社 光学測定装置および光学測定方法
CN107345918B (zh) * 2017-08-16 2023-05-23 广西大学 一种板材质量检测装置及方法
CN107515222A (zh) * 2017-09-20 2017-12-26 哈尔滨工程大学 一种冰的微观结构观测装置
CN111226110A (zh) * 2018-08-10 2020-06-02 合刃科技（深圳）有限公司 检测方法和系统
CN109187550A (zh) * 2018-08-15 2019-01-11 苏州富鑫林光电科技有限公司 一种基于光栅成像的缺陷检测成像方法
CN109827974B (zh) * 2018-08-30 2022-03-08 东莞市微科光电科技有限公司 一种树脂滤光片膜裂检测设备及检测方法
CN110044931B (zh) * 2019-04-23 2021-03-26 华中科技大学 一种曲面玻璃表面和内部缺陷的检测装置
CN110095590A (zh) * 2019-04-23 2019-08-06 深圳市华星光电半导体显示技术有限公司 玻璃基板残材侦测方法及装置
CN110031481B (zh) * 2019-05-05 2021-11-12 苏州天准科技股份有限公司 一种基于偏振的方波结构光照明实现方法
CN112147710B (zh) * 2019-06-26 2022-02-18 上海微电子装备（集团）股份有限公司 一种湿法光胶装置的检测方法及检测装置
CN114796730B (zh) * 2022-03-29 2024-02-27 深圳市好克医疗仪器股份有限公司 气泡检测装置、方法、设备及计算机可读存储介质
CN115338168A (zh) * 2022-07-28 2022-11-15 宜昌中威清洗机有限公司 一种曲轴清洗系统
CN116934752B (zh) * 2023-09-18 2023-12-08 山东国泰民安玻璃科技有限公司 一种基于人工智能的玻璃检测方法及系统

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JPH04178545A (ja) * 1990-11-14 1992-06-25 Fuji Photo Film Co Ltd 透明帯状体の検査方法及び装置
JPH0579994A (ja) * 1991-09-21 1993-03-30 Kowa Co 透明体欠陥検査装置
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US4340304A (en) * 1978-08-11 1982-07-20 Rockwell International Corporation Interferometric method and system
JPS57120804A (en) * 1981-01-20 1982-07-28 Hitachi Metals Ltd Inspecting method of surface defect
SU1260773A1 (ru) * 1984-11-29 1986-09-30 Специальное Конструкторско-Технологическое Бюро Института Радиофизики И Электроники Ан Усср Устройство дл обнаружени дефектов в прозрачных тонкопленочных издели х
JPH04178545A (ja) * 1990-11-14 1992-06-25 Fuji Photo Film Co Ltd 透明帯状体の検査方法及び装置
JPH0579994A (ja) * 1991-09-21 1993-03-30 Kowa Co 透明体欠陥検査装置
US6040900A (en) * 1996-07-01 2000-03-21 Cybernet Systems Corporation Compact fiber-optic electronic laser speckle pattern shearography
JP2001041719A (ja) * 1999-07-27 2001-02-16 Canon Inc 透明材の検査装置及び検査方法並びに記憶媒体
US20030210402A1 (en) * 2002-05-07 2003-11-13 Applied Materials Israel Ltd. Apparatus and method for dual spot inspection of repetitive patterns
WO2004017099A2 (en) * 2002-08-19 2004-02-26 Green Vision Systems Ltd. Electro-optically inspecting a longitudinally moving rod of material

Also Published As

Publication number Publication date
TWI360652B (en) 2012-03-21
TW200706859A (en) 2007-02-16
KR20070121820A (ko) 2007-12-27
WO2006108137A3 (en) 2006-11-16
WO2006108137A2 (en) 2006-10-12
CN101175986A (zh) 2008-05-07
JP2008536127A (ja) 2008-09-04
CN101175986B (zh) 2010-10-13
EP1866625A2 (en) 2007-12-19

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