CN100483693C - 半导体封装及其制造方法 - Google Patents
半导体封装及其制造方法 Download PDFInfo
- Publication number
- CN100483693C CN100483693C CNB2005100802253A CN200510080225A CN100483693C CN 100483693 C CN100483693 C CN 100483693C CN B2005100802253 A CNB2005100802253 A CN B2005100802253A CN 200510080225 A CN200510080225 A CN 200510080225A CN 100483693 C CN100483693 C CN 100483693C
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- CN
- China
- Prior art keywords
- substrate
- semiconductor
- dielectric film
- hole
- pin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/80—Constructional details of image sensors
- H10F39/804—Containers or encapsulations
-
- H10W76/10—
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F77/00—Constructional details of devices covered by this subclass
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F77/00—Constructional details of devices covered by this subclass
- H10F77/50—Encapsulations or containers
-
- H10W20/023—
-
- H10W20/0234—
-
- H10W20/0242—
-
- H10W72/0198—
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Light Receiving Elements (AREA)
- Solid State Image Pick-Up Elements (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004194663A JP4271625B2 (ja) | 2004-06-30 | 2004-06-30 | 半導体パッケージ及びその製造方法 |
| JP2004194663 | 2004-06-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1716579A CN1716579A (zh) | 2006-01-04 |
| CN100483693C true CN100483693C (zh) | 2009-04-29 |
Family
ID=35134698
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2005100802253A Expired - Fee Related CN100483693C (zh) | 2004-06-30 | 2005-06-28 | 半导体封装及其制造方法 |
Country Status (6)
| Country | Link |
|---|---|
| US (2) | US7274101B2 (enExample) |
| EP (1) | EP1612867B1 (enExample) |
| JP (1) | JP4271625B2 (enExample) |
| KR (1) | KR100701531B1 (enExample) |
| CN (1) | CN100483693C (enExample) |
| DE (1) | DE602005014170D1 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106298712A (zh) * | 2015-05-18 | 2017-01-04 | 成都艾德沃传感技术有限公司 | 一种传感器及传感器的制备方法 |
Families Citing this family (56)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4000507B2 (ja) | 2001-10-04 | 2007-10-31 | ソニー株式会社 | 固体撮像装置の製造方法 |
| JP4494745B2 (ja) * | 2003-09-25 | 2010-06-30 | 浜松ホトニクス株式会社 | 半導体装置 |
| JP4494746B2 (ja) * | 2003-09-25 | 2010-06-30 | 浜松ホトニクス株式会社 | 半導体装置 |
| JP4351012B2 (ja) * | 2003-09-25 | 2009-10-28 | 浜松ホトニクス株式会社 | 半導体装置 |
| JP4003780B2 (ja) * | 2004-09-17 | 2007-11-07 | カシオ計算機株式会社 | 半導体装置及びその製造方法 |
| JP4057017B2 (ja) * | 2005-01-31 | 2008-03-05 | 富士通株式会社 | 電子装置及びその製造方法 |
| JP2007019107A (ja) * | 2005-07-05 | 2007-01-25 | Shinko Electric Ind Co Ltd | 半導体装置および半導体装置の製造方法 |
| US8217473B2 (en) * | 2005-07-29 | 2012-07-10 | Hewlett-Packard Development Company, L.P. | Micro electro-mechanical system packaging and interconnect |
| US7288757B2 (en) | 2005-09-01 | 2007-10-30 | Micron Technology, Inc. | Microelectronic imaging devices and associated methods for attaching transmissive elements |
| US20070075236A1 (en) * | 2005-09-30 | 2007-04-05 | Po-Hung Chen | Packaging method of a light-sensing semiconductor device and packaging structure thereof |
| JP5010244B2 (ja) * | 2005-12-15 | 2012-08-29 | オンセミコンダクター・トレーディング・リミテッド | 半導体装置 |
| TWI284966B (en) * | 2006-01-12 | 2007-08-01 | Touch Micro System Tech | Method for wafer level package and fabricating cap structures |
| CN100536098C (zh) * | 2006-01-25 | 2009-09-02 | 探微科技股份有限公司 | 晶片级封装与制作上盖结构的方法 |
| CN100446202C (zh) * | 2006-01-25 | 2008-12-24 | 探微科技股份有限公司 | 晶片级封装与制作上盖结构的方法 |
| CN100470819C (zh) * | 2006-01-25 | 2009-03-18 | 日月光半导体制造股份有限公司 | 影像组件的封装结构与其形成方法 |
| TWI278045B (en) * | 2006-03-14 | 2007-04-01 | Touch Micro System Tech | Method for wafer-level package |
| JP4812512B2 (ja) * | 2006-05-19 | 2011-11-09 | オンセミコンダクター・トレーディング・リミテッド | 半導体装置の製造方法 |
| US20080136012A1 (en) * | 2006-12-08 | 2008-06-12 | Advanced Chip Engineering Technology Inc. | Imagine sensor package and forming method of the same |
| US20080169556A1 (en) * | 2007-01-16 | 2008-07-17 | Xin Tec Inc. | Chip package module heat sink |
| US8076744B2 (en) * | 2007-01-25 | 2011-12-13 | Chien-Hung Liu | Photosensitizing chip package and manufacturing method thereof |
| US8304923B2 (en) * | 2007-03-29 | 2012-11-06 | ADL Engineering Inc. | Chip packaging structure |
| CN101279709B (zh) * | 2007-04-04 | 2011-01-19 | 财团法人工业技术研究院 | 微型声波传感器的多层式封装结构 |
| JP5301108B2 (ja) * | 2007-04-20 | 2013-09-25 | セミコンダクター・コンポーネンツ・インダストリーズ・リミテッド・ライアビリティ・カンパニー | 半導体装置 |
| US7528420B2 (en) * | 2007-05-23 | 2009-05-05 | Visera Technologies Company Limited | Image sensing devices and methods for fabricating the same |
| JP2008300400A (ja) * | 2007-05-29 | 2008-12-11 | Fujikura Ltd | 半導体パッケージ基板、半導体パッケージ基板の製造方法、および半導体パッケージの製造方法 |
| JP4863935B2 (ja) * | 2007-06-20 | 2012-01-25 | パナソニック株式会社 | 電子部品パッケージおよびその製造方法 |
| JP2009032929A (ja) * | 2007-07-27 | 2009-02-12 | Sanyo Electric Co Ltd | 半導体装置及びその製造方法 |
| JP4687742B2 (ja) * | 2007-08-27 | 2011-05-25 | 株式会社デンソー | 半導体装置の製造方法 |
| EP2031653B1 (en) * | 2007-08-27 | 2014-03-05 | Denso Corporation | Manufacturing method for a semiconductor device having multiple element formation regions |
| DE102007060632A1 (de) * | 2007-12-17 | 2009-06-18 | Robert Bosch Gmbh | Verfahren zum Herstellen eines Kappenwafers für einen Sensor |
| JP4799542B2 (ja) * | 2007-12-27 | 2011-10-26 | 株式会社東芝 | 半導体パッケージ |
| US7851246B2 (en) | 2007-12-27 | 2010-12-14 | Stats Chippac, Ltd. | Semiconductor device with optical sensor and method of forming interconnect structure on front and backside of the device |
| JP4939452B2 (ja) * | 2008-02-07 | 2012-05-23 | ラピスセミコンダクタ株式会社 | 半導体装置の製造方法 |
| JP5344336B2 (ja) * | 2008-02-27 | 2013-11-20 | 株式会社ザイキューブ | 半導体装置 |
| TWI384602B (zh) * | 2008-06-13 | 2013-02-01 | 欣興電子股份有限公司 | 嵌埋有感光半導體晶片之封裝基板及其製法 |
| KR100997113B1 (ko) * | 2008-08-01 | 2010-11-30 | 엘지전자 주식회사 | 태양전지 및 그의 제조방법 |
| US7964448B2 (en) * | 2008-09-18 | 2011-06-21 | Infineon Technologies Ag | Electronic device and method of manufacturing same |
| KR101009103B1 (ko) * | 2008-10-27 | 2011-01-18 | 삼성전기주식회사 | 양면 전극 패키지 및 그 제조방법 |
| KR100997797B1 (ko) * | 2009-04-10 | 2010-12-02 | 주식회사 하이닉스반도체 | 이미지 센서 모듈 |
| JP2010245571A (ja) * | 2010-07-23 | 2010-10-28 | Oki Semiconductor Co Ltd | 半導体装置の製造方法 |
| JP2012039005A (ja) * | 2010-08-10 | 2012-02-23 | Toshiba Corp | 半導体装置およびその製造方法 |
| US8168474B1 (en) * | 2011-01-10 | 2012-05-01 | International Business Machines Corporation | Self-dicing chips using through silicon vias |
| TWI489600B (zh) * | 2011-12-28 | 2015-06-21 | 精材科技股份有限公司 | 半導體堆疊結構及其製法 |
| US8772930B2 (en) * | 2012-01-19 | 2014-07-08 | Hong Kong Applied Science and Technology Research Institute Company Limited | Increased surface area electrical contacts for microelectronic packages |
| US8963316B2 (en) | 2012-02-15 | 2015-02-24 | Advanced Semiconductor Engineering, Inc. | Semiconductor device and method for manufacturing the same |
| US8653634B2 (en) | 2012-06-11 | 2014-02-18 | Advanced Semiconductor Engineering, Inc. | EMI-shielded semiconductor devices and methods of making |
| WO2014069362A1 (ja) * | 2012-11-05 | 2014-05-08 | ソニー株式会社 | 光学装置およびその製造方法、ならびに電子機器 |
| US9371982B2 (en) * | 2013-08-15 | 2016-06-21 | Maxim Integrated Products, Inc. | Glass based multichip package |
| US9224650B2 (en) * | 2013-09-19 | 2015-12-29 | Applied Materials, Inc. | Wafer dicing from wafer backside and front side |
| CN105261623A (zh) * | 2014-07-16 | 2016-01-20 | 中芯国际集成电路制造(上海)有限公司 | 芯片、其制备方法、及包括其的图像传感器 |
| CN108496147A (zh) * | 2016-01-29 | 2018-09-04 | 孙业扬 | 使用光传感器采集货架系统上商品库存数据 |
| TWI649856B (zh) * | 2016-05-13 | 2019-02-01 | Xintec Inc. | 晶片封裝體與其製造方法 |
| CN107777657A (zh) * | 2016-08-25 | 2018-03-09 | 中芯国际集成电路制造(上海)有限公司 | 一种mems器件及其制备方法和电子装置 |
| TWI782830B (zh) * | 2021-12-21 | 2022-11-01 | 勝麗國際股份有限公司 | 感測器封裝結構 |
| CN114464540B (zh) * | 2022-02-11 | 2025-01-28 | 展讯通信(上海)有限公司 | 元器件封装方法及元器件封装结构 |
| CN118824956A (zh) * | 2023-04-17 | 2024-10-22 | Jcet星科金朋韩国有限公司 | 半导体封装条带和用于形成半导体器件的方法 |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3216650B2 (ja) | 1990-08-27 | 2001-10-09 | オリンパス光学工業株式会社 | 固体撮像装置 |
| US6013948A (en) * | 1995-11-27 | 2000-01-11 | Micron Technology, Inc. | Stackable chip scale semiconductor package with mating contacts on opposed surfaces |
| US5674785A (en) * | 1995-11-27 | 1997-10-07 | Micron Technology, Inc. | Method of producing a single piece package for semiconductor die |
| JPH09205174A (ja) | 1996-01-24 | 1997-08-05 | Olympus Optical Co Ltd | 気密端子基板とその製造方法 |
| KR100271656B1 (ko) | 1998-05-30 | 2000-11-15 | 김영환 | 비지에이 반도체 패키지 및 그 제조방법 |
| US6229404B1 (en) * | 1998-08-31 | 2001-05-08 | Kyocera Corporation | Crystal oscillator |
| US6384473B1 (en) | 2000-05-16 | 2002-05-07 | Sandia Corporation | Microelectronic device package with an integral window |
| JP2001351997A (ja) | 2000-06-09 | 2001-12-21 | Canon Inc | 受光センサーの実装構造体およびその使用方法 |
| EP1251566A1 (en) | 2001-04-19 | 2002-10-23 | United Test Center Inc. | Low profile optically-sensitive semiconductor package |
| JP4443865B2 (ja) | 2002-06-24 | 2010-03-31 | 富士フイルム株式会社 | 固体撮像装置およびその製造方法 |
| JP2005303258A (ja) | 2004-03-16 | 2005-10-27 | Fujikura Ltd | デバイス及びその製造方法 |
-
2004
- 2004-06-30 JP JP2004194663A patent/JP4271625B2/ja not_active Expired - Fee Related
-
2005
- 2005-06-27 US US11/166,195 patent/US7274101B2/en not_active Expired - Fee Related
- 2005-06-27 KR KR1020050055789A patent/KR100701531B1/ko not_active Expired - Fee Related
- 2005-06-28 EP EP05254014A patent/EP1612867B1/en not_active Expired - Lifetime
- 2005-06-28 CN CNB2005100802253A patent/CN100483693C/zh not_active Expired - Fee Related
- 2005-06-28 DE DE602005014170T patent/DE602005014170D1/de not_active Expired - Lifetime
-
2007
- 2007-07-26 US US11/828,699 patent/US7368321B2/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106298712A (zh) * | 2015-05-18 | 2017-01-04 | 成都艾德沃传感技术有限公司 | 一种传感器及传感器的制备方法 |
| CN106298712B (zh) * | 2015-05-18 | 2019-09-20 | 成都艾德沃传感技术有限公司 | 一种传感器及传感器的制备方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP4271625B2 (ja) | 2009-06-03 |
| DE602005014170D1 (de) | 2009-06-10 |
| KR20060048559A (ko) | 2006-05-18 |
| EP1612867A3 (en) | 2006-05-24 |
| EP1612867A2 (en) | 2006-01-04 |
| US7274101B2 (en) | 2007-09-25 |
| JP2006019428A (ja) | 2006-01-19 |
| US7368321B2 (en) | 2008-05-06 |
| US20070264753A1 (en) | 2007-11-15 |
| CN1716579A (zh) | 2006-01-04 |
| US20060001147A1 (en) | 2006-01-05 |
| EP1612867B1 (en) | 2009-04-29 |
| KR100701531B1 (ko) | 2007-03-29 |
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Legal Events
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| C06 | Publication | ||
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| C10 | Entry into substantive examination | ||
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20090429 Termination date: 20150628 |
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| EXPY | Termination of patent right or utility model |