JP4351012B2 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP4351012B2 JP4351012B2 JP2003333871A JP2003333871A JP4351012B2 JP 4351012 B2 JP4351012 B2 JP 4351012B2 JP 2003333871 A JP2003333871 A JP 2003333871A JP 2003333871 A JP2003333871 A JP 2003333871A JP 4351012 B2 JP4351012 B2 JP 4351012B2
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14636—Interconnect structures
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
- H01L21/563—Encapsulation of active face of flip-chip device, e.g. underfilling or underencapsulation of flip-chip, encapsulation preform on chip or mounting substrate
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73201—Location after the connecting process on the same surface
- H01L2224/73203—Bump and layer connectors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14618—Containers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14634—Assemblies, i.e. Hybrid structures
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/148—Charge coupled imagers
- H01L27/14831—Area CCD imagers
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01004—Beryllium [Be]
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/1515—Shape
- H01L2924/15151—Shape the die mounting substrate comprising an aperture, e.g. for underfilling, outgassing, window type wire connections
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/1515—Shape
- H01L2924/15153—Shape the die mounting substrate comprising a recess for hosting the device
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/15165—Monolayer substrate
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/1517—Multilayer substrate
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/1517—Multilayer substrate
- H01L2924/15172—Fan-out arrangement of the internal vias
- H01L2924/15173—Fan-out arrangement of the internal vias in a single layer of the multilayer substrate
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/1517—Multilayer substrate
- H01L2924/15182—Fan-in arrangement of the internal vias
- H01L2924/15184—Fan-in arrangement of the internal vias in different layers of the multilayer substrate
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/1517—Multilayer substrate
- H01L2924/15192—Resurf arrangement of the internal vias
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/153—Connection portion
- H01L2924/1531—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
- H01L2924/15312—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a pin array, e.g. PGA
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/161—Cap
- H01L2924/1615—Shape
- H01L2924/16195—Flat cap [not enclosing an internal cavity]
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Electromagnetism (AREA)
- Solid State Image Pick-Up Elements (AREA)
Description
Claims (4)
- 一方の面に形成された光検出部と、他方の面の前記光検出部に対向する領域がエッチングされることにより形成された薄型化部分と、該薄型化部分の外縁部の前記一方の面上に設けられ、前記光検出部と電気的に接続された第1の電極とを有し、前記薄型化部分での前記他方の面側が光入射面となる裏面入射型に構成された半導体基板と、
前記半導体基板の前記一方の面側に対向配置され、導電性バンプを介して前記第1の電極に接続された第2の電極を有するとともに、前記半導体基板と対向する上面が前記半導体基板よりも面積が広いように構成された配線基板と、
前記第1の電極及び前記第2の電極のそれぞれと前記導電性バンプとの接合強度を補強するために、前記薄型化部分の外縁部と前記配線基板との間の空隙に充填された樹脂と、
を備え、
前記配線基板において、前記配線基板の前記上面のうち前記樹脂で覆われた領域よりも外側の領域、並びに前記配線基板の底面及び側面が、外部に露出する前記配線基板の露出面となっており、
前記配線基板には、前記薄型化部分に対向する領域を囲む溝部と、該溝部から前記配線基板の前記露出面まで延びる連通部とが形成されており、
前記樹脂は、前記溝部、前記連通部、及び前記溝部よりも内側の部分には充填されず、前記溝部の内側にある前記薄型化部分と前記配線基板との間の空隙を残して、前記溝部よりも外側にある前記薄型化部分の外縁部と前記配線基板との間の空隙に充填されており、
前記連通部は、前記溝部及び前記溝部の内側にある前記薄型化部分と前記配線基板との間の空隙と、外部に露出する前記配線基板の前記露出面とを連通するように構成されていることを特徴とする半導体装置。 - 前記連通部は、前記配線基板の前記半導体基板と対向する前記上面に形成され、前記溝部と、前記配線基板の前記上面のうち前記樹脂で覆われた領域よりも外側の領域とを連通する第2の溝部であることを特徴とする請求項1に記載の半導体装置。
- 前記連通部は、前記配線基板を前記上面から前記底面へと貫通して、前記溝部と、前記配線基板の前記底面とを連通する貫通孔であることを特徴とする請求項1に記載の半導体装置。
- 前記光検出部は、一次元又は二次元に配列された複数の画素を有することを特徴とする請求項1〜3の何れか一項に記載の半導体装置。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003333871A JP4351012B2 (ja) | 2003-09-25 | 2003-09-25 | 半導体装置 |
EP04788123.0A EP1672694B1 (en) | 2003-09-25 | 2004-09-24 | Semiconductor device |
US10/573,469 US7605455B2 (en) | 2003-09-25 | 2004-09-24 | Semiconductor device |
PCT/JP2004/013964 WO2005031871A1 (ja) | 2003-09-25 | 2004-09-24 | 半導体装置 |
CNB2004800266601A CN100466271C (zh) | 2003-09-25 | 2004-09-24 | 半导体装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003333871A JP4351012B2 (ja) | 2003-09-25 | 2003-09-25 | 半導体装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005101332A JP2005101332A (ja) | 2005-04-14 |
JP4351012B2 true JP4351012B2 (ja) | 2009-10-28 |
Family
ID=34386004
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2003333871A Expired - Lifetime JP4351012B2 (ja) | 2003-09-25 | 2003-09-25 | 半導体装置 |
Country Status (5)
Country | Link |
---|---|
US (1) | US7605455B2 (ja) |
EP (1) | EP1672694B1 (ja) |
JP (1) | JP4351012B2 (ja) |
CN (1) | CN100466271C (ja) |
WO (1) | WO2005031871A1 (ja) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4494746B2 (ja) * | 2003-09-25 | 2010-06-30 | 浜松ホトニクス株式会社 | 半導体装置 |
JP4421589B2 (ja) * | 2006-10-10 | 2010-02-24 | 浜松ホトニクス株式会社 | 光検出装置 |
JP4908150B2 (ja) | 2006-10-18 | 2012-04-04 | 浜松ホトニクス株式会社 | 撮像装置の保持構造及び撮像装置 |
JP2010050150A (ja) * | 2008-08-19 | 2010-03-04 | Panasonic Corp | 半導体装置及び半導体モジュール |
JP6939568B2 (ja) * | 2016-01-15 | 2021-09-22 | ソニーグループ株式会社 | 半導体装置および撮像装置 |
JP6682327B2 (ja) * | 2016-04-01 | 2020-04-15 | キヤノン株式会社 | 電子デバイス、その製造方法及びカメラ |
JP6839248B1 (ja) * | 2019-09-30 | 2021-03-03 | 浜松ホトニクス株式会社 | 光検出器 |
WO2022239464A1 (ja) * | 2021-05-13 | 2022-11-17 | ソニーセミコンダクタソリューションズ株式会社 | 固体撮像装置、固体撮像装置の製造方法及び電子機器 |
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2003
- 2003-09-25 JP JP2003333871A patent/JP4351012B2/ja not_active Expired - Lifetime
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2004
- 2004-09-24 EP EP04788123.0A patent/EP1672694B1/en active Active
- 2004-09-24 WO PCT/JP2004/013964 patent/WO2005031871A1/ja active Application Filing
- 2004-09-24 US US10/573,469 patent/US7605455B2/en active Active
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US20070205480A1 (en) | 2007-09-06 |
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EP1672694B1 (en) | 2014-07-23 |
JP2005101332A (ja) | 2005-04-14 |
EP1672694A1 (en) | 2006-06-21 |
CN1853273A (zh) | 2006-10-25 |
US7605455B2 (en) | 2009-10-20 |
CN100466271C (zh) | 2009-03-04 |
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