CN100413038C - 形成鳍状场效应晶体管器件中的结构的方法 - Google Patents

形成鳍状场效应晶体管器件中的结构的方法 Download PDF

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Publication number
CN100413038C
CN100413038C CNB2004800087527A CN200480008752A CN100413038C CN 100413038 C CN100413038 C CN 100413038C CN B2004800087527 A CNB2004800087527 A CN B2004800087527A CN 200480008752 A CN200480008752 A CN 200480008752A CN 100413038 C CN100413038 C CN 100413038C
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fin structure
semiconductor device
fin
dielectric
single crystal
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Expired - Lifetime
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Chinese (zh)
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CN1768419A (zh
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林明仁
汪海宏
俞斌
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Advanced Micro Devices Inc
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Advanced Micro Devices Inc
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/62—Fin field-effect transistors [FinFET]
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/01—Manufacture or treatment
    • H10D30/021—Manufacture or treatment of FETs having insulated gates [IGFET]
    • H10D30/024—Manufacture or treatment of FETs having insulated gates [IGFET] of fin field-effect transistors [FinFET]
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/791—Arrangements for exerting mechanical stress on the crystal lattice of the channel regions
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01—Manufacture or treatment
    • H10D84/0123—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs
    • H10D84/0126—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs the components including insulated gates, e.g. IGFETs
    • H10D84/0128—Manufacturing their channels
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01—Manufacture or treatment
    • H10D84/0123—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs
    • H10D84/0126—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs the components including insulated gates, e.g. IGFETs
    • H10D84/0135—Manufacturing their gate conductors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01—Manufacture or treatment
    • H10D84/02—Manufacture or treatment characterised by using material-based technologies
    • H10D84/03—Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology
    • H10D84/038—Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology using silicon technology, e.g. SiGe
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/80—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D12/00 or H10D30/00, e.g. integration of IGFETs
    • H10D84/82—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D12/00 or H10D30/00, e.g. integration of IGFETs of only field-effect components
    • H10D84/83—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D12/00 or H10D30/00, e.g. integration of IGFETs of only field-effect components of only insulated-gate FETs [IGFET]

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Thin Film Transistor (AREA)
  • Insulated Gate Type Field-Effect Transistor (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
  • Recrystallisation Techniques (AREA)
CNB2004800087527A 2003-04-03 2004-03-29 形成鳍状场效应晶体管器件中的结构的方法 Expired - Lifetime CN100413038C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/405,343 US6762448B1 (en) 2003-04-03 2003-04-03 FinFET device with multiple fin structures
US10/405,343 2003-04-03

Publications (2)

Publication Number Publication Date
CN1768419A CN1768419A (zh) 2006-05-03
CN100413038C true CN100413038C (zh) 2008-08-20

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US (2) US6762448B1 (enExample)
JP (1) JP5009611B2 (enExample)
KR (1) KR101070845B1 (enExample)
CN (1) CN100413038C (enExample)
DE (1) DE112004000586B4 (enExample)
GB (1) GB2417829B (enExample)
TW (1) TWI384614B (enExample)
WO (1) WO2004093197A2 (enExample)

Families Citing this family (96)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6709982B1 (en) * 2002-11-26 2004-03-23 Advanced Micro Devices, Inc. Double spacer FinFET formation
US7105894B2 (en) * 2003-02-27 2006-09-12 Taiwan Semiconductor Manufacturing Co., Ltd. Contacts to semiconductor fin devices
US6900502B2 (en) 2003-04-03 2005-05-31 Taiwan Semiconductor Manufacturing Company, Ltd. Strained channel on insulator device
US6882025B2 (en) * 2003-04-25 2005-04-19 Taiwan Semiconductor Manufacturing Company, Ltd. Strained-channel transistor and methods of manufacture
US7074656B2 (en) * 2003-04-29 2006-07-11 Taiwan Semiconductor Manufacturing Company, Ltd. Doping of semiconductor fin devices
US6867433B2 (en) 2003-04-30 2005-03-15 Taiwan Semiconductor Manufacturing Company, Ltd. Semiconductor-on-insulator chip incorporating strained-channel partially-depleted, fully-depleted, and multiple-gate transistors
US6909147B2 (en) * 2003-05-05 2005-06-21 International Business Machines Corporation Multi-height FinFETS
KR100521382B1 (ko) * 2003-06-30 2005-10-12 삼성전자주식회사 핀 전계효과 트랜지스터 제조 방법
US6943405B2 (en) * 2003-07-01 2005-09-13 International Business Machines Corporation Integrated circuit having pairs of parallel complementary FinFETs
US20050012087A1 (en) * 2003-07-15 2005-01-20 Yi-Ming Sheu Self-aligned MOSFET having an oxide region below the channel
US7078742B2 (en) * 2003-07-25 2006-07-18 Taiwan Semiconductor Manufacturing Co., Ltd. Strained-channel semiconductor structure and method of fabricating the same
US6936881B2 (en) * 2003-07-25 2005-08-30 Taiwan Semiconductor Manufacturing Company, Ltd. Capacitor that includes high permittivity capacitor dielectric
US6940705B2 (en) 2003-07-25 2005-09-06 Taiwan Semiconductor Manufacturing Company, Ltd. Capacitor with enhanced performance and method of manufacture
JP3860582B2 (ja) * 2003-07-31 2006-12-20 株式会社東芝 半導体装置の製造方法
US7301206B2 (en) * 2003-08-01 2007-11-27 Taiwan Semiconductor Manufacturing Company, Ltd. Semiconductor-on-insulator SRAM configured using partially-depleted and fully-depleted transistors
US7101742B2 (en) 2003-08-12 2006-09-05 Taiwan Semiconductor Manufacturing Company, Ltd. Strained channel complementary field-effect transistors and methods of manufacture
US20050035369A1 (en) * 2003-08-15 2005-02-17 Chun-Chieh Lin Structure and method of forming integrated circuits utilizing strained channel transistors
US20050035410A1 (en) * 2003-08-15 2005-02-17 Yee-Chia Yeo Semiconductor diode with reduced leakage
US7112495B2 (en) * 2003-08-15 2006-09-26 Taiwan Semiconductor Manufacturing Company, Ltd. Structure and method of a strained channel transistor and a second semiconductor component in an integrated circuit
US7071052B2 (en) * 2003-08-18 2006-07-04 Taiwan Semiconductor Manufacturing Company, Ltd. Resistor with reduced leakage
US7888201B2 (en) * 2003-11-04 2011-02-15 Taiwan Semiconductor Manufacturing Company, Ltd. Semiconductor-on-insulator SRAM configured using partially-depleted and fully-depleted transistors
US6962843B2 (en) * 2003-11-05 2005-11-08 International Business Machines Corporation Method of fabricating a finfet
US7498225B1 (en) * 2003-12-04 2009-03-03 Advanced Micro Devices, Inc. Systems and methods for forming multiple fin structures using metal-induced-crystallization
US7198995B2 (en) * 2003-12-12 2007-04-03 International Business Machines Corporation Strained finFETs and method of manufacture
US20050186722A1 (en) * 2004-02-25 2005-08-25 Kuan-Lun Cheng Method and structure for CMOS device with stress relaxed by ion implantation of carbon or oxygen containing ions
KR100605104B1 (ko) * 2004-05-04 2006-07-26 삼성전자주식회사 핀-펫 소자 및 그 제조 방법
US20050266632A1 (en) * 2004-05-26 2005-12-01 Yun-Hsiu Chen Integrated circuit with strained and non-strained transistors, and method of forming thereof
US7452778B2 (en) * 2004-06-10 2008-11-18 Taiwan Semiconductor Manufacturing Company, Ltd. Semiconductor nano-wire devices and methods of fabrication
JP2006128494A (ja) * 2004-10-29 2006-05-18 Toshiba Corp 半導体集積回路装置及びその製造方法
US20060118892A1 (en) * 2004-12-02 2006-06-08 Taiwan Semiconductor Manufacturing Company, Ltd. Methods and Structures to Produce a Strain-Inducing Layer in a Semiconductor Device
KR100629604B1 (ko) * 2004-12-31 2006-09-27 동부일렉트로닉스 주식회사 반도체 소자의 게이트 라인 형성 방법
TWI295506B (en) 2005-02-03 2008-04-01 Samsung Electronics Co Ltd Semiconductor device having transistor with vertical gate electrode and method of fabricating the same
US7288805B2 (en) * 2005-02-24 2007-10-30 International Business Machines Corporation Double gate isolation
US7101763B1 (en) 2005-05-17 2006-09-05 International Business Machines Corporation Low capacitance junction-isolation for bulk FinFET technology
US20070018239A1 (en) * 2005-07-20 2007-01-25 International Business Machines Corporation Sea-of-fins structure on a semiconductor substrate and method of fabrication
KR100642384B1 (ko) * 2005-09-15 2006-11-03 주식회사 하이닉스반도체 반도체 메모리소자의 트랜지스터 및 그 제조방법
US7400031B2 (en) * 2005-09-19 2008-07-15 International Business Machines Corporation Asymmetrically stressed CMOS FinFET
FR2895835B1 (fr) * 2005-12-30 2008-05-09 Commissariat Energie Atomique Realisation sur une structure de canal a plusieurs branches d'une grille de transistor et de moyens pour isoler cette grille des regions de source et de drain
US8354311B2 (en) 2006-04-04 2013-01-15 Micron Technology, Inc. Method for forming nanofin transistors
US7491995B2 (en) 2006-04-04 2009-02-17 Micron Technology, Inc. DRAM with nanofin transistors
US7425491B2 (en) 2006-04-04 2008-09-16 Micron Technology, Inc. Nanowire transistor with surrounding gate
US8734583B2 (en) * 2006-04-04 2014-05-27 Micron Technology, Inc. Grown nanofin transistors
US7538391B2 (en) * 2007-01-09 2009-05-26 International Business Machines Corporation Curved FINFETs
US8558278B2 (en) 2007-01-16 2013-10-15 Taiwan Semiconductor Manufacturing Company, Ltd. Strained transistor with optimized drive current and method of forming
FR2921757B1 (fr) * 2007-09-28 2009-12-18 Commissariat Energie Atomique Structure de transistor double-grille dotee d'un canal a plusieurs branches.
JP5193583B2 (ja) * 2007-12-17 2013-05-08 株式会社東芝 フィン型トランジスタ
US7943961B2 (en) 2008-03-13 2011-05-17 Taiwan Semiconductor Manufacturing Company, Ltd. Strain bars in stressed layers of MOS devices
US7808051B2 (en) 2008-09-29 2010-10-05 Taiwan Semiconductor Manufacturing Company, Ltd. Standard cell without OD space effect in Y-direction
US8305829B2 (en) * 2009-02-23 2012-11-06 Taiwan Semiconductor Manufacturing Company, Ltd. Memory power gating circuit for controlling internal voltage of a memory array, system and method for controlling the same
US8305790B2 (en) * 2009-03-16 2012-11-06 Taiwan Semiconductor Manufacturing Company, Ltd. Electrical anti-fuse and related applications
US8957482B2 (en) * 2009-03-31 2015-02-17 Taiwan Semiconductor Manufacturing Company, Ltd. Electrical fuse and related applications
US8912602B2 (en) * 2009-04-14 2014-12-16 Taiwan Semiconductor Manufacturing Company, Ltd. FinFETs and methods for forming the same
US8461015B2 (en) * 2009-07-08 2013-06-11 Taiwan Semiconductor Manufacturing Company, Ltd. STI structure and method of forming bottom void in same
US8482073B2 (en) * 2010-03-25 2013-07-09 Taiwan Semiconductor Manufacturing Company, Ltd. Integrated circuit including FINFETs and methods for forming the same
US8298925B2 (en) 2010-11-08 2012-10-30 Taiwan Semiconductor Manufacturing Company, Ltd. Mechanisms for forming ultra shallow junction
US8440517B2 (en) 2010-10-13 2013-05-14 Taiwan Semiconductor Manufacturing Company, Ltd. FinFET and method of fabricating the same
US9484462B2 (en) * 2009-09-24 2016-11-01 Taiwan Semiconductor Manufacturing Company, Ltd. Fin structure of fin field effect transistor
US8187928B2 (en) 2010-09-21 2012-05-29 Taiwan Semiconductor Manufacturing Company, Ltd. Methods of forming integrated circuits
US8264032B2 (en) 2009-09-01 2012-09-11 Taiwan Semiconductor Manufacturing Company, Ltd. Accumulation type FinFET, circuits and fabrication method thereof
US8472227B2 (en) * 2010-01-27 2013-06-25 Taiwan Semiconductor Manufacturing Company, Ltd. Integrated circuits and methods for forming the same
US8980719B2 (en) 2010-04-28 2015-03-17 Taiwan Semiconductor Manufacturing Company, Ltd. Methods for doping fin field-effect transistors
US8497528B2 (en) 2010-05-06 2013-07-30 Taiwan Semiconductor Manufacturing Company, Ltd. Method for fabricating a strained structure
US8623728B2 (en) * 2009-07-28 2014-01-07 Taiwan Semiconductor Manufacturing Company, Ltd. Method for forming high germanium concentration SiGe stressor
US8759943B2 (en) 2010-10-08 2014-06-24 Taiwan Semiconductor Manufacturing Company, Ltd. Transistor having notched fin structure and method of making the same
US8264021B2 (en) * 2009-10-01 2012-09-11 Taiwan Semiconductor Manufacturing Company, Ltd. Finfets and methods for forming the same
US8629478B2 (en) * 2009-07-31 2014-01-14 Taiwan Semiconductor Manufacturing Company, Ltd. Fin structure for high mobility multiple-gate transistor
US20110097867A1 (en) * 2009-10-22 2011-04-28 Taiwan Semiconductor Manufacturing Company, Ltd. Method of controlling gate thicknesses in forming fusi gates
US8021949B2 (en) * 2009-12-01 2011-09-20 International Business Machines Corporation Method and structure for forming finFETs with multiple doping regions on a same chip
US9040393B2 (en) 2010-01-14 2015-05-26 Taiwan Semiconductor Manufacturing Company, Ltd. Method of forming semiconductor structure
CN102263131B (zh) * 2010-05-25 2013-05-01 中国科学院微电子研究所 一种半导体器件及其形成方法
US8603924B2 (en) 2010-10-19 2013-12-10 Taiwan Semiconductor Manufacturing Company, Ltd. Methods of forming gate dielectric material
US9048181B2 (en) 2010-11-08 2015-06-02 Taiwan Semiconductor Manufacturing Company, Ltd. Mechanisms for forming ultra shallow junction
US8769446B2 (en) 2010-11-12 2014-07-01 Taiwan Semiconductor Manufacturing Company, Ltd. Method and device for increasing fin device density for unaligned fins
US8592915B2 (en) 2011-01-25 2013-11-26 Taiwan Semiconductor Manufacturing Company, Ltd. Doped oxide for shallow trench isolation (STI)
US8877602B2 (en) 2011-01-25 2014-11-04 Taiwan Semiconductor Manufacturing Company, Ltd. Mechanisms of doping oxide for forming shallow trench isolation
US8431453B2 (en) 2011-03-31 2013-04-30 Taiwan Semiconductor Manufacturing Company, Ltd. Plasma doping to reduce dielectric loss during removal of dummy layers in a gate structure
CN102956700B (zh) * 2011-08-30 2015-06-24 中国科学院微电子研究所 一种半导体结构及其制造方法
US8872284B2 (en) * 2012-03-20 2014-10-28 Taiwan Semiconductor Manufacturing Company, Ltd. FinFET with metal gate stressor
CN103378129B (zh) * 2012-04-19 2016-03-23 中国科学院微电子研究所 一种半导体结构及其制造方法
US8987790B2 (en) 2012-11-26 2015-03-24 International Business Machines Corporation Fin isolation in multi-gate field effect transistors
US8877588B2 (en) * 2013-02-11 2014-11-04 Globalfoundries Inc. Methods of forming a three-dimensional semiconductor device with a dual stress channel and the resulting device
US9396931B2 (en) 2013-08-01 2016-07-19 Qualcomm Incorporated Method of forming fins from different materials on a substrate
US9548213B2 (en) 2014-02-25 2017-01-17 International Business Machines Corporation Dielectric isolated fin with improved fin profile
US9123627B1 (en) * 2014-05-01 2015-09-01 Globalfoundries Inc. Methods of forming alternative material fins with reduced defect density for a FinFET semiconductor device
US9224605B2 (en) * 2014-05-01 2015-12-29 Globalfoundries Inc. Forming alternative material fins with reduced defect density by performing an implantation/anneal defect generation process
CN105097535B (zh) * 2014-05-12 2018-03-13 中国科学院微电子研究所 FinFet器件的制造方法
US9847329B2 (en) * 2014-09-04 2017-12-19 Taiwan Semiconductor Manufacturing Company, Ltd. Structure of fin feature and method of making same
US9805991B2 (en) * 2015-08-20 2017-10-31 International Business Machines Corporation Strained finFET device fabrication
US9722052B2 (en) * 2015-10-27 2017-08-01 International Business Machines Corporation Fin cut without residual fin defects
US10103246B2 (en) 2016-06-09 2018-10-16 International Business Machines Corporation Fabrication of a vertical fin field effect transistor (vertical finFET) with a self-aligned gate and fin edges
US9773870B1 (en) 2016-06-28 2017-09-26 International Business Machines Corporation Strained semiconductor device
US9680019B1 (en) * 2016-07-20 2017-06-13 Globalfoundries Inc. Fin-type field-effect transistors with strained channels
US10559501B2 (en) * 2016-09-20 2020-02-11 Qualcomm Incorporated Self-aligned quadruple patterning process for Fin pitch below 20nm
FR3089343B1 (fr) * 2018-11-29 2021-10-08 Commissariat Energie Atomique Procede de realisation d’un transistor fet
US11011626B2 (en) 2019-05-07 2021-05-18 International Business Machines Corporation Fin field-effect transistor with reduced parasitic capacitance and reduced variability
US11476356B2 (en) 2020-05-29 2022-10-18 Taiwan Semiconductor Manufacturing Co., Ltd. Fin field-effect transistor device with low-dimensional material and method

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5545586A (en) * 1990-11-27 1996-08-13 Nec Corporation Method of making a transistor having easily controllable impurity profile
US6063688A (en) * 1997-09-29 2000-05-16 Intel Corporation Fabrication of deep submicron structures and quantum wire transistors using hard-mask transistor width definition
US6177299B1 (en) * 1998-01-15 2001-01-23 International Business Machines Corporation Transistor having substantially isolated body and method of making the same
US20010005022A1 (en) * 1999-12-22 2001-06-28 Nec Corporation. Semiconductor device
CN1349249A (zh) * 2000-10-18 2002-05-15 国际商业机器公司 制造半导体侧壁翼片的方法
US20020153587A1 (en) * 2000-03-16 2002-10-24 International Business Machines Corporation Double planar gated SOI MOSFET structure
US6475869B1 (en) * 2001-02-26 2002-11-05 Advanced Micro Devices, Inc. Method of forming a double gate transistor having an epitaxial silicon/germanium channel region
US20030042542A1 (en) * 1996-04-26 2003-03-06 Shigeto Maegawa Semiconductor device having a thin film transistor and manufacturing method thereof

Family Cites Families (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0214578A (ja) 1988-07-01 1990-01-18 Fujitsu Ltd 半導体装置
US5115289A (en) * 1988-11-21 1992-05-19 Hitachi, Ltd. Semiconductor device and semiconductor memory device
JPH04250667A (ja) * 1991-01-28 1992-09-07 Oki Electric Ind Co Ltd 半導体装置及びその製造方法
JP2789931B2 (ja) * 1991-05-27 1998-08-27 日本電気株式会社 半導体装置
KR920022546A (ko) * 1991-05-31 1992-12-19 김광호 모오스 트랜지스터의 구조 및 그 제조방법
JPH04354138A (ja) * 1991-05-31 1992-12-08 Oki Electric Ind Co Ltd Ｍｉｓ型半導体装置の製造方法
JP2572003B2 (ja) 1992-03-30 1997-01-16 三星電子株式会社 三次元マルチチャンネル構造を有する薄膜トランジスタの製造方法
JP3203048B2 (ja) * 1992-04-21 2001-08-27 三菱電機株式会社 半導体装置およびその製造方法
DE19548056C1 (de) 1995-12-21 1997-03-06 Siemens Ag Verfahren zur Herstellung einer Gateelektrode für eine MOS-Struktur
US5946566A (en) 1996-03-01 1999-08-31 Ace Memory, Inc. Method of making a smaller geometry high capacity stacked DRAM device
US5932911A (en) 1996-12-13 1999-08-03 Advanced Micro Devices, Inc. Bar field effect transistor
JP4436469B2 (ja) * 1998-09-30 2010-03-24 三洋電機株式会社 半導体装置
US20020011612A1 (en) 2000-07-31 2002-01-31 Kabushiki Kaisha Toshiba Semiconductor device and method for manufacturing the same
JP4044276B2 (ja) 2000-09-28 2008-02-06 株式会社東芝 半導体装置及びその製造方法
US6562665B1 (en) 2000-10-16 2003-05-13 Advanced Micro Devices, Inc. Fabrication of a field effect transistor with a recess in a semiconductor pillar in SOI technology
US6413802B1 (en) * 2000-10-23 2002-07-02 The Regents Of The University Of California Finfet transistor structures having a double gate channel extending vertically from a substrate and methods of manufacture
US6664143B2 (en) * 2000-11-22 2003-12-16 North Carolina State University Methods of fabricating vertical field effect transistors by conformal channel layer deposition on sidewalls
US6358827B1 (en) 2001-01-19 2002-03-19 Taiwan Semiconductor Manufacturing Company Method of forming a squared-off, vertically oriented polysilicon spacer gate
US6537880B1 (en) 2001-09-13 2003-03-25 Vanguard International Semiconductor Corporation Method of fabricating a high density NAND stacked gate flash memory device having narrow pitch isolation and large capacitance between control and floating gates
US6492212B1 (en) 2001-10-05 2002-12-10 International Business Machines Corporation Variable threshold voltage double gated transistors and method of fabrication
US6657259B2 (en) * 2001-12-04 2003-12-02 International Business Machines Corporation Multiple-plane FinFET CMOS
US6583469B1 (en) 2002-01-28 2003-06-24 International Business Machines Corporation Self-aligned dog-bone structure for FinFET applications and methods to fabricate the same
US6635909B2 (en) 2002-03-19 2003-10-21 International Business Machines Corporation Strained fin FETs structure and method
EP1383164A1 (en) * 2002-07-17 2004-01-21 Interuniversitair Micro-Elektronica Centrum (IMEC) FinFET device and a method for manufacturing such device
US7358121B2 (en) 2002-08-23 2008-04-15 Intel Corporation Tri-gate devices and methods of fabrication
US6770516B2 (en) * 2002-09-05 2004-08-03 Taiwan Semiconductor Manufacturing Company Method of forming an N channel and P channel FINFET device on the same semiconductor substrate
US6864519B2 (en) 2002-11-26 2005-03-08 Taiwan Semiconductor Manufacturing Co., Ltd. CMOS SRAM cell configured using multiple-gate transistors
US6645797B1 (en) * 2002-12-06 2003-11-11 Advanced Micro Devices, Inc. Method for forming fins in a FinFET device using sacrificial carbon layer
US6794718B2 (en) * 2002-12-19 2004-09-21 International Business Machines Corporation High mobility crystalline planes in double-gate CMOS technology
US6716686B1 (en) 2003-07-08 2004-04-06 Advanced Micro Devices, Inc. Method for forming channels in a finfet device

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5545586A (en) * 1990-11-27 1996-08-13 Nec Corporation Method of making a transistor having easily controllable impurity profile
US20030042542A1 (en) * 1996-04-26 2003-03-06 Shigeto Maegawa Semiconductor device having a thin film transistor and manufacturing method thereof
US6063688A (en) * 1997-09-29 2000-05-16 Intel Corporation Fabrication of deep submicron structures and quantum wire transistors using hard-mask transistor width definition
US20020043690A1 (en) * 1997-09-29 2002-04-18 Doyle Brian S. Fabrication of deep submicron structures and quantum wire transistors using hard-mask transistor width definition
US6177299B1 (en) * 1998-01-15 2001-01-23 International Business Machines Corporation Transistor having substantially isolated body and method of making the same
US20010005022A1 (en) * 1999-12-22 2001-06-28 Nec Corporation. Semiconductor device
US20020153587A1 (en) * 2000-03-16 2002-10-24 International Business Machines Corporation Double planar gated SOI MOSFET structure
CN1349249A (zh) * 2000-10-18 2002-05-15 国际商业机器公司 制造半导体侧壁翼片的方法
US6475869B1 (en) * 2001-02-26 2002-11-05 Advanced Micro Devices, Inc. Method of forming a double gate transistor having an epitaxial silicon/germanium channel region

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GB0521181D0 (en) 2005-11-23
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