AU4781300A - Electrostatic chuck and treating device - Google Patents

Electrostatic chuck and treating device

Info

Publication number
AU4781300A
AU4781300A AU47813/00A AU4781300A AU4781300A AU 4781300 A AU4781300 A AU 4781300A AU 47813/00 A AU47813/00 A AU 47813/00A AU 4781300 A AU4781300 A AU 4781300A AU 4781300 A AU4781300 A AU 4781300A
Authority
AU
Australia
Prior art keywords
electrostatic chuck
treating device
treating
chuck
electrostatic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU47813/00A
Other languages
English (en)
Inventor
Koh Fuwa
Hiroaki Hori
Tetsuo Kitabayashi
Ken Maehira
Noriaki Tateno
Takeshi Uchimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toto Ltd
Ulvac Inc
Original Assignee
Toto Ltd
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toto Ltd, Ulvac Inc filed Critical Toto Ltd
Publication of AU4781300A publication Critical patent/AU4781300A/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q3/00—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine
    • B23Q3/15—Devices for holding work using magnetic or electric force acting directly on the work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q3/00—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine
    • B23Q3/15—Devices for holding work using magnetic or electric force acting directly on the work
    • B23Q3/154—Stationary devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
    • H01L21/6833—Details of electrostatic chucks
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N13/00—Clutches or holding devices using electrostatic attraction, e.g. using Johnson-Rahbek effect

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Jigs For Machine Tools (AREA)
AU47813/00A 1999-05-25 2000-05-25 Electrostatic chuck and treating device Abandoned AU4781300A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP14550799A JP3805134B2 (ja) 1999-05-25 1999-05-25 絶縁性基板吸着用静電チャック
JP11/145507 1999-05-25
PCT/JP2000/003355 WO2000072376A1 (en) 1999-05-25 2000-05-25 Electrostatic chuck and treating device

Publications (1)

Publication Number Publication Date
AU4781300A true AU4781300A (en) 2000-12-12

Family

ID=15386861

Family Applications (1)

Application Number Title Priority Date Filing Date
AU47813/00A Abandoned AU4781300A (en) 1999-05-25 2000-05-25 Electrostatic chuck and treating device

Country Status (9)

Country Link
US (2) US6768627B1 (enExample)
EP (2) EP1852907B1 (enExample)
JP (1) JP3805134B2 (enExample)
KR (4) KR20020019030A (enExample)
CN (3) CN1595631A (enExample)
AU (1) AU4781300A (enExample)
DE (1) DE60037885T2 (enExample)
TW (1) TW508716B (enExample)
WO (1) WO2000072376A1 (enExample)

Families Citing this family (127)

* Cited by examiner, † Cited by third party
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US20040218340A1 (en) 2004-11-04
CN1595632A (zh) 2005-03-16
US6768627B1 (en) 2004-07-27
KR20070049689A (ko) 2007-05-11
EP1852907B1 (en) 2013-07-03
KR20090003347A (ko) 2009-01-09
KR20090100455A (ko) 2009-09-23
EP1191581B1 (en) 2008-01-23
KR20020019030A (ko) 2002-03-09
KR100933727B1 (ko) 2009-12-24
DE60037885D1 (de) 2008-03-13
CN1179407C (zh) 2004-12-08
CN1365518A (zh) 2002-08-21
TW508716B (en) 2002-11-01
JP3805134B2 (ja) 2006-08-02
EP1191581A4 (en) 2006-03-22
CN100375263C (zh) 2008-03-12
DE60037885T2 (de) 2009-01-15
US7209339B2 (en) 2007-04-24
WO2000072376A1 (en) 2000-11-30
JP2000332091A (ja) 2000-11-30
EP1191581A1 (en) 2002-03-27
CN1595631A (zh) 2005-03-16
EP1852907A1 (en) 2007-11-07

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