AU2002312872A1 - High-aperture projection lens - Google Patents

High-aperture projection lens

Info

Publication number
AU2002312872A1
AU2002312872A1 AU2002312872A AU2002312872A AU2002312872A1 AU 2002312872 A1 AU2002312872 A1 AU 2002312872A1 AU 2002312872 A AU2002312872 A AU 2002312872A AU 2002312872 A AU2002312872 A AU 2002312872A AU 2002312872 A1 AU2002312872 A1 AU 2002312872A1
Authority
AU
Australia
Prior art keywords
projection lens
aperture projection
aperture
lens
projection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002312872A
Other languages
English (en)
Inventor
Karl-Heinz Schuster
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss SMT GmbH
Original Assignee
Carl Zeiss SMT GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss SMT GmbH filed Critical Carl Zeiss SMT GmbH
Publication of AU2002312872A1 publication Critical patent/AU2002312872A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B13/00—Optical objectives specially designed for the purposes specified below
    • G02B13/24—Optical objectives specially designed for the purposes specified below for reproducing or copying at short object distances
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B13/00—Optical objectives specially designed for the purposes specified below
    • G02B13/14—Optical objectives specially designed for the purposes specified below for use with infrared or ultraviolet radiation
    • G02B13/143—Optical objectives specially designed for the purposes specified below for use with infrared or ultraviolet radiation for use with ultraviolet radiation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B9/00—Optical objectives characterised both by the number of the components and their arrangements according to their sign, i.e. + or -
    • G02B9/60—Optical objectives characterised both by the number of the components and their arrangements according to their sign, i.e. + or - having five components only
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70241—Optical aspects of refractive lens systems, i.e. comprising only refractive elements
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70341—Details of immersion lithography aspects, e.g. exposure media or control of immersion liquid supply

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Lenses (AREA)
AU2002312872A 2002-03-08 2002-05-03 High-aperture projection lens Abandoned AU2002312872A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10210899A DE10210899A1 (de) 2002-03-08 2002-03-08 Refraktives Projektionsobjektiv für Immersions-Lithographie
DE10210899.4 2002-03-08
PCT/EP2002/004846 WO2003077036A1 (de) 2002-03-08 2002-05-03 Projektionsobjektiv höchster apertur

Publications (1)

Publication Number Publication Date
AU2002312872A1 true AU2002312872A1 (en) 2003-09-22

Family

ID=27762884

Family Applications (2)

Application Number Title Priority Date Filing Date
AU2002312872A Abandoned AU2002312872A1 (en) 2002-03-08 2002-05-03 High-aperture projection lens
AU2003221490A Abandoned AU2003221490A1 (en) 2002-03-08 2003-02-26 Refractive projection objective for immersion lithography

Family Applications After (1)

Application Number Title Priority Date Filing Date
AU2003221490A Abandoned AU2003221490A1 (en) 2002-03-08 2003-02-26 Refractive projection objective for immersion lithography

Country Status (8)

Country Link
US (4) US6891596B2 (enExample)
EP (2) EP1483625A1 (enExample)
JP (2) JP2005519347A (enExample)
KR (1) KR100991590B1 (enExample)
CN (1) CN100573222C (enExample)
AU (2) AU2002312872A1 (enExample)
DE (1) DE10210899A1 (enExample)
WO (2) WO2003077036A1 (enExample)

Families Citing this family (263)

* Cited by examiner, † Cited by third party
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WO2002091078A1 (en) * 2001-05-07 2002-11-14 Massachusetts Institute Of Technology Methods and apparatus employing an index matching medium
JP2003185920A (ja) 2001-12-18 2003-07-03 Nikon Corp 結像光学系及び投影露光装置
JP4016179B2 (ja) * 2002-02-28 2007-12-05 ソニー株式会社 露光装置及び収束レンズの制御方法
AU2003208872A1 (en) 2002-03-01 2003-09-16 Carl Zeiss Smt Ag Refractive projection lens with a middle part
DE10210899A1 (de) 2002-03-08 2003-09-18 Zeiss Carl Smt Ag Refraktives Projektionsobjektiv für Immersions-Lithographie
CN100462844C (zh) 2002-08-23 2009-02-18 株式会社尼康 投影光学系统、微影方法、曝光装置及使用此装置的方法
JP3982362B2 (ja) 2002-08-23 2007-09-26 住友電気工業株式会社 光データリンク

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US7495840B2 (en) 2009-02-24
CN1639644A (zh) 2005-07-13
WO2003077036A1 (de) 2003-09-18
AU2003221490A1 (en) 2003-09-22
US20050141098A1 (en) 2005-06-30
US20070188880A1 (en) 2007-08-16
US7312847B2 (en) 2007-12-25
KR100991590B1 (ko) 2010-11-04
CN100573222C (zh) 2009-12-23
DE10210899A1 (de) 2003-09-18
EP1485760A1 (en) 2004-12-15
EP1483625A1 (de) 2004-12-08
JP2005519348A (ja) 2005-06-30
KR20040099307A (ko) 2004-11-26
US20030174408A1 (en) 2003-09-18
WO2003077037A1 (en) 2003-09-18
JP2005519347A (ja) 2005-06-30
US20050231814A1 (en) 2005-10-20
US7203008B2 (en) 2007-04-10
US6891596B2 (en) 2005-05-10

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